PH12015502478B1

PH12015502478B1 - Electronic device carrying apparatus

Info

Publication number: PH12015502478B1
Application number: PH12015502478A
Authority: PH
Inventors: Hideo Minami; Junpei Yonemitsu
Original assignee: Ueno Seiki Co Ltd
Priority date: 2013-12-02
Filing date: 2015-10-27
Publication date: 2017-10-06
Also published as: CN105144864B; CN105144864A; PH12015502478A1; MY160498A; HK1212541A1; WO2015083414A1; WO2015083211A1

Abstract

An electronic device carrying apparatus is provided which is capable of mounting an electronic device in an attitude according to that of a stage without a load for an attitude adjustment relative to the stage of a process unit. An electronic device carrying apparatus 1 stores attitude information indicating the installation attitude of a socket 41 beforehand. An imager unit 71 that picks up an image of an electronic device, and an XY0 stage 72 that corrects the attitude of the electronic device are installed on a carrying path 11. The imager unit 71 picks up the image of the electronic device, and the XY0 stage 72 corrects the attitude of the electronic device according to the installation attitude of the socket 41 indicated by the attitude information based on the image-pickup result.

Description

o control units including a computer and a controller, a power ~ source, cables, a compressor, air pipes, and the like. -

Electronic devices are parts utilized in electronic products, and example electronic devices include = i semiconductor elements, and, resistors and capacitors other y than semiconductor elements. Example semiconductor = elements are discrete semiconductor devices, such as a = transistor, a diode, an LED, and a thyristor, and an i integrated circuit, such as an IC or an LSI. he

The carrying path 11 is formed by a carrying table 12 oe on the frame 14. Sucking nozzles 13 are attached at the outer = circumference of the carrying table 12. The sucking nozzles = 13 are each a holder that holds and releases the electronic device. The rotation trajectory of the sucking nozzles 13 becomes the carrying path 1l. Inaddition, the carrying table 12 and the sucking nozzles 13 form a carrier.

The carrying table 12 is formed in a disk or star shape, etc., that spreads radially froma point. This carrying table 12 intermittently rotates by a predetermined angle in the : circumferential direction. A power source for the carrying table 12 is a direct drive motor 15, and the carrying table 12 is installed on the frame 14 through the direct drive motor 15.

The plural sucking nozzles 13 are attached at the outer circumference of the flat plane of the carrying table 12 at an equal pitch on the circumference and at the same distance from the center of the flat plane. When the carrying table 12 is in a star shape, the sucking nozzle 13 is attached to the tip of an arm. The sucking nozzle 13 has a hollow interior that has one end opened, and is placed on the flat plane with the opened end being directed downwardly. The interior of the sucking nozzle 13 is in connected with a pneumatic circuit of a negative-pressure generating unit, such as a vacuum pump or an ejector. When the pneumatic circuit generates negative pressure, the sucking nozzle 13 sucks the electronic device through the opened end, and releases the electronic device

Co 10 = by vacuum break or pressure release to the atmospheric Ol pressure. =

The direct drive motor 15 is controlled so as to intermittently rotate pitch by pitch. This pitch is adjusted = so as to be consistent with the installation pitch of the “ud sucking nozzle 13. That is, the sucking nozzle 13 traces a or common movement trajectory together with the intermittent Ea rotation of the carrying table 12, and stops at a common stop je position. Since the process unit is provided at the stop = position, a process like a test is performed on the electronic = “device. i

A advance or retreat drive unit 8 is provided at each =

Stop position where each process unit is provided and right above the carrying table 12. The advance or retreat drive unit 8 moves down the sucking nozzle 13 toward the stage of the process unit. For example, the sucking nozzle 13 is provided on the carrying table 12 through a cylindrical bearing that has an axial line in the vertical direction, and thus the sucking nozzle 13 is movable up and down. The sucking nozzle 13 is always pushed upwardly by a compression spring.

In addition, the advance or retreat drive unit 8 includes a rod that extends toward the head of the sucking nozzle 13, and a rotation motor and a cam unit which apply driving force to the rod in the axial direction.

The advance or retreat drive unit 8 generates driving force by the rotation motor, and converts this driving force into linear thrust force along the axial line of the sucking nozzle 13 with the cam unit and the rod, and pushes the sucking nozzle 13 with the rod against the spring force by the compression spring. The electronic device held by the sucking nozzle 13 is placed on the stage of the process unit by the moving-down of the sucking nozzle 13, and is taken through a process by this process unit. When the rod releases the sucking nozzle 13, the sucking nozzle 13 moves up to the original position by the spring force of the compression spring while holding the electronic device.

oo 11

As one of the process units, a supply unit 2 that supplies os the electronic device to the carrying path 11 is provided at rx a start end of the carrying path 11 of the electronic device carrying apparatus 1. A storage unit 3 that stores the = electronic devices is provided at the last end of the carrying we path 11. An attitude correcting unit 7, and electrical test oT unit 4, a visual inspection unit 5, a sorting unit 6, and other be various process units are provided side by side on the = carrying path 11 between the supply unit 2 and the storage - unit 3. The electronic device carrying apparatus 1 - sequentially carries the electronic devices supplied from the — supply unit 2to the respective process units with the carrying = table 12, , and moves down and up the sucking nozzle 13 with the advance or retreat drive unit 8 right above each process unit, thereby transferring the electronic device relative to the process unit.

