KR880009414A - 강자성체 자기 저항 소자 및 그 제조방법 - Google Patents
강자성체 자기 저항 소자 및 그 제조방법 Download PDFInfo
- Publication number
- KR880009414A KR880009414A KR1019880000020A KR880000020A KR880009414A KR 880009414 A KR880009414 A KR 880009414A KR 1019880000020 A KR1019880000020 A KR 1019880000020A KR 880000020 A KR880000020 A KR 880000020A KR 880009414 A KR880009414 A KR 880009414A
- Authority
- KR
- South Korea
- Prior art keywords
- wiring
- potato
- ferromagnetic
- magnetoresistive element
- straight line
- Prior art date
Links
- 230000005294 ferromagnetic effect Effects 0.000 title claims 8
- 238000004519 manufacturing process Methods 0.000 title 1
- 235000002595 Solanum tuberosum Nutrition 0.000 claims 9
- 244000061456 Solanum tuberosum Species 0.000 claims 9
- 239000004020 conductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 239000010408 film Substances 0.000 claims 2
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Hall/Mr Elements (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
Description
Claims (6)
- 강자성체의 자기 저항 소자에 있어서, 복수개의 새로로 향한 감자 소자의 각각이 강자성 효과를 갖는 강자성체의 필름으로 구성되고, 배선부가 상기 감자 소자의 상기 얇은 필름의 저항보다 더 낮은 시트 저항을 갖는 금속 필름으로 구성되며, 상기 배선부가 배선 접속부에서 상기 감자 소자의 각각에 연결되고 상기 접속부에서 상기 감자 소자의 각각의 양측상에 횡방향으로 폭이 넓어지는 것을 특징으로 하는 강자성체 자기 저항 소자.
- 제1항에 있어서, 상기 배선 접속부 근처의 상기 감자 소자의 각 부분의 상기 폭이 그 다른 부분의 폭보다 더 넓은 것을 특징으로 하는 강자성체 자기 저항 소자.
- 제1항에 있어서, 상기 배선 접속부의 각각이 가하학적으로 대칭인 모양을 가짐을 특징으로 하는 강자성체 자기 저항 소자.
- 제1항에 있어서, 상기 감자 소자 및 상기 배선부 사이의 그 경계에서 상기 접속부가 2개의 평행 직선상에 있는 1개의 직선 상에 놓여 있으며, 상기 감자 소자가 상기 배선부와 자동 배열 됨을 특징으로 하는 강자성체 자기 저항 소자.
- 제4항에 있어서, 상기 감자 소자 및 상기 배선부 사이의 그 경계에서 상기 접속부가 2개의 평행 직선상에 놓여 있으며, 상기 감자 소자가 상기 배선부와 자동 배열됨을 특징으로 하는 강자성체 자기 저항 소자.
- 기판 상에 개선된 자기 저항 소자를 형성시키는 방법으로, 그런 형식의 소자는 배선에 의하여 연결된 자기 저항 소자를 가지며, 다음의 단계, 기판 상에 직선을 따라 배열된 소자 접속부를 갖는 배선패턴 내 제1층의 도전성 재료를 형성시키는 단계, 기판 상에 직선을 따라 소정의 폭을 가지는 하나 이상의 배성 접속부를 가지는 소자패턴 내 제2층의 도전성 재료를 형성시키는 단계, 상기 제1층 형성단계가 상기 소정의 폭보다 더 큰 거리로 도전성 재료를 신장시키는 단계를 포함하는 방법에 있어서, 상기 제2층 형성 단계는 직선을 따라 소자 접속부 내 내포화 접촉이 되도록 직선을 따라 소자 접속부를 위치시키는 단계를 포함함으로 써 각 소자 접속부가 직선을 따라 각 접촉 배선 접속부의 양측 부분으로 신장됨을 특징으로 하는 강자성체 자기 저항 소자 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-1808 | 1987-01-09 | ||
JP62001808A JP2587822B2 (ja) | 1987-01-09 | 1987-01-09 | 強磁性体磁気抵抗素子 |
JP87-1808 | 1987-01-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880009414A true KR880009414A (ko) | 1988-09-15 |
KR910002314B1 KR910002314B1 (ko) | 1991-04-11 |
Family
ID=11511870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880000020A KR910002314B1 (ko) | 1987-01-09 | 1988-01-06 | 강자성체 자기 저항 소자 및 그 제조 방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US4835510A (ko) |
JP (1) | JP2587822B2 (ko) |
KR (1) | KR910002314B1 (ko) |
DE (1) | DE3800243A1 (ko) |
FR (1) | FR2609576B1 (ko) |
NL (1) | NL192232C (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02231586A (ja) * | 1989-03-06 | 1990-09-13 | Japan Servo Co Ltd | 磁気センサ |
US5155643A (en) * | 1990-10-30 | 1992-10-13 | Mars Incorporated | Unshielded horizontal magnetoresistive head and method of fabricating same |
JP2581421Y2 (ja) * | 1991-06-17 | 1998-09-21 | 株式会社村田製作所 | 磁気センサ |
