JP5413727B2 - Coating apparatus and coating method - Google Patents

Description

  The present invention relates to a coating apparatus and a coating method for coating a coating solution on a single-wafer type substrate such as a glass substrate or a plastic substrate.

  2. Description of the Related Art Conventionally, various types of coating apparatuses are known as coating apparatuses that apply a coating solution to a single-wafer type substrate such as a glass substrate or a plastic substrate.

  A conventional coating apparatus will be described with reference to FIGS. FIG. 10 is a perspective view showing an outline of the configuration of a conventional coating apparatus, and FIG. 11 is a front view of the coating apparatus shown in FIG. FIG. 12 is a graph showing the relationship between the time from the start of moving the gantry and the relative speed of the die head with respect to the mounting table in the coating apparatus shown in FIG.

  First, the structure of the conventional coating apparatus 70 is demonstrated using FIG. 10 and FIG. As shown in FIGS. 10 and 11, the conventional coating apparatus 70 includes a base 71 and a mounting table 72 fixed to the base 71. On the mounting table 72, a single-wafer type substrate S such as a glass substrate or a plastic substrate is mounted. The coating apparatus 70 is provided with a die head 90 that discharges the coating liquid onto the substrate S placed on the mounting table 72, and the die head 90 is supported by the gantry 80. The gantry 80 is provided on the mounting table 72 and moves linearly along the longitudinal direction of the mounting table 72 (the left-right direction in FIGS. 10 and 11).

  A discharge port 90a is provided at the lower end of the die head 90, and the coating liquid is discharged downward from the discharge port 90a. Further, a hollow portion 90b is provided inside the die head 90, and the coating liquid is accommodated in the hollow portion 90b. The coating liquid accommodated in the hollow portion 90b is discharged downward from the discharge port 90a. Further, as shown in FIG. 11, the coating liquid is supplied to the hollow portion 90 b of the die head 90 from the coating liquid supply source 92 by the supply pump 94. The coating liquid supply source 92 and the supply pump 94 constitute a coating liquid supply unit for supplying the coating liquid to the die head 90.

  Next, the operation of the conventional coating apparatus 70 as described above, that is, a coating method for coating the substrate S with a coating solution will be described below.

  First, the substrate S is mounted on the mounting table 72. At this time, the gantry 80 is moved to a predetermined position (initial position) in advance so that the discharge port 90a of the die head 90 is positioned in the vicinity of one end of the substrate S.

  Next, the gantry 80 is moved in the right direction in FIGS. At this time, the coating liquid is discharged onto the substrate S from the discharge port 90 a of the die head 90. As a result, the coating liquid is applied to the substrate S. When the discharge port 90a of the die head 90 approaches the vicinity of the other end of the substrate S, the gantry 80 is stopped. At this time, the discharge of the coating liquid from the discharge port 90a of the die head 90 to the substrate S is also stopped. In this way, the coating liquid is applied to the substrate S placed on the mounting table 72.

In the conventional coating apparatus 70, as shown in FIG. 12, it takes a certain time until the speed of the gantry 80 reaches a predetermined size (coating liquid coating speed) after the gantry 80 starts to move. . That is, the speed of the gantry 80 becomes smaller than a predetermined size until the time t ₁ elapses after the gantry 80 starts to move, and during this time, the film thickness of the coating liquid applied to the substrate S from the die head 90 is reached. Variation will occur. Thus, in the conventional coating apparatus 70, it is difficult to control the film thickness on the substrate S until the speed of the gantry 80 reaches a predetermined size, and the film thickness of the coating solution on the substrate S seems to be substantially uniform. There is a problem that the effective application area becomes narrow. Note that the effective coating area refers to a region where the coating liquid is applied to the substrate S during the time t ₁ in FIG. 12 to time t _2.

  In order to solve such a problem, for example, in Patent Document 1, a plurality of substrates are arranged in series on a mounting table so as to be adjacent to each other, and a coating solution is continuously supplied to the plurality of substrates arranged in series. Such an apparatus is disclosed. Patent Documents 2 and 3 disclose a method of controlling the amount of the coating liquid sent to the die head with a pump or the like when starting to discharge the coating liquid from the die head. However, even with the methods disclosed in these patent documents, there is a problem that the process must be changed due to a change in the type of coating liquid, and the thickness of the coating liquid on the substrate is substantially uniform. It was difficult to widen the effective application area.

JP 2004-25003 A JP-A-8-229497 JP 2000-157908 A

  The present invention has been made in consideration of such points, and the relative speed of the coating unit with respect to the mounting table is predetermined after the coating unit starts to move relative to the mounting table on which the substrate is mounted. The coating apparatus and coating which can shorten the time required to reach the size of the coating liquid (coating liquid coating speed) and can relatively increase the effective coating area where the film thickness of the coating liquid on the substrate is substantially uniform Provide a method.

