KR20060044916A - Radiation-sensitive composition, color filter, and color liquid crystal display device for color filter - Google Patents
Radiation-sensitive composition, color filter, and color liquid crystal display device for color filter Download PDFInfo
- Publication number
- KR20060044916A KR20060044916A KR1020050025907A KR20050025907A KR20060044916A KR 20060044916 A KR20060044916 A KR 20060044916A KR 1020050025907 A KR1020050025907 A KR 1020050025907A KR 20050025907 A KR20050025907 A KR 20050025907A KR 20060044916 A KR20060044916 A KR 20060044916A
- Authority
- KR
- South Korea
- Prior art keywords
- meth
- acid
- acrylate
- weight
- pigment
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 82
- 230000005855 radiation Effects 0.000 title claims abstract description 63
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 19
- 239000000049 pigment Substances 0.000 claims abstract description 85
- 239000000178 monomer Substances 0.000 claims abstract description 53
- 239000002270 dispersing agent Substances 0.000 claims abstract description 38
- 239000011347 resin Substances 0.000 claims abstract description 35
- 229920005989 resin Polymers 0.000 claims abstract description 35
- 239000002904 solvent Substances 0.000 claims abstract description 29
- 150000001412 amines Chemical class 0.000 claims abstract description 27
- 239000002253 acid Substances 0.000 claims abstract description 25
- 229920006243 acrylic copolymer Polymers 0.000 claims abstract description 6
- 238000010551 living anionic polymerization reaction Methods 0.000 claims abstract description 4
- 238000010539 anionic addition polymerization reaction Methods 0.000 claims abstract description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 78
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 76
- 229920001577 copolymer Polymers 0.000 claims description 64
- -1 2-ethylhexyl Chemical group 0.000 claims description 58
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 51
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 26
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 24
- 150000001252 acrylic acid derivatives Chemical class 0.000 claims description 12
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 11
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 claims description 10
- 239000003513 alkali Substances 0.000 claims description 10
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 9
- 239000004793 Polystyrene Substances 0.000 claims description 8
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 8
- 229920002223 polystyrene Polymers 0.000 claims description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 7
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 7
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 claims description 6
- JAGRUUPXPPLSRX-UHFFFAOYSA-N 4-prop-1-en-2-ylphenol Chemical compound CC(=C)C1=CC=C(O)C=C1 JAGRUUPXPPLSRX-UHFFFAOYSA-N 0.000 claims description 5
- 125000005439 maleimidyl group Chemical class C1(C=CC(N1*)=O)=O 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 53
- 239000000852 hydrogen donor Substances 0.000 description 31
- 239000010408 film Substances 0.000 description 29
- 238000000034 method Methods 0.000 description 29
- 150000001875 compounds Chemical class 0.000 description 27
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 25
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 21
- 239000006185 dispersion Substances 0.000 description 20
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 19
- 230000008569 process Effects 0.000 description 18
- 238000011161 development Methods 0.000 description 16
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 14
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical class SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 11
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 11
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 10
- 238000011109 contamination Methods 0.000 description 10
- 238000007334 copolymerization reaction Methods 0.000 description 10
- 229920000642 polymer Polymers 0.000 description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 239000003999 initiator Substances 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- 238000003860 storage Methods 0.000 description 9
- 239000001384 succinic acid Substances 0.000 description 9
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 8
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 8
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Natural products CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- 239000000654 additive Substances 0.000 description 7
- 230000000996 additive effect Effects 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 125000003396 thiol group Chemical group [H]S* 0.000 description 7
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical class NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 150000008062 acetophenones Chemical class 0.000 description 6
- 125000003277 amino group Chemical group 0.000 description 6
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 6
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 6
- 125000000623 heterocyclic group Chemical group 0.000 description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- 150000007524 organic acids Chemical class 0.000 description 6
- 150000004027 organic amino compounds Chemical class 0.000 description 6
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 5
- 239000002202 Polyethylene glycol Substances 0.000 description 5
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000012860 organic pigment Substances 0.000 description 5
- 229920001223 polyethylene glycol Polymers 0.000 description 5
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical group CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 5
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 5
- 150000003918 triazines Chemical class 0.000 description 5
- BLLFPKZTBLMEFG-UHFFFAOYSA-N 1-(4-hydroxyphenyl)pyrrole-2,5-dione Chemical compound C1=CC(O)=CC=C1N1C(=O)C=CC1=O BLLFPKZTBLMEFG-UHFFFAOYSA-N 0.000 description 4
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 4
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 4
- CWLKGDAVCFYWJK-UHFFFAOYSA-N 3-aminophenol Chemical compound NC1=CC=CC(O)=C1 CWLKGDAVCFYWJK-UHFFFAOYSA-N 0.000 description 4
- PLIKAWJENQZMHA-UHFFFAOYSA-N 4-aminophenol Chemical compound NC1=CC=C(O)C=C1 PLIKAWJENQZMHA-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 4
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 4
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 4
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 4
- 238000005227 gel permeation chromatography Methods 0.000 description 4
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 4
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 4
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 4
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 4
- GJRQTCIYDGXPES-UHFFFAOYSA-N isobutyl acetate Chemical compound CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 4
- 125000006678 phenoxycarbonyl group Chemical group 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