The visual inspection unit 5 inspects the external appearance of the electronic device through image pickup and image processing, thereby checking any scratches, pollutions, and damages on the electronic device. The sorting unit 6 sorts the electronic device that has no worth of storing in the storage unit 3 in accordance with the results of the electrical characteristic test and the visual inspection.

The electrical test unit 4 applies a voltage or a current to the electronic device, and inspects the electrical characteristics thereof. Example electrical characteristics are a voltage, a current, a resistance or a frequency of the electronic device relative to the application of the current or the voltage thereto, and an output signal relative to a logic signal. This electrical test unit 4 includes plural stages installed in sequence. The stage is a socket 41 or the like, and the electrical test unit 4 has the sockets 41 installed in sequence. This electrical test unit 4 simultaneously inspects the plural electronic devices. :

I 12 =

Each socket 41 is provided with terminals thereinside, o is mounted on each separate board 42 standing upright on the el upper surface of the electrical test unit 4, and has the opened - end being directed upwardly. Each board 42 includes a driver = circuit, and, receives power and a control signal or the like nd from a unit main box 4a. Each board 42 generates a current, Po a voltage, or a logic signal, and inputs the generated current, = voltage or logic signal to the terminals of the socket 41.

Each board 42 returns a test result to the unit main box 4a. -

The unit main box 4a analyzes the test result to determine = the quality of the electronic device, and notifies the control he unit in the frame 14 of the determination result. =

According to this electronic device carrying apparatus 1, the carrying table 12 keeps intermittently rotating until the electronic devices to be subject to the electrical characteristic test are positioned over all sockets 41. Next, after the electronic devices to be subject to the electrical characteristic test are positioned over all sockets 41, each advance or retreat drive unit 8 moves down each sucking nozzle 13 to transfer each electronic device to each socket 41, and the electrical characteristic test of all electronic devices is performed at once through all sockets 41. That is, according to this electronic device carrying apparatus 1, the electrical characteristic test is once performed per a number of intermittent rotations corresponding to the number of sockets 41.

Each socket 41 corresponds to each stop position of the sucking nozzle 13 one on one, and is installed right below the corresponding stop position. The installation pitch of each socket 41 is consistent with the installation pitch of each sucking nozzle 13. In addition, the arrangement line of the sockets 41 is curved along the carrying path 11. Still further, each socket 41 is directed toward the center of the carrying table 12.

In other words, each board 42 is assembled by an assembling operator in such a way that boards 42 are arranged

BES . 13 o in a sector shape as a whole, each board 42 is orthogonal to ol the carrying path 11, the installation pitch of the boards 0 42 is equal to the installation pitch of the sucking nozzle o 13, and each board 42 is right below each stop position of = the sucking nozzle 13. However, as illustrated in FIG. 4, due to a design tolerance of the board 42, a manufacturing po tolerance of parts, an assembling tolerance, and an Ea assembling tolerance on the frame 14 by the assembling I operator, the installation attitude of the socket 41 contains a unique displacement relative to an appropriate attitude. =

The term attitude means a concept that covers a direction, ol a position or both of the direction and the position. =

Hence, the attitude correcting unit 7 is provided at an upper stream side in the carrying direction than the electrical test unit 4, and corrects the attitude displacement between the socket 41 and the electronic device to be mounted on this socket 41. When the board 42 is a separate component, each socket 41 may have a different displacement in each installation attitude.

This attitude correcting unit 7 detects the installation attitude of each socket 41 beforehand, and changes the attitude of the electronic device to be mounted so as to be aligned with the installation attitude of the socket. The electronic device may have an attitude displacement caused during the carriage. Hence, the attitude correcting unit 7 also detects the attitude of the electronic device itself, calculates a difference between the installation attitude of the socket 41 and the attitude of the electronic device, and changes the attitude of the electronic device so as to eliminate the difference.

This attitude correcting unit 7 includes an imager unit 71 that picks up an image of the attitude of a dummy object and that of the electronic device, an XYb stage 72 that changes the attitude of the electronic device, and a control unit 73 that controls the imager unit 71 and the XYO stage 72. The dummy object is a simulated object of the electronic device,

to Lo 14 : = and takes an attitude that copies the installation attitude ol of each socket 41 beforehand. =

The imager unit 71 is installed at a stop position at fo the upper stream side in the carrying direction than the = electrical test unit 4. The upstream side in the carrying “od direction is a side toward the supply unit 2. The imager unit = 71 picks up an image of the dummy object and that of the ow electronic device, and inputs pieces of image data obtained = by the image-pickup operation to the control unit 73. This - imager unit 71 is a camera provided with a lens and imaging = elements that are CMOSs, CCDs or the like, is located right - below the stop position of the sucking nozzle 13, and has the 0 optical axis directed immediately upwardly.

