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KR20080018111A - Coating device - Google Patents

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Publication number
KR20080018111A
KR20080018111A KR1020070083178A KR20070083178A KR20080018111A KR 20080018111 A KR20080018111 A KR 20080018111A KR 1020070083178 A KR1020070083178 A KR 1020070083178A KR 20070083178 A KR20070083178 A KR 20070083178A KR 20080018111 A KR20080018111 A KR 20080018111A
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South Korea
Prior art keywords
slit nozzle
center
traveling body
coating
travel body
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KR1020070083178A
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Korean (ko)
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KR100900383B1 (en
Inventor
요시아키 마스
히데노리 미야모토
겐지 요시자와
야스히로 소네
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도쿄 오카 고교 가부시키가이샤
다즈모 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)

Abstract

A coater is provided to inhibit pitching when a travel body travels horizontally along a rail during the coating process of a slit nozzle, thereby improving the stability of coating. A coater comprises a travel body(3) which can move along the both sides of a substrate-loaded stage(2); and a slit nozzle(10) which is maintained at the travel body so as to go up and come down, wherein a drive device(11) for ascending or descending the slit nozzle is mounted on the travel body, and the center(G1) of the drive device is lower than the center(G2) of the slit nozzle. Preferably the travel body is installed independently at the both sides of the substrate-loaded stage, and the each travel body is provided with a drive device.

Description

도포장치{Coating apparatus}Coating apparatus

본 발명은 유리기판 등의 기판표면에 도포액을 도포하는 도포장치에 관한 것이다.The present invention relates to a coating apparatus for applying a coating liquid to a substrate surface such as a glass substrate.

유리기판에 피막을 형성하기 위해서는 피막형성용 도포액을 도포하고, 이를 건조(베이크)하여 피막으로 하고 있다. 이를 위한 도포장치로서 특허문헌 1~6에 개시되는 것이 알려져 있다.In order to form a film on a glass substrate, the coating liquid for film formation is apply | coated, it is dried (baked), and it is set as a film. It is known that it is disclosed by patent documents 1-6 as a coating apparatus for this.

특허문헌 1에 개시되는 도포장치는 기대(基台)의 양쪽에 레일을 설치하고, 이들 레일에 이동대(移動台)를 취부하며, 이 이동대에 승강 실린더를 매개로 하여 슬릿 노즐을 취부(取付)하고 있다.In the coating device disclosed in Patent Document 1, rails are provided on both sides of a base, and moving rails are attached to these rails, and a slit nozzle is attached to the moving rails via a lifting cylinder.取 付).

특허문헌 2에 개시되는 도포장치는 유리기판을 재치(載置)하는 스테이지에 대해 스테이지를 아래로부터 걸치듯이 위쪽이 개방된 コ자상 프레임을 배치하고, 이 コ자상 프레임의 상단(上端) 사이에 슬릿 노즐을 취부하고 있다. 이 선행기술에 있어서는 슬릿 노즐을 승강하는 기구는 나타내어져 있지 않다.The coating device disclosed in Patent Literature 2 arranges a U-shaped frame whose top is opened as if the stage is mounted from the bottom with respect to the stage on which the glass substrate is placed, and a slit between the upper ends of the U-shaped frame. The nozzle is mounted. In this prior art, the mechanism for elevating the slit nozzle is not shown.

특허문헌 3에 개시되는 도포장치는 유리기판을 재치하는 베이스의 양쪽에 레일을 설치하고, 이들 레일에 문형(門型)을 이루는 지주(支柱)를 주행 가능하게 계 합(係合;걸어 맞춤)하며, 이 지주의 상부 중앙에 설치한 승강부에 대(슬릿 노즐)를 취부하고 있다.In the coating apparatus disclosed in Patent Document 3, rails are provided on both sides of a base on which glass substrates are placed, and the rails are formed to engage the rails so as to be able to travel. And a mount (slit nozzle) is attached to the lifting part provided in the upper center of this support | pillar.

특허문헌 4에 개시되는 도포장치는 특허문헌 3과 동일한 구성이지만, 문형을 이루는 지지부재에 고정부재를 매개로 하여 슬릿 노즐이 취부되고, 슬릿 노즐을 승강하는 기구는 나타내어져 있지 않다.Although the coating apparatus disclosed by patent document 4 is the same structure as patent document 3, the slit nozzle is attached to the support member which forms a door shape through the fixing member, and the mechanism which raises and lowers a slit nozzle is not shown.

