[go: up one dir, main page]

MX2011006554A - Generador de vapor industrial para la deposicion de un recubrimiento de aleacion en una banda metalica. - Google Patents

Generador de vapor industrial para la deposicion de un recubrimiento de aleacion en una banda metalica.

Info

Publication number
MX2011006554A
MX2011006554A MX2011006554A MX2011006554A MX2011006554A MX 2011006554 A MX2011006554 A MX 2011006554A MX 2011006554 A MX2011006554 A MX 2011006554A MX 2011006554 A MX2011006554 A MX 2011006554A MX 2011006554 A MX2011006554 A MX 2011006554A
Authority
MX
Mexico
Prior art keywords
depositing
substrate
alloy coating
mixer
vapour
Prior art date
Application number
MX2011006554A
Other languages
English (en)
Other versions
MX342910B (es
Inventor
Eric Silberberg
Luc Vanhee
Bruno Schmitz
Maxime Monnoyer
Original Assignee
Arcelormittal France
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=40636672&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=MX2011006554(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Arcelormittal France filed Critical Arcelormittal France
Publication of MX2011006554A publication Critical patent/MX2011006554A/es
Publication of MX342910B publication Critical patent/MX342910B/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

La presente invención se refiere a una instalación de deposición al vacío de un recubrimiento de aleación metálica en un sustrato (7), equipada con un generador/mezclador de vapor que contiene una cámara de vacío (6) en forma de un recipiente provisto de elementos para crear un estado de depresión en el mismo en relación con el medio exterior y provisto de elementos que permiten la entrada y la salida del sustrato (7), mientras sigue siendo esencialmente impermeable respecto del medio exterior, dicho recipiente incluye un cabezal de deposición de vapor, llamado eyector (3), configurado para crear un chorro de vapor de aleación metálica a velocidad sónica hacia la superficie del sustrato (7) y perpendicular a la misma, dicho eyector (3) se comunica de modo impermeable con un dispositivo mezclador distinto (14), conectado hacia arriba a por lo menos dos crisoles (11, 12) respectivamente, y que contienen metales diferentes Ml y M2, en forma líquida, cada crisol (11, 12) está conectado al mezclador (14) por un ducto propio (4, 4').
MX2011006554A 2008-12-18 2009-12-17 Generador de vapor industrial para la deposicion de un recubrimiento de aleacion en una banda metalica. MX342910B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08172179A EP2199425A1 (fr) 2008-12-18 2008-12-18 Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique (II)
PCT/EP2009/067448 WO2010070067A1 (fr) 2008-12-18 2009-12-17 Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique (ii)

Publications (2)

Publication Number Publication Date
MX2011006554A true MX2011006554A (es) 2011-08-03
MX342910B MX342910B (es) 2016-10-17

Family

ID=40636672

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2011006554A MX342910B (es) 2008-12-18 2009-12-17 Generador de vapor industrial para la deposicion de un recubrimiento de aleacion en una banda metalica.

Country Status (19)

Country Link
US (2) US20110281031A1 (es)
EP (2) EP2199425A1 (es)
JP (1) JP5599816B2 (es)
KR (1) KR101642364B1 (es)
CN (1) CN102257175B (es)
AU (1) AU2009327078B2 (es)
BR (1) BRPI0918113B1 (es)
CA (1) CA2746325C (es)
DK (1) DK2358921T3 (es)
ES (1) ES2397593T3 (es)
HR (1) HRP20121013T1 (es)
MX (1) MX342910B (es)
PL (1) PL2358921T3 (es)
PT (1) PT2358921E (es)
RU (1) RU2515875C2 (es)
SI (1) SI2358921T1 (es)
UA (1) UA104747C2 (es)
WO (1) WO2010070067A1 (es)
ZA (1) ZA201104315B (es)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2012206581B2 (en) * 2011-01-14 2017-03-30 Arcelormittal Investigacion Y Desarrollo Automatic feeding device for an industrial metal-vapor generator
JP6430528B2 (ja) * 2013-11-05 2018-11-28 タタ、スティール、ネダーランド、テクノロジー、ベスローテン、フェンノートシャップＴａｔａ Ｓｔｅｅｌ Ｎｅｄｅｒｌａｎｄ Ｔｅｃｈｎｏｌｏｇｙ Ｂｖ 蒸発器デバイス内の液体金属の組成を制御するための方法および装置
WO2015088523A1 (en) 2013-12-11 2015-06-18 ArcelorMittal Investigación y Desarrollo, S.L. Cold rolled and annealed steel sheet
JP6358446B2 (ja) * 2014-03-11 2018-07-18 株式会社Ｊｏｌｅｄ 蒸着装置及びその制御方法、蒸着装置を用いた蒸着方法、及びデバイスの製造方法
CN105925936B (zh) * 2016-07-08 2018-04-20 武汉钢铁有限公司 一种高档门窗用轻金属复合镀层钢带的生产方法
WO2018020296A1 (en) * 2016-07-27 2018-02-01 Arcelormittal Apparatus and method for vacuum deposition
KR102098455B1 (ko) * 2017-12-26 2020-04-07 주식회사 포스코 연속 증착 장치 및 연속 증착 방법
WO2019239184A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019239186A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
WO2019239185A1 (en) 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
CN110004411B (zh) * 2019-03-29 2021-05-11 北京钢研新冶工程设计有限公司 一种合金镀膜方法
CN112553578B (zh) * 2019-09-26 2022-01-14 宝山钢铁股份有限公司 一种具有抑流式喷嘴的真空镀膜装置