The XYO stage 72 is installed right next to the imager unit 71 in the carrying direction at the stop position of the sucking nozzle 13. The XY0 stage 72 includes a stage and motors for three axes. The stage is, a collet or the like, and has a plane orthogonal to the axis of the sucking nozzle 13, and the electronic device released from the sucking nozzle 13 is mounted on the stage. The motors for three axes move the stage in X and Y directions, and rotate the stage around a 0 axis according to correction data input from the control unit 73.

That is, in the XYO stage 72, the motors for three axes are connected with the stage through a biaxial ball screw and a single-axis rotor. The X direction is a tangent direction of the carrying path 11 at a tangent point that is the stop position where the XY stage 72 is installed, and the Y direction is a normal direction of the carrying path 11 passing through the stop position where the XY0 stage 72 is installed. In addition, © rotation means a rotation of an

XY plane around the normal line.

The control unit 73 is a so-called computer that includes a CPU, a ROM, a RAM, and controllers for the imager unit 71 . and the XYO stage 72. As for the control unit 73, a computer retained in the frame 14 is applicable. That is, this control

” Co 15 o unit 73 controls the whole electronic device carrying " apparatus 1, and controls an attitude correcting operation = for the electronic device. The whole control operation os includes a moving process of the sucking nozzle 13 for a single = electrical characteristic test per a number of intermittent ~d rotations by what corresponds to the number of sockets 41. fee

The attitude correcting unit 7 may be provided with a oe dedicated computer, and this computer may be utilized as the = control unit 73 for the attitude correcting operation. -

As illustrated in FIG. 5, the control unit 73 includes = an image analyzer 731, a memory 732, a data selector 733, a i. correction-amount calculator 734, and a stage controller 735. on

The image analyzer 731 detects an attitude of the dummy object and that of the electronic device from the image data input from the imager unit 71. The memory 732 stores, as attitude information, the installation attitude of each socket 41 obtained based on the dummy object. The data selector 733 selects, from the memory 732, the attitude information on the socket 41 on which the electronic device subjected to the attitude correcting operation is to be mounted. The correction-amount calculator 734 calculates a correction ) amount that causes the attitude of the electronic device to be matched with the installation attitude of the socket 41.

The stage controller 735 moves and rotates the stage on which the electronic device is mounted according to the correction amount.

An operation of such an electronic device carrying apparatus 1 will be explained. The operation of the electronic device carrying apparatus 1 is roughly divided into a setting mode and a device carryingmode. Inthe setting mode, the attitude information on each socket 41 is stored.

In the setting mode, the sequential sucking nozzles 13 corresponding to the number of installed sockets 41 are caused to suck the respective dummy objects. When the four sockets 41 are provided side by side, the four sucking nozzles 13 suck the four dummy objects, respectively.

a —

Ce 16 =

The carrying table 12 causes the sucking nozzle 13 that is holding the dummy object to face each socket 41 one on one. =

In this case, instead of the intermittent rotation, the hs carrying table 12 may move the sucking nozzles 13 to the = sockets 41 at once. he

Next, the advance or retreat drive unit 8 located right = above each socket 41 moves down the sucking nozzle 13 which ba is holding the dummy object. When the dummy object moves = close to the socket 41, an assembling operator aligns the BN attitude of each dummy object with the socket 41 that faces = the dummy object one on one. The assembling operator may carry out this work manually or with an aid of a jig. During Oo the work by the assembling operator, the sucking nozzle 13 keeps holding the dummy object by maintaining the sucking action. Through this work, the attitude of each socket 41 is copied on the corresponding dummy object that is being held by the sucking nozzle 13.

When the attitude alignment work is manually operated, as illustrated in FIG. 6, the assembling operator moves a dummy object D that is being sucked by the sucking nozzle 13 so as to be aligned with the socket 41 while comparing the direction and position of the socket 41 with those of the dummy object D. The jig is, for example, a mortar-shape object that has a tapered face concaved toward the bottom. The space encircled by the tapered face is formed in a trapezoidal shape, and the shape and area of the bottommatches those of the socket 41. In the attitude alignment work, with the jig being fitted on the socket 41, the advance or retreat drive unit 8 moves down the sucking nozzle 13 that is holding the dummy object.

During the move-down operation, the dummy object is guided along the tapered face of the jig, and is corrected and aligned © relative to the attitude of the socket 41 as the dummy object is moving down.

