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TW200914146A - Paste applicator and paste application method - Google Patents

Paste applicator and paste application method Download PDF

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Publication number
TW200914146A
TW200914146A TW097103780A TW97103780A TW200914146A TW 200914146 A TW200914146 A TW 200914146A TW 097103780 A TW097103780 A TW 097103780A TW 97103780 A TW97103780 A TW 97103780A TW 200914146 A TW200914146 A TW 200914146A
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TW
Taiwan
Prior art keywords
coating
paste
head
pattern
support member
Prior art date
Application number
TW097103780A
Other languages
Chinese (zh)
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TWI338595B (en
Inventor
Noriaki Shimoda
Norihito Mafune
Original Assignee
Shibaura Mechatronics Corp
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Publication of TW200914146A publication Critical patent/TW200914146A/en
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Publication of TWI338595B publication Critical patent/TWI338595B/zh

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/28Adhesive materials or arrangements

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Coating Apparatus (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Liquid Crystal (AREA)

Abstract

To provide a paste applicator capable of drawing a different coating pattern between coating heads in every supports. The paste applicator 1 is provided with a first support member 5A supporting a first coating head 3A movable in the first axial direction and provided movable in the second axial direction, a second support member 5B supporting a second coating head 3B movable to the first axial direction and provided movable in the second axial direction and a means for applying paste with the first coating head 3A based on a first coating condition, controlling the movement of the first coating head 3A and the movement of the first support member 5A, applying the past with the second coating head 3B based on the second coating condition different from the first coating condition,; controlling the movement of the second coating head 3B and the movement of the second support member 5B and drawing on the coating surface Ka so that the coating pattern of the paste with the first coating head 3A is different from the coating pattern of the paste with the second coating head 3B.

Description

200914146 九、發明說明: 【發明所屬之技術領域】 佈方=發明有關向塗饰物件物塗佈糊料的糊料塗佈裝置及糊料塗 f先前技術】 佈裝鄕缺關示蛛衫雜置。該糊料塗 的佈頭相對塗佈物件物移動的同時,向塗 ==平定的塗佈〆 件物的基板塗佈具有密封性及黏接性的 料包圍液晶顯示面板的顯示區域。 η…彳使糊 提出了一種糊料塗佈裝置的方案,在 在χ軸方向上移動地==::中支柱ΐ 顯===心==率:逆 要對一,基板描繪多個不同的塗佈圖案。 樣化’為 但是’在上述的糊料塗佈裝置中,由 能描 塗佈頭之間不間’即在每個鱗部件的 【發明内容】 的塗佈圖』:的塗佈頭間描繪不同 200914146 本發明的實施方式的第—方案的特徵為 .j 士达弟-塗佈頭所進行的上述糊 據與上述二= 動 ==移述= 述第一塗佈頭所進行的上述糊料的塗佈圖案涂2 進行^述糊料的塗侧案不同並_在上述‘面^ 塗佈糊料的第_塗佈頭所:==== 並可移動地妓在沿上述塗怖面的第二軸向i 饰條件^^、移動’根據與上述第—塗佈條件不同的第二塗 塗==的第二塗佈頭所進行的上述 ^使上述第一塗佈頭所進行的上述糊料 並描纷社述塗進行的上述糊料的塗佈圖案不同 :丄 6 200914146 面的第二軸向上·,第二支撐部件,其可在上述 支樓上述第二塗佈頭、並可移動地設置在上述 二 ^ 機構,其使上述㈣物在上述第:軸動 其根據與上述糊料的塗佈相關的條件,對每個上 一 上述第二塗佈頭各不相同的塗佈條件來控制&構 上述第頭所進行的上述糊料的塗佈、上頭= 動及上述第-支撐部件的雜,並控制上料 行 上述糊料的塗佈、上述第二塗佈頭的移動及上述第 使上述第—塗細所形成的上述糊料的塗述 綱的塗佈圖案不同並將它們的塗佈形 本發明的實施方式的第四方案的特徵為,在糊料塗佈方 中’根據與糊料的塗佈相關的條件,對每個在塗佈物件塗 ίίΐΐ塗佈糊料的第—塗佈頭及上述第二塗佈頭各列目同的塗 佈條件來控制上述塗佈物件物沿上述塗佈面的第二軸向上移 ^動機構;控制上述第一塗佈頭所進行的上述糊料的塗佈、上述 第一塗佈頭的移動及可在沿上述塗佈面的第一軸向上移動地支 上述第一塗佈頭並可移動地設置在上述第二軸向上的第一支撐 件的移動,控制上述第二塗佈頭所進行的上述糊料的塗佈、上述 第二塗佈頭的移動及可在上述第一轴向上移動地支撐上述第二塗 佈頭並可移動地設置在上述第二軸向上的第二支撐部件的移動; 以及使上述第一塗佈頭所形成的上述糊料的塗佈圖案和上述第二 塗佈碩所形成的上述糊料的塗佈圖案不同並將它們的塗佈形 繪在上述塗佈面上。 【實施方式】 第一實施方式 參照附圖來說明本發明的一個實施方式。 如圖1及圖2所示,本發明的實施方式的糊料塗佈裝置1具 200914146 平狀態(在圖1中,沿作為第一軸向的x軸方向和錢 ‘ K =板方臺向:=;=象物的 使這 =頭 :頭移動機構4A而支撐各塗佈頭3A的第f 撐“ ϋ弟一Λ移動機構4B *支撐各塗佈頭3B的第一支 撑轉SB ’使苐-支撐部件5A及第二 「弟一支 :向上移動的一對γ軸移動機構6A、6 刀及在:軸200914146 IX. Description of the invention: [Technical field to which the invention pertains] Fabrication = Invention of a paste coating device for applying a paste to a coated article and a paste coating prior art] Cloth 鄕 关 示 蛛 蛛Set. The paste-coated cloth head is coated with a material having a sealing property and an adhesive property to cover the display region of the liquid crystal display panel with respect to the substrate coated with the coating material. η...彳Proposed a paste coating device solution, moving in the direction of the x-axis ==:: pillars ====heart==rate: reverse to one, the substrate is painted differently Coating pattern. In the paste application device described above, the coating head is depicted between the coating heads of the coating material of the invention. Different 200914146 The first aspect of the embodiment of the present invention is characterized in that the paste prepared by the .j sida-coating head and the above-mentioned two ================================================= The coating pattern of the material is coated 2, and the coating side of the paste is different and _ in the above-mentioned surface coating of the first coating head: ==== and can be moved along the above-mentioned coating The second axial direction of the surface is decorated, and the movement of the second coating head according to the second coating == different from the above-mentioned first coating condition is performed by the first coating head. The above paste is different from the coating pattern of the paste described above: 第二6 200914146 The second axial direction of the surface, the second support member, which can be in the above-mentioned second coating head of the branch, And movably disposed on the second mechanism, wherein the (4) object is subjected to the above-mentioned: axial movement according to conditions associated with coating of the paste Controlling the coating of the paste, the upper head and the movement of the first support member, which are performed on the first head, respectively, for each of the coating conditions of the second coating head. And controlling the application of the paste in the feeding line, the movement of the second coating head, and the coating pattern of the coating of the paste formed by the first coating, and coating the coating A fourth aspect of the embodiment of the present invention is characterized in that, in the paste application side, the first coating of each of the coated articles is applied according to the conditions associated with the application of the paste. a coating condition of each of the cloth head and the second coating head to control the second axial upward movement mechanism of the coated object along the coated surface; controlling the above-mentioned first coating head to perform the above Coating of the paste, movement of the first coating head, and first support that is movably disposed along the first axial direction of the coated surface and movably disposed in the second axial direction Movement of the piece, controlling the coating of the paste by the second coating head And movement of the second coating head and movement of the second support member movably supported by the second coating head and movably disposed in the second axial direction in the first axial direction; The coating pattern of the above-mentioned paste formed by a coating head is different from the coating pattern of the above-mentioned paste formed by the second coating, and their coating forms are drawn on the coated surface. [Embodiment] First Embodiment An embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 and 2, the paste application device 1 of the embodiment of the present invention has a flat state of 200914146 (in FIG. 1, along the x-axis direction as the first axial direction and the money 'K = plate square direction) :=;= The first support SB' of the respective coating heads 3B is supported by the head moving mechanism 4A to support the first support of the respective coating heads 3A.苐-support member 5A and second "one brother: a pair of γ-axis moving mechanisms 6A, 6 that move upwards