  The present invention is a coating apparatus that applies a coating solution to a substrate, and is applied to a base, a mounting base fixed on the base and on which the substrate is placed, and a substrate placed on the mounting base. An application part that discharges the liquid, a coating part support mechanism that moves linearly along the longitudinal direction of the mounting table, supports the application part, and is provided in the application part support mechanism. A sliding mechanism for sliding the coating part in the moving direction of the coating part support mechanism with respect to the coating part support mechanism, and a sliding mechanism for the coating part support mechanism and the sliding mechanism. A control unit that performs control, and the control unit supplies the coating liquid to the substrate by supplying the coating liquid from the coating unit to the substrate placed on the mounting table while moving the coating unit support mechanism. Start to move the applicator support mechanism In this case, the application unit support mechanism is moved until the relative speed of the application unit with respect to the mounting table reaches a predetermined size, and the application unit is applied to the application unit support mechanism by the sliding mechanism. A coating apparatus that controls to slide in the moving direction of the part support mechanism.

  According to such a coating apparatus, the sliding unit for sliding the coating unit in the moving direction of the coating unit support mechanism is provided with respect to the coating unit support mechanism, and the control unit controls the coating unit support mechanism. When starting to move, the application unit support mechanism is moved until the relative speed of the application unit with respect to the mounting table reaches a predetermined size, and the application unit is moved to the application unit support mechanism by the sliding mechanism. Control is made to slide in the moving direction. As a result, when the application unit support mechanism starts to move, the application unit support mechanism is moved in the application direction, and the application unit is applied by sliding the application unit in the application direction with respect to the application unit support mechanism. Since the acceleration of the coating unit with respect to the mounting table increases substantially, the time required until the relative speed of the coating unit with respect to the mounting table reaches a predetermined speed is relatively short. Become. For this reason, the region where the coating liquid is applied to the substrate (that is, the thickness of the coating liquid) until the relative speed of the coating section with respect to the mounting table reaches a predetermined speed (coating speed) after the movement of the coating section support mechanism is started. The region where there is variation) is relatively small, and the effective application region where the film thickness of the coating solution on the substrate is substantially uniform can be made relatively large.

  In the coating apparatus as described above, the coating unit is connected to a coating solution supply unit that supplies the coating solution to the coating unit, and the coating solution supply unit is controlled by the control unit. When the control unit starts to move the coating unit support mechanism, the control unit supplies the coating unit with the coating liquid supply unit until the relative speed of the coating unit with respect to the mounting table reaches a predetermined size. The coating liquid supply unit may be controlled so as to keep increasing the amount of coating liquid to be applied.

  In the coating apparatus as described above, a rail extending linearly is provided on the base or the mounting table, and the coating unit support mechanism slides along the rail. A linear motor may be used for the drive part of the application part support mechanism, and an air slider may be used for the sliding part.

  In the coating apparatus as described above, in the sliding mechanism, a linear motor may be used for the driving portion of the sliding mechanism, and an air slider may be used for the sliding portion.

  The present invention is a coating apparatus that applies a coating solution to a substrate, and is provided on a base and the base, moves linearly along the longitudinal direction of the base, and the substrate is placed thereon. A mounting table, a coating unit that discharges a coating liquid onto a substrate mounted on the mounting table, a coating unit support mechanism that is fixed on the base and supports the coating unit, and a coating unit support mechanism A sliding mechanism to which the coating unit is attached, and a sliding mechanism for sliding the coating unit in a direction opposite to the moving direction of the mounting table with respect to the coating unit support mechanism; A control unit that controls the mounting table and the sliding mechanism, and the control unit supplies the coating liquid from the coating unit to the substrate mounted on the mounting table while moving the mounting table. The coating liquid is applied to the substrate, and moving the mounting table starts In this case, the mounting table is moved until the relative speed of the coating unit with respect to the mounting table reaches a predetermined magnitude and the coating unit is moved with respect to the coating unit supporting mechanism by the sliding mechanism. It is a coating apparatus characterized by performing control to slide in a direction opposite to the moving direction.

  According to such a coating apparatus, the sliding unit for sliding the coating unit in the direction opposite to the moving direction of the mounting table with respect to the coating unit supporting mechanism is provided, and the control unit is When moving the mounting table, the mounting table is moved until the relative speed of the coating unit with respect to the mounting table reaches a predetermined magnitude, and the application unit is moved relative to the coating unit support mechanism by the sliding mechanism. Control is made to slide in the opposite direction. By this, when starting to move the mounting table, by moving the mounting table in the coating direction, by sliding the coating unit in the direction opposite to the moving direction of the mounting table with respect to the coating unit support mechanism, Since the coating unit is substantially double-accelerated with respect to the mounting table, the acceleration of the coating unit with respect to the mounting table increases, and it is necessary until the relative speed of the coating unit with respect to the mounting table reaches a predetermined speed. Time is relatively short. For this reason, the area where the coating liquid is applied to the substrate becomes relatively small from when the mounting table starts to move until the relative speed of the coating unit with respect to the mounting table reaches a predetermined speed (coating speed). The effective application area where the film thickness is substantially uniform can be made relatively large.

  In the coating apparatus as described above, the coating unit is connected to a coating solution supply unit that supplies the coating solution to the coating unit, and the coating solution supply unit is controlled by the control unit. When the controller starts to move the mounting table, the controller supplies the coating unit to the coating unit until the relative speed of the coating unit with respect to the mounting table reaches a predetermined size. The coating liquid supply unit may be controlled so as to continue increasing the amount of the coating liquid.