US5617071A (en) * | 1992-11-16 | 1997-04-01 | Nonvolatile Electronics, Incorporated | Magnetoresistive structure comprising ferromagnetic thin films and intermediate alloy layer having magnetic concentrator and shielding permeable masses |
DE4436876A1 (de) * | 1994-10-15 | 1996-04-18 | Lust Antriebstechnik Gmbh | Sensorchip |
US5784772A (en) * | 1995-12-21 | 1998-07-28 | Storage Technology Corporation | Method of simultaneously forming MR sensors in a dual element MR head |
DE19608730C2 (de) * | 1996-03-06 | 1998-05-28 | Siemens Ag | Magnetfeldempfindlicher Sensor mit einem Dünnschichtaufbau und Verwendung des Sensors |
US20050260331A1 (en) * | 2002-01-22 | 2005-11-24 | Xingwu Wang | Process for coating a substrate |
JP2009194143A (ja) * | 2008-02-14 | 2009-08-27 | Elpida Memory Inc | 半導体装置 |
JP2012173206A (ja) * | 2011-02-23 | 2012-09-10 | Yamanashi Nippon Denki Kk | 磁気センサ及びその製造方法 |
CN103954927B (zh) * | 2014-05-21 | 2016-03-23 | 常州天合光能有限公司 | 体积电阻与方块电阻转换校准装置及其校准方法 |
EP4117034A4 (en) * | 2020-03-05 | 2023-11-22 | TDK Corporation | MAGNETIC RECORDING ARRAY, NEUROMORPHIC DEVICE AND CONTROL METHOD FOR MAGNETIC RECORDING ARRAY |
JP7173104B2 (ja) | 2020-07-21 | 2022-11-16 | Tdk株式会社 | 磁気センサ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56172901U (ko) * | 1980-05-23 | 1981-12-21 | ||
JPS57171219A (en) * | 1981-04-14 | 1982-10-21 | Ishida Scales Mfg Co Ltd | Computer scale |
CA1209260A (en) * | 1982-10-29 | 1986-08-05 | Tetsuo Sekiya | Magnetic transducer head using magnetroresistance effect |
DE3583870D1 (de) * | 1984-01-25 | 1991-10-02 | Matsushita Electric Ind Co Ltd | Magnetmessaufnehmer. |
JPS60194557A (ja) * | 1984-03-16 | 1985-10-03 | Nec Corp | 混成集積回路 |
JPS6122677A (ja) * | 1984-07-10 | 1986-01-31 | Sanyo Electric Co Ltd | 磁気センサの製造方法 |
JPH0728060B2 (ja) * | 1984-07-18 | 1995-03-29 | 株式会社日立製作所 | 磁気低抗素子 |
JPS6218077A (ja) * | 1985-07-16 | 1987-01-27 | Dai Ichi Seiko Co Ltd | 磁気抵抗素子 |
-
1987
- 1987-01-09 JP JP62001808A patent/JP2587822B2/ja not_active Expired - Lifetime
- 1987-12-30 US US07/139,843 patent/US4835510A/en not_active Expired - Lifetime
-
1988
- 1988-01-06 KR KR1019880000020A patent/KR910002314B1/ko not_active IP Right Cessation
- 1988-01-07 FR FR8800092A patent/FR2609576B1/fr not_active Expired - Fee Related
- 1988-01-07 DE DE3800243A patent/DE3800243A1/de active Granted
- 1988-01-08 NL NL8800046A patent/NL192232C/nl not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NL192232B (nl) | 1996-11-01 |
FR2609576B1 (fr) | 1994-07-08 |
NL192232C (nl) | 1997-03-04 |
DE3800243C2 (ko) | 1993-07-29 |
NL8800046A (nl) | 1988-08-01 |
JP2587822B2 (ja) | 1997-03-05 |
FR2609576A1 (fr) | 1988-07-15 |
JPS63170981A (ja) | 1988-07-14 |
KR910002314B1 (ko) | 1991-04-11 |
US4835510A (en) | 1989-05-30 |
DE3800243A1 (de) | 1988-07-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR880009414A (ko) | 강자성체 자기 저항 소자 및 그 제조방법 | |
KR900005576A (ko) | 반도체 집적회로 장치 | |
KR960705328A (ko) | Pct 저항 소자를 포함하는 전기 어셈블리(electrical assembly comprising a ptc resistive element) | |
KR910007096A (ko) | Tab 테이프와 반도체 칩을 접속하는 방법 및 그것에 사용하는 범프시이트와 범프부착 tab 테이프 | |
KR890013786A (ko) | 비정질 실리콘 박막 트랜지스터 어레이 기판 및 그 제조방법 | |
KR910010163A (ko) | 저항 온도 센서 | |
KR920008899A (ko) | 집적회로다이 | |