- 150000003923 2,5-pyrrolediones Chemical class 0.000 description 3
- JKQRNTIBBOTABS-UHFFFAOYSA-N 2-(2,4-dichlorophenyl)-1-[2-(2,4-dichlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC(Cl)=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC(Cl)=CC=2)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 JKQRNTIBBOTABS-UHFFFAOYSA-N 0.000 description 3
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000007933 aliphatic carboxylic acids Chemical class 0.000 description 3
- 150000003973 alkyl amines Chemical class 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 3
- 229940018557 citraconic acid Drugs 0.000 description 3
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 3
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 3
- 239000001530 fumaric acid Substances 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 239000001023 inorganic pigment Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 3
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 3
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 2
- YWODHBPFOGXUFX-UHFFFAOYSA-N 1-(3-hydroxyphenyl)pyrrole-2,5-dione Chemical compound OC1=CC=CC(N2C(C=CC2=O)=O)=C1 YWODHBPFOGXUFX-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- RWEAGLZFYKQPLZ-UHFFFAOYSA-N 1-[4,5-diphenyl-2-(2,4,6-trichlorophenyl)imidazol-2-yl]-4,5-diphenyl-2-(2,4,6-trichlorophenyl)imidazole Chemical compound ClC1=CC(Cl)=CC(Cl)=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC(Cl)=CC=2Cl)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 RWEAGLZFYKQPLZ-UHFFFAOYSA-N 0.000 description 2
- HNAGHMKIPMKKBB-UHFFFAOYSA-N 1-benzylpyrrolidine-3-carboxamide Chemical compound C1C(C(=O)N)CCN1CC1=CC=CC=C1 HNAGHMKIPMKKBB-UHFFFAOYSA-N 0.000 description 2
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 2
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 2
- RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 2
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Chemical compound C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 description 2
- OJVAMHKKJGICOG-UHFFFAOYSA-N 2,5-hexanedione Chemical compound CC(=O)CCC(C)=O OJVAMHKKJGICOG-UHFFFAOYSA-N 0.000 description 2
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- MHDULSOPQSUKBQ-UHFFFAOYSA-N 2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 MHDULSOPQSUKBQ-UHFFFAOYSA-N 0.000 description 2
- ZJRNXDIVAGHETA-UHFFFAOYSA-N 2-[2-(3,4-dimethoxyphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=C(OC)C(OC)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 ZJRNXDIVAGHETA-UHFFFAOYSA-N 0.000 description 2
- GOJUJUVQIVIZAV-UHFFFAOYSA-N 2-amino-4,6-dichloropyrimidine-5-carbaldehyde Chemical group NC1=NC(Cl)=C(C=O)C(Cl)=N1 GOJUJUVQIVIZAV-UHFFFAOYSA-N 0.000 description 2
- KJJPLEZQSCZCKE-UHFFFAOYSA-N 2-aminopropane-1,3-diol Chemical compound OCC(N)CO KJJPLEZQSCZCKE-UHFFFAOYSA-N 0.000 description 2
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- WXUAQHNMJWJLTG-UHFFFAOYSA-N 2-methylbutanedioic acid Chemical compound OC(=O)C(C)CC(O)=O WXUAQHNMJWJLTG-UHFFFAOYSA-N 0.000 description 2
- OQEBBZSWEGYTPG-UHFFFAOYSA-N 3-aminobutanoic acid Chemical compound CC(N)CC(O)=O OQEBBZSWEGYTPG-UHFFFAOYSA-N 0.000 description 2
- 229940018563 3-aminophenol Drugs 0.000 description 2
- KQIGMPWTAHJUMN-UHFFFAOYSA-N 3-aminopropane-1,2-diol Chemical compound NCC(O)CO KQIGMPWTAHJUMN-UHFFFAOYSA-N 0.000 description 2
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 2
- XMIIGOLPHOKFCH-UHFFFAOYSA-N 3-phenylpropionic acid Chemical compound OC(=O)CCC1=CC=CC=C1 XMIIGOLPHOKFCH-UHFFFAOYSA-N 0.000 description 2
- YDIYEOMDOWUDTJ-UHFFFAOYSA-N 4-(dimethylamino)benzoic acid Chemical compound CN(C)C1=CC=C(C(O)=O)C=C1 YDIYEOMDOWUDTJ-UHFFFAOYSA-N 0.000 description 2
- ALYNCZNDIQEVRV-UHFFFAOYSA-N 4-aminobenzoic acid Chemical compound NC1=CC=C(C(O)=O)C=C1 ALYNCZNDIQEVRV-UHFFFAOYSA-N 0.000 description 2
- ARZSRJNMSIMAKS-UHFFFAOYSA-N 4-aminobutane-1,2-diol Chemical compound NCCC(O)CO ARZSRJNMSIMAKS-UHFFFAOYSA-N 0.000 description 2
- HRXZRAXKKNUKRF-UHFFFAOYSA-N 4-ethylaniline Chemical compound CCC1=CC=C(N)C=C1 HRXZRAXKKNUKRF-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 2
- XXRCUYVCPSWGCC-UHFFFAOYSA-N Ethyl pyruvate Chemical compound CCOC(=O)C(C)=O XXRCUYVCPSWGCC-UHFFFAOYSA-N 0.000 description 2
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- JLTDJTHDQAWBAV-UHFFFAOYSA-N N,N-dimethylaniline Chemical compound CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 description 2
- WUGQZFFCHPXWKQ-UHFFFAOYSA-N Propanolamine Chemical compound NCCCO WUGQZFFCHPXWKQ-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000001361 adipic acid Substances 0.000 description 2
- 235000011037 adipic acid Nutrition 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- QWCKQJZIFLGMSD-UHFFFAOYSA-N alpha-aminobutyric acid Chemical compound CCC(N)C(O)=O QWCKQJZIFLGMSD-UHFFFAOYSA-N 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- QMKYBPDZANOJGF-UHFFFAOYSA-N benzene-1,3,5-tricarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=CC(C(O)=O)=C1 QMKYBPDZANOJGF-UHFFFAOYSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- QUKGYYKBILRGFE-UHFFFAOYSA-N benzyl acetate Chemical compound CC(=O)OCC1=CC=CC=C1 QUKGYYKBILRGFE-UHFFFAOYSA-N 0.000 description 2
- UCMIRNVEIXFBKS-UHFFFAOYSA-N beta-alanine Chemical compound NCCC(O)=O UCMIRNVEIXFBKS-UHFFFAOYSA-N 0.000 description 2
- 239000001055 blue pigment Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- OBNCKNCVKJNDBV-UHFFFAOYSA-N butanoic acid ethyl ester Natural products CCCC(=O)OCC OBNCKNCVKJNDBV-UHFFFAOYSA-N 0.000 description 2
- BTMVHUNTONAYDX-UHFFFAOYSA-N butyl propionate Chemical compound CCCCOC(=O)CC BTMVHUNTONAYDX-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 235000013985 cinnamic acid Nutrition 0.000 description 2
- 229930016911 cinnamic acid Natural products 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- JQVDAXLFBXTEQA-UHFFFAOYSA-N dibutylamine Chemical compound CCCCNCCCC JQVDAXLFBXTEQA-UHFFFAOYSA-N 0.000 description 2
- 235000014113 dietary fatty acids Nutrition 0.000 description 2
- GGSUCNLOZRCGPQ-UHFFFAOYSA-N diethylaniline Chemical compound CCN(CC)C1=CC=CC=C1 GGSUCNLOZRCGPQ-UHFFFAOYSA-N 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000012156 elution solvent Substances 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- MTZQAGJQAFMTAQ-UHFFFAOYSA-N ethyl benzoate Chemical compound CCOC(=O)C1=CC=CC=C1 MTZQAGJQAFMTAQ-UHFFFAOYSA-N 0.000 description 2
- 229940117360 ethyl pyruvate Drugs 0.000 description 2
- LIWAQLJGPBVORC-UHFFFAOYSA-N ethylmethylamine Chemical compound CCNC LIWAQLJGPBVORC-UHFFFAOYSA-N 0.000 description 2
- 229930195729 fatty acid Natural products 0.000 description 2
- 239000000194 fatty acid Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- BTCSSZJGUNDROE-UHFFFAOYSA-N gamma-aminobutyric acid Chemical compound NCCCC(O)=O BTCSSZJGUNDROE-UHFFFAOYSA-N 0.000 description 2
- MNWFXJYAOYHMED-UHFFFAOYSA-N heptanoic acid Chemical compound CCCCCCC(O)=O MNWFXJYAOYHMED-UHFFFAOYSA-N 0.000 description 2
- VYFOAVADNIHPTR-UHFFFAOYSA-N isatoic anhydride Chemical compound NC1=CC=CC=C1CO VYFOAVADNIHPTR-UHFFFAOYSA-N 0.000 description 2