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU433252A1 (ru) * 1971-07-16 1974-06-25 В. В. Горбачев, В. Г. Дзевалтовский , Г. П. Жариков Ордена Ленина институт кибернетики Испаритель
SU788831A1 (ru) * 1976-11-15 1989-07-15 Предприятие П/Я В-8495 Установка дл нанесени покрытий в вакууме
JPS5834172A (ja) * 1981-08-26 1983-02-28 Mitsubishi Heavy Ind Ltd 合金蒸着用蒸発源構造
JPS60251273A (ja) * 1984-05-28 1985-12-11 Mitsubishi Heavy Ind Ltd 真空蒸発装置の蒸発量制御方法
JPH068170B2 (ja) * 1985-10-29 1994-02-02 宇部興産株式会社 高純度酸化マグネシウム微粉末の製造方法
US5002837A (en) 1988-07-06 1991-03-26 Kabushiki Kaisha Kobe Seiko Sho Zn-Mg alloy vapor deposition plated metals of high corrosion resistance, as well as method of producing them
JPH02125866A (ja) * 1988-11-04 1990-05-14 Kobe Steel Ltd 合金蒸着めっき装置
SU1737924A1 (ru) * 1989-09-27 1994-03-30 Всесоюзный научно-исследовательский институт экспериментальной физики Способ получения покрытия с градиентом плотности в вакууме
JP3463693B2 (ja) * 1992-10-29 2003-11-05 石川島播磨重工業株式会社 連続帯状物用真空蒸着装置
DE4310085A1 (de) * 1993-03-27 1994-09-29 Leybold Ag Verfahren und Vorrichtung zur Erzeugung von Mustern auf Substraten
JPH07268605A (ja) * 1994-03-29 1995-10-17 Nisshin Steel Co Ltd 合金化Ｚｎ−Ｍｇ蒸着めっき鋼板の製造方法
US5776254A (en) * 1994-12-28 1998-07-07 Mitsubishi Denki Kabushiki Kaisha Apparatus for forming thin film by chemical vapor deposition
DE19527515C1 (de) 1995-07-27 1996-11-28 Fraunhofer Ges Forschung Verfahren zur Herstellung von korrosionsgeschütztem Stahlblech
BE1010351A6 (fr) 1996-06-13 1998-06-02 Centre Rech Metallurgique Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'une vapeur metallique.
US6423144B1 (en) * 1996-08-07 2002-07-23 Matsushita Electric Industrial Co., Ltd. Coating apparatus and coating method
BE1010720A3 (fr) 1996-10-30 1998-12-01 Centre Rech Metallurgique Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'un alliage metallique en phase vapeur.
US6409839B1 (en) * 1997-06-02 2002-06-25 Msp Corporation Method and apparatus for vapor generation and film deposition
US6399017B1 (en) * 2000-06-01 2002-06-04 Aemp Corporation Method and apparatus for containing and ejecting a thixotropic metal slurry
EP1174526A1 (en) * 2000-07-17 2002-01-23 Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek TNO Continuous vapour deposition
DE10039375A1 (de) 2000-08-11 2002-03-28 Fraunhofer Ges Forschung Korrosionsgeschütztes Stahlblech und Verfahren zu seiner Herstellung
WO2003025071A1 (en) * 2001-09-14 2003-03-27 Showa Denko K.K. Silica-coated mixed crystal oxide particle, production process thereof and cosmetic material using the same
FR2843130B1 (fr) 2002-08-05 2004-10-29 Usinor Procede de revetement de la surface d'un materiau metallique, dispositif pour sa mise en oeuvre et produit ainsi obtenu
LV13383B (en) * 2004-05-27 2006-02-20 Sidrabe As Method and device for vacuum vaporization metals or alloys
WO2007005832A2 (en) * 2005-06-30 2007-01-11 University Of Virginia Patent Foundation Reliant thermal barrier coating system and related methods and apparatus of making the same
WO2008002559A2 (en) * 2006-06-26 2008-01-03 Precision Combustion, Inc. Streamlined flow mixer
CN101522943B (zh) * 2006-10-10 2013-04-24 Asm美国公司 前体输送系统
EP1972699A1 (fr) 2007-03-20 2008-09-24 ArcelorMittal France Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique
US20090251989A1 (en) * 2007-06-26 2009-10-08 Pfefferle William C Streamlined flow mixer
EP2048261A1 (fr) * 2007-10-12 2009-04-15 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique
US20090098280A1 (en) * 2007-10-12 2009-04-16 Jean-Pierre Tahon Vapor deposition apparatus and method of vapor deposition making use thereof
WO2009153865A1 (ja) * 2008-06-18 2009-12-23 産機電業株式会社 微粉体の製造装置及び製造方法