특허문헌 5에 개시되는 도포장치는 볼나사에 의해서 이동하는 스테이지의 위쪽에 슬릿 노즐을 2개 배설(配設)하고, 상기 스테이지의 상면(上面)에 2장의 유리기판을 이간하여 재치하며, 상기 2개의 슬릿 노즐을 사용하여 2장의 유리기판의 각각에 동시에 도포함으로써, 1개의 슬릿 노즐로 도포하는 경우에 비교하여 시간을 단축하도록 하고 있다.In the coating device disclosed in Patent Document 5, two slit nozzles are disposed on the upper side of the stage moved by the ball screw, and two glass substrates are placed on the upper surface of the stage, and placed thereon. By applying two slit nozzles to each of two glass substrates at the same time, the time is shortened as compared with the case of applying with one slit nozzle.

특허문헌 6에 개시되는 도포장치는 한쌍의 레일 사이에 기판 재치 스테이지를 배치하고, 한쌍의 레일 사이에 문형 이동기구를 가설(架設)하며, 이 문형 이동기구에 Z축(상하방향) 모터에 의해서 승강하는 슬릿 노즐을 취부하고 있다.The coating apparatus disclosed in patent document 6 arrange | positions a board | substrate mounting stage between a pair of rails, hypothesizes a door-shaped moving mechanism between a pair of rails, and this door-shaped moving mechanism is moved by a Z-axis (up-down direction) motor. The slit nozzle which moves up and down is attached.

[특허문헌 1] 일본국 특허공개 제2003-236435호 공보[Patent Document 1] Japanese Patent Laid-Open No. 2003-236435

[특허문헌 2] 일본국 특허공개 제(평)11-162815호 공보[Patent Document 2] Japanese Patent Application Laid-Open No. 11-162815

[특허문헌 3] 일본국 특허공개 제2002-102771호 공보[Patent Document 3] Japanese Patent Publication No. 2002-102771

[특허문헌 4] 일본국 특허공개 제2004-298775호 공보[Patent Document 4] Japanese Patent Application Laid-Open No. 2004-298775

[특허문헌 5] 일본국 특허공개 제(평)10-216599호 공보[Patent Document 5] Japanese Patent Application Laid-Open No. 10-216599

[특허문헌 6] 일본국 특허공개 제2002-140982호 공보[Patent Document 6] Japanese Patent Publication No. 2002-140982

특허문헌 1~6의 선행문헌 중, 슬릿 노즐을 승강하는 기구를 갖는 선행문헌에 있어서는 모두 승강기구를 구성하는 모터 또는 실리더의 중심이 슬릿 노즐의 중심 보다도 위쪽에 위치해 있다. 이 때문에, 슬릿 노즐이 수평방향으로 주행할 때, 문형 이동기구 등의 중심위치가 높아져 피칭 움직임을 발생시키고, 도포가 불안정해지며, 균일한 막두께가 얻어지지 않는다고 하는 문제가 있다.In the prior documents of Patent Documents 1 to 6, in the prior documents having a mechanism for lifting and lifting the slit nozzle, the centers of the motors or cylinders constituting the lifting mechanism are located above the center of the slit nozzle. For this reason, when the slit nozzle travels in the horizontal direction, there is a problem that the center position of the door-shaped moving mechanism or the like is increased to cause pitching movement, coating becomes unstable, and uniform film thickness is not obtained.

상기 과제를 해결하기 위해 본 발명은 기판 재치 스테이지의 양쪽을 따라서 이동 가능하게 주행체를 설치하고, 이 주행체에 슬릿 노즐이 승강 가능하게 유지된 도포장치로서, 상기 주행체에는 상기 슬릿 노즐을 승강시키는 구동장치가 취부되고, 이 구동장치의 중심은 슬릿 노즐의 중심 보다도 낮게 설정된 구성으로 하였다.MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention is the coating apparatus which provided the traveling body so that it can move along both sides of a board | substrate mounting stage, and the slit nozzle was hold | maintained so that the traveling body could be lifted, The said moving body raises and lowers the said slit nozzle. A drive device to be mounted is mounted, and the center of the drive device is set to be lower than the center of the slit nozzle.