- MLFHJEHSLIIPHL-UHFFFAOYSA-N isoamyl acetate Chemical compound CC(C)CCOC(C)=O MLFHJEHSLIIPHL-UHFFFAOYSA-N 0.000 description 2
- HJOVHMDZYOCNQW-UHFFFAOYSA-N isophorone Chemical compound CC1=CC(=O)CC(C)(C)C1 HJOVHMDZYOCNQW-UHFFFAOYSA-N 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropyl acetate Chemical compound CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 2
- 239000011976 maleic acid Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 description 2
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 2
- 125000002560 nitrile group Chemical group 0.000 description 2
- ZWRUINPWMLAQRD-UHFFFAOYSA-N nonan-1-ol Chemical compound CCCCCCCCCO ZWRUINPWMLAQRD-UHFFFAOYSA-N 0.000 description 2
- BDJRBEYXGGNYIS-UHFFFAOYSA-N nonanedioic acid Chemical compound OC(=O)CCCCCCCC(O)=O BDJRBEYXGGNYIS-UHFFFAOYSA-N 0.000 description 2
- 229960002446 octanoic acid Drugs 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- RZXMPPFPUUCRFN-UHFFFAOYSA-N p-toluidine Chemical compound CC1=CC=C(N)C=C1 RZXMPPFPUUCRFN-UHFFFAOYSA-N 0.000 description 2
- DPBLXKKOBLCELK-UHFFFAOYSA-N pentan-1-amine Chemical compound CCCCCN DPBLXKKOBLCELK-UHFFFAOYSA-N 0.000 description 2
- PGMYKACGEOXYJE-UHFFFAOYSA-N pentyl acetate Chemical compound CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 2
- 229940067265 pigment yellow 138 Drugs 0.000 description 2
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 description 2
- 229920000193 polymethacrylate Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- YKYONYBAUNKHLG-UHFFFAOYSA-N propyl acetate Chemical compound CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 2
- TYFQFVWCELRYAO-UHFFFAOYSA-N suberic acid Chemical compound OC(=O)CCCCCCC(O)=O TYFQFVWCELRYAO-UHFFFAOYSA-N 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- 125000004434 sulfur atom Chemical group 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 2
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 2
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 1
- QBYIENPQHBMVBV-HFEGYEGKSA-N (2R)-2-hydroxy-2-phenylacetic acid Chemical compound O[C@@H](C(O)=O)c1ccccc1.O[C@@H](C(O)=O)c1ccccc1 QBYIENPQHBMVBV-HFEGYEGKSA-N 0.000 description 1
- OJZQOQNSUZLSMV-UHFFFAOYSA-N (3-aminophenyl)methanol Chemical compound NC1=CC=CC(CO)=C1 OJZQOQNSUZLSMV-UHFFFAOYSA-N 0.000 description 1
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- OWSKJORLRSWYGK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) propanoate Chemical compound CCC(=O)OCCC(C)(C)OC OWSKJORLRSWYGK-UHFFFAOYSA-N 0.000 description 1
- AXKGIPZJYUNAIW-UHFFFAOYSA-N (4-aminophenyl)methanol Chemical compound NC1=CC=C(CO)C=C1 AXKGIPZJYUNAIW-UHFFFAOYSA-N 0.000 description 1
- 239000001124 (E)-prop-1-ene-1,2,3-tricarboxylic acid Substances 0.000 description 1
- FFJCNSLCJOQHKM-CLFAGFIQSA-N (z)-1-[(z)-octadec-9-enoxy]octadec-9-ene Chemical compound CCCCCCCC\C=C/CCCCCCCCOCCCCCCCC\C=C/CCCCCCCC FFJCNSLCJOQHKM-CLFAGFIQSA-N 0.000 description 1
- JWTGRKUQJXIWCV-UHFFFAOYSA-N 1,2,3-trihydroxypropyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(O)C(O)CO JWTGRKUQJXIWCV-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- JHTPBGFVWWSHDL-UHFFFAOYSA-N 1,4-dichloro-2-isothiocyanatobenzene Chemical compound ClC1=CC=C(Cl)C(N=C=S)=C1 JHTPBGFVWWSHDL-UHFFFAOYSA-N 0.000 description 1
- WGYZMNBUZFHYRX-UHFFFAOYSA-N 1-(1-methoxypropan-2-yloxy)propan-2-ol Chemical compound COCC(C)OCC(C)O WGYZMNBUZFHYRX-UHFFFAOYSA-N 0.000 description 1
- WHVCGSUZBJVDAE-UHFFFAOYSA-N 1-[4,5-diphenyl-2-(2,4,6-tribromophenyl)imidazol-2-yl]-4,5-diphenyl-2-(2,4,6-tribromophenyl)imidazole Chemical compound BrC1=CC(Br)=CC(Br)=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC(Br)=CC=2Br)Br)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 WHVCGSUZBJVDAE-UHFFFAOYSA-N 0.000 description 1
- HMIBQFXWSUBFTG-UHFFFAOYSA-N 1-[4-(diethylamino)phenyl]ethanone Chemical compound CCN(CC)C1=CC=C(C(C)=O)C=C1 HMIBQFXWSUBFTG-UHFFFAOYSA-N 0.000 description 1
- HXKKHQJGJAFBHI-UHFFFAOYSA-N 1-aminopropan-2-ol Chemical compound CC(O)CN HXKKHQJGJAFBHI-UHFFFAOYSA-N 0.000 description 1
- MKRBAPNEJMFMHU-UHFFFAOYSA-N 1-benzylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CC1=CC=CC=C1 MKRBAPNEJMFMHU-UHFFFAOYSA-N 0.000 description 1
- KTZVZZJJVJQZHV-UHFFFAOYSA-N 1-chloro-4-ethenylbenzene Chemical compound ClC1=CC=C(C=C)C=C1 KTZVZZJJVJQZHV-UHFFFAOYSA-N 0.000 description 1
- OZWAPCBQFFIPQH-UHFFFAOYSA-N 1-ethenyl-2-[2-[2-(2-ethenylphenyl)ethoxy]ethyl]benzene Chemical compound C=CC1=CC=CC=C1CCOCCC1=CC=CC=C1C=C OZWAPCBQFFIPQH-UHFFFAOYSA-N 0.000 description 1
- NVZWEEGUWXZOKI-UHFFFAOYSA-N 1-ethenyl-2-methylbenzene Chemical compound CC1=CC=CC=C1C=C NVZWEEGUWXZOKI-UHFFFAOYSA-N 0.000 description 1
- WUPNAQFYNLSXBZ-UHFFFAOYSA-N 1-ethenyl-3-[2-[2-(3-ethenylphenyl)ethoxy]ethyl]benzene Chemical compound C=CC1=CC=CC(CCOCCC=2C=C(C=C)C=CC=2)=C1 WUPNAQFYNLSXBZ-UHFFFAOYSA-N 0.000 description 1
- PECUPOXPPBBFLU-UHFFFAOYSA-N 1-ethenyl-3-methoxybenzene Chemical compound COC1=CC=CC(C=C)=C1 PECUPOXPPBBFLU-UHFFFAOYSA-N 0.000 description 1
- JZHGRUMIRATHIU-UHFFFAOYSA-N 1-ethenyl-3-methylbenzene Chemical compound CC1=CC=CC(C=C)=C1 JZHGRUMIRATHIU-UHFFFAOYSA-N 0.000 description 1
- VDCRIUHITXYHHC-UHFFFAOYSA-N 1-ethenyl-4-[2-[2-(4-ethenylphenyl)ethoxy]ethyl]benzene Chemical compound C1=CC(C=C)=CC=C1CCOCCC1=CC=C(C=C)C=C1 VDCRIUHITXYHHC-UHFFFAOYSA-N 0.000 description 1
- JWYVGKFDLWWQJX-UHFFFAOYSA-N 1-ethenylazepan-2-one Chemical compound C=CN1CCCCCC1=O JWYVGKFDLWWQJX-UHFFFAOYSA-N 0.000 description 1
- CTXUTPWZJZHRJC-UHFFFAOYSA-N 1-ethenylpyrrole Chemical compound C=CN1C=CC=C1 CTXUTPWZJZHRJC-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical compound CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 description 1
- BPIUIOXAFBGMNB-UHFFFAOYSA-N 1-hexoxyhexane Chemical compound CCCCCCOCCCCCC BPIUIOXAFBGMNB-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- LRTOHSLOFCWHRF-UHFFFAOYSA-N 1-methyl-1h-indene Chemical compound C1=CC=C2C(C)C=CC2=C1 LRTOHSLOFCWHRF-UHFFFAOYSA-N 0.000 description 1
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 1
- XLPJNCYCZORXHG-UHFFFAOYSA-N 1-morpholin-4-ylprop-2-en-1-one Chemical compound C=CC(=O)N1CCOCC1 XLPJNCYCZORXHG-UHFFFAOYSA-N 0.000 description 1
- GQHTUMJGOHRCHB-UHFFFAOYSA-N 2,3,4,6,7,8,9,10-octahydropyrimido[1,2-a]azepine Chemical compound C1CCCCN2CCCN=C21 GQHTUMJGOHRCHB-UHFFFAOYSA-N 0.000 description 1
- QRIMLDXJAPZHJE-UHFFFAOYSA-N 2,3-dihydroxypropyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(O)CO QRIMLDXJAPZHJE-UHFFFAOYSA-N 0.000 description 1
- MJCJFUJXVGIUOD-UHFFFAOYSA-N 2,3-dimethylbutane-1,2,3-tricarboxylic acid Chemical compound OC(=O)C(C)(C)C(C)(C(O)=O)CC(O)=O MJCJFUJXVGIUOD-UHFFFAOYSA-N 0.000 description 1
- DXUMYHZTYVPBEZ-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 DXUMYHZTYVPBEZ-UHFFFAOYSA-N 0.000 description 1
- RDNCVBKPZYTNCT-UHFFFAOYSA-N 2,5-bis(methylamino)-1h-pyridine-2-thiol Chemical compound CNC1=CNC(S)(NC)C=C1 RDNCVBKPZYTNCT-UHFFFAOYSA-N 0.000 description 1
- DKCPKDPYUFEZCP-UHFFFAOYSA-N 2,6-di-tert-butylphenol Chemical compound CC(C)(C)C1=CC=CC(C(C)(C)C)=C1O DKCPKDPYUFEZCP-UHFFFAOYSA-N 0.000 description 1