After the attitude of the dummy object is aligned with that of the socket 41, the advance or retreat drive unit 8 moves up the sucking nozzle 13. After the sucking nozzle 13 ee oo . 17 — moves up, the carrying table 12 positions the dummy object at a location right above the imager unit 71. The drive timing a of the advance or retreat drive unit 8 and that of the carrying » table 12 may be a timing at which an instruction is input = through an input interface of the electronic device carrying “ed apparatus 1 like a touch panel 9. oo

The imager unit 71 sequentially picks up images of the EN respective dummy objects one by one, and inputs the image data = ! of each dummy object in the control unit 73. The image = analyzer 731 detects, from the image data, the attitude of = ! each dummy object. In other words, the installation attitude - of the socket 41 that is copied on the dummy object is detected. =

This image analyzer 731 stores beforehand origin information on an origin that is a point on an image represented by the image data as a predetermined reference.

As illustrated in FIG. 7, the image analyzer 731 detects a weight center G of the dummy object D from image data Pd, and calculates a position vector Vld froman origin 0 to the weight center G. In addition, the image analyzer 731 detects a specific side of the dummy object D, and detects a direction vector Vdd in parallel with the extending direction of the specific side. The position vector V1d represents a position in the installation attitude of the socket 41. The direction vector Vdd represents a direction in the installation attitude of the socket 41.

As illustrated in FIG. 8, the memory 732 stores, in association with position identification information, the attitude information on the socket 41 that is copied on each dummy object. That is, a pair of position vector and direction vector calculated for each socket 41 is stored in association with the position identification information.

The position identification information is information to identify the socket 41. For example, the position information is a natural number sequential from 1 to a number corresponding to the number of sockets 41, and the socket 41 at the most downstream side in the carrying direction may have ot the smallest number, the previous socket 41 to that socket 41 may have a second number, and the further previous socket ob 41 to that previous socket 41 may have a third number.

As explained above, in the settingmode, the installation = attitude of each socket 41 is copied on the dummy object, and el the installation attitude of each socket 41 is read from the om dummy object, and is stored as the attitude information. Next, Ee the electronic device carrying apparatus 1 transitions the = operation to the device carrying mode. =

In the device carrying mode, the carrying table 12 = intermittently rotates, and sequentially stops the sucking — nozzles 13 at the supply unit 2 one by one. The sucking nozzle 13 receives the electronic device from the supply unit 2, and moves along the carrying path 11 according to the intermittent rotation of the carrying table 12. The suckingnozzle 13 that . is holding the electronic device then stops at a location right above the imager unit 71. The imager unit 71 sequentially picks up images of the electronic devices stopping at the location right above the imager unit 71, and input plural pieces of image data to the control unit 73.

The carrying table 12 sequentially moves the electronic devices having undergone the image-pickup operation by the imager unit 71 to the location right above the XYO stage 72.

The advance or retreat drive unit 8 located right above the

XYO stage 72 moves down the sucking nozzle 13 located right below the advance or retreat drive unit 8 toward the XY0 stage 72. The sucking nozzle 13 mounts the electronic device on the XY0 stage 72 by vacuum break or pressure release to the atmospheric pressure. The XY0 stage 72 on which the electronic device is mounted is moved in the X direction and the Ydirection and rotated around the 6 axis under the control by the control unit 73, and thus the attitude of the electronic device is aligned with that of the socket 41 on which the electronic device is to be mounted.

As illustrated in FIG. 9, it is assumed that four sockets 4la to 41d are installed in sequence. The control unit 73

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ELECTRONIC DEVICE CARRYING APPARATUS =~ +. . [os

TECHNICAL FIELD TO

The present invention relates to an electronic device = carrying apparatus which forms a carrying path to carry ol . electronic devices, and which processes the electronic = devices during the carriage. 0

BACKGROUND ART

Electronic device carrying apparatuses simultaneously = carry plural electronic devices in line along a carrying path, = : and process each electronic device on the carrying path. =

Example processes for the electronic device are electrical characteristic test and laser marking, and various process units including an electrical test unit, a laser marking unit or the like are installed on the carrying path. Electronic device carrying apparatuses carry the electronic device to each of those process units, and mount the electronic device on each stage of the process units. The process unit performs a specific process on the electronic device mounted on the stage.

An example stage of the electrical test unit is a socket.

The socket is provided with a terminal that contacts the electrode of the electronic device. In order to obtain an excellent electrical-characteristic test result that has little errors, it is important that the electrode of the electronic device contacts the terminal of the socket with an appropriate contact area so as not to cause a contact failure, etc. As for the stage of the laser marking unit, it is necessary to emit laser beams to an appropriate portion of the electronic device.

Hence, it is important for the process unit to mount the ' electronic device on the stage while maintaining an appropriate attitude. However, some electronic devices may be inappropriately transferred when supplied to the carrying path, and may be carried in an inappropriate attitude. In ol determines the correction amount for a first electronic o device Wl after the imager unit 71 picks up an image of the = first electronic device Wl to be mounted on the backmost bo socket 41a and before the first electronic device is mounted = on the XYO stage 72. That is, when image data Pd obtained wd by imaging the first electronic device Wl is input from the x imager unit 71, the image analyzer 731 detects, from the image = data Pd, an attitude of the first electronic device Wl. More C specifically, as illustrated in FIG. 9, the weight center G of the first electronic device Wl is detected, and a position = vector Vlw from the origin 0 to the weight center G is - calculated. In addition, the image analyzer 731 detects a direction vector Vdw in parallel with the extending direction : of the specific side of the first electronic device W1.