상기 주행체로서는 문형이어도 되지만, 문형인 경우 중량이 커지기 때문에 각 레일에 주행체를 취부하고, 이들 주행체 사이에 슬릿 노즐을 승강 가능하게 지지하는 구성이 바람직하다. 이 경우, 한쪽의 주행체에만 구동장치를 설치하면 승강시에 슬릿 노즐에 변형이 발생하기 쉬워지기 때문에, 각각의 주행체에 모터 또는 실린더 유닛으로 되는 구동장치를 설치하는 것이 바람직하다.The door may be of a door type, but in the case of a door shape, a weight is increased, and therefore, a structure in which a traveling body is attached to each rail and a slit nozzle is supported between the traveling bodies in such a manner as to be capable of lifting and lowering is preferable. In this case, if the drive device is provided only on one traveling body, deformation is likely to occur in the slit nozzle during lifting, and therefore, it is preferable to provide a driving device that is a motor or a cylinder unit in each of the traveling bodies.

본 발명에 의하면, 주행체와 함께 슬릿 노즐이 주행할 때 중심을 낮게 유지할 수 있기 때문에, 피칭의 발생을 억제할 수 있고, 안정된 도포를 행할 수 있다.According to the present invention, since the center can be kept low when the slit nozzle travels together with the traveling body, occurrence of pitching can be suppressed and stable coating can be performed.

이하에 본 발명의 실시형태를 첨부 도면을 토대로 설명한다. 도 1은 본 발명의 도포장치의 측면도이고, 도 2는 도 1의 주요부 평면도이며, 도 3은 구동장치의 확대도이고, 도 4는 도 3의 A방향 화살표에서 본 도면이며, 도 5는 도 3의 B방향 화살표에서 본 도면이다.EMBODIMENT OF THE INVENTION Below, embodiment of this invention is described based on an accompanying drawing. Figure 1 is a side view of the coating device of the present invention, Figure 2 is a plan view of the main part of Figure 1, Figure 3 is an enlarged view of the driving device, Figure 4 is a view seen from the arrow A in Figure 3, Figure 5 is a view It is the figure seen from arrow B of FIG.

도포장치는 기대(1) 상에 기판(W)을 재치하는 스테이지(2)가 고정되고, 이 스테이지(2)의 양쪽을 따라서 주행체(3, 3)가 수평방향(도 1의 지면(紙面) 수직방향)으로 이동 가능하게 배치되어 있다.As for the coating apparatus, the stage 2 which mounts the board | substrate W on the base 1 is fixed, and the traveling body 3, 3 along both sides of this stage 2 is horizontal direction (the surface of FIG. 1). Are arranged to be movable in the vertical direction).

본 실시예에 있어서는 주행체(3)는 리니어 모터로 주행한다. 즉, 스테이지(2)의 측면 프레임에 레일(4, 4)을 설치하고, 이 레일(4)에 주행체(3)의 가이드(5)를 계합하며, 또한 리니어 모터의 고정자(6)를 상기 레일(4)에 평행하게 배치하고, 이 고정자(6)와 소정의 간격을 유지하는 리니어 모터의 가동자(7)를 주행체(3)에 취부하며, 또한 에어패드에 의해서 상기 레일(4)과 가이드(5) 사이에 일정의 간극을 형성하고 있다.In this embodiment, the traveling body 3 runs with a linear motor. That is, the rails 4 and 4 are provided in the side frame of the stage 2, and the guide 5 of the traveling body 3 is engaged with this rail 4, and the stator 6 of the linear motor is mentioned above. Arranged in parallel with the rail 4, the movable body 7 of the linear motor which maintains a predetermined distance from this stator 6 is attached to the traveling body 3, and the said rail 4 is carried out by an air pad. And a certain gap is formed between the guide 5 and the guide 5.

주행체(3)의 상부에는 상하방향의 가이드 레일(8)을 설치하고, 이 가이드 레일(8)에 지지체(9)를 승강 움직임 자유자재로 계합하며, 좌우의 지지체(9, 9) 사이에 슬릿 노즐(10)을 취부하고 있다.A guide rail 8 in the up and down direction is provided on the upper part of the traveling body 3, and the support body 9 is freely engaged with the guide rail 8 in a lifting movement, and between the left and right support bodies 9 and 9. The slit nozzle 10 is attached.

