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KR960002462A - 방전 램프 - Google Patents

방전 램프 Download PDF

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Publication number
KR960002462A
KR960002462A KR1019950016285A KR19950016285A KR960002462A KR 960002462 A KR960002462 A KR 960002462A KR 1019950016285 A KR1019950016285 A KR 1019950016285A KR 19950016285 A KR19950016285 A KR 19950016285A KR 960002462 A KR960002462 A KR 960002462A
Authority
KR
South Korea
Prior art keywords
discharge lamp
quartz glass
mercury
rare gas
light emitting
Prior art date
Application number
KR1019950016285A
Other languages
English (en)
Other versions
KR100349800B1 (ko
Inventor
유키오 야스다
기요타다 나카무라
Original Assignee
다나카 아키히로
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6160791A external-priority patent/JPH087835A/ja
Priority claimed from JP6160792A external-priority patent/JP2991933B2/ja
Application filed by 다나카 아키히로, 우시오덴키 가부시키가이샤 filed Critical 다나카 아키히로
Publication of KR960002462A publication Critical patent/KR960002462A/ko
Application granted granted Critical
Publication of KR100349800B1 publication Critical patent/KR100349800B1/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)

Abstract

본 발명은 파장 220nm 부근의 광을 산업상 이용할 수 있을 정도까지 충분히 방사할 수 있음과 동시에, 방사광의 투과율은 충분히 유지할 수 있으며, 또한 점등중에 물이나 수소를 방출하지 않는 양호한 방전램프에 관한 것으로서, 본 발명의 방전램프는 석영유리의 발광관내에 근접하여 한쌍의 전극을 배치하고, 수은과 희가스를 봉입한 방전램프에 있어서, 석영유리에는 OH기가 300~800중량ppm 함유되어 있는 것을 특징으로 한다.
또한, 석영유리의 금속불순물 함유량은 1중량ppm 이하인 것을 특징으로 한다.

Description

방전 램프
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 방전램프 실시예의 설명도.

Claims (4)

  1. 상기 석영유리의 발관관내에 근접하여 한쌍의 전극을 배치하고, 수은과 희가스를 봉입한 방전램프에 있어서, 상기 석영유리의 OH기 농도가 300~800중량ppm인 것을 특징으로 하는 방전램프.
  2. 상기 석영유리의 발광관내에서 근접하여 한쌍의 전극을 배치하고, 수은과 희가스를 봉입한 방전램프에 있어서, 상기 석영유리의 금속불순물 농도가 1중량ppm 이하인 것을 특징으로 하는 방전램프.
  3. 상기 석영유리의 발광관내에 근접하여 한쌍의 전극을 배치하고, 수은과 희가스를 봉입한 방전램프에 있어서, 상기 수은 봉입량은 발광관 내용적 1㎤당 14mg 내지 30mg으로 하고, 희가스는 크세논 혹은 크립톤을 사용해서 25℃ 기준에서 0.1×105Pa 내지 5×105Pa로 하는 것을 특징으로 하는 방전램프.
  4. 상기 석영유리의 발광관내에 근접하여 한쌍의 전극을 배치하고, 수은과 희가스를 봉입한 방전램프에 있어서, 상기 수은의 봉입량은 발광판 내용적 1㎤당 14mg 내지 30mg으로 하고, 희가스는 아르곤을 사용해서 25℃ 기준에서 0.03×105Pa 내지 5×105Pa로 하는 것을 특징으로 하는 방전램프.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950016285A 1994-06-21 1995-06-19 방전램프 KR100349800B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP94-160792 1994-06-21
JP6160791A JPH087835A (ja) 1994-06-21 1994-06-21 半導体露光用放電ランプ
JP94-160791 1994-06-21
JP6160792A JP2991933B2 (ja) 1994-06-21 1994-06-21 半導体露光用放電ランプ

Publications (2)

Publication Number Publication Date
KR960002462A true KR960002462A (ko) 1996-01-26
KR100349800B1 KR100349800B1 (ko) 2002-12-18

Family

ID=26487186

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950016285A KR100349800B1 (ko) 1994-06-21 1995-06-19 방전램프

Country Status (2)

Country Link
US (1) US5670844A (ko)
KR (1) KR100349800B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100407778B1 (ko) * 2000-11-09 2003-12-01 엘지전선 주식회사 광배향을 적용한 ｏｃｂ 모드 액정디스플레이 제조방법

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3216877B2 (ja) * 1997-11-18 2001-10-09 松下電子工業株式会社 高圧放電ランプ、この高圧放電ランプを光源とした照明光学装置、およびこの照明光学装置を用いた画像表示装置
US6368175B1 (en) * 1998-03-16 2002-04-09 Matsushita Electric Industrial Co., Ltd. Discharge lamp and method of producing the same
JP3346291B2 (ja) * 1998-07-31 2002-11-18 ウシオ電機株式会社 誘電体バリア放電ランプ、および照射装置
US7166963B2 (en) * 2004-09-10 2007-01-23 Axcelis Technologies, Inc. Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation
DE102013102600A1 (de) * 2013-03-14 2014-10-02 Heraeus Noblelight Gmbh Quecksilberdampfentladungslampe und Verfahren zu deren Herstellung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4156826A (en) * 1978-05-01 1979-05-29 Rca Corporation Mercury arc lamps
NL8000298A (nl) * 1980-01-17 1981-08-17 Philips Nv Lamp voorzien van een lampvat uit kwartsglas, kwartsglas en werkwijze voor het bereiden van kwartsglas.
JP2730001B2 (ja) * 1989-03-20 1998-03-25 ウシオ電機株式会社 半導体ウエハー露光方法と露光用水銀灯
JP2994125B2 (ja) * 1991-12-16 1999-12-27 ウシオ電機株式会社 メタルハライドランプ
JP2878520B2 (ja) * 1992-03-17 1999-04-05 株式会社小糸製作所 放電ランプ装置用アークチューブ
DE69409677T3 (de) * 1993-01-20 2001-09-20 Ushiodenki K.K., Tokio/Tokyo Entladungslampe mit dielektrischer Sperrschicht
EP0641015B1 (en) * 1993-08-03 1997-04-16 Ushiodenki Kabushiki Kaisha Cadmium discharge lamp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100407778B1 (ko) * 2000-11-09 2003-12-01 엘지전선 주식회사 광배향을 적용한 ｏｃｂ 모드 액정디스플레이 제조방법

Also Published As

Publication number Publication date
KR100349800B1 (ko) 2002-12-18
US5670844A (en) 1997-09-23

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