After the attitude of the first electronic device Wl is obtained, as illustrated in FIG. 10, the data selector 733 selects, from the memory 732, the attitude information associated with the position identification information that is the first number indicating the backmost socket 41. The correction-amount calculator 734 calculates, based on the attitude of the first electronic device Wl and the attitude information associated with the position identification information that is the first number, the correction amount for the first electronic device Wl.

That is, as illustrated in FIG. 10, the position vector

Vlw of the first electronic device Wl is subtracted from the position vector V1d of the first attitude information. The scaler amount in the X direction of a vector Vr that is the subtraction result is set as a correction amount X1 in the

X direction, and the scaler amount in the Y direction is set as a correction amount Yl in the Y direction. In addition, the inner product of the direction vector Vdd of the first attitude information and the direction vector Vdw of the first electronic device Wl is obtained, and is divided by a result obtained by multiplication of the scalers of both direction vectors, and the reverse cosine of the division result is

Co 20 o calculated. The calculation result of the reverse cosine is po set as a correction amount 81 that indicates a rotation around = the 6 axis. =

As illustrated in FIG. 11, when the first electronic — device Wl is mounted on the XY stage 72, the stage controller he 735 outputs a control signal to the XY0 stage 72. The control = signal is pulse signal obtained by converting the pixel-based = correction amounts X1, Yl, and 61 into pulses that define the = drive amount of the motors, and is output to the motor for each axis. In accordance with the control signal, the XYO = stage 72 moves in the X direction in proportional to the - ; correction amount X1 in the X direction, moves in the Y Led direction in proportional to the correction amount Y1 in the

Y direction, and rotates around the 0 axis by the correction amount 61 for the 6-axis rotation.

Likewise, as illustrated in FIG. 12, the control unit 73 determines correction amounts X2, Y2, and 62 for a second electronicdevice W2 after the imager unit 71 picks up an image of the second electronic device W2 to be mounted on the socket 41b located at the previous position to the backmost socket and until the second electronic device W2 is mounted on the

XY0 stage 72. However, the data selector 733 selects the attitude information associated with the position identification information that indicates the second number.

Likewise, the control unit 73 determines correction amounts for third and fourth electronic devices after the imager unit 71 picks up respective images of the third and fourth electronic devices to be mounted on the socket 41 two sockets previous to the backmost socket and on the foremost socket and until the third and fourth electronic devices are mounted on the XY0 stage 72. However, the attitude information associated with the position identification information that indicates the third number is utilized for the third electronic device, and the attitude information associated with the position identification information that indicates the fourth number is utilized for the fourth electronic device. The fifth and subsequent electronic ws devices are handled as the first, second electronic devices, = etc., again and the corresponding the position identification ol information that indicates the first number, the position = identification information that indicates the second number, a etc., are repeatedly utilized in sequence. (T

Next, as illustrated in FIG. 13A, the carrying table 12 he carries the four electronic devices Wl to W4 aligned with the 0 respective installation attitudes of the sockets 41 on which = the respective electronic devices are to be mounted to the = location right above the respective sockets 4la to 41d on — which the respective electronic devices are to be mounted. } ~

When all electronic devices W1 to W4 are lined up at the location right above the sockets 4la to 41d, as illustrated in FIG. 13B, the advance or retreat drive units 8 move down the respective sucking nozzles 13, and mount the respective electronic devices Wl to W4 on the respective sockets 4la to 41d. In this mounting operation, even if the installation attitudes of the respective sockets 4la to 41d are different fromthe appropriate attitude at a unique level, the attitudes of the respective electronic devices Wl to W4 have been corrected so as to compensate the respective displacements of the sockets 4la to 41d, and thus precise mounting is realized.

When a simultaneous electrical characteristic test for the four electronic devices Wl to W4 starts, since the respective electrodes of the electronic devices Wl to W4 are precisely in contact with the test terminals, the highly precise electrical characteristic test is executable. After the electrical characteristic test ends, the respective electronic devices Wl to W4 are sequentially sent to the visual inspection unit 5 and the sorting unit 6, and are collected by the sorting unit 6 when the electronic device has no worth of storing in the storage unit 3. The remaining electronic devices are further sent to the storage unit 3, and are stored therein.