- IETCLBGYEVVQQL-UHFFFAOYSA-N 2-(2,4-dibromophenyl)-1-[2-(2,4-dibromophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound BrC1=CC(Br)=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC(Br)=CC=2)Br)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 IETCLBGYEVVQQL-UHFFFAOYSA-N 0.000 description 1
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 1
- RXPLWIYPJFSJCC-UHFFFAOYSA-N 2-(2-bromophenyl)-1-[2-(2-bromophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound BrC1=CC=CC=C1C(N1C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Br)=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 RXPLWIYPJFSJCC-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- WMDZKDKPYCNCDZ-UHFFFAOYSA-N 2-(2-butoxypropoxy)propan-1-ol Chemical compound CCCCOC(C)COC(C)CO WMDZKDKPYCNCDZ-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- YHYCMHWTYHPIQS-UHFFFAOYSA-N 2-(2-hydroxyethoxy)-1-methoxyethanol Chemical compound COC(O)COCCO YHYCMHWTYHPIQS-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- BJINVQNEBGOMCR-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethyl acetate Chemical compound COCCOCCOC(C)=O BJINVQNEBGOMCR-UHFFFAOYSA-N 0.000 description 1
- DJCYDDALXPHSHR-UHFFFAOYSA-N 2-(2-propoxyethoxy)ethanol Chemical compound CCCOCCOCCO DJCYDDALXPHSHR-UHFFFAOYSA-N 0.000 description 1
- GWQAFGZJIHVLGX-UHFFFAOYSA-N 2-(2-propoxyethoxy)ethyl acetate Chemical compound CCCOCCOCCOC(C)=O GWQAFGZJIHVLGX-UHFFFAOYSA-N 0.000 description 1
- XYVAYAJYLWYJJN-UHFFFAOYSA-N 2-(2-propoxypropoxy)propan-1-ol Chemical compound CCCOC(C)COC(C)CO XYVAYAJYLWYJJN-UHFFFAOYSA-N 0.000 description 1
- QRHHZFRCJDAUNA-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 QRHHZFRCJDAUNA-UHFFFAOYSA-N 0.000 description 1
- FPFQSSDQLTUYLH-UHFFFAOYSA-N 2-(diethylamino)propane-1,3-diol Chemical compound CCN(CC)C(CO)CO FPFQSSDQLTUYLH-UHFFFAOYSA-N 0.000 description 1
- CUACAHUDGBWTME-UHFFFAOYSA-N 2-(dimethylamino)propane-1,3-diol Chemical compound CN(C)C(CO)CO CUACAHUDGBWTME-UHFFFAOYSA-N 0.000 description 1
- QTUVQQKHBMGYEH-UHFFFAOYSA-N 2-(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC=NC=N1 QTUVQQKHBMGYEH-UHFFFAOYSA-N 0.000 description 1
- FUOOLUPWFVMBKG-UHFFFAOYSA-N 2-Aminoisobutyric acid Chemical compound CC(C)(N)C(O)=O FUOOLUPWFVMBKG-UHFFFAOYSA-N 0.000 description 1
- OXQGTIUCKGYOAA-UHFFFAOYSA-N 2-Ethylbutanoic acid Chemical compound CCC(CC)C(O)=O OXQGTIUCKGYOAA-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 description 1
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 1
- WFSMVVDJSNMRAR-UHFFFAOYSA-N 2-[2-(2-ethoxyethoxy)ethoxy]ethanol Chemical compound CCOCCOCCOCCO WFSMVVDJSNMRAR-UHFFFAOYSA-N 0.000 description 1
- FMVOPJLFZGSYOS-UHFFFAOYSA-N 2-[2-(2-ethoxypropoxy)propoxy]propan-1-ol Chemical compound CCOC(C)COC(C)COC(C)CO FMVOPJLFZGSYOS-UHFFFAOYSA-N 0.000 description 1
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 description 1
- BLLZAHSARJPHSO-UHFFFAOYSA-N 2-[2-(4-ethoxyphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OCC)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 BLLZAHSARJPHSO-UHFFFAOYSA-N 0.000 description 1
- XOPKKHCDIAYUSK-UHFFFAOYSA-N 2-[2-(5-methylfuran-2-yl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound O1C(C)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 XOPKKHCDIAYUSK-UHFFFAOYSA-N 0.000 description 1
- PNDRGJCVJPHPOZ-UHFFFAOYSA-N 2-[2-(furan-2-yl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=CC=2OC=CC=2)=N1 PNDRGJCVJPHPOZ-UHFFFAOYSA-N 0.000 description 1
- 125000000022 2-aminoethyl group Chemical group [H]C([*])([H])C([H])([H])N([H])[H] 0.000 description 1
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 1
- 125000006276 2-bromophenyl group Chemical group [H]C1=C([H])C(Br)=C(*)C([H])=C1[H] 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- SZTBMYHIYNGYIA-UHFFFAOYSA-N 2-chloroacrylic acid Chemical compound OC(=O)C(Cl)=C SZTBMYHIYNGYIA-UHFFFAOYSA-N 0.000 description 1
- YBXYCBGDIALKAK-UHFFFAOYSA-N 2-chloroprop-2-enamide Chemical compound NC(=O)C(Cl)=C YBXYCBGDIALKAK-UHFFFAOYSA-N 0.000 description 1
- OYUNTGBISCIYPW-UHFFFAOYSA-N 2-chloroprop-2-enenitrile Chemical compound ClC(=C)C#N OYUNTGBISCIYPW-UHFFFAOYSA-N 0.000 description 1
- 125000003006 2-dimethylaminoethyl group Chemical group [H]C([H])([H])N(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- ZVUNTIMPQCQCAQ-UHFFFAOYSA-N 2-dodecanoyloxyethyl dodecanoate Chemical compound CCCCCCCCCCCC(=O)OCCOC(=O)CCCCCCCCCCC ZVUNTIMPQCQCAQ-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- 125000004200 2-methoxyethyl group Chemical group [H]C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 1
- RIWRBSMFKVOJMN-UHFFFAOYSA-N 2-methyl-1-phenylpropan-2-ol Chemical compound CC(C)(O)CC1=CC=CC=C1 RIWRBSMFKVOJMN-UHFFFAOYSA-N 0.000 description 1
- LETDRANQSOEVCX-UHFFFAOYSA-N 2-methyl-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 LETDRANQSOEVCX-UHFFFAOYSA-N 0.000 description 1
- NJBCRXCAPCODGX-UHFFFAOYSA-N 2-methyl-n-(2-methylpropyl)propan-1-amine Chemical compound CC(C)CNCC(C)C NJBCRXCAPCODGX-UHFFFAOYSA-N 0.000 description 1
- FCYVWWWTHPPJII-UHFFFAOYSA-N 2-methylidenepropanedinitrile Chemical compound N#CC(=C)C#N FCYVWWWTHPPJII-UHFFFAOYSA-N 0.000 description 1
- JBIJLHTVPXGSAM-UHFFFAOYSA-N 2-naphthylamine Chemical compound C1=CC=CC2=CC(N)=CC=C21 JBIJLHTVPXGSAM-UHFFFAOYSA-N 0.000 description 1
- WHFKYDMBUMLWDA-UHFFFAOYSA-N 2-phenoxyethyl acetate Chemical compound CC(=O)OCCOC1=CC=CC=C1 WHFKYDMBUMLWDA-UHFFFAOYSA-N 0.000 description 1
- WLJVXDMOQOGPHL-PPJXEINESA-N 2-phenylacetic acid Chemical compound O[14C](=O)CC1=CC=CC=C1 WLJVXDMOQOGPHL-PPJXEINESA-N 0.000 description 1
- LVFFZQQWIZURIO-UHFFFAOYSA-N 2-phenylbutanedioic acid Chemical compound OC(=O)CC(C(O)=O)C1=CC=CC=C1 LVFFZQQWIZURIO-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- QMAQLCVJIYANPZ-UHFFFAOYSA-N 2-propoxyethyl acetate Chemical compound CCCOCCOC(C)=O QMAQLCVJIYANPZ-UHFFFAOYSA-N 0.000 description 1
- IKEHOXWJQXIQAG-UHFFFAOYSA-N 2-tert-butyl-4-methylphenol Chemical compound CC1=CC=C(O)C(C(C)(C)C)=C1 IKEHOXWJQXIQAG-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- LTACQVCHVAUOKN-UHFFFAOYSA-N 3-(diethylamino)propane-1,2-diol Chemical compound CCN(CC)CC(O)CO LTACQVCHVAUOKN-UHFFFAOYSA-N 0.000 description 1
- XFDUHJPVQKIXHO-UHFFFAOYSA-N 3-aminobenzoic acid Chemical compound NC1=CC=CC(C(O)=O)=C1 XFDUHJPVQKIXHO-UHFFFAOYSA-N 0.000 description 1
- OXYZDRAJMHGSMW-UHFFFAOYSA-N 3-chloropropyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CCCCl OXYZDRAJMHGSMW-UHFFFAOYSA-N 0.000 description 1
- KNTKCYKJRSMRMZ-UHFFFAOYSA-N 3-chloropropyl-dimethoxy-methylsilane Chemical compound CO[Si](C)(OC)CCCCl KNTKCYKJRSMRMZ-UHFFFAOYSA-N 0.000 description 1
- QOXOZONBQWIKDA-UHFFFAOYSA-N 3-hydroxypropyl Chemical group [CH2]CCO QOXOZONBQWIKDA-UHFFFAOYSA-N 0.000 description 1
- YSIKHBWUBSFBRZ-UHFFFAOYSA-N 3-methoxypropanoic acid Chemical compound COCCC(O)=O YSIKHBWUBSFBRZ-UHFFFAOYSA-N 0.000 description 1
- JJYPMNFTHPTTDI-UHFFFAOYSA-N 3-methylaniline Chemical compound CC1=CC=CC(N)=C1 JJYPMNFTHPTTDI-UHFFFAOYSA-N 0.000 description 1
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 description 1
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- INDIALLCZKIHFF-UHFFFAOYSA-N 4-(diethylamino)phenol Chemical compound CCN(CC)C1=CC=C(O)C=C1 INDIALLCZKIHFF-UHFFFAOYSA-N 0.000 description 1