  In the coating apparatus as described above, a groove extending linearly is provided on the base, and the mounting table slides along the groove, and the driving unit of the mounting table Alternatively, a linear motor may be used, and an air slider may be used for the sliding portion.

  In the coating apparatus as described above, in the sliding mechanism, a linear motor may be used for the driving unit of the coating unit, and an air slider may be used for the sliding part.

  The present invention is a coating method for applying a coating liquid to a substrate, the mounting table on which the substrate is mounted, a coating unit that discharges the coating liquid to the substrate mounted on the mounting table, and the mounting table An applicator support mechanism that moves relative to the applicator to support the applicator, and a sliding mechanism that is provided on the applicator support mechanism and to which the applicator is attached. A step of preparing a coating device having a sliding mechanism for sliding the coating portion, and when starting to move the coating portion relative to the mounting table, the application to the mounting table Moving the mounting table or the coating unit support mechanism until the relative speed of the unit reaches a predetermined size, and sliding the coating unit with respect to the coating unit support mechanism by the sliding mechanism. It is the coating method characterized by this.

  According to such a coating method, when starting to move the coating unit relative to the mounting table, the mounting table or the coating unit support mechanism until the relative speed of the coating unit with respect to the mounting table reaches a predetermined size. The applicator is slid with respect to the applicator support mechanism by a sliding mechanism. By this, when starting to move the mounting table or the coating unit support mechanism, the coating unit is substantially double accelerated with respect to the mounting table by sliding the coating unit with respect to the coating unit support mechanism. Therefore, the acceleration of the coating unit with respect to the mounting table increases, and the time required for the relative speed of the coating unit with respect to the mounting table to reach a predetermined speed is relatively short. For this reason, the area where the coating liquid is applied to the substrate becomes relatively small from when the mounting table starts to move until the relative speed of the coating unit with respect to the mounting table reaches a predetermined speed (coating speed). The effective application area where the film thickness is substantially uniform can be made relatively large.

  In the coating method of the present invention, the position of the mounting table is fixed, and the application unit support mechanism moves with respect to the mounting table, and the coating unit with respect to the mounting table. When the relative movement of the application unit with respect to the mounting table reaches a predetermined magnitude, the application unit support mechanism is moved and the sliding mechanism is used to move the application unit relative to the application unit support mechanism. The application unit may be slid in the moving direction of the application unit support mechanism.

  Or while the position of the said application part support mechanism is being fixed, the said mounting base moves with respect to the said application part support mechanism, The said application part is made relatively with respect to the said mounting base. When starting to move, the mounting table is moved until the relative speed of the coating unit with respect to the mounting table reaches a predetermined magnitude, and the coating unit is moved forward with respect to the coating unit support mechanism by the sliding mechanism. You may make it slide in the direction opposite to the moving direction of a table.

  According to the coating apparatus and the coating method of the present invention, it is possible to make the effective coating area relatively large in which the coating liquid film thickness on the substrate is substantially uniform.

It is a perspective view which shows the outline of a structure of the coating device by one embodiment of this invention. It is a front view of the coating device shown in FIG. It is a block diagram which shows the structure of the linear drive part provided in the gantry of the coating device shown in FIG. It is a block diagram which shows the structure of the slider provided in the die head of the coating device shown in FIG. 2 is a graph showing the relationship between the time from the start of moving the gantry and the relative speed of the die head with respect to the mounting table in the coating apparatus shown in FIG. 2 is a graph showing the relationship between the time from the start of moving the gantry and the amount of coating liquid supplied to the die head in the coating apparatus shown in FIG. It is a perspective view which shows the outline of the other structure of the coating device by one embodiment of this invention. It is a front view of the coating device shown in FIG. It is a block diagram which shows the structure of the linear drive part provided in the mounting base of the coating device shown in FIG. It is a perspective view which shows the outline of a structure of the conventional coating device. It is a front view of the coating device shown in FIG. 11 is a graph showing the relationship between the time from the start of moving the gantry and the relative speed of the die head with respect to the mounting table in the coating apparatus shown in FIG.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1 to 6 are diagrams showing a coating apparatus according to the present embodiment. Among these, FIG. 1 is a perspective view schematically showing the configuration of the coating apparatus according to the present embodiment, and FIG. 2 is a front view of the coating apparatus shown in FIG. 3 is a configuration diagram showing the configuration of the linear drive unit provided in the gantry of the coating apparatus shown in FIG. 1, and FIG. 4 shows the configuration of the slider provided in the die head of the coating apparatus shown in FIG. FIG. 5 is a graph showing the relationship between the time from the start of moving the gantry and the relative speed of the die head with respect to the mounting table in the coating apparatus shown in FIG. 1, and FIG. 6 shows the coating apparatus shown in FIG. 2 is a graph showing the relationship between the time from the start of moving the gantry and the amount of coating liquid supplied to the die head.

  First, the configuration of the coating apparatus 10 according to the present embodiment will be described with reference to FIGS. 1 to 4. As shown in FIGS. 1 and 2, the coating apparatus 10 according to the present embodiment includes a base 11 and a mounting table 12 fixed to the base 11. A single-wafer type substrate S such as a glass substrate or a plastic substrate is placed on the mounting table 12. In addition, the coating apparatus 10 is provided with a die head 30 that discharges the coating liquid onto the substrate S mounted on the mounting table 12, and the die head 30 is supported by the gantry 20. The gantry 20 is provided on the mounting table 12, and moves linearly along the longitudinal direction of the mounting table 12 (the left-right direction in FIGS. 1 and 2).