Bh | 22 =

As explained above, this electronic device carrying oo apparatus 1 stores, beforehand, the attitude information that = indicates the installation attitude of the socket 41. In bos addition, the image of the electronic device on the carrying = path1llispickedup, and the attitude of the electronic device od - is corrected based on the image-pickup result so as to be es aligned with the installation attitude of the socket 41 that is indicated by the attitude information. =

Hence, even if the installation attitude of the socket - 41 is different from the appropriate attitude due to an = assembling tolerance or the like, the electronic device is - precisely mountable on the socket 41 without an adjustment 1 work that corrects the displacement of the socket 41. Hence, in the electrical characteristic test, the terminal of the socket 41 contacts the electrode of the electronic device quite easily, and thus a reliable electrical characteristic test that suppresses an occurrence of a contact failure or the like is realized.

In addition, a risk in which the edge of the socket 41 collides the electronic device is suppressible. Hence, a possibility that the electronic device is damaged by the edge of the socket 41, and the electronic device is detached from the carrying path 11 due to the collision with the edge of the socket 41 is reduced, and thus the yield of the electronic device increases.

The socket 41 is an example stage on which the electronic device is mounted for the process to the electronic device.

This electronic device carrying apparatus 1 stores, beforehand, attitude information that indicates the installation attitude of all kinds of stages, and is capable of correcting the attitude of the electronic device according to the installation attitude of the stage based on the stored attitude information.

Other example stages are the stage of the visual inspection unit 5, and the stage of a laser marking unit that performs laser marking on the electronic device. The imager

LL

Co 23 unit 71 and the XY0 stage 72 may be installed at an upper stream » side in the carrying direction than the stop position where = the visual inspection unit 5 is installed, the imager unit ro 71 and the XY6 stage 72 may be also installed at the upper o stream side in the carrying direction than the laser marking unit, and the setting mode may be executed using the dummy = object. =

As for the method of storing the attitude information, = in the setting mode prior to the carriage of the electronic BN device, a carrier that includes the carrying table 12 and the = sucking nozzles 13 moves, to the imager unit 71, the dummy object which has the attitude aligned with that of the socket AE 41, the imager unit 71 picks up an image of the dummy object, and the attitude of the dummy object obtained by the image-pickup operation of the imager unit 71 is stored as the attitude information. That is, the attitude correcting unit 7 changes the attitude of the electronic device so as to adjust the attitude of the dummy object, thereby aligning the electronic device with the installation attitude of the socket 41.

As explained above, since the necessary operation is simple which causes the installation attitude of the socket 41 to be copied on the dummy object, and to pick up an image of this dummy object, it becomes unnecessary to measure the installation attitude of the socket 41 by a measuring instrument like a gauge, and a highly reliable electrical characteristic test is realizable quite easily. In addition, the reliability in tests other than the electrical characteristic test is likewise improvable.

However, the method of storing the attitude information in the memory 732 is not limited to the above example, and for example, the installation attitude of the socket 41 may be measured using a measuring instrument like a gauge, and the measurement result may be input through an input interface like the touch panel 9. In addition, in the setting mode, instead of applying the dummy object that simulates the electronic device, the electronic device itself to be carried N in the device carrying mode may be applied. The electronic = device applied in this setting mode may be also carried in os the subsequent device carrying mode. =

Still further, this electronic device carrying ed apparatus 1 includes the plural sockets 41 installed in oT sequence along the carrying path 11, and mounts the = corresponding electronic device on each socket 41 one on one oe to carry out the electrical characteristic test after the + electronic devices are carried to all sockets 41 installed = in sequence. That is, according to this electronic device — carrying apparatus 1, a single electrical characteristic test is executed per a number of intermittent rotations by what corresponds to the number of sockets 41. Next, the memory 732 stores the attitude information for each socket 41, and the attitude correcting unit 7 aligns the attitude of the electronic device to be mounted on the corresponding socket 41 based on the attitude information of this socket 41 on which the electronic device is to be mounted.

Hence, even in a case in which the stages for the same process are installed in sequence and the process is executed at once, an operator work of adjusting the installation attitude of each stage to be an appropriate attitude becomes unnecessary. This remarkably reduces a necessary time for the adjustment work for the electronic device carrying apparatus : 1.

The stages for the same process may be installed in accordance with the pitch of the stop position so as to have no empty stop position, or when stage for other processes is not installed therebetween an empty stop position may be present. That is, within the range where the stages for the

Same processes are installed side by side, the stages may be installed in sequence at the stop positions by what corresponds to the number of stages, and a stop position for the electronic device where no stage is installed may be present. For example, the same kind of the three stages may

Lo be installed at three sequential stop positions, or the three ws stages may be installed in any three stop positions among the = four sequential stop positions. oo

When the stages for the same process are present as a = single unit, the attitude information is only one, and thus ud it is unnecessary to associate this attitude information with Bn the position identification information, and the data EE. selector 733 becomes unnecessary. =

In addition, according to the embodiment, based on image = data output by the imager unit 71, the attitude of the dummy = object and that of the electronic device are analyzed, and — the correction amount that is the difference between the installation attitude of the socket 41 indicated by the attitude information and the attitude of the electronic device is calculated. However, the present invention is not limited to this operation, and as for the arithmetic process to align the attitude of the electronic device with the installation attitude of the socket 41, various . conventionally well-known schemes are applicable.