軸移動機構6A、6B的架臺7,控制各部分及—對Y 基板臺2由裝載玻璃基板等基板尺^ ^在γ轴方向上移_丫鄉動機構cm”工作臺 該吸附機構而將基板κ固定保持在工等,通過 作為吸附機構,使用例如空氣吸附機構等。a的域面上。再者, 各塗佈頭3A、3B分別具有容納糊料 該容納筒3a連通且喷出糊料的喷嘴3 體^^同如和與 該夾具3!固定在托座32上。這些淹,同3a由夾具31保持, 給管等連接到氣體供給部。塗佈頭3A、3Β^、3B分別經氣體供 給的氣體而將其内部的糊料從噴嘴% m納筒3a内供 使用例如_空氣和壓縮氮氣等。此外Y。再者,作為氣體, 有密封性和黏接性的糊料。 F马糊料,使用例如具 第一頭移動機構4A及第二頭移動機構 3A、3B在X軸方向上移動的χ軸移動刀別由使各塗佈頭 3Α、3Β在Υ軸方向上移動的多個γ轴 二土別使各塗佈頭 佈頭3Α、3Β在Ζ軸方向上移動的多個扑,分別使各塗 裏,作為X軸移動機構4a、γ軸移動機構動機構4c構成。這 使用例如以偏曜為驅動源的進給螺 8 200914146 動源的移動機構等。 二支撐部 在X軸方向上可移動地开4夕刀^支標各Y軸移動機構4b並 作臺 ======和將這些移動工 接且繼軸4/和__如連 而與取向正交即沿_的塗佈面以 佈面與水平面(基板κ的塗 或雜的接近雜柏上2接近 4c上,藉由拖架而分別安 ^在各Z軸移動機構 ;的塗辑等的拍攝部。再V作為拍:二:齊= 3B,即支翻頭 3A、 些第-支撐部件5Α及第二“部件形狀。這 此時,第—支撐部件5Α的樑部相對Hi方式分 也^於與X軸方向平行的基板臺2的裝载—^f平的樑部The gantry 7 of the shaft moving mechanisms 6A, 6B controls each part and the Y substrate stage 2 is moved by a substrate such as a glass substrate in the γ-axis direction. The substrate κ is fixed and held, and the like, for example, an air absorbing mechanism or the like is used as the adsorption mechanism. Further, each of the coating heads 3A and 3B has a paste for accommodating the accommodating cylinder 3a and ejects the paste. The nozzles 3 of the material are fixed to the holder 32 with the clamps 3! These floods are held by the clamp 31, and the tubes are connected to the gas supply portion. The coating heads 3A, 3Β, 3B The paste inside the gas is supplied from the nozzle % m cylinder 3a by using a gas supplied from a gas, for example, air, compressed nitrogen, etc. Further, Y. Further, as a gas, a seal having adhesiveness and adhesion is used. The F-horse paste is moved in the X-axis direction using, for example, the first-axis moving mechanism 4A and the second-head moving mechanism 3A, 3B in the X-axis direction, so that the respective coating heads 3, 3 are in the z-axis direction. A plurality of moving γ-axis and two soils move the plurality of coating head cloth heads 3Α, 3Β in the z-axis direction Each of the coatings is configured as an X-axis moving mechanism 4a and a γ-axis moving mechanism moving mechanism 4c. This uses, for example, a moving mechanism of a feed screw 8 200914146 with a biasing source as a driving source, etc. In the X-axis direction, the X-axis knives are movably opened, and the Y-axis moving mechanisms 4b are calibrated and made as a table ====== and these movements are connected and the relays 4/ and __ are connected and oriented orthogonally. That is, the coated surface along the _ is coated with the water level (the coating of the substrate κ or the close to the cypress 2 is close to 4c, and the respective Z-axis moving mechanism is mounted by the carriage; V. As V: 2: Qi = 3B, that is, the head 3A, the first-support member 5Α and the second "part shape. At this time, the beam portion of the first support member 5" is also relative to the Hi mode. Mounting of the substrate table 2 parallel to the X-axis direction - the flat beam portion

^ ^ 6Β ;; Υ ^1;4ΪΓί ί "J" Y 方==板臺2 6A、6B是將第—支撐部件5八及第二支揮部“ ==^向 200914146 上可移動地支撐’且係使這些第一支標部件5a及 5B分別沿Y軸方向移動的機構。再者 了支撐雜^ ^ 6Β ;; Υ ^1;4ΪΓί ί "J" Y square == pallet 2 6A, 6B is the movable support of the first support member 5 and the second branch " ==^ to 200914146 'And a mechanism for moving the first sub-components 5a and 5B in the Y-axis direction, respectively.

i^B且在雜臺7的上时絲錢2及—對Y 助控制設備82、儲存控制程式和各種f 序控制的輔 自操作者的輸入齡的操作部84、製作83、接收來 條件的各種資料的資料製作部85、主^ 塗佈的塗佈 上支撐的機構的馬達控制II 86、主要控: 部件认 支撐的機構的馬達控制器87β這些件犯上 2的γ軸移動機構2b、各塗佈頭3Α、3ϋ617控制基板臺 第二頭移動機構4Β及-對Υ#_機構、 主電腦81是根據在儲存部83中冓丄專刀的驅動。 來控制所有各部分触置。此外 種資料等 資料製作部85根據對操作部84的輪入 條件的各種資料。作為該資料,可歹作設定塗佈 資料)和圖案資料等。即,塗佈侔件 丄C貧料(數值控制 成。NC資料包括描賴:座 由T貧二=_ 確定描軟寸的距離、角部R及描括狀(例如’ 如,間隙、移動速度及喷嶋等)等。例如,例 10 200914146 I舉出長方形'正方形、橢圓形 勤,塗佈量(塗佈面以 二古專。此外,通過改變喷出 部幻中。例如,將第一支稽種貝存多個(塗佈條件)在儲存 描緣用的第一塗佈條件和第二各塗佈頭3a所進行的 行的描緣用的第二塗佈條件Ι = 侧的各塗佈頭3β所進 馬達控制器86上中^ 支標的各塗佈頭3Α (以下指 j仃在第一支撐部件5Α上 3Α)的移動及第-支撐部件5AHH部件5八_各塗佈頭 的驅動部88、用於進行各塗佈頭第一支柱軌跡控制系統 修正控制系統的驅動部89、用於ϋ嘴3b的位置修正的喷嘴 動的間隙控制系統的驅動部9G、、^塗佈頭Μ向Z軸方向移 3的分配器控制系統的驅動部91用;頭3A噴出糊 向Y轴方向移動的基板臺控制 ^丁基板臺2的工作臺2a 對應於各驅動部88〜92,^告、英此’動部92。該馬達控制器86 在馬達控制哭87上,;者些驅動部88〜%。 上支撺的各塗佈頭3B (以為行在第二支撐部件诏 頭3B)的移動及第二支撐部件B、^撐部件5B側的各塗佈 統的驅動部93、用於進行各塗牛^第二支柱執跡控制系 嘴修正控制系統的驅Uf的嘴嘴3b的位置修正的喷 移動的間隙控制系統的驅動部塗佈頭3B向Z轴方向 的分配器控制系統的驅動部96。& 塗佈碩3B噴出 動^96,並控制這些驅動部93=達控制器87對應於各驅i^B and the operation unit 84, the production 83, and the receiving condition of the input age of the auxiliary control device 82, the storage control program, and the various control commands for the Y-B. The data creation unit 85 of various materials, the motor control II 86 of the main coating application mechanism, and the main control: the motor controller 87β of the mechanism for supporting the support member 2, the γ-axis moving mechanism 2b Each of the coating heads 3, 3, and 617 controls the substrate stage second head moving mechanism 4 and the pair of #_ mechanisms and the host computer 81 are driven by the special knife in the storage unit 83. To control all parts of the touch. Further, the data creating unit 85, based on the data, and the like, various materials based on the wheeling conditions of the operation unit 84. As the material, it is possible to set the coating data and pattern data. That is, the coating element 丄C is poor (the numerical control is controlled. The NC data includes the description: the seat is determined by the T-poor = _ determines the distance of the soft inch, the corner R and the description (for example, ', gap, movement For example, Example 10 200914146 I cites a rectangular shape of a square, an elliptical shape, and a coating amount (the coated surface is made of two ancient syllabuses. In addition, by changing the squirting section, for example, A plurality of seed coating conditions (coating conditions) are used for storing the first coating condition for the drawing and the second coating condition for the line of the second coating head 3a. Each coating head 3 of the motor head 86 into which the coating head 3β is fed is moved by the respective coating heads 3 (hereinafter referred to as j 仃 on the first supporting member 5 Α) and the first supporting member 5AHH member 5 _ each coating The driving unit 88 of the head, the driving unit 89 for performing the coating control system of each of the first head trajectory control system of the coating head, and the driving unit 9G of the gap control system for the nozzle movement for correcting the position of the mouth 3b, The driving portion 91 of the dispenser control system in which the cloth head is moved 3 in the Z-axis direction; the head 3A ejects the substrate in which the paste moves in the Y-axis direction The table 2a for controlling the butyl plate 2 corresponds to each of the driving portions 88 to 92, and the moving portion 92. The motor controller 86 is controlled by the motor control 87; some of the driving portions 88 to %. The respective coating heads 3B of the upper support (in the second support member head 3B) and the drive portions 93 of the respective coating systems on the second support member B and the support member 5B side are used for performing the respective coatings. The position of the nozzle 3b of the nozzle control system of the second control track control system is corrected. The drive unit of the gap control system of the spray movement of the nozzle movement control head is applied to the drive unit 96 of the dispenser control system in the Z-axis direction. & coating the 3B ejector ^96, and controlling these drive parts 93 = up to the controller 87 corresponding to each drive