- LNYTUARMNSFFBE-UHFFFAOYSA-N 4-(diethylazaniumyl)benzoate Chemical compound CCN(CC)C1=CC=C(C(O)=O)C=C1 LNYTUARMNSFFBE-UHFFFAOYSA-N 0.000 description 1
- JYMNQRQQBJIMCV-UHFFFAOYSA-N 4-(dimethylamino)benzonitrile Chemical compound CN(C)C1=CC=C(C#N)C=C1 JYMNQRQQBJIMCV-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- UNDXPKDBFOOQFC-UHFFFAOYSA-N 4-[2-nitro-4-(trifluoromethyl)phenyl]morpholine Chemical compound [O-][N+](=O)C1=CC(C(F)(F)F)=CC=C1N1CCOCC1 UNDXPKDBFOOQFC-UHFFFAOYSA-N 0.000 description 1
- BLFRQYKZFKYQLO-UHFFFAOYSA-N 4-aminobutan-1-ol Chemical compound NCCCCO BLFRQYKZFKYQLO-UHFFFAOYSA-N 0.000 description 1
- AZWLGPJBVAQRHW-UHFFFAOYSA-N 4-aminobutane-1,3-diol Chemical compound NCC(O)CCO AZWLGPJBVAQRHW-UHFFFAOYSA-N 0.000 description 1
- JVVRCYWZTJLJSG-UHFFFAOYSA-N 4-dimethylaminophenol Chemical compound CN(C)C1=CC=C(O)C=C1 JVVRCYWZTJLJSG-UHFFFAOYSA-N 0.000 description 1
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 description 1
- OPPHXULEHGYZRW-UHFFFAOYSA-N 4-methoxy-2,4-dimethyl-2-phenyldiazenylpentanenitrile Chemical compound COC(C)(C)CC(C)(C#N)N=NC1=CC=CC=C1 OPPHXULEHGYZRW-UHFFFAOYSA-N 0.000 description 1
- LQGKDMHENBFVRC-UHFFFAOYSA-N 5-aminopentan-1-ol Chemical compound NCCCCCO LQGKDMHENBFVRC-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 1
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical class NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 1
- FPVVYTCTZKCSOJ-UHFFFAOYSA-N Ethylene glycol distearate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCCOC(=O)CCCCCCCCCCCCCCCCC FPVVYTCTZKCSOJ-UHFFFAOYSA-N 0.000 description 1
- 206010073306 Exposure to radiation Diseases 0.000 description 1
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N Lactic Acid Natural products CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 1
- WRQNANDWMGAFTP-UHFFFAOYSA-N Methylacetoacetic acid Chemical compound COC(=O)CC(C)=O WRQNANDWMGAFTP-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- DIQMPQMYFZXDAX-UHFFFAOYSA-N Pentyl formate Chemical compound CCCCCOC=O DIQMPQMYFZXDAX-UHFFFAOYSA-N 0.000 description 1
- 241000594009 Phoxinus phoxinus Species 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- IWYDHOAUDWTVEP-UHFFFAOYSA-N R-2-phenyl-2-hydroxyacetic acid Natural products OC(=O)C(O)C1=CC=CC=C1 IWYDHOAUDWTVEP-UHFFFAOYSA-N 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- REUQOSNMSWLNPD-UHFFFAOYSA-N [2-(diethylamino)phenyl]-phenylmethanone Chemical compound CCN(CC)C1=CC=CC=C1C(=O)C1=CC=CC=C1 REUQOSNMSWLNPD-UHFFFAOYSA-N 0.000 description 1
- KYIKRXIYLAGAKQ-UHFFFAOYSA-N abcn Chemical compound C1CCCCC1(C#N)N=NC1(C#N)CCCCC1 KYIKRXIYLAGAKQ-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 229940022663 acetate Drugs 0.000 description 1
- 235000011054 acetic acid Nutrition 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229940091181 aconitic acid Drugs 0.000 description 1
- 150000008360 acrylonitriles Chemical class 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 150000001346 alkyl aryl ethers Chemical class 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- SOGAXMICEFXMKE-UHFFFAOYSA-N alpha-Methyl-n-butyl acrylate Natural products CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229960004050 aminobenzoic acid Drugs 0.000 description 1
- 150000005415 aminobenzoic acids Chemical class 0.000 description 1
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- IRERQBUNZFJFGC-UHFFFAOYSA-L azure blue Chemical compound [Na+].[Na+].[Na+].[Na+].[Na+].[Na+].[Na+].[Na+].[Al+3].[Al+3].[Al+3].[Al+3].[Al+3].[Al+3].[S-]S[S-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-] IRERQBUNZFJFGC-UHFFFAOYSA-L 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- WTSCLNSIDYGPSD-UHFFFAOYSA-N benzoic acid;pyrrole-2,5-dione Chemical compound O=C1NC(=O)C=C1.OC(=O)C1=CC=CC=C1 WTSCLNSIDYGPSD-UHFFFAOYSA-N 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 229940007550 benzyl acetate Drugs 0.000 description 1
- 235000019445 benzyl alcohol Nutrition 0.000 description 1
- 229940000635 beta-alanine Drugs 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- OCWYEMOEOGEQAN-UHFFFAOYSA-N bumetrizole Chemical compound CC(C)(C)C1=CC(C)=CC(N2N=C3C=C(Cl)C=CC3=N2)=C1O OCWYEMOEOGEQAN-UHFFFAOYSA-N 0.000 description 1
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 150000001733 carboxylic acid esters Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- YACLQRRMGMJLJV-UHFFFAOYSA-N chloroprene Chemical compound ClC(=C)C=C YACLQRRMGMJLJV-UHFFFAOYSA-N 0.000 description 1
- OEYIOHPDSNJKLS-UHFFFAOYSA-N choline Chemical compound C[N+](C)(C)CCO OEYIOHPDSNJKLS-UHFFFAOYSA-N 0.000 description 1
- 229960001231 choline Drugs 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- GTZCVFVGUGFEME-IWQZZHSRSA-N cis-aconitic acid Chemical compound OC(=O)C\C(C(O)=O)=C\C(O)=O GTZCVFVGUGFEME-IWQZZHSRSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- QYQADNCHXSEGJT-UHFFFAOYSA-N cyclohexane-1,1-dicarboxylate;hydron Chemical compound OC(=O)C1(C(O)=O)CCCCC1 QYQADNCHXSEGJT-UHFFFAOYSA-N 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- 150000005690 diesters Chemical class 0.000 description 1
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- WYACBZDAHNBPPB-UHFFFAOYSA-N diethyl oxalate Chemical compound CCOC(=O)C(=O)OCC WYACBZDAHNBPPB-UHFFFAOYSA-N 0.000 description 1
- PQZTVWVYCLIIJY-UHFFFAOYSA-N diethyl(propyl)amine Chemical compound CCCN(CC)CC PQZTVWVYCLIIJY-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 125000001664 diethylamino group Chemical group [H]C([H])([H])C([H])([H])N(*)C([H])([H])C([H])([H])[H] 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 1
- WHGNXNCOTZPEEK-UHFFFAOYSA-N dimethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(OC)CCCOCC1CO1 WHGNXNCOTZPEEK-UHFFFAOYSA-N 0.000 description 1
- OREAFAJWWJHCOT-UHFFFAOYSA-N dimethylmalonic acid Chemical compound OC(=O)C(C)(C)C(O)=O OREAFAJWWJHCOT-UHFFFAOYSA-N 0.000 description 1
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical compound CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
- UIWXSTHGICQLQT-UHFFFAOYSA-N ethenyl propanoate Chemical compound CCC(=O)OC=C UIWXSTHGICQLQT-UHFFFAOYSA-N 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 1
- CKSRFHWWBKRUKA-UHFFFAOYSA-N ethyl 2-ethoxyacetate Chemical compound CCOCC(=O)OCC CKSRFHWWBKRUKA-UHFFFAOYSA-N 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- ZANNOFHADGWOLI-UHFFFAOYSA-N ethyl 2-hydroxyacetate Chemical compound CCOC(=O)CO ZANNOFHADGWOLI-UHFFFAOYSA-N 0.000 description 1
- FJAKCEHATXBFJT-UHFFFAOYSA-N ethyl 2-oxobutanoate Chemical compound CCOC(=O)C(=O)CC FJAKCEHATXBFJT-UHFFFAOYSA-N 0.000 description 1
- LJUJMKJGPIXNAK-UHFFFAOYSA-N ethyl 4-[2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-bis(4-ethoxycarbonylphenyl)imidazol-2-yl]-5-(4-ethoxycarbonylphenyl)imidazol-4-yl]benzoate Chemical compound C1=CC(C(=O)OCC)=CC=C1C1=NC(N2C(=C(N=C2C=2C(=CC=CC=2)Cl)C=2C=CC(=CC=2)C(=O)OCC)C=2C=CC(=CC=2)C(=O)OCC)(C=2C(=CC=CC=2)Cl)N=C1C1=CC=C(C(=O)OCC)C=C1 LJUJMKJGPIXNAK-UHFFFAOYSA-N 0.000 description 1
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- UKFXDFUAPNAMPJ-UHFFFAOYSA-N ethylmalonic acid Chemical compound CCC(C(O)=O)C(O)=O UKFXDFUAPNAMPJ-UHFFFAOYSA-N 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 229960003692 gamma aminobutyric acid Drugs 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 229940100608 glycol distearate Drugs 0.000 description 1