  As shown in FIGS. 1 and 2, a pair of left and right rails 14 is provided on the upper surface of the mounting table 12. These rails 14 may be provided directly on the upper surface of the base 11 instead of being provided on the upper surface of the mounting table 12. A pair of left and right linear drive units 22 are provided at the bottom of the gantry 20. Here, as shown in FIG. 3, each linear drive section 22 is positioned on each rail 14. More specifically, a pair of air pads 24 are provided at the bottom of each linear drive unit 22 so as to sandwich the rails 14, and air flows downward (in the direction of the arrow in FIG. ) Is blown out. When the air is blown out from the air pad 24, the linear drive unit 22 floats from the rail 14. In the linear drive unit 22, a conductive coil is provided inside the air pad 24, and N magnets and S magnets are alternately arranged along the longitudinal direction of the mounting table 12 on the mounting table 12 side such as the rail 14. Is provided. As a result, the gantry 20 moves along the rail 14 with respect to the mounting table 12 by the linear motor in each linear drive unit 22. The gantry 20, the linear driving unit 22, and the air pad 24 constitute a coating unit support mechanism that moves linearly along the longitudinal direction of the mounting table 12 and supports the die head 30.

  As shown in FIGS. 1 and 2, the gantry 20 is provided with a slider 32, and a die head 30 is attached to the slider 32. The slider 32 can slide the die head 30 relative to the gantry 20 at least in the moving direction of the gantry 20 (the right direction in FIGS. 1 and 2). More specifically, as shown in FIG. 4, a pair of left and right slider drive units 34 are provided on the upper surface of the slider 32, and the slider 32 is driven by the slider drive unit 34 with respect to the gantry 20. It has become. As the slider drive unit 34, a linear motor may be used similarly to the linear drive unit 22 as shown in FIG. 3, and an air slider may be used for the sliding portion. Alternatively, instead of using a linear motor as the slider driving unit 34, the slider 32 may be driven with respect to the gantry 20 by ball screw driving. The slider 32 and the slider drive unit 34 constitute a sliding mechanism for sliding the die head 30 with respect to the gantry 20 in the moving direction of the gantry 20.

  A discharge port 30a is provided at the lower end portion of the die head 30, and the coating liquid is discharged downward from the discharge port 30a. Further, a hollow portion 30b is provided inside the die head 30, and the coating liquid is accommodated in the hollow portion 30b. The coating liquid accommodated in the hollow portion 30b is discharged downward from the discharge port 30a. As shown in FIG. 2, the coating liquid is supplied from the coating liquid supply source 52 to the hollow portion 30 b of the die head 30 by the supply pump 54. The coating liquid supply source 52 and the supply pump 54 constitute a coating liquid supply unit for supplying the coating liquid to the die head 30.

  As shown in FIG. 2, the coating device 10 is provided with a control unit 50 that controls each component of the coating device 10. More specifically, the control unit 50 is connected to the linear drive unit 22, the slider drive unit 34, and the supply pump 54, and controls these components. Specifically, the control unit 50 supplies the coating liquid from the die head 30 to the substrate S placed on the mounting table 12 while moving the gantry 20 in the right direction in FIGS. 1 and 2. Each component is controlled. Details of the control method by the control unit 50 will be described later.

  Next, the operation of the coating apparatus 10 as described above, that is, a coating method for coating the substrate S with a coating solution will be described below. The operation of the coating apparatus 10 as described below is performed by the control unit 50 controlling each component of the coating apparatus 10.

  First, the substrate S is mounted on the mounting table 12. At this time, the gantry 20 is moved to a predetermined position (initial position) in advance so that the discharge port 30a of the die head 30 is positioned in the vicinity of one end of the substrate S.

  Next, the gantry 20 is moved in the right direction in FIGS. 1 and 2 by the linear drive unit 22. Specifically, when the gantry 20 is started to move, the gantry 20 is accelerated. When the speed of the gantry 20 reaches a predetermined size (application liquid application speed), the gantry 20 is subsequently moved at a constant speed. When the discharge port 30a of the die head 30 approaches the vicinity of the other end of the substrate S, the gantry 20 is decelerated and finally the gantry 20 is stopped.

  Further, when the gantry 20 is started to move, the slider head 34 moves the die head 30 relative to the gantry 20 by the slider driving unit 34 until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined magnitude (that is, Slide in the right direction in FIGS. As a result, the gantry 20 moves in the application direction (that is, the right direction in FIGS. 1 and 2) until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined magnitude, and with respect to the gantry 20 The die head 30 will slide in the application direction.