侧作為第一支撐部件5A 為弟-支撐部件5A向γ軸 =達撕的驅動器88c、作 一支撐部件5A的定動的驅動源的馬達_、用於第 所構成。再者,馬====馬達_驅動讀 係做為含有第一頭移動機構4A的 200914146 噴嘴修正控制系統的驅動部89係由作為各塗佈 方向移動的驅動源的馬達89a、用於各塗佈頭3A 呵Y軸 位的編碼器8%、驅動馬達89a的驅動器89c所構成定 89設於每健佈頭3A上,並修正γ軸 再ς動广 4A ^ 間隙控制系統的驅動部90由作為各塗佈頭3 動的驅動源的馬達術、用於這些塗佈頭==向Z二向移The side is used as the first supporting member 5A as the first supporting member 5A for the driver-inducing member 5A to the γ-axis = tearing drive 88c, and as a driving source for the fixed driving member 5A. Further, the horse====motor_drive reading system is the drive unit 89 of the 200914146 nozzle correction control system including the first head moving mechanism 4A. The motor 89a is used as a drive source for moving in each coating direction, and is used for each. The coating head 3A, the Y-axis encoder 8%, and the drive motor 89a driver 89c are arranged 89 on each of the cloth heads 3A, and the γ-axis is corrected and the wide drive is applied to the drive unit 90 of the gap control system. As a driving source for each coating head 3, for these coating heads == two-direction shift to Z

=器9%及鐳射位移計9Ge、驅動馬達9Qa的驅^^^的 ^射位移計9Ge是測量塗侧3A和基板 面H r;r: r基板κ的塗佈面Ka = 二:控 ί移=構祕縣鮮城構4a賴有的各z 塗佈頭3A定量地嘴出祕、給官4而連接,且控制流_各 基板臺控制系統的驅動部92由作為 動的驅動源的馬達92a、用於該工Y轴方向移 驅動馬達92a的驅動器92e所構成,的^^碼器92b、 基板臺2的Y軸移動機構2b 9 &之功能係做為 側的部93係由作為第二支撐部件犯 塗佈頭3Β的定位缸_源的馬達%、用於這些 為第-以位的柄器93b、驅動馬達93a的驅動写93c、供 為弟-支撐部件5B向Y軸方向移動的驅動源的馬達動^ 12 200914146 一支撐部件5B的定位的編碼器93 所構成。再者,馬達93a 為=_馬達㈣的驅動器93f X轴移動機構4a的驅動源,馬機構犯之 6B的第二驅動源功能。运轉為-對Y軸義機構6A、 ί噶修正控制系統的驅動部94由作 向移動的軸__94a、_ 向Υ轴方 的編碼器94b、驅動馬達94a的 ^^軸方向的定位 設於每個塗佈頭3B上,並修斤構成。該驅動部94 94a之功能係做為頭移動 立置。f,該馬達 驅動源。 所具有的各Y軸移動機構4b的 間隙控制系統的驅動部95由作 動的驅動源的馬達95a、用於這些塗向Z轴方向移 編碼器95b及鐳射位移計95c、驅動馬^ 方向的定位的 鐘射位移計95c是測量塗佈胃| a、11動态95d所構成。 開距離的測量器之間的離 定。再者,馬達95a之功能係做的離開距離保持一 動機構4c的驅動源。係做為3有碩移動機構4Β的各Ζ軸移 分配盗控制系統的驅動部96由 出糊料等流體的分配器驅動用的馬====定量地喷 編碼器96b、驅動馬達96a的驅動^96ca=馬達如的轉動的 並行地控^==,並可同時 佈、第-支撐部件5八側的各塗饰頭3A移 的糊料塗= 9% and laser displacement meter 9Ge, drive motor 9Qa drive displacement meter 9Ge is the measurement side 3A and the substrate surface H r; r: r substrate κ coated surface Ka = two: control Each of the z coating heads 3A of the sacred city fresh city structure 4a is quantitatively connected, and is connected to the official 4, and the control flow_ drive unit 92 of each substrate stage control system is used as a driving source for the movement. The motor 92a, the driver 92e for the Y-axis direction drive motor 92a, and the Y-axis moving mechanism 2b 9 of the substrate table 2 function as the side portion 93. The motor % of the positioning cylinder_source of the coating head 3 as the second supporting member, the handle 93b for the first position, the drive writing 93c for the driving motor 93a, and the Y-axis for the support member 5B The motor of the drive source that moves in the direction is constituted by an encoder 93 that is positioned by the support member 5B. Further, the motor 93a is a drive source of the motor shaft 93 of the =_ motor (four), and a drive source of the X-axis moving mechanism 4a, and the second drive source function of the horse mechanism is 6B. The operation of the Y-axis mechanism 6A and the drive unit 94 of the correction control system is set by the axis __94a for moving, the encoder 94b for Υ axis, and the axis of the drive motor 94a. It is formed on each of the coating heads 3B and repaired. The function of the drive unit 94 94a is set as the head movement. f, the motor drive source. The drive unit 95 of the gap control system of each of the Y-axis moving mechanisms 4b is driven by the motor 95a of the actuating drive source, and is used for positioning the Z-axis direction shift encoder 95b and the laser displacement meter 95c in the driving direction. The clock-displacement meter 95c is constructed by measuring the coated stomach | a, 11 dynamic 95d. The separation between the measuring instruments of the open distance. Further, the function of the motor 95a is to maintain the driving distance of the moving mechanism 4c. The drive unit 96 for each of the three shaft shifting control systems of the three-story moving mechanism 4 is driven by a dispenser for discharging a fluid such as a paste, and the motor 96a and the drive motor 96a are quantitatively sprayed. The drive ^96ca=the rotation of the motor is controlled in parallel, and the paste of the coating heads 3A on the eight sides of the first support member 5 can be applied at the same time.

的移動和第二支撐部件犯側的各、=動及第一支撐部件5A 第二支撐部件5B側的各塗佈頭3B的^ =進^的糊料塗佈、 H 86 蝴2^8==^ 200914146 器87 *控制各驅動部93〜96 ’描緣不同的第一塗佈圖幸 ϋ二塗佈圖案P2 (參照圖4、圖5及圖6)。 ” 同二t,例如’在第一塗佈條件及第二塗佈條件的各描綠尺寸不 i二安如圖4所示’將描繪尺寸不同的第一塗佈圖案P1及 在基板κ的塗佈®Ka上描繪多個。此外’在第 所ί 塗佈條件的各塗佈雜不同的情況下,如圖5 i反κίϋ形狀不同的第一塗佈圖案P1及第二塗佈圖案Ρ2在 塗佈條件的久^繪多個。此外’在第一塗佈條件及第二 (塗你'而忆 、、’、佈置不同的情況下,如圖0所示,將塗佈量 pi 工作臺2a上時,利部8/將基板K裝載於基板臺2的 定在工作臺2&上(步的基板吸附機構將基板Κ吸附並固 _一控支 對Y軸移動機構6A、6B並驅動馬達 (步驟s2 >卞“—:叉γ轴方向上移動到Υ軸描_始位置 一支撐部件5Γ偏^ 5Α觸Χ __構如,使第 開始位置(步驟各員3A在X軸方向上移動到X軸描繪 撐部件5A側的各塗饰’控制各Z彻多動機構& ’使第-支 置(步驟S4)。 月八在2軸方向上移動到z軸描繪開始位 此外,控制部8盥步驟 6A、6B並驅動馬達93d H〜S4亚行地控制一對Y軸移動機構 到丫軸描_純置支撐料5B在Y轴方向上移動 軸移動機構4a,使第二% 控制第二支撐部件5B側的X 上移動到X她糊細^ϋ5Β _各塗細3B在X軸方向 機構4c,使第二支撐(步騾S6);再者,控制各Z軸移動 °牛β側的各塗佈頭3B在Z軸方向上移動 200914146 到Z軸描緣開始位置(步驟S7 )。 步驟S4後,控制部8根據第一塗 5A側的各塗翻3A所進行的糊 ^ 的各塗佈頭3A的移動及第一皮禮邱杜弟支撐部件5八侧 :作臺2a不移動地予以固定。再 2 f板 件5A侧的全部塗佈頭3A進行描 J j^用第二支撐部 以僅由其中的—個或兩個塗佈頭3a進射^合限於此’例如,也可 叫^各^ 來控制第二支撐部件 佈圖案P2 (步驟S9)。這樣描繪多個第二塗 與第一塗佈圖案P1不同^第^ ^ /以上,描射The movement and the second support member are on the side of each side, and the first support member 5A on the second support member 5B side of the respective coating head 3B is coated with a paste, H 86 butterfly 2^8= =^ 200914146 The device 87 * controls each of the driving portions 93 to 96 'the first coating pattern different in the drawing pattern from the second coating pattern P2 (see Figs. 4, 5 and 6). With the same two t, for example, 'the green color size of the first coating condition and the second coating condition is not as shown in FIG. 4', the first coating pattern P1 having a different size will be drawn and the substrate κ A plurality of coatings are formed on the coating Ka. Further, in the case where the coatings of the first coating conditions are different, the first coating pattern P1 and the second coating pattern 不同2 having different shapes as shown in FIG. In the coating conditions, a lot of paintings are made. In addition, in the case of the first coating condition and the second (coating you, and recalling, ', and the arrangement is different, as shown in Fig. 0, the coating amount pi is worked. On the stage 2a, the substrate 8/loads the substrate K on the stage 2& of the substrate stage 2 (the substrate adsorption mechanism of the step adsorbs and fixes the substrate _ to the Y-axis moving mechanism 6A, 6B) Drive motor (step s2 > 卞 "-: fork γ axis direction moves to the Υ axis drawing _ start position a support member 5 Γ ^ Α Α _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Each of the finishes that are moved in the direction to the X-axis drawing support member 5A 'controls each Z-switching mechanism & 'Making the first support (step S4). The eighth is moved in the 2-axis direction In addition to the z-axis drawing start position, the control unit 8 drives the motors 93d H to S4 in the steps 6A, 6B and controls the pair of Y-axis moving mechanisms to the 丫-axis drawing _ pure support material 5B to move the axis in the Y-axis direction. The moving mechanism 4a moves the X of the second % control second support member 5B side to X, and the respective thin portions 3B are in the X-axis direction mechanism 4c to make the second support (step S6); Each coating head 3B that controls each Z-axis movement on the cow β side moves in the Z-axis direction from 200914146 to the Z-axis stroke start position (step S7). After step S4, the control unit 8 is based on each of the first coating 5A sides. The movement of each of the coating heads 3A of the paste 3A and the first skin of the first member of the support member 5A: the table 2a is fixed without moving. Further, all the coating heads 3A on the side of the plate 5A The second supporting portion is used to control only the one or two coating heads 3a to be limited to this. For example, the second supporting member cloth pattern P2 may be controlled. S9). The plurality of second coatings are different from the first coating pattern P1 in this way.