KR900004014A (ko) | 게이트 어레이 | |
KR920005341A (ko) | 반도체 기억장치 | |
KR890011101A (ko) | 래터럴 트랜지스터를 구비한 집적 회로 | |
JPH0424983A (ja) | 屈曲用フレキシブルプリント基板 | |
KR900002321A (ko) | 고저항층을 가지는 반도체장치 | |
JPH0334348A (ja) | セル構造電力用半導体装置 | |
KR890015403A (ko) | 반도체집적회로장치 | |
KR880001054A (ko) | 저항성 회로망 | |
DE3672627D1 (de) | Integrierte halbleiterschaltung mit zwei epitaxieschichten aus verschiedenen leitungstypen. | |
KR910007131A (ko) | 마스터 슬라이스 집적 회로 장치 | |
KR920021973A (ko) | 유동 측정 소자 | |
JPS57201062A (en) | Semiconductor device | |
KR910016072A (ko) | 반도체장치 | |
KR870005449A (ko) | 집적 회로 칩 | |
KR910015030A (ko) | 필름 실장형 반도체 장치 | |
KR940010302A (ko) | 반도체 접속장치 | |
KR920010820A (ko) | 반도체 소자의 접속장치 및 그 제조방법 | |
JPS584193Y2 (ja) | 多層配線装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19880106 |
|
PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19880106 Comment text: Request for Examination of Application |
|
PG1501 | Laying open of application | ||
G160 | Decision to publish patent application | ||
PG1605 | Publication of application before grant of patent |
Comment text: Decision on Publication of Application Patent event code: PG16051S01I Patent event date: 19910314 |
|
E701 | Decision to grant or registration of patent right | ||
PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 19910706 |
|
GRNT | Written decision to grant | ||
PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 19910824 Patent event code: PR07011E01D |
|
PR1002 | Payment of registration fee |
Payment date: 19910824 End annual number: 3 Start annual number: 1 |
|
PR1001 | Payment of annual fee |
Payment date: 19940407 Start annual number: 4 End annual number: 4 |
|
PR1001 | Payment of annual fee |
Payment date: 19950406 Start annual number: 5 End annual number: 5 |
|
PR1001 | Payment of annual fee |
Payment date: 19960327 Start annual number: 6 End annual number: 6 |
|
PR1001 | Payment of annual fee |
Payment date: 19970401 Start annual number: 7 End annual number: 7 |
|
PR1001 | Payment of annual fee |
Payment date: 19980331 Start annual number: 8 End annual number: 8 |
|
PR1001 | Payment of annual fee |
Payment date: 19990330 Start annual number: 9 End annual number: 9 |
|
PR1001 | Payment of annual fee |
Payment date: 20000408 Start annual number: 10 End annual number: 10 |
|
PR1001 | Payment of annual fee |
Payment date: 20010404 Start annual number: 11 End annual number: 11 |
|
PR1001 | Payment of annual fee |
Payment date: 20020403 Start annual number: 12 End annual number: 12 |
|
PR1001 | Payment of annual fee |
Payment date: 20030410 Start annual number: 13 End annual number: 13 |
|
PR1001 | Payment of annual fee |
Payment date: 20040323 Start annual number: 14 End annual number: 14 |
|
PR1001 | Payment of annual fee |
Payment date: 20050408 Start annual number: 15 End annual number: 15 |
|
PR1001 | Payment of annual fee |
Payment date: 20060410 Start annual number: 16 End annual number: 16 |
|
FPAY | Annual fee payment |
Payment date: 20070411 Year of fee payment: 17 |
|
PR1001 | Payment of annual fee |
Payment date: 20070411 Start annual number: 17 End annual number: 17 |
|
EXPY | Expiration of term | ||
PC1801 | Expiration of term |