FIG. 5 is a graph showing the relationship between the time from the start of moving the gantry 20 and the relative speed of the die head 30 with respect to the mounting table 12 in the coating apparatus 10 shown in FIG. The solid line in FIG. 5 indicates that the gantry 20 is moved in the application direction (that is, the right direction in FIGS. 1 and 2) until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined magnitude. The relative speed of the die head 30 with respect to the mounting table 12 when the die head 30 is slid in the coating direction is shown. On the other hand, the two-dot chain line in FIG. 5 moves the gantry 20 in the coating direction until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined magnitude as a comparative example. The relative speed of the die head 30 with respect to the mounting table 12 when not sliding is shown. As shown in the graph of FIG. 5, when the die head 30 is not slid with respect to the gantry 20, time t ₁ is required until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined speed. On the other hand, when the gantry 20 is moved in the coating direction and the die head 30 is slid in the coating direction until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined size, Since 30 is accelerated substantially double in the coating direction, the acceleration of the die head 30 with respect to the mounting table 12 increases, and the time t until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined speed t. ₂ is shorter than the time t ₁ according to the comparative example. Therefore, a region where the coating liquid is applied to the substrate S from when the gantry 20 starts to move until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined speed (that is, a region where the film thickness of the coating liquid varies). ) Is relatively small, and the effective coating area in which the film thickness of the coating solution on the substrate S is substantially uniform can be made relatively large.

As shown by a two-dot chain line in FIG. 5, in the comparative example, the gantry 20 is moved in the coating direction until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined magnitude. If the coating speed of the coating liquid, that is, the constant speed of the gantry 20 is 400 mm / s and the acceleration of the gantry 20 when the gantry 20 is started to be moved is 1000 mm / s ² without sliding 30. The length of the region where the coating liquid is applied to the substrate S until the relative speed of the die head 30 reaches a predetermined speed, that is, the region where the thickness of the coating liquid on the substrate S varies is 80 mm. On the other hand, as shown by the solid line in FIG. 5, the gantry 20 is moved in the coating direction until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined magnitude, and the die head 30 is moved with respect to the gantry 20. When sliding in the coating direction, the coating speed of the coating liquid, that is, the constant speed of the gantry 20 is 400 mm / s, the acceleration of the gantry 20 when the gantry 20 starts to move is 1000 mm / s ² , and the die head with respect to the gantry 20 When the acceleration of 30 is 500 mm / s ² , the region where the coating liquid is applied to the substrate S until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined speed, that is, the thickness of the coating liquid on the substrate S varies. The length of the region with 53 mm was 53 mm. As described above, when the gantry 20 is moved in the coating direction and the die head 30 is slid in the coating direction with respect to the gantry 20, the die head 30 is not slid in the coating direction with respect to the gantry 20. Thus, it has been found that the length of the region where the coating film thickness varies in the substrate S is shortened.

  Further, when the gantry 20 starts to move, the gantry 20 is supplied to the die head 30 by the coating liquid supply unit including the coating liquid supply source 52 and the supply pump 54 until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined magnitude. Continue to increase the amount of coating solution. FIG. 6 is a graph showing the relationship between the time from the start of moving the gantry 20 and the amount of coating liquid supplied to the die head 30. As shown in FIG. 6, the amount of the coating liquid supplied from the coating liquid supply unit to the die head 30 increases from 0 when the gantry 20 starts to move, and the relative speed of the die head 30 with respect to the mounting table 12 has a predetermined magnitude. When reaching the above, the amount of the coating liquid supplied to the die head 30 becomes constant.

  Then, the coating liquid is applied to the substrate S by supplying the coating liquid from the die head 30 to the substrate S placed on the mounting table 12 while moving the gantry 20, and the discharge port 30 a of the die head 30 is placed on the other side of the substrate S. When approaching the vicinity of the end, the gantry 20 is decelerated and finally the gantry 20 is stopped. At this time, the supply amount of the coating liquid to the die head 30 is also decreased, and finally the supply amount of the coating liquid to the die head 30 is set to zero. In this way, a series of coating operations on the substrate S is completed.

As described above, according to the coating apparatus 10 and the coating method of the present embodiment, the slider drive unit 34 for sliding the die head 30 in the moving direction of the gantry 20 with respect to the gantry 20 is provided. 50, when the gantry 20 is started to move, the gantry 20 is moved until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined magnitude, and the die head 30 is moved with respect to the gantry 20 by the slider drive unit 34. Control is performed so as to slide in 20 movement directions. Accordingly, when the gantry 20 is started to move, the gantry 20 is moved in the application direction, and the die head 30 is substantially moved in the application direction by sliding the die head 30 in the application direction with respect to the gantry 20. since the can is accelerated heavy, the mounting acceleration of the die head 30 is increased with respect to table 12, the relative speed of the die head 30 is the time t ₂ required to reach the predetermined speed is relatively short with respect to the mounting table 12. For this reason, the region where the coating liquid is applied to the substrate S from when the gantry 20 starts to move until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined speed (coating speed) (that is, the film thickness of the coating liquid). The region where there is variation) is relatively small, and the effective coating region where the coating liquid film thickness on the substrate S is substantially uniform can be made relatively large.