Ji · -r 3b - 頭3B進行描繪。 僅由/、中的一個或兩個塗佈 弟—支撐部件5A及第二支撐部件5B ^^仃。廷樣,由於 ===擺,件从及第二支 ^部件5‘因‘相同方 - -^-3t ί 控制一對γ轴移動機構从、® 置/步 塗佈頭M在χ軸方向上移_ χ軸退讓位置則的各 200914146 部使第二支撐 驟SU ),控制一對γ軸移動機構二上^夕動到Z軸退讓位置(步 在Υ軸方向上移動到Υ轴退讓位 ^弟-支撐部件5Β 支撐部件5Β側的X軸移動位置4f’& =再者,控制第二 佈頭3B在X轴方向上移 =—支^部件5B側的各塗 &最後,控制部8為了取下^板軸。 構釋放基板Κ向οι作臺2a上的吸附(步二基板吸附機 支撐部件5A側的各塗佈頭3A和第m ^這樣,由第- 3B在基板κ的塗佈面Ka上同時描 ^ = β側的各塗佈頭 樣,在第-支撐部件5Α侧的各塗佈佈卜Ρ2。這 ί各塗佈頭3Β之間姻_ 了 === 如上所述’根據本發明的第一眚你士々# 控制由第-支撐部件5Α側^塗^;^由第一塗佈條件來 各塗佈頭3Α的移動及第—支撐部H 2,_料的塗佈、 條件不同的第二塗佈條件來控、η根據與第-塗佈 3Β所進行的糊料的塗佈、各塗5關的各塗佈頭 的移動,且由第-支撐部件的ί塗的第二支撐部件5Β 塗佈圖案和第二支撐部件5B側 你=3Α所形成的糊料的 :=同並描繪在基板κ的塗佈面κ: 件5Α、5Β上分別設置的兩個塗佈H兩個支撐邛 5Α、5Β的塗佈頭3Α、3Β間 f7在各支撐部件 p卜P2。其結果,可由—個1 &、=^不同的塗佈圖案 板的生產可縮短每個基 佈條件布圖案的描繪尺寸分別不同的第-塗 形成的糊料的ί佈圖案3第:以? 5A側的各塗佈頭3A所 弟一支撐邻件5B側的各塗佈頭3B所形 16 200914146 的塗佈面Ka上,所^由二塗佈圖案P2赠在基板Κ 面板。 了由—個基板Κ製造尺寸不同的多種顯示 佈細彡細不同的第一塗 佈形狀不同的第-塗佈圖亲曰如圖5所不,由於可將塗 的塗佈面Ka上,戶^弟二塗佈圖案P2描綠在基板Κ 面板。 所以可由一個基板K製造形狀不同的多種顯示 及第=二來 = 艮佈量分別不同的第-塗佈條件 糊料的塗i彡=t5A_權職所形成的 料的4=3 :ίίϊ件5B側的各塗佈頭3B所形成的糊 二=Ϊ 進行描繪’由於可將塗佈量(塗佈面Ka上: 莱2七田、,、曰在基板κ的塗佈面以上 师圖 化並製造多種不同的顯示面板。 打根據規格使塗佈量變 此外’通過使第一支撐部件5Α的移 不會同h•在相同方向上移動,由於可防止 ί件5B因在相同方向上移動而羞生的擺動^以可在Ϊ Ϊ f 以上高精度地贿不同的塗佈圖㈣、Ρ2。 參照附圖來對本發明的另一個實施方式 第中,對與第-實施方式不同的=4發:第的 一實施方式中,與第一實施方式相比,將在第 ί方小,以實現糊料塗箱置1的小型化1者在I 第-實施方式中,與在第—實施方式化翻的部分相 17 200914146 用相同標記表示,並省略其說明。 多個第二實施方式中’在塗佈條件改變1各種資料㈣— 夕個儲存部83巾。例如,由第—主 :、種貝科而館存在 各塗佈頭3B所進行的第-次的^用的第f 部件5B側的 件、第二支撐部件5B側的各塗佈頭進U的第三塗佈條 的第四产佈條件㈣存麵存部8ft。進_—次的描繚用 在第二實施方式中,控制部8 理,可同時並行地控制第一支 進订不同的多種處 支撐部件5ΑU動f ί件^側的各塗饰頭3Α的移動及第- 二支撐部件5B的移佈頭3b的移動及第 經馬達控_6來控條 1及第四塗佈條件) 控制各驅動部93〜% ίΪ動 迦馬達控制器87來 侧的各塗=斤示,通過利用支撐部件5八 的各塗佈^ 會弟案P1並利用支標部件_ 佈圖宰P1及第-冷二塗佈圖案P2 ’從而描緣不同的第一塗 立二Γ,,各塗佈頭3A來描缘第三塗佈圖案P3並利用支樓 i第三‘圖來描繪第四塗佈圖案P4 ’從而描繪不同 圖案]νπ。、及第四塗佈圖案P4,並形成作為目標的塗佈 佈幵ϋϋ塗佈條件中’各塗佈形狀不同。第—塗佈條件的塗 條于的兩直線(圖8所示的塗佈圖案ρι),第二塗佈 =形狀為17字形線(圖8所示的塗佈圖案打),第三塗佈 狀為反销(圖9所示的塗佈圖案P”第= /、 形狀為互相平行的兩直線(图9所示的塗佈圖案p4)。 18 200914146 將塗佈形狀不同的第一塗佈圖案P1及第二塗 ,如圖9所示’將塗佈形狀不同的第三 A目,案P4並行地描緣。這樣’在基板K的塗佈面Ka上完 成作為目彳承的塗佈圖案Ml。 ^ 1 對糊料塗佈裳置1的塗佈動作進行說明。糊料塗佈穿置 工作Ϊ* 2 Λ不,百先,㈣部8在將基板K裝載於基板臺2的 固定:1作』= 部制部8控制一對Υ轴移動機構6Α、6Β,使第一# ;制第H轴方向上移動到¥軸描緣開始位置(步驟S2),並牙 機構-使第-支擇= 驟S3),·再:,f向上移動到X軸描繪開始位置(步 5B在Y Y轴移動機構6A、®,使第二支撐& 二支撐部件5B _ S4^並控制第 開始位置(步驟S6)。這樣機#一支移動到γ軸描繪 塗佈頭3A、3B及工作臺2 牙°卩件5A、弟一支撐部件5B、 然後,控制部8控制上的Ji · -r 3b - Head 3B is depicted. Only the one or two of /, the support member 5A and the second support member 5B are coated. In the case of the court, since the === pendulum, the piece and the second piece 5' are controlled by the same side - -^-3t ί, a pair of γ-axis moving mechanisms are controlled, and the / step coating head M is in the direction of the x-axis. Each of the 200914146 parts of the upshift _ χ axis retraction position causes the second support step SU) to control the pair of γ-axis moving mechanisms to move to the Z-axis retraction position (step moves in the Υ axis direction to the Υ axis retreat position) ^弟-Support member 5Β X-axis moving position 4f'&= on the side of the supporting member 5; further, controlling the second cloth head 3B to move in the X-axis direction = - each coating on the side of the member 5B & Finally, the control portion 8 In order to remove the shaft, the substrate is released from the substrate 2a (the second coating head 5A on the side of the substrate adsorber support member 5A and the m ^ ^, by the -3B in the substrate κ On the coated surface Ka, each of the coating heads on the side of the β side is simultaneously drawn, and each of the coating sheets on the side of the first support member 5 is coated with a cloth. This is the same as the coating head 3 === The first control item according to the present invention is controlled by the first support member 5; the movement of the respective coating heads 3 and the first support portion H 2, Coating The second coating conditions with different conditions are controlled, η is applied according to the coating of the first coating, the coating of each coating, and the coating of the first supporting member. The second support member 5 涂布 the coating pattern and the second support member 5B side of the paste formed by the =3 ::= and the two coatings respectively disposed on the coated surface κ of the substrate κ: 5, 5, 5 H The two coating heads 5Α, 5Β of the coating head 3Α, 3Β f7 are in each supporting part p P2. As a result, the production of each of the coating patterns of 1 & The ί cloth pattern 3 of the first-formed paste which is different in the drawing size of the cloth condition cloth pattern is formed by the respective coating heads 3B on the side of the support 5A on the side of the support 5A on the side of the 5A side. 16 On the coated surface Ka of 200914146, the second coating pattern P2 is supplied to the substrate 面板 panel. The first coating shape of the plurality of display fabrics having different sizes is different from the one substrate - As shown in Fig. 5, the coating pattern relatives can be painted on the coated surface Ka, and the second coating pattern P2 is painted on the substrate Κ panel. A plurality of displays having different shapes are produced from one substrate K, and the first coating condition of the second coating material is different from that of the first coating condition paste, i==5, which is formed by the right member, 4=3 : ίίϊ 5B The paste 2 = 形成 formed by each of the coating heads 3B on the side is depicted as 'the coating amount (the coated surface Ka: 莱 2 七田, 曰 曰 on the coated surface of the substrate κ A variety of different display panels. The amount of coating is changed according to the specification. By moving the first support member 5Α not in the same direction as h•, it is possible to prevent the 5 member 5B from being shy by moving in the same direction. Swing ^ can be used to accurately coat different coating drawings (4) and Ρ2 above Ϊ Ϊ f. Another embodiment of the present invention will be described with reference to the accompanying drawings. In the first embodiment, which is different from the first embodiment, the first embodiment is smaller than the first embodiment. In the first embodiment, the first embodiment of the paste coating unit 1 is denoted by the same reference numeral as the partial phase 17 200914146 which is turned over in the first embodiment, and the description thereof is omitted. In the plurality of second embodiments, the various conditions (4) of the coating conditions are changed. For example, the member on the f-th member 5B side and the second-side support member 5B on the second support member 5B are provided by the first main body, the genus Becko, and the coating head 3B. The fourth coating condition of the third coating strip (4) is stored in the storage portion 8 ft. In the second embodiment, the control unit 8 controls the first plurality of different support members 5 at the same time in parallel, and the respective finishing heads 3 on the side of the device The movement and the movement of the transfer head 3b of the second and second support members 5B and the first motor control unit 6 control the strip 1 and the fourth coating condition) respectively control each of the drive units 93 to The coating is indicated by the use of the support member 5B and the use of the support member _ 图 宰 宰 P1 and the second-coating pattern P2 ′ That is, each of the coating heads 3A draws the third coating pattern P3 and draws the fourth coating pattern P4' using the third drawing of the branch i to draw a different pattern] νπ. And the fourth coating pattern P4, and the coating coating conditions to be targeted are different from the respective coating shapes. The first coating condition is applied to the two straight lines (the coating pattern shown in FIG. 8), the second coating = the shape is a 17-shaped line (the coating pattern shown in FIG. 8), and the third coating The shape is a reverse pin (the coating pattern P shown in Fig. 9) = /, and the shapes are two straight lines parallel to each other (the coating pattern p4 shown in Fig. 9). 18 200914146 First coating having different coating shapes The pattern P1 and the second coating are as shown in FIG. 9 'the third A mesh having a different coating shape, and the case P4 is drawn in parallel. Thus, the coating as the target bearing is completed on the coated surface Ka of the substrate K. Pattern M1. ^ 1 The application operation of the paste application skirt 1 will be described. The paste application insertion operation Ϊ* 2 Λ No, the first, the (four) portion 8 is fixed to the substrate table 2 by the substrate K :1作』= The part 8 controls a pair of Υ-axis moving mechanisms 6Α, 6Β, and moves the first #; system in the H-axis direction to the ¥-axis stroke start position (step S2), and the tooth mechanism-making - Select = Step S3), · again:, f moves up to the X-axis drawing start position (Step 5B moves the mechanism 6A, ® on the YY axis, makes the second support & 2 support member 5B_S4^ and controls the start position( Step S6). Such a mobile machine # γ-axis depicts the coating head 3A, 3B and the table 2 ° Jie tooth member. 5A, 5B brother a supporting member, and then, the control unit 8 controls