Also Published As

Publication number Publication date
JP2012512959A (ja) 2012-06-07
CN102257175B (zh) 2013-06-26
BRPI0918113B1 (pt) 2019-07-09
US20190093210A1 (en) 2019-03-28
AU2009327078B2 (en) 2014-06-19
ES2397593T3 (es) 2013-03-08
EP2358921A1 (fr) 2011-08-24
BRPI0918113A2 (pt) 2015-11-24
CA2746325A1 (en) 2010-06-24
CA2746325C (en) 2019-04-30
KR20110102886A (ko) 2011-09-19
CN102257175A (zh) 2011-11-23
SI2358921T1 (sl) 2013-03-29
RU2515875C2 (ru) 2014-05-20
WO2010070067A1 (fr) 2010-06-24
JP5599816B2 (ja) 2014-10-01
RU2011129058A (ru) 2013-01-27
AU2009327078A1 (en) 2011-07-07
PL2358921T3 (pl) 2013-04-30
US10711339B2 (en) 2020-07-14
EP2358921B1 (fr) 2012-11-28
MX342910B (es) 2016-10-17
EP2199425A1 (fr) 2010-06-23
KR101642364B1 (ko) 2016-08-10
US20110281031A1 (en) 2011-11-17
UA104747C2 (ru) 2014-03-11
HRP20121013T1 (hr) 2013-01-31
PT2358921E (pt) 2013-01-24
ZA201104315B (en) 2012-11-28
DK2358921T3 (da) 2013-01-02

Similar Documents

Publication Publication Date Title
MX2011006554A (es) Generador de vapor industrial para la deposicion de un recubrimiento de aleacion en una banda metalica.
MX2009009914A (es) Metodo de revestimiento de un substrato e instalacion de deposicion al vacio de la aleacion metalica.
MX2010003889A (es) Generador de vapor industrial para colocar un revestimiento de aleacion en una banda metalica.
KR101953432B1 (ko) 기판 처리 장치
MX2012003853A (es) Geometria de recubridor no ortogonal para recubrimientos mejorados sobre un sustrato.
WO2009143264A3 (en) Direct silicon or reactive metal casting
JP2009286127A5 (es)
TW200706696A (en) Method for coating a substrate surface and coated product
EP2261948A3 (en) Plasma discharge film-forming apparatus and method
MX342299B (es) Dispositivo de suministro automático para un generador de vapor metálico industrial.
WO2008018956A3 (en) Coating composition, article, and associated method
WO2014144862A3 (en) Synthesis of silicon containing materials using liquid hydrosilane compositions through direct injection
WO2008078502A1 (ja) 成膜装置および成膜方法
SG182119A1 (en) Coating deposition apparatus and method therefor
WO2014197027A3 (en) Method and apparatus for aerosol direct write printing
DE602006015914D1 (de) Verfahren zur herstellung eines silicium- und zirconiumbasierten targets durch thermisches sprühen
TW200720469A (en) Process for producing thin zirconium nitride coatings
MY157422A (en) Water-reactive al-based thermally sprayed film, process for production of such al-based thermally sprayed film, and constituent member for film-forming chamber
US20100242841A1 (en) Electron beam vapor deposition apparatus and method of coating
GB2510540A (en) Method and apparatus for depositing stable crystalline phase coatings of high temperature ceramics
MY152964A (en) Water-reactive al composite material for thermal spray, water-reactive thermally sprayed al film, process for the production of the thermally sprayed al film, and constituent member for film-forming chamber
WO2012079562A3 (de) Verfahren und vorrichtung zur bildung eines elektrolytfilmes auf einer elektrodenoberfläche
WO2011064392A3 (en) Method and apparatus for depositing nanostructured thin layers with controlled morphology and nanostructure
WO2007117576A3 (en) Gas manifolds for use during epitaxial film formation
TW200745370A (en) Method for depositing Ti film

Legal Events

Date Code Title Description
FG Grant or registration