When, for example, the position vector and the direction vector both indicating the attitude of the electronic device are detected from an image, the coordinate system of the image may be converted beforehand in accordance with the attitude information. That is, the origin on the image may be shifted by the position vector of the dummy object, and the Cartesian coordinate system is rotated according to the direction vector. In this case, when the attitude of the electronic device is calculated, the calculation result immediately becomes the correction amount, and thus the arithmetic process is simplified. (First Modified Example)

In the advance or retreat drive unit 8, the rod that extends toward the head of the sucking nozzle 13 may be an extending coil bobbin of a voice coil motor. When the voice coil motor is generating no driving force, the rod is pushed back toward the interior of the voice coil motor by reactive force applied from the sucking nozzle 13 and is retracted in the voice coil motor. Conversely, when the voice coil motor (= generates counter force that is equal to or larger than the . reactive force, the rod pushes down the sucking nozzle 13. =

The voice coil motor generates total thrust force that Ra includes pushing force to push the electronic device against a the socket 41 and counter thrust force against the reactive a. force from the sucking nozzle 13. £0

Hence, after the dummy object is fitted to the socket + 41, when the sucking nozzle 13 attempts to further move down, = the rod is pushed into the voice coil motor. The control unit = 73 detects this push-in action, and measures a total rotation angle after the rotation motor of the advance or retreat drive unit 8 starts driving and until a detection timing. The measured value is obtainable by controlling a relative displacement between the sucking nozzle 13 and the socket 41.

As explained above, when there is a sensor that detects a contact of the dummy object being held by the sucking nozzle 13 with the socket 41, the approaching amount of the sucking nozzle 13 for each socket 41 is measurable beforehand.

Depending on the assembling precision of the board 42, the height of the socket 41 may vary individually. When, however, the result of the beforehand measurement using the dummy object is fed back and applied in the device carrying mode, appropriate contact pressure between the electrode and the terminal in the electrical characteristic test is maintainable, and no excessive load is applied to the electronic device during this test. (Second Modified Example)

As for the installation method of the respective sockets 41 in the electrical test unit 4, instead of individually assembling the board 42 including each socket 41, as illustrated in FIG. 14, a common plate that fastens the respective boards 42 may be attached to the frame 14 directly or indirectly through a support frame, etc. The boards 42 are arranged on the plate in a sector shape as a whole, and

= the curvature radius of the sector is consistent with the O carrying path 11. In addition, each board 42 is directed xs toward the center of a circle that passes through a line oy interconnecting the arranged boards, and the installation = pitch of each board 42 is consistent with the installation -) pitch of the sucking nozzle 13. Still further, the = installation location of each board 42 is right below the stop HE position of each sucking nozzle 13. ee]

According to such a plate, the possibility that the = installation attitude of each board 42 is irregularly = displaced is reduced. However, a design tolerance of the board 42, a manufacturing tolerance of parts, an assembling = tolerance of the board relative to the plate, and an assembling tolerance of the plate relative to the frame 14 by an assembling operator may still remain. Hence, It is a beneficial method to cause the installation attitude of each socket 41 to be copied on the dummy object, store the installation attitude of each socket 41 based on the dummy object, and correct the attitude of the electronic device according to the installation attitude of each socket 41. (Third Modified Example)

As for the method of storing the attitude information in the memory 732, an explanation was also given of a method of measuring the installation attitude of the socket 41 using a measuring instrument like a gauge, and inputting the measurement result through the input interface like the touch panel 9. The measurement instrument may be a camera, and a measurement of the installation attitude through a measurement based on an image is also within the scope of the aforementioned method.

When this image-based measurement is applied, in the setting mode of storing the attitude information in the memory 732, the camera is temporarily installed on the frame 14 so as to be located right above the socket 41. The camera is a detachable imager, and is also utilized as a jig. It is assumed that the frame 14 and the camera have an attachment

Ce

- —_— T 28 = relationship with an ensured precision, and with a - repeatability. This camera picks up an image of the socket pr 41 right below the camera, and inputs image data to the image ol analyzer 731. The image analyzer 731 calculates, based on = : 5 the image data, the displacement of the socket 41 from the ° reference position, and the displacement from the reference —- direction. The memory 732 stores the measurement results as o the attitude information of the socket 41. After the attitude mo information of the socket 41 is stored in the memory 732, the += camera may be detached from the frame 14, and the device a carrying mode may be started. Needless to say, the device = carrying mode may be started without the camera being detached - from the frame 14. (Others)

Although an explanation was given of an example case in which the holder is the sucking nozzle 13, an electrostatic absorption type, a Bernoulli chuck type, or a mechanical chuck type mechanism that holds the electronic device mechanically is also applicable. In addition, various process units other than the electrical test unit 4 are installable right below the carrying table 12. Example other process units are a marking unit, and an ejecting device.