,個塗佈頭3A在Z軸方====撐部件5A 2並控制各Z軸移動機構 ^二位置(步驟 佈碩3B在Z軸方向上 ,弟一支按精5B側的一個塗 接著,控制部會開始位置(步驟⑻。 :支撐部件5A_j塗^ =的件來控制第 佈頭3α的移動及第一支撐m糊料的塗佈、這些塗 (圖中的虛線);再者’根據g 描緣弟—塗佈圖案P1 據第—塗佈條件來控制第二支擇部件犯 19 200914146 士 ί塗佈頭3B所進行的糊料的塗佈、該塗佈頭3B的移動及 ί3 ί移動,描繪第二塗佈圖案P2( ®中的虛線)(步 的當-= 樣’在基板κ的塗佈面Ka上,描緣了塗佈形狀不同額 烏2的塗案P1及第二塗佈圖案P2 (參照圖8)。此時,基板 至2的工作$ 2a不移動地予以固定。 動和描緣時,控制部8也可使第一支撐部件5A的移 動支撐部件5B的移動在相反的方向上進行 3 二支撐部件5料會同時在相同方向上移動, 擺i撐部件5錢第二働件则在相同方向上 侧的塗構4c ’使第一支撑部件认 S-) ^ 頭犯f Z轴方向上移動到z轴^==的一個塗伟 部件一對Y袖移動機構6A、®,使第-狀 制第-支揮部= 向開始位置(步_2心 側的一個塗佈頭3A在X軸方向上轉叙a使第一支撐部件5A 驟S13),·再者,控制一對= 到^轴^繪開始位置(步 件5B在y轴方向上移動到使第二支撐部 第-支撐部件犯側的χ軸移動機構 (=S14) ’控制 兩個塗_ 3Β在X軸方向上f H支撐料5Β側的 ⑽,控制基板臺2的丫轴移動田繪開始位置(步驟 轴描繪開始位置(步驟S16)。這禕,μ ’使工作臺2a移動到Υ 部件5B、塗佈頭3Α、3β及工’弟:支撐部件5A、第二支撐 的位置待機。 至a的各部分在例如圖13所示 側的-個塗佈頭L 3構如,使第-支撐部件5A 驟S17),控制各z軸移動=! 2軸描繪開始位置 構4cn支撐部件的兩ς 20 200914146 第一支撐部件5A _—健條件來控制 塗佈頭3α的移動及第一支撐^ 的糊料的塗佈、其各 f描緣第三塗佈圖案叫圖中的虛i)u ’13所示那 ,制第二支撐部件5Β側的兩個 者=據3塗佈條件 佈、這些塗佈頭3B的移動及第二糊料的塗 所示那樣描緣第四塗佈圖宰(f , 5B的移動’並如圖13 在基板K的塗佈面^案除了(I的f線)(步驟叫這樣, P2以外,還描緣了塗佈形不塗佈圖案P1及第二塗佈圖案 圖案P4 (參照圖9 )。此^ L1二塗佈圖案P3及第四塗佈 固定。 匕^基板臺2的工作臺2a不移動地予以 塗控機構-,使第-_件- 叫控制各2軸移步驟 佈頭3B在Z轴方向上移動到z軸=,=的兩個塗 部件^在構6a ' ® ’使第-支撐 -Si 動位置如,使第-支細5二第 :=ί=γ=二制第,支撐部㈣ =:動 r :,置=二 =t ;?移動到基板送出位置(步驟叫 機構釋放心匕工ϋτ基板κ *彻基板*2的基板吸附 頭im ϋί各塗佈頭3a和第二支撐部件5β側的各塗^ 在基板κ的塗佈面以上同時描繪出*同的塗佈圖案ρι、 200914146 =2 ’ ^而’基板K在γ軸方向上移動,再者在基板κ的, a coating head 3A on the Z-axis side ==== support member 5A 2 and control each Z-axis moving mechanism ^ two positions (step Bu Shuo 3B in the Z-axis direction, the younger one according to the fine 5B side of one coating The control unit will start the position (step (8).: the support member 5A_j is coated with a member to control the movement of the cloth head 3α and the application of the first support m paste, these coatings (dotted lines in the figure); g 缘 弟 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 2009 Moving, depicting the second coating pattern P2 (dashed line in ®) (when the step -= sample) is applied on the coated surface Ka of the substrate κ, and the coating P1 and the second coating the different shapes of the frontal 2 are drawn. The pattern P2 is applied (see Fig. 8). At this time, the work $2a of the substrate to 2 is fixed without moving. The control portion 8 can also move the moving support member 5B of the first support member 5A during the movement and the stroke. In the opposite direction, the two support members 5 will move in the same direction at the same time, and the second member of the swing member will be in the same direction. 4c 'make the first support member recognize S-) ^ a slap in the Z-axis direction to the z-axis ^==, a pair of Y-sleeve moving mechanisms 6A, ®, so that the first-piece system Swing = to the start position (one coating head 3A on the heart side of step 2 is revolved in the X-axis direction to make the first supporting member 5A step S13), and again, control a pair = to ^ axis ^ painting start Position (step member 5B moves in the y-axis direction to the crucible moving mechanism (=S14) that causes the second support portion to be erected on the side of the support member's controll. 2 control _ 3 Β in the X-axis direction f H support material 5 Β side (10), controlling the boring axis movement starting position of the substrate table 2 (step axis drawing start position (step S16). Here, μ' moves the table 2a to the 部件 member 5B, the coating head 3 Α, 3β, and the worker' The position of the support member 5A and the second support is standby. Each part to a is in the form of a coating head L 3 on the side shown in Fig. 13, for example, the first support member 5A is step S17), and each z-axis is controlled. Move =! 2 axes depicting the starting position of the 4cn support member 20 200914146 The first support member 5A _ - the condition to control the movement of the coating head 3α and the coating of the first support ^ The third coating pattern of each of the f-strips is called the virtual i) u '13 in the figure, and the two sides of the second supporting member 5 are formed on the side of the second supporting member 5 according to the coating condition of the coating head 3B. The movement and the coating of the second paste are as shown in the fourth coating pattern (f, the movement of 5B) and as shown in Fig. 13 on the coated surface of the substrate K except (the f line of I) (the step is called In addition to P2, the coating-form non-coating pattern P1 and the second coating pattern pattern P4 are also described (see FIG. 9). This ^ L1 two coating pattern P3 and the fourth coating are fixed. The table 2a of the substrate table 2 is coated with a control mechanism without moving, so that the first plate member 3B is moved in the Z-axis direction to the z-axis =, = two coated members. ^ In the structure 6a ' ® ' to make the first - support - Si moving position, such as the first - branch fine 5 two: = ί = γ = two, the support (four) =: dynamic r:, set = two = t; Move to the substrate feeding position (the step is called the mechanism to release the hearth ϋ substrate κ * the substrate of the substrate * 2 the adsorption head im ϋ 各 each coating head 3a and the second supporting member 5β side of each coating ^ coating of the substrate κ At the same time, the same coating pattern ρι, 200914146 = 2 ' ^ and 'the substrate K is moved in the γ-axis direction, and further on the substrate κ