  Further, in the coating apparatus 10 of the present embodiment, the die head 30 is connected to a coating liquid supply unit (a coating liquid supply source 52 and a supply pump 54) that supplies the coating liquid to the die head 30, and this coating is performed. The liquid supply unit is controlled by the control unit 50. When the control unit 50 starts to move the gantry 20, the liquid supply unit is applied until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined size. Control is performed so as to continue increasing the amount of the coating liquid supplied to the die head 30 by the liquid supply unit. As a result, when the relative speed of the die head 30 with respect to the mounting table 12 when the gantry 20 starts to move is relatively small, the amount of coating liquid supplied from the die head 30 to the substrate S is also relatively small. In the region where the coating liquid is applied to the substrate S until the relative speed of the die head 30 with respect to the mounting table 12 reaches a predetermined speed (coating speed) after the movement of the substrate is suppressed, variation in the film thickness of the coating liquid is suppressed as much as possible. Can do.

  Moreover, in the coating apparatus 10 of this Embodiment, the rail 14 extended linearly is provided on the mounting base 12, and the gantry 20 slides along the rail 14. As shown in FIG. A linear motor is used for the linear drive unit 22 which is a drive unit of the gantry 20, and an air slider (air pad 24) is used for the sliding part.

  Moreover, in the coating apparatus 10 of this Embodiment, in the slider 32, a linear motor is used for the slider drive part 34 which is a drive part of the slider 32, and an air slider is used for a sliding part. As described above, instead of using a linear motor as the slider drive unit 34, the slider 32 may be driven with respect to the gantry 20 by ball screw drive.

  In addition, the coating device by this Embodiment is not limited to said aspect, A various change can be added. Another configuration of the coating apparatus will be described with reference to FIGS. FIG. 7 is a perspective view schematically showing another configuration of the coating apparatus according to the present embodiment, and FIG. 8 is a front view of the coating apparatus shown in FIG. Moreover, FIG. 9 is a block diagram which shows the structure of the linear drive part provided in the mounting base of the coating device shown in FIG.

  In the description of the coating apparatus 60 according to the modification shown in FIGS. 7 to 9, the same components as those of the coating apparatus 10 shown in FIGS. To do.

  In the coating apparatus 60 as shown in FIGS. 7 to 9, a pair of left and right frames 62 are attached to the upper surface of the base 11, and the bottom of the gantry 20 is fixed to each frame 62. That is, the gantry 20 is fixed on the base 11. On the other hand, a mounting table 64 is provided between the pair of left and right frames 62, and this mounting table 64 is arranged on the upper surface of the base 11 along the longitudinal direction of the base 11 (the left-right direction in FIGS. 7 and 8). It is designed to move in a straight line. That is, the mounting table 64 is guided between the pair of left and right frames 62 in the direction in which the frame 62 extends.

  More specifically, as shown in FIG. 9, a bottom plate 65 is attached to the bottom of the mounting table 64. And the groove part 62a is provided in the side surface of a pair of right-and-left frames 62 in the position which mutually opposes, and the baseplate 65 attached to the bottom part of the mounting base 64 fits into the groove part 62a. A pair of left and right air pads 65a are provided at a position in the vicinity of the groove 62a in the bottom plate 65, and air is blown out from the air pads 65a outward (in the direction of arrows in FIG. 9) in the left and right directions. It has become. When the air is blown out from the air pad 65 a, the mounting table 64 floats from the base 11. Further, a linear drive unit 66 is provided at the bottom of the bottom plate 65, and a shaft 68 passes through the linear drive unit 66. The shaft 68 is fixed to the base 11 and extends in the longitudinal direction of the base 11 (the left-right direction in FIGS. 7 and 8). Conductive coils are provided inside the linear drive unit 66, and N magnets and S magnets are alternately provided along the longitudinal direction of the base 11 on the base 11 side of the shaft 68 and the like. Accordingly, the mounting table 64 moves along the shaft 68 with respect to the base 11 by the linear motor in the linear driving unit 66.

  Further, as shown in FIG. 8, the coating device 60 according to the modification is provided with a control unit 51 that controls each component of the coating device 60. More specifically, the control unit 51 is connected to the linear drive unit 66, the slider drive unit 34, and the supply pump 54, and controls these components. Specifically, the control unit 51 applies the coating liquid from the die head 30 to the substrate S placed on the mounting table 64 while moving the mounting table 64 in the left direction in FIGS. 7 and 8. 60 components are controlled. Details of the control method by the control unit 51 will be described later.

  Next, the operation of the coating apparatus 60 according to the modification shown in FIGS. 7 to 9, that is, the coating method for coating the substrate S with the coating liquid will be described below. The operation of the coating apparatus 60 as described below is performed by the control unit 51 controlling each component of the coating apparatus 60.

  First, the substrate S is mounted on the mounting table 64. At this time, the mounting table 64 is moved in advance to a predetermined position (initial position) so that the discharge port 30a of the die head 30 is positioned in the vicinity of one end of the substrate S.

  Next, the mounting table 64 is moved in the left direction in FIGS. Specifically, when the mounting table 64 is started to move, the mounting table 64 is accelerated, and when the speed of the mounting table 64 reaches a predetermined size (coating liquid application speed), then the mounting table 64 is moved at a constant speed. Move with. When the discharge port 30a of the die head 30 approaches the vicinity of the other end of the substrate S, the mounting table 64 is decelerated and finally the mounting table 64 is stopped.