- 239000001056 green pigment Substances 0.000 description 1
- 125000004970 halomethyl group Chemical group 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical class [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- UCNNJGDEJXIUCC-UHFFFAOYSA-L hydroxy(oxo)iron;iron Chemical compound [Fe].O[Fe]=O.O[Fe]=O UCNNJGDEJXIUCC-UHFFFAOYSA-L 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 235000019239 indanthrene blue RS Nutrition 0.000 description 1
- 150000002469 indenes Chemical class 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- KDSNLYIMUZNERS-UHFFFAOYSA-N isobutyl amine Natural products CC(C)CN KDSNLYIMUZNERS-UHFFFAOYSA-N 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- PIJPYDMVFNTHIP-UHFFFAOYSA-L lead sulfate Chemical compound [PbH4+2].[O-]S([O-])(=O)=O PIJPYDMVFNTHIP-UHFFFAOYSA-L 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 229960002510 mandelic acid Drugs 0.000 description 1
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 1
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- YSGBMDFJWFIEDF-UHFFFAOYSA-N methyl 2-hydroxy-3-methylbutanoate Chemical compound COC(=O)C(O)C(C)C YSGBMDFJWFIEDF-UHFFFAOYSA-N 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- CWKLZLBVOJRSOM-UHFFFAOYSA-N methyl pyruvate Chemical compound COC(=O)C(C)=O CWKLZLBVOJRSOM-UHFFFAOYSA-N 0.000 description 1
- XJRBAMWJDBPFIM-UHFFFAOYSA-N methyl vinyl ether Chemical compound COC=C XJRBAMWJDBPFIM-UHFFFAOYSA-N 0.000 description 1
- ZIYVHBGGAOATLY-UHFFFAOYSA-N methylmalonic acid Chemical compound OC(=O)C(C)C(O)=O ZIYVHBGGAOATLY-UHFFFAOYSA-N 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- MQWFLKHKWJMCEN-UHFFFAOYSA-N n'-[3-[dimethoxy(methyl)silyl]propyl]ethane-1,2-diamine Chemical compound CO[Si](C)(OC)CCCNCCN MQWFLKHKWJMCEN-UHFFFAOYSA-N 0.000 description 1
- SRLHDBRENZFCIN-UHFFFAOYSA-N n,n-di(butan-2-yl)butan-2-amine Chemical compound CCC(C)N(C(C)CC)C(C)CC SRLHDBRENZFCIN-UHFFFAOYSA-N 0.000 description 1
- DAZXVJBJRMWXJP-UHFFFAOYSA-N n,n-dimethylethylamine Chemical compound CCN(C)C DAZXVJBJRMWXJP-UHFFFAOYSA-N 0.000 description 1
- ZUHZZVMEUAUWHY-UHFFFAOYSA-N n,n-dimethylpropan-1-amine Chemical compound CCCN(C)C ZUHZZVMEUAUWHY-UHFFFAOYSA-N 0.000 description 1
- CYQYCASVINMDFD-UHFFFAOYSA-N n,n-ditert-butyl-2-methylpropan-2-amine Chemical compound CC(C)(C)N(C(C)(C)C)C(C)(C)C CYQYCASVINMDFD-UHFFFAOYSA-N 0.000 description 1
- OBYVIBDTOCAXSN-UHFFFAOYSA-N n-butan-2-ylbutan-2-amine Chemical compound CCC(C)NC(C)CC OBYVIBDTOCAXSN-UHFFFAOYSA-N 0.000 description 1
- GNVRJGIVDSQCOP-UHFFFAOYSA-N n-ethyl-n-methylethanamine Chemical compound CCN(C)CC GNVRJGIVDSQCOP-UHFFFAOYSA-N 0.000 description 1
- XWCCTMBMQUCLSI-UHFFFAOYSA-N n-ethyl-n-propylpropan-1-amine Chemical compound CCCN(CC)CCC XWCCTMBMQUCLSI-UHFFFAOYSA-N 0.000 description 1
- XCVNDBIXFPGMIW-UHFFFAOYSA-N n-ethylpropan-1-amine Chemical compound CCCNCC XCVNDBIXFPGMIW-UHFFFAOYSA-N 0.000 description 1
- UVBMZKBIZUWTLV-UHFFFAOYSA-N n-methyl-n-propylpropan-1-amine Chemical compound CCCN(C)CCC UVBMZKBIZUWTLV-UHFFFAOYSA-N 0.000 description 1
- GVWISOJSERXQBM-UHFFFAOYSA-N n-methylpropan-1-amine Chemical compound CCCNC GVWISOJSERXQBM-UHFFFAOYSA-N 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- CATWEXRJGNBIJD-UHFFFAOYSA-N n-tert-butyl-2-methylpropan-2-amine Chemical compound CC(C)(C)NC(C)(C)C CATWEXRJGNBIJD-UHFFFAOYSA-N 0.000 description 1
- SFBTTWXNCQVIEC-UHFFFAOYSA-N o-Vinylanisole Chemical compound COC1=CC=CC=C1C=C SFBTTWXNCQVIEC-UHFFFAOYSA-N 0.000 description 1
- ZWLPBLYKEWSWPD-UHFFFAOYSA-N o-toluic acid Chemical compound CC1=CC=CC=C1C(O)=O ZWLPBLYKEWSWPD-UHFFFAOYSA-N 0.000 description 1
- RNVCVTLRINQCPJ-UHFFFAOYSA-N o-toluidine Chemical compound CC1=CC=CC=C1N RNVCVTLRINQCPJ-UHFFFAOYSA-N 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- CKMXAIVXVKGGFM-UHFFFAOYSA-N p-cumic acid Chemical compound CC(C)C1=CC=C(C(O)=O)C=C1 CKMXAIVXVKGGFM-UHFFFAOYSA-N 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- QIWKUEJZZCOPFV-UHFFFAOYSA-N phenyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1=CC=CC=C1 QIWKUEJZZCOPFV-UHFFFAOYSA-N 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- CLYVDMAATCIVBF-UHFFFAOYSA-N pigment red 224 Chemical compound C=12C3=CC=C(C(OC4=O)=O)C2=C4C=CC=1C1=CC=C2C(=O)OC(=O)C4=CC=C3C1=C42 CLYVDMAATCIVBF-UHFFFAOYSA-N 0.000 description 1
- IUGYQRQAERSCNH-UHFFFAOYSA-N pivalic acid Chemical compound CC(C)(C)C(O)=O IUGYQRQAERSCNH-UHFFFAOYSA-N 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- ULWHHBHJGPPBCO-UHFFFAOYSA-N propane-1,1-diol Chemical compound CCC(O)O ULWHHBHJGPPBCO-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- FKRCODPIKNYEAC-UHFFFAOYSA-N propionic acid ethyl ester Natural products CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 description 1
- ILPVOWZUBFRIAX-UHFFFAOYSA-N propyl 2-oxopropanoate Chemical compound CCCOC(=O)C(C)=O ILPVOWZUBFRIAX-UHFFFAOYSA-N 0.000 description 1
- HUAZGNHGCJGYNP-UHFFFAOYSA-N propyl butyrate Chemical compound CCCOC(=O)CCC HUAZGNHGCJGYNP-UHFFFAOYSA-N 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 238000001226 reprecipitation Methods 0.000 description 1
- 238000007142 ring opening reaction Methods 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- BHRZNVHARXXAHW-UHFFFAOYSA-N sec-butylamine Chemical compound CCC(C)N BHRZNVHARXXAHW-UHFFFAOYSA-N 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical compound [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- GTZCVFVGUGFEME-UHFFFAOYSA-N trans-aconitic acid Natural products OC(=O)CC(C(O)=O)=CC(O)=O GTZCVFVGUGFEME-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 235000013799 ultramarine blue Nutrition 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229940005605 valeric acid Drugs 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000001052 yellow pigment Chemical class 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D233/00—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings
- C07D233/54—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings having two double bonds between ring members or between ring members and non-ring members
- C07D233/64—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings having two double bonds between ring members or between ring members and non-ring members with substituted hydrocarbon radicals attached to ring carbon atoms, e.g. histidine
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
Abstract
본 발명의 컬러 필터용 감방사선성 조성물은 (A) 안료, (B) 분산제, (C) 알칼리 가용성 수지, (D) 다관능성 단량체, (E) 광중합 개시제 및 (F) 용매를 함유한다. 그 중, 상기 (B) 분산제는 리빙 음이온 중합을 거쳐 얻어지며 아민가(단위 mgKOH/g)와 산가(단위 mgKOH/g)가 모두 0을 초과하는 아크릴계 공중합체를 함유한다.The radiation sensitive composition for color filters of this invention contains (A) pigment, (B) dispersing agent, (C) alkali-soluble resin, (D) polyfunctional monomer, (E) photoinitiator, and (F) solvent. Among them, the dispersing agent (B) is obtained through living anionic polymerization and contains an acrylic copolymer in which both the amine value (unit mgKOH / g) and the acid value (unit mgKOH / g) exceed 0.