Ka上同時描繪出不同的塗佈圖案ρ3、ρ4。這樣, t 佈面Ka上形成了作為目標的塗佈圖案M1。 土 的塗 如上所述,根據本發明的第二實施方式,與第一 ^ ’通過同時並行地描繪不同的塗佈圖案p =3產二’可以縮短每個基板的生產規制時間塗^ f 12a ^ ^ 左端部(圖中)時,則在架臺“的Ka also paints different coating patterns ρ3, ρ4. Thus, the target coating pattern M1 is formed on the t-face Ka. Coating of soil As described above, according to the second embodiment of the present invention, it is possible to shorten the production regulation time of each substrate by simultaneously drawing a different coating pattern p = 3 by two in the same way. ^ ^ When the left end (in the picture) is on the gantry

空間SP1。此外’如果基板Y 5A用的描緣用的空間sp卜這樣、,第一支擇部件 任-端部側形成了描繪用的空間刺,所Υ軸方向的 轴方向兩側設置描繪用的空間讲卜5 板室2的γ 轴方向的移動而描繪不同的塗 ^板K的γ 作為目標的塗佈圖案M卜所圖一案:、二P4,並形成了 及第二支撐部件5B的移動範圍件5A的移動範圍m 基板K的場合變小。 ^ “、、圖12及圖13)比固定 據此,根據本發明的第二竇祐 部件5A側的塗佈頭3A及第二’通過根據在每個第一支撐 的塗佈條件來控制基板臺2 f 5B _塗佈頭3B上不同 件5A側的各塗佈頭制第-支撐部 移動及第-支撐部件5A的移 ^ ^塗佈、故些塗作頭3A的 佈頭犯所進行的糊料的塗伟、、:32第二支撐部件5B側的各塗 部件5β的移動,且使第—支浐佈頭3B的移動及第二支撐 的糊料的塗佈圖案和第二支#^牛5Α側的各塗佈頭3Α所形成 糊料的塗佈圖案不同而將它:二?侧的各塗佈頭3Β所形成的 的形狀描繪在基板Κ的塗佈面Ka 22 200914146 ί向ί:二?方向上移動相應地在基板κ的γ軸 缸古/成了撝繪用的空間SP1,進而,盥基板κ的γ 了塗佈形狀獨的塗佈圖㈣、㈣、 p4,f形成了作為目標的塗佈圖案Mb 比現^置t兩t支^部件5Α、5β的各自的移動範圍m、H2 用的空_ Γ所以Y軸方向的兩側設置描緣 ,、g@ j現糊科塗佈裝置1的小型化。 圖案和第二Him:支撐部件5A側的塗佈頭3A所形成的塗佈 根板K的二丈J側的塗佈頭3B所形成的塗伟圖案不同並 ϊίίί ί重複進行描繪,且在基板K的塗佈面以上 S I t 足而將塗佈形狀不同的各種塗佈圖 ^以描硌作為目;形成了作為目標的塗佈圖案mi,所以 』以抱了作為目“而具有各種塗_狀的塗佈圖案mi。 此外’通過使第一支撐部件SA的移動和第二支撐 其他實施方式 内可本種t月更並不限於上述實施方式,在不脫離其主旨的範圍 =如,雖然在上述實施方式巾,僅設置兩個續部件 二5A及第二支撐部件5B,但並不限於此,例如,也= 叹置二個或以上。例如,在除了第一支撐部件5A及第二 5严之外還設置第三支撐部件的情況下,除了根據第一塗二= 第二塗佈條件進行控制之外,通過根據第三塗佈條件來控制、夕 二支撐部件支撐的各塗佈頭所進行的的糊料的塗佈、各 移動及第三支撐部件的移動,使塗饰圖案不同地進行描绛,〜的 可在各支擇部件的塗佈頭間對一個基板K描續·不同的三個塗^^ 23 200914146 案。 置三上3ΐ的:施方式中,對-個支 撐部件5Α、5Β設 個或者四個以上。 S亚不限於此,例如’也可設置-個或兩 等氣體而從啦氣或壓縮氮氣 根據在儲細綱了控制部8 (主電腦Si) 88〜% 各種資料等來控制各驅動部 行各驅動部糊財和各鮮料等並進 佈條件描κ的塗佈面Ka上以第一塗 -"τ:ίίί:® 動速^ (塗你瓸π内70成描綠,亦可在任何塗佈條件採修正移 間的:料的ί出相對移動速度)和喷出壓力(每單位時 的條件下都將移動速度設定為容許用最大速度 同&並配人銘叙較早地結束者的塗佈條件將移動速度減小的 小使喷出壓力下降’就可以與描繪較慢 声:ίj 3 r?繪所需的時間相一致。再者,讓移動速 的母早位長度的喷出量保持一定。 交棚料 ®Hi亦了在儲存部Μ中用對基板K的塗佈面Ka的兩個备 束的時間相同之觸^ 此外,在用儲存部83中儲存的塗佈條件來進行塗佈圖案的插 心的情況下’用主電腦81在描緣前判斷塗佈頭3A、3B之間= 同支撐部件5A、犯上的塗佈頭SA、犯之間或不同的支撐部件 24 200914146 Άτϋϋ塗佈-頭3*A、3B之⑷是否產生干涉,在干涉的情況 用顯不器顯示或聲音來通知進行塗佈條件修正的警報。 似1如L在第一實施方式中,在儲存部83中儲存的第一塗佈條 一塗ΐ條件下使用多個塗佈頭3A、3B來塗佈的情況下, 料值(例如,塗俩^林會干涉的最 二塗;:=== 個=下的航下,判=上= 生塗佈=3&=爾侧案P1、Κ的描种將發 ^樣^,由於可防止在塗佈圖案的描繪中所產生塗佈頭之 ,干"’又ϋ能防止因塗佈頭之間的干涉所 : 佈頭的損傷,因而可高效率地進行塗佈作業。…、良口塗 θ 【圖式簡單說明】 =是表示本發明第—實施方式的糊料塗佈裝置的簡要構成的立 =予J示圖1所示的糊料塗佈裝置的俯視圖. 2所示的糊爾置物^ 圖4是表示本發明第一實施方式的描繪尺 及第二塗饰圖案的俯視圖; 的第一塗佈圖案 圖5是表示本發明第一實施方式的塗 及第二塗佈圖案的俯視圖; 邊不间的第-塗佈圖案 圖6是表示本發明第—實施方 第二塗佈圖案的俯視圖; 布置不间的弟一塗佈圖案及 圖7是表示圖1及圖2所示_料塗條置所進行的塗佈動作的 25 200914146 流程的流程圖; 圖8是表示本發明第二實施方式的塗佈形狀不同的第一塗 及第二塗佈圖案的俯視圖; 圆木 圖9是表示本發明第二實施方式的塗佈形狀不同的第= 及第四塗佈圖案的俯視圖; -案 置所進行的塗佈動 圖1 〇是表示本發明第二實施方式的糊料塗佈裝 作的流程的流程圖; 圖11是表示本發明第二實施方式的糊料塗佈裝 作的流程的流糊; m所進仃的塗佈% 圖12是用於說明圖10及圖u所示的塗佈 示糊料塗佈裝置的俯視圖; 忭的5兄明圖,且是表 圖,用於說額1G及圖„所示的塗佈 示糊料塗佈裝置的俯視圖。 的°兄月圖,且是表 【主要元件符號說明】 1 糊料塗佈裝置 2 基板臺 2a 工作臺 2b Y轴移動機構 3A 塗佈頭 3B 塗佈頭 3a 容納筒 3b 喷嘴 4a X轴移動機構 4b Y轴移動機構 4c Z軸移動機構 4A 第一頭移動機構 4B 第二頭移動機構 5 A 第一支撐部件 26 200914146 5B 第二支撐部件 6A、6BY軸移動機構 7 架臺 8 控制部 31 夾具 32 托座 41 移動工作臺 42 導引部件 81 主電腦 82 輔助控制設備 83 儲存部 84 操作部 85 資料製作部 86、87馬達控制器 88、89、90、91、92、93、94、95、96 驅動部 88a、88d、90a、91a、92a、 93a、93d、94a、95a、96a 馬達 88b、88e、90b、91b、92b、 93b、93e、94b、95b、96b 編碼 88c、88f、90d、91c、92c、93c、 93f、94c、95d、96c 驅動器 90c、95c鐳射位移計 Ka 塗佈面 K 基板 27Space SP1. In addition, in the case of the space sp for the substrate Y 5A, the space for the drawing is formed on the first-end side of the first member, and the space for drawing is provided on both sides in the axial direction of the axis direction. In the gamma-axis direction of the plate chamber 2, the gamma of the different coating plates K is drawn as the target coating pattern M, and the second P4 is formed and the moving range of the second supporting member 5B is formed. The movement range m of the piece 5A becomes small in the case of the substrate K. ^,, FIG. 12 and FIG. 13 are fixed, according to the present invention, the coating head 3A and the second 'on the second sinusoidal member 5A side according to the present invention control the substrate according to the coating conditions at each of the first supports. In the table 2 f 5B _ coating head 3B, the first support portion movement of each coating head on the different 5A side and the movement of the first support member 5A are applied, so that the cloth head of the head 3A is made. The coating of the paste, the movement of each of the coating members 5β on the side of the second supporting member 5B, and the movement of the first supporting cloth head 3B and the coating pattern of the second supporting paste and the second branch #^ The coating pattern of the paste formed by each of the coating heads 3 on the side of the cow 5 is different, and the shape formed by the coating heads 3 on the second side is drawn on the coated surface of the substrate Ka Ka 22 200914146 ί to ί In the second direction, the γ-axis cylinder of the substrate κ is correspondingly formed into the space SP1 for the drawing, and further, the γ of the 盥 substrate κ has a coating pattern (4), (4), p4, and f. The target coating pattern Mb is different from the current movement range m and H2 of the two t-pieces 5, 5, and the space _ 用 for the two sides of the Y-axis direction. , g@j The miniaturization of the paste coating apparatus 1. The pattern and the second Him: the coating head 3B of the coated root K formed by the coating head 3A on the side of the support member 5A The coating pattern is different and 重复 ί ί 重复 , , , 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复 重复Therefore, there is a coating pattern mi of various coatings in the form of "holding". In addition, the movement of the first support member SA and the second support may be further limited to the