  Further, when starting to move the mounting table 64, the slider drive unit 34 moves the die head 30 relative to the gantry 20 until the relative speed of the die head 30 with respect to the mounting table 64 reaches a predetermined magnitude. Is slid in the opposite direction (ie, the right direction in FIGS. 7 and 8). Thus, until the relative speed of the die head 30 with respect to the mounting table 64 reaches a predetermined magnitude, the mounting table 64 moves to the left in FIGS. 7 and 8, and the die head 30 moves relative to the gantry 20 in FIG. 7. And it will slide to the right direction in FIG. As described above, the mounting table 64 is moved until the relative speed of the die head 30 with respect to the mounting table 64 reaches a predetermined size, and the die head 30 is moved in a direction opposite to the moving direction of the mounting table 64 with respect to the gantry 20. , The die head 30 is substantially double-accelerated with respect to the mounting table 64, so that the acceleration of the die head 30 with respect to the mounting table 64 increases, and the relative speed of the die head 30 with respect to the mounting table 64 is increased. Takes a relatively short time to reach a predetermined speed. For this reason, the region where the coating liquid is applied to the substrate S from when the mounting table 64 starts to move until the relative speed of the die head 30 with respect to the mounting table 64 reaches a predetermined speed becomes relatively small. The effective application area where the film thickness is substantially uniform can be made relatively large.

  Further, when starting to move the mounting table 64, the die head 30 is supplied to the die head 30 by the coating liquid supply unit including the coating liquid supply source 52 and the supply pump 54 until the relative speed of the die head 30 with respect to the mounting table 64 reaches a predetermined magnitude. Continue to increase the amount of coating solution applied. Specifically, the amount of the coating liquid supplied from the coating liquid supply unit to the die head 30 increases from 0 when the mounting table 64 starts to move, and the relative speed of the die head 30 with respect to the mounting table 64 becomes a predetermined magnitude. When it reaches, the amount of the coating liquid supplied to the die head 30 becomes constant.

  Then, by supplying the coating liquid from the die head 30 to the substrate S placed on the mounting table 64 while moving the mounting table 64, the coating liquid is applied to the substrate S, and the discharge port 30 a of the die head 30 is connected to the substrate S. When approaching the vicinity of the other end, the mounting table 64 is decelerated and finally the mounting table 64 is stopped. At this time, the supply amount of the coating liquid to the die head 30 is also decreased, and finally the supply amount of the coating liquid to the die head 30 is set to zero. In this way, a series of coating operations on the substrate S is completed.

  As described above, according to the coating apparatus 60 and the coating method according to the above-described modification, the slider drive unit for sliding the die head 30 with respect to the gantry 20 in the direction opposite to the moving direction of the mounting table 64. 34, the control unit 51 moves the mounting table 64 until the relative speed of the die head 30 with respect to the mounting table 64 reaches a predetermined magnitude when starting to move the mounting table 64 and the slider driving unit. 34 controls the gantry 20 to slide the die head 30 in the direction opposite to the moving direction of the mounting table 64. Thus, when the mounting table 64 starts to move, the mounting table 64 is moved in the coating direction, and the die head 30 is slid in the direction opposite to the moving direction of the mounting table 64 with respect to the gantry 20. Since the die head 30 is substantially double-accelerated with respect to the mounting table 64, the acceleration of the die head 30 with respect to the mounting table 64 increases, and the relative speed of the die head 30 with respect to the mounting table 64 becomes a predetermined speed. The time required to reach it is relatively short. For this reason, the region where the coating solution is applied to the substrate S from when the mounting table 64 starts to move until the relative speed of the die head 30 with respect to the mounting table 64 reaches a predetermined speed (coating speed) becomes relatively small. The effective coating area in which the coating liquid film thickness is substantially uniform can be made relatively large.

  In the coating apparatus 60 according to the modification, the frame 62 on the base 11 is provided with a groove 62a extending linearly, and the bottom plate 65 attached to the bottom of the mounting table 64 is along the groove 62a. A linear motor is used for the linear drive part 66 which is a drive part of the mounting table 64, and an air slider (air pad 65a) is used for the sliding part.

  In the coating apparatus and the coating method according to the present invention, when the coating unit starts to move relative to the mounting table on which the substrate is mounted, the relative speed of the coating unit with respect to the mounting table is a predetermined magnitude ( If the application part support mechanism or the mounting table that supports the application part is moved and the application part is slid with respect to the application part support mechanism until the application speed of the application liquid is reached, the above-described embodiment is used. There is no limitation, and various other configurations and methods may be used.