The embodiment of the present invention was explained above, but various omissions, replacements, and modifications may be made without departing from the scope of the present invention. Such embodiments and modified forms thereof are within the scope of the present invention and also within the scope of the invention as recited in claims and the equivalent range thereto.

REFERENCE SIGNS LIST

1 Electronic device carrying apparatus 11 Carrying path 12 Carrying table 13 Sucking nozzle 14 Frame 15 Direct drive motor

— a —_—_—_——,_—_—_—— oe . A addition, the electronic device repeats moving and stopping on on the carrying path, and is repeatedly transferred relative es to the various process units. Hence, external forces, such o as inertial force and collision force, are likely to be ~ applied to the electronic device, and thus the attitude “] displacement is sometimes caused due to such external forces. oy

Hence, according to conventional technologies, a Ee correcting unit is installed to pick up an image of the Ty electronic device at an upper stream side in the carrying - direction than the process unit, and to correct the attitude i of the electronic device based on the image-pickup result (see, - for example, Patent Document 1). This correcting unit picks w up an image of the electronic device, and analysis the attitude displacement of the electronic device based on image data. In addition, the correcting unit includes a unit like an XYO stage that corrects the attitude of the electronic device, and moves the electronic device in a two-dimensional direction or changes the direction of the electronic device so as to address the attitude displacement.

Claims

Claims - SF i Lo

1. An electronic device carrying apparatus carrying 4 an electronic device along a carrying path, and processing the electronic device on the carrying path, the apparatus comprising: a plurality of stages processing a same kind procedure installed in sequence along the carrying path; a carrier mounting, after moving the electronic devices one to one to all of the stages installed in sequence along the carrying path while maintaining a carrying attitude of the electronic device, the corresponding electronic device on each stage, the attitude includes a direction, a position or both of the direction and the position; a memory storing attitude information indicating, for each stage, an installation attitude of the stage; an imager installed at an upper stream side in the carrying path than the stage, and picking up an image of the electronic device on the carrying path; and an attitude corrector installed on the carrying path between the stage and the imager, and correcting the attitude of each electronic device to be mounted on the stage in accordance with the installation attitude of the stage based on an image-pickup result by the imager and the attitude information for each stage.

2. The electronic device carrying apparatus according to claim 1, wherein: the carrier moves, prior to carrying the electronic device for the process, a dummy object which is adjusted to a consistent position as of the stage to the imager; the imager picks up an image of the dummy object prior to the carriage of the electronic device for the process; the memory stores, as the attitude information, an attitude of the dummy object obtained by the image-pickup ee —————————

operation by the imager; and the attitude corrector changes the attitude of the electronic device according to the attitude of the dummy object, thereby aligning the attitude of the electronic device with the installation attitude of the stage.

3. The electronic device carrying apparatus according to claim 2, wherein: the carrier moves the dummy object to the stage prior to the carriage of the electronic device; and the attitude of the dummy object is changed with reference to the installation attitude of the stage.

4, The electronic device carrying apparatus according to claim 2, further comprising a jig installed on the stage prior to the carriage of the electronic device, guiding the dummy object being about to be mounted on the stage, and changing the attitude of the dummy object according to the installation attitude of the stage during the mounting on the stage.

:

5. The electronic device carrying apparatus according to claim 4, wherein the jig is a tapered mortar- shape object into which the dummy object being moving down toward the stage is fitted.

6. The electronic device carrying apparatus according to any one of claims 2 to 5, wherein an image of the electronic device aligned with the installation attitude of the stage instead of the dummy object is picked up prior to the carriage of the electronic device for the process, and the attitude of the electronic device obtained by the image-pickup operation is stored as the attitude information.

7. The electronic device carrying apparatus a2 according to claim 1, further comprising a second imager attached to a location right above the stage and picking up an image of the stage when the attitude information is stored in the memory, wherein the memory stores, as the attitude information, the installation attitude of the stage obtained by the image-pickup operation by the second imager.

8. The electronic device carrying apparatus according to claim 1, wherein: the carrier intermittently carries the electronic device while stopping at each stop position set on the carrying path; and within a range where the plurality of stages for the processing a same kind procedure is installed in sequence, a same number of the stop positions as a number of stages are provided in sequence, or there is the stop position for the electronic device where no stage is installed.

9. The electronic device carrying apparatus according to «claim 1, further comprising an analyzer analyzing the attitude of the electronic device based on image data output by the imager, wherein the attitude corrector changes the attitude of the electronic device by a difference between the installation attitude of the stage indicated by the attitude information and the attitude of the electronic device.

10. The electronic device carrying apparatus according to «claim 2, further comprising an analyzer analyzing the attitude of the electronic device based on image data output by the imager, wherein: ee the attitude corrector changes the attitude of the electronic device by a difference between the installation attitude of the stage indicated by the attitude information and the attitude of the electronic device; and the analyzer analyzes the attitude of the dummy object based on the image data output by the imager, and stores in the memory as the attitude information. am