above embodiments in other embodiments, without departing from the scope of the gist = if, in the above embodiment, only The two continuation members 2A and 2B are provided, but are not limited thereto, and for example, sighs two or more. For example, in the case where the third support member is provided in addition to the first support member 5A and the second 5 member, in addition to the control according to the first coating 2 = second coating condition, by the third coating condition The application of the paste by the coating heads supported by the support members and the movement of the third support members are performed to control the painting patterns differently, and the selection can be made in each of the coating patterns. The coating head of the component is described for one substrate K and three different coatings. Three sets of three turns: In the application mode, one or four or more support members 5Α, 5Β are provided. The S-sub is not limited to this, for example, 'the gas may be set to one or two, and the driving of each driving unit may be controlled from the gas or compressed nitrogen according to the control unit 8 (main computer Si) 88%% of various materials. The paste and the fresh materials are placed on the coated surface Ka of the conditional drawing κ. The first coating is used as the first coating-"τ: ίίί®® speed ^ (painting 瓸 π within 70% of the green, can also be applied in any coating The cloth condition is corrected for the movement: the relative movement speed of the material and the discharge pressure (the movement speed is set to allow the maximum speed to be the same as the & The coating conditions will reduce the speed of the spray to reduce the discharge pressure'. It can be consistent with the time required to draw a slower sound: ίj 3 r?. Again, let the moving speed of the mother's early length spray The throughput is kept constant. The screed material® Hi also has the same contact time for the two preparations of the coated surface Ka of the substrate K in the storage portion, and the coating conditions stored in the storage portion 83. In the case of the insertion of the coating pattern, the main computer 81 is used to judge the coating heads 3A and 3B before the stroke = the same Whether the support member 5A, the coated coating head SA, or the different support members 24 200914146 Άτϋϋ coating-head 3*A, 3B (4) interfere with each other, and in the case of interference, the display is displayed by the display or sound. An alarm for correcting the coating conditions is performed. As in the first embodiment, the first coating strip stored in the storage portion 83 is coated with a plurality of coating heads 3A and 3B under the conditions of coating. Next, the material value (for example, the two coatings that will interfere with the two forests;: === one = the next flight, the judgment = the upper = the raw coating = 3 & = the side case P1, the description of the 将 will The film can prevent the coating head from being produced in the drawing of the coating pattern, and the dry "' can prevent the interference between the coating heads: the damage of the cloth head, so that the drying can be performed efficiently [Coating operation]., a good coating θ [Simplified description of the drawings] = is a schematic configuration of the paste application device according to the first embodiment of the present invention. FIG. 4 is a plan view showing a drawing ruler and a second finish pattern according to the first embodiment of the present invention; FIG. 5 is a plan view showing the coating and the second coating pattern according to the first embodiment of the present invention; the first coating pattern of the first embodiment of the present invention is a second coating pattern of the first embodiment of the present invention. FIG. 7 is a flow chart showing the flow of 25 200914146 for the coating operation performed by the coating strip shown in FIGS. 1 and 2; FIG. 8 is a second plan view showing the second embodiment of the present invention; FIG. 9 is a plan view showing the first and fourth application patterns having different coating shapes according to the second embodiment of the present invention; The application chart 1 is a flow chart showing the flow of the paste application device according to the second embodiment of the present invention. FIG. 11 is a view showing the paste application device of the second embodiment of the present invention. Flow of paste of the flow; % of coating applied by m is shown in Fig. 12 is a plan view for explaining the application of the paste application device shown in Fig. 10 and Fig. 5; It is a top view of the coating paste application apparatus shown in the 1G and FIG. ° brother and moon diagram, and is a table [main component symbol description] 1 paste coating device 2 substrate table 2a table 2b Y-axis moving mechanism 3A coating head 3B coating head 3a housing cylinder 3b nozzle 4a X-axis moving mechanism 4b Y-axis moving mechanism 4c Z-axis moving mechanism 4A First head moving mechanism 4B Second head moving mechanism 5 A First support member 26 200914146 5B Second support member 6A, 6BY Axis moving mechanism 7 Rack 8 Control portion 31 Clamp 32 Bracket 41 Moving table 42 Guide member 81 Main computer 82 Auxiliary control device 83 Storage unit 84 Operation unit 85 Data creation unit 86, 87 Motor controllers 88, 89, 90, 91, 92, 93, 94, 95, 96 Drives 88a, 88d, 90a, 91a, 92a, 93a, 93d, 94a, 95a, 96a motors 88b, 88e, 90b, 91b, 92b, 93b, 93e, 94b, 95b, 96b encode 88c, 88f, 90d, 91c, 92c, 93c, 93f, 94c, 95d, 96c driver 90c, 95c laser displacement meter Ka coated surface K substrate 27

Claims (1)