DESCRIPTION OF SYMBOLS 10 Coating apparatus 11 Base 12 Mounting base 14 Rail 20 Gantry 22 Linear drive part 24 Air pad 30 Die head 30a Discharge port 30b Hollow part 32 Slider 34 Slider drive part 50 Control part 51 Control part 52 Coating liquid supply source 54 Supply pump 60 Coating apparatus 62 Frame 62a Groove 64 Mounting platform 65 Bottom plate 65a Air pad 66 Linear drive unit 68 Shaft 70 Conventional coating device 71 Base 72 Mounting platform 80 Gantry 90 Die head 90a Discharge port 90b Hollow portion 92 Coating liquid supply source 94 Supply pump S Substrate

Claims (11)

A coating apparatus for applying a coating liquid to a substrate,
The base,
A mounting table fixed on the base and on which a substrate is mounted;
A coating unit that discharges the coating liquid onto the substrate placed on the mounting table;
An application part support mechanism that moves linearly along the longitudinal direction of the mounting table and supports the application part;
A sliding mechanism provided in the coating unit support mechanism and having the coating unit attached thereto, the sliding mechanism for sliding the coating unit in the moving direction of the coating unit support mechanism with respect to the coating unit support mechanism. Dynamic mechanism,
A control unit for controlling the application unit support mechanism and the sliding mechanism;
With
The control unit is configured to apply the coating liquid to the substrate by supplying the coating liquid from the coating unit to the substrate placed on the mounting table while moving the coating unit support mechanism. When starting to move the part support mechanism, the application part support mechanism is moved until the relative speed of the application part with respect to the mounting table reaches a predetermined magnitude, and the sliding part is moved with respect to the application part support mechanism. Then, the application unit is controlled to slide in the moving direction of the application unit support mechanism. The application unit is connected to an application liquid supply unit that supplies the application liquid to the application unit, and the application liquid supply unit is controlled by the control unit,
When the control unit starts to move the application unit support mechanism, the application liquid supplied to the application unit by the application liquid supply unit until the relative speed of the application unit with respect to the mounting table reaches a predetermined size. The coating apparatus according to claim 1, wherein the coating liquid supply unit is controlled so as to continue increasing the amount of the liquid.   A rail extending linearly is provided on the base or the mounting table, and the application unit support mechanism slides along the rail, and the drive unit of the application unit support mechanism The coating apparatus according to claim 1, wherein a linear motor is used and an air slider is used for the sliding portion.   4. The coating according to claim 1, wherein the sliding mechanism uses a linear motor for a driving part of the sliding mechanism and uses an air slider for the sliding part. 5. apparatus. A coating apparatus for applying a coating liquid to a substrate,
The base,
A mounting table that is provided on the base and moves linearly along the longitudinal direction of the base;
A coating unit that discharges the coating liquid onto the substrate placed on the mounting table;
An application part support mechanism fixed on the base and supporting the application part;
A sliding mechanism provided on the coating unit support mechanism and having the coating unit attached thereto, wherein the coating unit is slid in a direction opposite to the moving direction of the mounting table with respect to the coating unit support mechanism. A sliding mechanism for
A control unit for controlling the mounting table and the sliding mechanism;
With
The control unit is configured to apply the coating liquid to the substrate by supplying the coating liquid from the coating unit to the substrate placed on the mounting table while moving the mounting table. When starting to move, the mounting table is moved until the relative speed of the coating unit with respect to the mounting table reaches a predetermined magnitude, and the coating unit is moved forward with respect to the coating unit support mechanism by the sliding mechanism. A coating apparatus that controls to slide in a direction opposite to a moving direction of the table. The application unit is connected to an application liquid supply unit that supplies the application liquid to the application unit, and the application liquid supply unit is controlled by the control unit,
When the control unit starts to move the mounting table, the control unit supplies the coating solution supplied to the coating unit by the coating solution supply unit until the relative speed of the coating unit with respect to the mounting table reaches a predetermined size. 6. The coating apparatus according to claim 5, wherein the coating liquid supply unit is controlled so as to keep increasing the amount.   A groove extending linearly is provided on the base, and the mounting table is configured to slide along the groove. A linear motor is used for the driving unit of the mounting table, and sliding is performed. 7. The coating apparatus according to claim 5, wherein an air slider is used for the portion.   8. The coating apparatus according to claim 5, wherein in the sliding mechanism, a linear motor is used for the drive unit of the coating unit, and an air slider is used for the sliding part. . A coating method for coating a substrate with a coating solution,
A mounting table on which the substrate is mounted, a coating unit that discharges the coating liquid to the substrate mounted on the mounting table, and a coating unit support that moves relative to the mounting table and supports the coating unit And a sliding mechanism provided in the coating unit support mechanism and having the coating unit attached thereto, the sliding mechanism for sliding the coating unit with respect to the coating unit support mechanism. Preparing a coating device;
When starting to move the coating unit relative to the mounting table, the mounting table or the coating unit support mechanism is moved until the relative speed of the coating unit with respect to the mounting table reaches a predetermined size. Sliding the application part relative to the application part support mechanism by the sliding mechanism;
A coating method characterized by comprising: The position of the mounting table is fixed, and the application unit support mechanism moves with respect to the mounting table.
When starting to move the application unit relative to the mounting table, the application unit support mechanism is moved and the sliding is performed until the relative speed of the application unit with respect to the mounting table reaches a predetermined size. The coating method according to claim 9, wherein the coating unit is slid in the moving direction of the coating unit support mechanism with respect to the coating unit support mechanism by a mechanism. The application unit support mechanism is fixed in position, and the mounting table moves with respect to the application unit support mechanism,
When starting to move the coating unit relative to the mounting table, the mounting table is moved and the sliding mechanism until the relative speed of the coating unit with respect to the mounting table reaches a predetermined size. The coating method according to claim 9, wherein the coating unit is slid in a direction opposite to the moving direction of the mounting table with respect to the coating unit support mechanism.

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