NL181880B - Verdampingsinrichting. - Google Patents

Verdampingsinrichting.

Info

Publication number: NL181880B
Authority: NL; Netherlands
Prior art keywords: evaporating device; evaporating
Prior art date: 1983-05-09

Application number

NL8400053A

Other languages

English (en)

Other versions

NL8400053A (nl

NL181880C (nl

Original Assignee

Vac Tec Syst

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-05-09

Filing date

1984-01-06

Publication date

1987-06-16

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27050887&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL181880(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1983-05-09 Priority claimed from US06/492,831 external-priority patent/US4430184A/en

1983-09-12 Priority claimed from US06/531,287 external-priority patent/US4559121A/en

1984-01-06 Application filed by Vac Tec Syst filed Critical Vac Tec Syst

1984-12-03 Publication of NL8400053A publication Critical patent/NL8400053A/nl

1987-06-16 Publication of NL181880B publication Critical patent/NL181880B/nl

1993-01-18 Application granted granted Critical

1993-01-18 Publication of NL181880C publication Critical patent/NL181880C/nl

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
Physical Vapour Deposition (AREA)

NL8400053A 1983-05-09 1984-01-06 Werkwijze voor het op een voorwerp afzetten van een materiaal met gebruikmaking van een opdampinrichting. NL181880C (nl)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
US06/492,831 US4430184A (en)	1983-05-09	1983-05-09	Evaporation arc stabilization
US49283183		1983-05-09
US53128783		1983-09-12
US06/531,287 US4559121A (en)	1983-09-12	1983-09-12	Method and apparatus for evaporation arc stabilization for permeable targets

Publications (3)

Publication Number	Publication Date
NL8400053A NL8400053A (nl)	1984-12-03
NL181880B true NL181880B (nl)	1987-06-16
NL181880C NL181880C (nl)	1993-01-18

Family

ID=27050887

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL8400053A NL181880C (nl)	1983-05-09	1984-01-06	Werkwijze voor het op een voorwerp afzetten van een materiaal met gebruikmaking van een opdampinrichting.

Country Status (5)

Country	Link
CA (1)	CA1210824A (nl)
DE (1)	DE3345493C2 (nl)
FR (1)	FR2545840B1 (nl)
GB (1)	GB2140040B (nl)
NL (1)	NL181880C (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4448659A (en) *	1983-09-12	1984-05-15	Vac-Tec Systems, Inc.	Method and apparatus for evaporation arc stabilization including initial target cleaning
DE3901401C2 (de) *	1988-03-01	1996-12-19	Fraunhofer Ges Forschung	Verfahren zur Steuerung einer Vakuum-Lichtbogenentladung
DE4006456C1 (en) *	1990-03-01	1991-05-29	Balzers Ag, Balzers, Li	Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
GB9108553D0 (en) *	1991-04-22	1991-06-05	Ion Coat Ltd	Ionised vapour source
DE4220588C2 (de) *	1992-06-24	2001-02-15	Leybold Ag	Lichtbogen-Verdampfungsvorrichtung
JP2002525431A (ja) *	1998-09-14	2002-08-13	ユナキス・トレーディング・アクチェンゲゼルシャフト	アーク蒸化室用ターゲット配置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3836451A (en) *	1968-12-26	1974-09-17	A Snaper	Arc deposition apparatus
US3793179A (en) *	1971-07-19	1974-02-19	L Sablev	Apparatus for metal evaporation coating
US3783231A (en) *	1972-03-22	1974-01-01	V Gorbunov	Apparatus for vacuum-evaporation of metals under the action of an electric arc
SU636266A1 (ru) *	1976-04-05	1978-02-10	Предприятие П/Я В-8851	Электродуговой испаритель металлов
CH631743A5 (de) *	1977-06-01	1982-08-31	Balzers Hochvakuum	Verfahren zum aufdampfen von material in einer vakuumaufdampfanlage.
JPS54110988A (en) *	1978-01-31	1979-08-30	Nii Chiefunorogii Afutomobirin	Coating vacuum evaporation apparatus
WO1982002906A1 (en) *	1981-02-23	1982-09-02	Leonid Pavlovich Sablev	Consumable cathode for electric-arc evaporator of metal

1983
- 1983-12-07 GB GB08332650A patent/GB2140040B/en not_active Expired
- 1983-12-14 CA CA000443298A patent/CA1210824A/en not_active Expired
- 1983-12-15 DE DE19833345493 patent/DE3345493C2/de not_active Expired
- 1983-12-15 FR FR8320123A patent/FR2545840B1/fr not_active Expired
1984
- 1984-01-06 NL NL8400053A patent/NL181880C/nl not_active IP Right Cessation

Also Published As

Publication number	Publication date
DE3345493C2 (de)	1986-01-16
DE3345493A1 (de)	1984-11-15
GB2140040B (en)	1986-09-17
GB2140040A (en)	1984-11-21
FR2545840A1 (fr)	1984-11-16
NL8400053A (nl)	1984-12-03
NL181880C (nl)	1993-01-18
GB8332650D0 (en)	1984-01-11
FR2545840B1 (fr)	1985-11-29
CA1210824A (en)	1986-09-02

Publication	Publication Date	Title
NO166825C (no)	1991-09-04	Hoeyspennings-tilkoplingsanordning.
NO163646C (no)	1990-06-27	Broenn-tetningsenhet.
NO161707C (no)	1989-09-13	Koblingsenhet.
NL181151C (nl)	1987-06-16	Muntafgeefinrichting.
ES286420Y (es)	1986-06-01	Dispositivo osmotico.
NO161025C (no)	1989-06-21	Koblingsanordning.
DE3381054D1 (de)	1990-02-08	Immunoessay.
IT8320809A0 (it)	1983-04-27	Dispositivo dispergente.
NL181880B (nl)	1987-06-16	Verdampingsinrichting.
ES271352Y (es)	1984-06-01	Dispositivo de conexion.
ES272075Y (es)	1984-05-16	Corretilla.
IT8419192A0 (it)	1984-01-17	Dispositivo eccentrico.
NL185107C (nl)	1990-01-16	Muntafgeefinrichting.
NO162037C (no)	1989-10-25	Laasanordning.
IT8323779A0 (it)	1983-11-18	Dispositivo distillatore.
NO153992C (no)	1986-07-02	Forbindelsesinnretning.
NO157058C (no)	1988-01-20	Svingeanordning.
ATE16561T1 (de)	1985-12-15	Ophtalmoskopisches geraet.
ES263851Y (es)	1983-05-01	Dispositivo sujetador-compresor.
ES268070Y (es)	1984-09-16	Dispositivo descapsulador-cortaprecintos.
ES268746Y (es)	1983-12-16	Dispositivo antideslumbrante.
IT8230734V0 (it)	1982-06-22	Dispositivo strozzascotte.
NO162944C (no)	1990-03-14	Sitteanordning.
NO853289L (no)	1985-08-20	Koblingsanordning.
ATE27355T1 (de)	1987-06-15	Nachfuehrungseinrichtung.

Legal Events

Date	Code	Title	Description
1984-12-03	A1B	A search report has been drawn up
1985-01-01	A85	Still pending on 85-01-01
1985-09-02	BC	A request for examination has been filed
1987-11-16	R1B	Notice of opposition during period of laying open
1993-01-18	NP1G	Not automatically granted patents, but text of patent specification modified with respect to the text of examined patent application
1993-12-01	SNR	Assignments of patents or rights arising from examined patent applications	Owner name: HAUZER INDUSTRIES B.V.
2002-10-01	V1	Lapsed because of non-payment of the annual fee	Effective date: 20020801