200914146 ι· 、申請專利範圍: 糊料塗佈裝置,其特徵在於,具備: 弟一及第二塗佈頭,其在塗佈對象物的塗佈面上分別塗 第一可在沿上述塗佈面的第一軸向上移動地支撐 軸2了塗佈頭,並可移動地設置在沿上述塗佈面的第二 第一部件’其可在上述第一軸向上移動地支撐上述第二塗 件^^可移動地設置在上述第二軸向上的第二支撐部 丨卞,Μ及 構Γ述ί樹糊料的塗佈相關的第一塗佈條件來控制 ίϊί二頭所進行的上述糊料的塗佈、上述第-塗佈 佈体杜π及上述第一支撐部件的移動,根據與上述第一塗 =不同的第二塗佈條件來控制上述第:塗佈‘/ ί撐部塗佈、上述第二塗佈頭的移動及上述第二 的^网安4 ’且使上述第一塗佈頭所進行的上述糊料 圖案不同並描繪在上述塗佈面上。 ·±神 2 如申明專利範圍第1項所述之糊料塗佈裝置,苴 ίϊηίϋί H塗佈圖案的描緣尺寸分別不同的 ΐί ί Γ ΐί 述第二塗佈條件,使上述第一塗佈頭所 塗佈圖案和上述第二塗饰頭所形成的上述 糊枓的塗佈圖案不同來進行。 凡j 、 如申明專利範圍第1項所述之糊料塗佈褒置,宜 ίί ϊίΐί根據上^塗佈圖案的塗佈形狀分別不同的 m二布條件及上述第二塗佈條件,使上述第一塗佈頭所 域的上補料的塗佈圖案和上述第二塗佈頭所形成的上述 28 200914146 糊料的塗佈圖案不同來進行。 4 .如申請專利範圍第i項所述之糊料塗 j構件的描緣係根據上述糊料的塗佈^分/不 -塗佈條件及上述第二塗佈條件,使 °、述第 塗佈圖案不同來^边第一塗佈頭所形成的上述糊料的 5 6 1申請專利範圍第1〜4項中任一項所述之糊料塗佈裝置,其 件的鱗雜上述第—支撐料的轉和 撐部件的移動在相反的方向上來進行。 丈弟-支 一種糊料塗佈方法’其特徵在於: 根據與糊料的塗佈相關的第一塗佈條 佈糊料的第-塗佈頭所進 -軸向上移動地支撐上述第—塗佈頭並可飾 奸姑f上述塗佈面的第二軸向上的第—支撐部件的移ί. 佈、上述第二塗佈頭的移動及可在上述第上 地支撐上述第二塗佈職可移動地設置 上的上述第二支撐部件的移動;以及 1罘一釉向 使上述第-塗佈頭所進行的上賴料的塗麵案和上二 塗佈頭所進行的上述糊料的塗佈圖案不同並描& 塗佈面上。 、日π丄、 7 •如申請專利範圍第6項所述之糊料塗佈方法,其中, 29 200914146 根據上述塗佈圖f的描繪尺寸分別不同的上述第— ϋΪΪ二塗佈f件:使上述第—塗佈頭所形成的上述糊料的 、、布圖案和上述第二塗佈頭所形成的上述糊料的塗佈圖案 同並進行描繪。 … •如申睛專利範圍第6項所述之糊料塗佈方法,其中, 根據上述塗佈圖案的塗佈形狀分別不同的上述第— ϋίίί塗佈條件,使上述第-塗佈頭所形成的上述糊料的 ===述第二塗佈頭所形成的上述糊料的塗佈圖案不 9 •如申請專利麵第6項所述之補塗佈方法,其 述糊料的塗佈量分別不同的上述第一塗佈 第一塗佈條件,使上述第一塗+ 、 L 案和上η 佈撕M的上述糊料的塗佈圖 储繪。4 —塗佈 成的上述糊料的塗佈_不同並進 其 1〇 · ^;申請專利範,〜9射任—項所述之糊料塗佈方法, 卩件的軸和上述第二讀部件的移動在相 1卜:種糊料塗佈裝置,其特徵在於,具備: 弟iii 頁i第二塗佈頭,其在塗佈對象物的塗佈面上分別 第一ΐίΐί二的第一轴向上移動地支 第二輛ί上可移動地設置在沿上述塗佈面的 第二支撐部件,其可在上述第—軸向上移動地支撐上述第二 30 200914146 她i佈頭,並可_地設置在上卿二軸向上的; H其使上缝佈縣齡上鄕二!的上移動; Μ及 據述嶋的塗仙義條件,對每個上述 ί上ίίζ上述第二塗佈頭各不相同的塗佈條件來控 Hi佈、上述第—塗佈_義及上述第—支禮部^ #、述第二塗佈頭所進行的上述糊料的塗 f 杉—塗佈頭的移動及上述第二支撐部件的移 2上ίί上:一塗佈頭所形成的上述糊料的塗佈圖案 一塗佈頭所形成的上述糊料的塗佈圖案不同並 將此等塗佈形狀描繪在上述塗佈面上。 12 •如申請專利範圍f 1!項所述之糊料塗佈裝置, ΐΪίΪ的係使上述第一塗佈頭所形成的上述塗佈圖案 動來重複來進行’在上述塗佈面上形成作為目 13 14 利範圍第11或12項所述之糊料塗佈裝置,其中, ^ 述構件的描繪係使上述第—支撐部件的移動和上述 撐部件的移動在相反的方向上來進行。 一 料塗佈方法’係有關糊料塗佈條件,其特徵在於: 根據糊料的塗佈相關的條件’即對每個在塗佈物件物的塗 佈面上分別塗佈糊料的第一塗佈頭及第二塗佈頭之各 相同的塗佈條件來控制使上述塗佈物件物在沿上述塗佈 面的第二軸向上移動的移動機構; 控制上述第-塗佈頭所進行的上述糊料的塗佈、上述第一塗 31 200914146 $的移動及可在沿上述塗佈面的第—轴向上移動地支 ^上,第-_職可移動地設置在上述第 第一支撐部件的移動; 旧 控制第二塗佈頭所進行的上述糊料的塗佈、上述第二塗 =的移動及可上述第-軸向上軸地支撐上述第二塗 ==地設置在上述第二軸向上的第二支撐部件 使上上述糊料的塗佈®案和上述第二 佈它們的塗 15 16 其中 .利範圍第14項所述之糊 =====佈圖案和上述第二塗佈頭 重複進行勝且在 反的方向上進行。 玟弟一支撐部件的移動在相 32200914146 ι. Patent Application: A paste application device comprising: a first one and a second coating head, which are coated on the coated surface of the object to be coated, respectively, along the above coating The first axially movable support shaft of the surface supports the coating head, and is movably disposed on the second first member along the coated surface to support the second coating member in the first axial direction ^^ movably disposed in the second axial direction of the second support portion Μ, and the first coating condition related to the coating of the λ tree paste is controlled to control the paste prepared by the two ends The coating, the first coating cloth du π, and the movement of the first support member are controlled according to a second coating condition different from the first coating = coating: coating And moving the second coating head and the second web cover 4', and the paste pattern performed by the first coating head is different and drawn on the coated surface. ·±神2 As described in the patent application scope, the paste coating device of the first aspect of the invention, the coating size of the coating pattern is different, and the second coating condition is described to make the first coating The coating pattern of the head is different from the coating pattern of the paste formed by the second coating head. In the case of the paste coating device according to the first aspect of the patent application, it is preferable that the above-mentioned coating shape of the coating pattern is different, and the second coating condition is The coating pattern of the upper feeding in the region of the first coating head is different from the coating pattern of the above-mentioned 28 200914146 paste formed by the second coating head. 4. The drawing of the paste-coated member according to item i of the patent application scope is based on the coating/non-coating conditions of the paste and the second coating condition, so that the first coating is applied. The paste coating device according to any one of the first to fourth aspects of the present invention, wherein The movement of the support and the movement of the brace member takes place in the opposite direction. The present invention is characterized in that: the first coating head of the first coating strip paste associated with the coating of the paste is supported in the axial direction to support the first coating The cloth head can be attached to the second support member in the second axial direction of the coated surface, the movement of the second coating head, and the second coating position can be supported on the first surface. Movably arranging movement of the second support member; and coating the glazing to the coating of the first coating head and the paste of the upper coating head The coating pattern is different and the & coated surface. The bismuth coating method according to the sixth aspect of the invention, wherein: 29 200914146, according to the above-mentioned coating drawing f, the above-mentioned first-second coating f-pieces are different: The coating pattern of the paste formed by the first coating head and the coating pattern of the paste formed by the second coating head are drawn together. The paste coating method according to the sixth aspect of the invention, wherein the first coating head is formed according to the coating condition of the coating pattern of the coating pattern being different from the first coating condition === The coating pattern of the paste formed by the second coating head is not 9; The coating method according to Item 6 of the patent application, the coating amount of the paste The first coating first coating conditions are different, and the coating patterns of the pastes of the first coating +, L and the upper η tearing M are stored. 4 - coating of the above-mentioned paste to be coated _ differently into the first 〇 · ^; patent application, ~ 9 shot - the paste coating method, the axis of the element and the second reading part The movement of the first layer: a paste application device, comprising: a second coating head of a page iii, which is the first axis of the first object on the coated surface of the object to be coated a second support member movably disposed on the coated surface, the second support member movably disposed on the coated surface, and movably supporting the second 30 200914146 on the first axial direction, and can be set In the upper axis of the upper two sides; H which makes the upper sewing cloth county 鄕 鄕 ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! 条件 条件 条件 条件 条件 条件The same coating conditions are used to control the movement of the coated cedar-coating head of the above-mentioned paste by the Hi cloth, the above-mentioned first coating method and the above-mentioned first branching unit ##, the second coating head The second support member is moved on the top surface of the paste: a coating head formed by the coating head Applying the paste to a different pattern and the like of this coating on the coating surface shape is depicted. [12] The paste application device according to the application of the first aspect of the invention, wherein the coating pattern formed by the first coating head is repeated to perform 'formation on the coated surface The paste application device according to Item 11 or 12, wherein the drawing of the member causes the movement of the first support member and the movement of the support member in opposite directions. The first coating method is a paste coating condition, which is characterized in that: according to the conditions related to the application of the paste, that is, the first coating of each of the coated surfaces on the coated article And applying the same coating conditions of the coating head and the second coating head to control a moving mechanism for moving the coated object in the second axial direction along the coated surface; controlling the first coating head The coating of the paste, the movement of the first coating 31 200914146 $ and the movement of the first coating 31 200914146 $ can be performed on the first axial direction of the coated surface, and the first support member is movably disposed on the first support member Moving; the application of the paste applied by the second coating head, the movement of the second coating = and the first axially supporting the second coating == are disposed on the second shaft The upwardly facing second support member causes the coating of the above paste and the coating of the second cloth 15 16 of the above, wherein the paste according to the item 14 of the range is =====cloth pattern and the second coating described above The head repeats and wins in the opposite direction. The movement of a support member of the younger brother is in phase 32
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