또한, 각 주행체(3)에는 지지체(9)를 승강 움직임을 하게 하는 구동장치(11)가 취부되어 있다. 구동장치(11)는 주행체(3)의 측면에 고정되는 모터(12), 이 모터(12)로 회전되는 스크류 샤프트(13), 이 스크류 샤프트(13)에 계합되는 동시에 스크류 샤프트(13)의 회전에 따라서 상하로 나진(螺進)하는 너트부재(14)를 구비하고 있다. 그리고, 상기 너트부재(14)의 일부가 상기 지지체(9)에 취부되고, 너트부재(14)가 상하로 나진함으로써 지지체(9) 및 슬릿 노즐(10)이 승강 움직임을 한다.In addition, each driving body 3 is provided with a drive device 11 for causing the support body 9 to move up and down. The drive unit 11 engages with the motor 12 fixed to the side of the traveling body 3, the screw shaft 13 rotated by the motor 12, the screw shaft 13, and at the same time the screw shaft 13. The nut member 14 which oscillates up and down according to the rotation of is provided. A portion of the nut member 14 is attached to the support 9, and the support member 9 and the slit nozzle 10 move up and down by the nut member 14 extending upward and downward.

또한, 지지체(9)의 승강 움직임의 상한 및 하한은 도 4에 나타내는 바와 같이, 너트부재(14)에 취부한 조작편(14a)이 좌우 한쪽의 가이드 레일(8)에 취부한 리미트 스위치(8a, 8b)에 맞닿음으로써 결정된다.In addition, as shown in FIG. 4, the upper limit and the lower limit of the raising / lowering movement of the support body 9 are the limit switch 8a which the operation piece 14a attached to the nut member 14 attached to the left and right guide rails 8, respectively. , 8b).

여기에서, 구동장치(11)를 구성하는 부재 중, 가장 중량이 무거운 것은 모터(12)로서, 이 모터(12)가 상기 슬릿 노즐(10) 보다도 낮은 위치에 설치되어 있다. 그 결과, 구동장치(11)의 중심(G1)은 슬릿 노즐(10)(정확하게는 슬릿 노즐(10)과 지지체(9))의 중심(G2) 보다도 낮은 위치가 된다.Here, among the members constituting the drive device 11, the heaviest weight is the motor 12, and the motor 12 is provided at a position lower than that of the slit nozzle 10. FIG. As a result, the center G1 of the drive device 11 becomes a position lower than the center G2 of the slit nozzle 10 (exactly, the slit nozzle 10 and the support body 9).

이상에 있어서, 스테이지(2) 상에 재치한 유리기판(W)에 도포액을 도포하기 위해서는, 구동장치(11)에 의해서 슬릿 노즐(10) 하단(下端)과 유리기판(W) 상면의 간격이 소정값이 될 때까지 슬릿 노즐(10)을 하강시키고, 이어서 슬릿 노즐(10)로부터 기판(W) 표면에 도포액을 토출하면서 리니어 모터에 의해서 좌우의 주행체(3, 3)를 동기(同期)하여 주행시키고, 이것에 의해 기판(W) 표면에 균일한 두께의 도막을 형성한다.In the above, in order to apply the coating liquid to the glass substrate W placed on the stage 2, the distance between the lower end of the slit nozzle 10 and the upper surface of the glass substrate W by the drive device 11. The slit nozzle 10 is lowered until the predetermined value is reached, and then the left and right traveling bodies 3 and 3 are synchronized with the linear motor while discharging the coating liquid from the slit nozzle 10 to the surface of the substrate W. At the same time, the substrate is made to run, whereby a coating film having a uniform thickness is formed on the substrate W surface.

이 때, 구동장치(11)의 중심(G1)은 슬릿 노즐(10)의 중심(G2) 보다도 낮은 위치에 있기 때문에, 주행체(3)가 레일(4, 4)을 따라서 수평방향으로 주행할 때에 발생하는 피칭 움직임(상하 움직임)이 억제된다.At this time, since the center G1 of the drive device 11 is at a position lower than the center G2 of the slit nozzle 10, the traveling body 3 can travel in the horizontal direction along the rails 4, 4. Pitching movements (up and down movements) occurring at the time are suppressed.

실시예에서는 스테이지(2)의 양쪽에 각각 독립하여 주행체(3, 3)를 배치하였 지만, 주행체의 형상을 문형으로 하여 1개의 주행체로 해도 된다. 또한, 이 경우에도 리니어 모터는 양쪽에 설치하는 것이 문형의 주행체에 변형을 발생시키지 않게 하기 위해서 필요하다.In the embodiment, the traveling bodies 3, 3 are arranged independently on both sides of the stage 2, but the traveling body may be formed into a door shape, and may be one traveling body. Also in this case, the linear motors are required to be provided on both sides so as not to cause deformation in the door-shaped traveling body.