컬러 필터용 감방사선성 조성물, 컬러 필터, 컬러 액정 표시 장치, 안료, 분산제, 알칼리 가용성 수지, 리빙 음이온 중합, 아민가, 산가 Radiation-sensitive composition for color filters, color filter, color liquid crystal display device, pigment, dispersant, alkali-soluble resin, living anion polymerization, amine number, acid value
Description
본 발명은 컬러 필터용 감방사선성 조성물, 컬러 필터 및 컬러 액정 표시 장치에 관한 것이다. 보다 자세하게는, 투과형 또는 반사형의 컬러 액정 표시 장치, 컬러 촬상관 소자 등에 사용되는 컬러 필터의 제조에 유용한 컬러 필터용 감방사선성 조성물, 이 조성물로 형성된 컬러 필터, 및 이 컬러 필터를 구비하는 컬러 액정 표시 장치에 관한 것이다. The present invention relates to a radiation sensitive composition for color filters, a color filter and a color liquid crystal display device. In more detail, the radiation sensitive composition for color filters useful for manufacture of the color filter used for a transmissive or reflective color liquid crystal display device, a color image tube element, etc., the color filter formed from this composition, and the color liquid crystal provided with this color filter It relates to a display device.
착색 감방사선성 조성물을 사용하여 컬러 필터를 제조하는 것에 있어서는, 통상 기판상 또는 미리 원하는 패턴의 차광층을 형성한 기판상에 착색 감방사선성 조성물의 피막을 형성하고, 원하는 패턴 형상을 갖는 포토마스크를 통해 방사선을 조사(이하, "노광"이라 함)하고 현상하여 미노광부를 용해 제거한 후, 크린 오븐이나 핫 플레이트를 이용하여 후 베이킹함으로써, 각 색의 화소 패턴을 형성하는 방법(일본 특허 공개 (평)2-144502호 공보 및 일본 특허 공개 (평)3-53201호 공보 참조)가 알려져 있다. 그러나 이 방법에서는, 특히 착색 감방사선성 조성물에 포함 되는 안료의 농도가 높아지면 현상시에 미노광부의 기판상 또는 차광층상에 잔사나 바탕 오염이 발생하는 경우가 있다. In manufacturing a color filter using a colored radiation sensitive composition, the film of a colored radiation sensitive composition is normally formed on the board | substrate or the board | substrate with which the light shielding layer of the desired pattern was formed previously, and has a photomask which has a desired pattern shape. Method of forming a pixel pattern of each color by irradiating radiation (hereinafter referred to as "exposure"), developing, dissolving and removing unexposed parts, and then baking using a clean oven or hot plate (Japanese Patent Publication ( JP-A 2-144502 and JP-A 3-53201 are known. However, in this method, especially when the density | concentration of the pigment contained in a colored radiation-sensitive composition becomes high, residue or ground contamination may generate | occur | produce on the board | substrate or light-shielding layer of an unexposed part at the time of image development.
이러한 잔사나 바탕 오염의 생성을 회피하기 위해서는, 현상액의 토출압을 높이는 것이 효과적이지만, 반면에 패턴의 결함이나 박리가 발생하는 폐해가 나타나기 때문에, 기판에의 밀착성이 우수하고, 현상액의 토출압을 높여도 패턴의 결함이나 박리가 발생하지 않는 착색 감방사선성 조성물이 요구되어 왔다. It is effective to increase the discharge pressure of the developing solution in order to avoid the generation of such residues or ground contamination. On the other hand, since the harmful effects such as defects and peeling of the pattern appear, the adhesion to the substrate is excellent and the discharge pressure of the developing solution is increased. There has been a demand for a colored radiation-sensitive composition in which no defect or peeling of the pattern occurs even if it is increased.
또한 최근, 액정 표시 장치의 대형화가 진행되고 있어 컬러 필터가 형성되는 기판도 커지고 있다. 그 때문에, 컬러 필터를 형성할 때의 노광 공정에서는, 수회로 나눠 노광하는 "분할 노광"이라 불리는 방법이 채용되고 있지만, 반면에 노광에 요구되는 연장 시간이 늘어나고 있다. 그래서 생산성 향상의 관점으로부터, 보다 짧은 노광 시간에도 화소 패턴을 형성할 수 있는 착색 감방사선성 조성물이 요망되고 있다. Moreover, in recent years, the enlargement of the liquid crystal display device advances, and the board | substrate with which a color filter is formed also becomes large. Therefore, in the exposure process at the time of forming a color filter, although the method called "split exposure" which exposes in several times is employ | adopted, the extension time required for exposure increases. Then, from the viewpoint of productivity improvement, the colored radiation-sensitive composition which can form a pixel pattern even in shorter exposure time is desired.
그러나 종래의 착색 감방사선성 조성물에서는, 짧은 노광 시간, 즉 적은 노광량에서 화소 패턴을 형성하면 현상시에 패턴의 결함이나 누락이 발생하는 경우가 있어 반드시 만족할만하다고는 할 수 없다. 또한 적은 노광량의 경우, 착색 감방사선성 조성물로부터의 피막의 경화 부족에 의해, 패턴의 표면 평활성이 현저히 손상되고, 그 결과 액정의 배향 불량 등이 발생한다는 문제가 있었다. 게다가, 종래의 착색 감방사선성 조성물은 일반적으로 경시적으로 증점하는 경향이 있어 제조 후 장기간 보관할 수 없다는 문제가 있었다. However, in the conventional colored radiation-sensitive composition, if a pixel pattern is formed at a short exposure time, that is, at a small exposure amount, defects or omissions of the pattern may occur at the time of development, and this is not necessarily satisfactory. Moreover, in the case of a small exposure amount, the surface smoothness of a pattern was remarkably impaired by the lack of hardening of the film from a colored radiation-sensitive composition, As a result, there existed a problem that the orientation defect of a liquid crystal etc. generate | occur | produced. In addition, conventional colored radiation-sensitive compositions generally have a problem that they tend to thicken over time and cannot be stored for a long time after production.
그 때문에, 기판에의 밀착성이 우수하고, 적은 노광량만으로도 충분한 현상 성 및 패턴의 표면 평활성을 가지며, 보존 안정성도 우수한 컬러 필터용 감방사선성 조성물의 개발이 강하게 요망되고 있다. Therefore, the development of the radiation sensitive composition for color filters which is excellent in adhesiveness to a board | substrate, has sufficient developability, the surface smoothness of a pattern only by a small exposure amount, and also excellent storage stability is desired.
본 발명의 과제는 기판에의 밀착성이 우수하고, 적은 노광량만으로도 충분한 현상성 및 패턴의 표면 평활성을 가지며, 보존 안정성 등도 우수한 컬러 필터용 감방사선성 조성물을 제공하는 것에 있다. The subject of this invention is providing the radiation sensitive composition for color filters which is excellent in adhesiveness to a board | substrate, has sufficient developability, the surface smoothness of a pattern only by a small exposure amount, and also excellent storage stability.
본 발명의 다른 과제는 본 발명의 상기 조성물로 형성되는 컬러 필터를 제공하는 것에 있다. Another object of the present invention is to provide a color filter formed of the composition of the present invention.
본 발명의 또 다른 과제는 본 발명의 컬러 필터를 구비한 액정 표시 장치를 제공하는 것에 있다. Another object of the present invention is to provide a liquid crystal display device having the color filter of the present invention.
본 발명의 또 다른 과제 및 이점 등은 이하의 설명으로부터 명백하게 될 것이다. Further objects and advantages of the present invention will become apparent from the following description.
본 발명에 의하면 본 발명의 상기 과제는 첫 번째로, According to the present invention the first object of the present invention is,
(A) 안료, (B) 분산제, (C) (c1) (메트)아크릴산을 함유하는 카르복실기 함유 불포화 단량체와, (c2) N-위치 치환 말레이미드와, (c3) 스티렌, α-메틸스티렌, p-히드록시-α-메틸스티렌, 메틸(메트)아크릴레이트, n-부틸(메트)아크릴레이트, 2-에틸헥실(메트)아크릴레이트, 2-히드록시에틸(메트)아크릴레이트, 알릴(메트)아크릴레이트, 벤질(메트)아크릴레이트, 글리세롤 모노(메트)아크릴레이트, 폴리스티렌 거대 단량체 및 폴리메틸메타크릴레이트 거대 단량체로 이루어지는 군으 로부터 선택되는 1종 이상의 공중합체를 포함하는 알칼리 가용성 수지, (D) 다관능성 단량체, (E) 광중합 개시제 및 (F) 용매를 함유하고, 상기 (B) 분산제가 리빙 음이온 중합을 거쳐 얻어지며, 아민가(단위 mgKOH/g)와 산가(단위 mgKOH/g)가 모두 0을 초과하는 아크릴계 공중합체를 함유하는 것을 특징으로 하는 컬러 필터용 감방사선성 조성물에 의해 해결된다. (A) a pigment, (B) a dispersing agent, (C) (c1) carboxyl group-containing unsaturated monomer containing (meth) acrylic acid, (c2) N-position substituted maleimide, (c3) styrene, (alpha) -methylstyrene, p-hydroxy-α-methylstyrene, methyl (meth) acrylate, n-butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, allyl (meth Alkali soluble resins comprising at least one copolymer selected from the group consisting of acrylates, benzyl (meth) acrylates, glycerol mono (meth) acrylates, polystyrene macromonomers and polymethylmethacrylate macromonomers, (D A) a polyfunctional monomer, (E) a photoinitiator, and (F) a solvent, wherein said (B) dispersant is obtained through living anionic polymerization, and both the amine value (unit mgKOH / g) and the acid value (unit mgKOH / g) Containing more than zero acrylic copolymer It solves with the radiation sensitive composition for color filters characterized by the above-mentioned.