본 발명의 도포장치는 각종 디스플레이장치에 삽입하는 유리기판에 도막을 형성하기 위한 도포장치로서 이용할 수 있다.The coating device of the present invention can be used as a coating device for forming a coating film on a glass substrate to be inserted into various display devices.

도 1은 본 발명의 도포장치의 측면도이다.1 is a side view of the coating apparatus of the present invention.

도 2는 도 1의 주요부 평면도이다.FIG. 2 is a plan view of main parts of FIG. 1. FIG.

도 3은 구동장치의 확대도이다.3 is an enlarged view of the driving device.

도 4는 도 3의 A방향 화살표에서 본 도면이다.4 is a view seen from the arrow A in FIG.

도 5는 도 3의 B방향 화살표에서 본 도면이다.FIG. 5 is a view seen from the arrow B in FIG. 3.

부호의 설명Explanation of the sign

1…기대(基台), 2…스테이지, 3…주행체(走行體), 4…레일, 5…가이드, 6…리니어 모터의 고정자(固定子), 7…리니어 모터의 가동자(可動子), 8…상하방향의 가이드 레일, 8a, 8b…리미트 스위치, 9…지지체, 10…슬릿 노즐, 11…구동장치, 12…모터, 13…스크류 샤프트, 14…너트부재, 14a…조작편, G1…구동장치의 중심, G2…슬릿 노즐의 중심, W…기판. One… Expectation, 2... Stage, 3... Driving body, 4... Rail, 5.. Guide, 6... Stator of linear motor, 7.. Mover of linear motor, 8... Up and down guide rails, 8a, 8b... Limit switch, 9.. Support 10... Slit nozzle, 11... Drive, 12.. Motor, 13... Screw shaft, 14... Nut member 14a... Operation piece, G1.. Center of drive, G2... Center of slit nozzle, W... Board.

Claims (2)

기판 재치 스테이지의 양쪽을 따라서 이동 가능하게 주행체를 설치하고, 이 주행체에 슬릿 노즐이 승강 가능하게 유지된 도포장치로서, 상기 주행체에는 상기 슬릿 노즐을 승강시키는 구동장치가 취부되고, 이 구동장치의 중심은 슬릿 노즐의 중심 보다도 낮게 설정되어 있는 것을 특징으로 하는 도포장치.A coating device in which a traveling body is provided to be movable along both sides of the substrate placing stage, and the slit nozzle is held on the traveling body so that the slit nozzle can be lifted and lowered. And the center of the apparatus is set lower than the center of the slit nozzle. 제1항의 도포장치에 있어서, 상기 주행체는 기판 재치 스테이지의 양쪽에 각각 독립하여 설치되고, 각 주행체마다 구동장치가 설치되어 있는 것을 특징으로 하는 도포장치.The coating device according to claim 1, wherein the traveling body is provided independently on both sides of the substrate placing stage, and a driving device is provided for each traveling body.
KR1020070083178A 2006-08-22 2007-08-20 Coating device Active KR100900383B1 (en)

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KR101327144B1 (en) * 2011-10-04 2013-11-13 주식회사 케이씨텍 Substrate coating apparatus
KR20150039902A (en) * 2013-10-04 2015-04-14 주식회사 케이씨텍 Substrate coater

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CN106111011B (en) * 2016-06-24 2018-07-03 常州一步干燥设备有限公司 Sealing container with nozzle height apparatus for adjusting position

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JP2003243286A (en) 2002-02-14 2003-08-29 Dainippon Screen Mfg Co Ltd Substrate processing apparatus
JP3965312B2 (en) 2002-03-20 2007-08-29 アドバンスト・カラーテック株式会社 Single substrate manufacturing equipment
JP4316275B2 (en) * 2003-03-31 2009-08-19 大日本印刷株式会社 Coating device
KR100659486B1 (en) * 2003-07-18 2006-12-20 스미도모쥬기가이고교 가부시키가이샤 Stage apparatus for table coater
JP2005052822A (en) * 2003-07-18 2005-03-03 Sumitomo Heavy Ind Ltd Stage apparatus for table coater

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101327144B1 (en) * 2011-10-04 2013-11-13 주식회사 케이씨텍 Substrate coating apparatus
KR20150039902A (en) * 2013-10-04 2015-04-14 주식회사 케이씨텍 Substrate coater

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CN101130184B (en) 2013-03-20
CN101130184A (en) 2008-02-27

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