본 발명에 의하면 본 발명의 상기 과제는 두 번째로, According to the present invention, the above object of the present invention is second,
(A) 안료, (B) 분산제, (C) 알칼리 가용성 수지, (D) 다관능성 단량체, (E) 광중합 개시제 및 (F) 용매를 함유하고, 상기 (B) 분산제가 리빙 음이온 중합을 거쳐 얻어지며, 아민가(단위 mgKOH/g)와 산가(단위 mgKOH/g)가 모두 0을 초과하는 아크릴계 공중합체를 함유하며, 상기 (A) 안료는 (B) 분산제, (C) 알칼리 가용성 수지 및 (F) 용매를 포함하는 매체 중에 미리 분산시켜 제조된 것임을 특징으로 하는 컬러 필터용 감방사선성 조성물에 의해 해결된다. (A) a pigment, (B) dispersing agent, (C) alkali-soluble resin, (D) polyfunctional monomer, (E) photoinitiator, and (F) solvent, The said (B) dispersing agent is obtained through a living anion polymerization. Wherein both the amine value (unit mgKOH / g) and the acid value (unit mgKOH / g) contain an acrylic copolymer with more than 0, wherein the pigment (A) is a (B) dispersant, (C) an alkali soluble resin and (F) It is solved by the radiation-sensitive composition for color filters, characterized in that prepared by dispersing in advance in a medium containing a solvent.
본 발명에 의하면 본 발명의 상기 과제는 세 번째로, 상기 각 컬러 필터용 감방사선성 조성물로 형성된 컬러 필터에 의해 해결된다. According to this invention, the said subject of this invention is 3rd solved by the color filter formed from the said radiation sensitive composition for each said color filter.
본 발명에 의하면 본 발명의 상기 과제는 네 번째로, 상기 컬러 필터를 구비하는 액정 표시 장치에 의해 해결된다. According to this invention, the said subject of this invention is 4th solved by the liquid crystal display device provided with the said color filter.
본 발명의 컬러 필터용 감방사선성 조성물은 기판에의 밀착성이 우수하고, 적은 노광량만으로도 충분한 현상성 및 패턴의 표면 평활성을 가지며, 보존 안정성 등도 우수하다. The radiation sensitive composition for color filters of this invention is excellent in adhesiveness to a board | substrate, has sufficient developability and surface smoothness of a pattern only by a small exposure amount, and is excellent also in storage stability.
따라서, 본 발명의 컬러 필터용 감방사선성 조성물은 전자 공업 분야에서의 컬러 액정 표시 장치용 컬러 필터를 비롯한 각종 컬러 필터의 형성에 매우 바람직하게 사용할 수 있다. Therefore, the radiation sensitive composition for color filters of this invention can be used very preferably for formation of various color filters including the color filter for color liquid crystal display devices in the electronic industry.
<발명을 실시하기 위한 최선의 형태> Best Mode for Carrying Out the Invention
이하, 본 발명에 대해서 상세히 설명한다. EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail.
[컬러 필터용 감방사선성 조성물][Radiation composition for color filters]
-(A) 안료-(A) Pigment
본 발명에서의 안료로는 특별히 한정되는 것은 아니고, 유기 안료, 무기 안료 중 어느 것도 좋다. 이 중, 컬러 필터에는 고순도이고 높은 투과성의 발색과 내열성이 요구되기 때문에, 특히 유기 안료가 바람직하다. The pigment in the present invention is not particularly limited, and any of an organic pigment and an inorganic pigment may be used. Among these, organic pigments are particularly preferred because color filters require high purity and high transmittance color development and heat resistance.
상기 유기 안료로는, 예를 들면 색지수(C.I.; The Society of Dyers and Colourists사 발행)에서 피그먼트로 분류되어 있는 화합물, 구체적으로는 하기와 같은 색지수(C.I.) 번호가 부여되어 있는 것을 들 수 있다. Examples of the organic pigments include compounds classified as pigments in the color index (CI; The Society of Dyers and Colorists, Inc.), specifically those having the following color index (CI) numbers. Can be.
C.I. 피그먼트 옐로우 12, C.I. 피그먼트 옐로우 13, C.I. 피그먼트 옐로우 14, C.I. 피그먼트 옐로우 17, C.I. 피그먼트 옐로우 20, C.I. 피그먼트 옐로우 24, C.I. 피그먼트 옐로우 31, C.I. 피그먼트 옐로우 55, C.I. 피그먼트 옐로우 83, C.I. 피그먼트 옐로우 93, C.I. 피그먼트 옐로우 109, C.I. 피그먼트 옐로우 110, C.I. 피그먼트 옐로우 138, C.I. 피그먼트 옐로우 139, C.I. 피그먼트 옐로우 150, C.I. 피그먼트 옐로우 153, C.I. 피그먼트 옐로우 154, C.I. 피그먼트 옐로우 155, C.I. 피그먼트 옐로우 166, C.I. 피그먼트 옐로우 168, C.I. 피그먼트 옐로우 211; C.I. Pigment Yellow 12, C.I. Pigment Yellow 13, C.I. Pigment Yellow 14, C.I. Pigment Yellow 17, C.I. Pigment Yellow 20, C.I. Pigment Yellow 24, C.I. Pigment Yellow 31, C.I. Pigment Yellow 55, C.I. Pigment Yellow 83, C.I. Pigment Yellow 93, C.I. Pigment Yellow 109, C.I. Pigment Yellow 110, C.I. Pigment Yellow 138, C.I. Pigment Yellow 139, C.I. Pigment Yellow 150, C.I. Pigment Yellow 153, C.I. Pigment Yellow 154, C.I. Pigment Yellow 155, C.I. Pigment Yellow 166, C.I. Pigment Yellow 168, C.I. Pigment yellow 211;
C.I. 피그먼트 오렌지 36, C.I. 피그먼트 오렌지 43, C.I. 피그먼트 오렌지 51, C.I. 피그먼트 오렌지 61, C.I. 피그먼트 오렌지 71; C.I. Pigment Orange 36, C.I. Pigment Orange 43, C.I. Pigment Orange 51, C.I. Pigment Orange 61, C.I. Pigment orange 71;
C.I. 피그먼트 레드 9, C.I. 피그먼트 레드 97, C.I. 피그먼트 레드 122, C.I. 피그먼트 레드 123, C.I. 피그먼트 레드 149, C.I. 피그먼트 레드 168, C.I. 피그먼트 레드 176, C.I. 피그먼트 레드 177, C.I. 피그먼트 레드 180, C.I. 피그먼트 레드 185, C.I. 피그먼트 레드 207, C.I. 피그먼트 레드 208, C.I. 피그먼트 레드 209, C.I. 피그먼트 레드 215, C.I. 피그먼트 레드 224, C.I. 피그먼트 레드 242, C.I. 피그먼트 레드 243, C.I. 피그먼트 레드 254; C.I. Pigment Red 9, C.I. Pigment Red 97, C.I. Pigment Red 122, C.I. Pigment Red 123, C.I. Pigment Red 149, C.I. Pigment Red 168, C.I. Pigment Red 176, C.I. Pigment Red 177, C.I. Pigment Red 180, C.I. Pigment Red 185, C.I. Pigment Red 207, C.I. Pigment Red 208, C.I. Pigment Red 209, C.I. Pigment Red 215, C.I. Pigment Red 224, C.I. Pigment Red 242, C.I. Pigment Red 243, C.I. Pigment red 254;
C.I. 피그먼트 바이올렛 19, C.I. 피그먼트 바이올렛 23, C.I. 피그먼트 바이올렛 29; C.I. Pigment Violet 19, C.I. Pigment Violet 23, C.I. Pigment violet 29;
C.I. 피그먼트 블루 15, C.I. 피그먼트 블루 60, C.I. 피그먼트 블루 15:3, C.I. 피그먼트 블루 15:4, C.I. 피그먼트 블루 15:6; C.I. Pigment Blue 15, C.I. Pigment Blue 60, C.I. Pigment Blue 15: 3, C.I. Pigment Blue 15: 4, C.I. Pigment blue 15: 6;
C.I. 피그먼트 그린 7, C.I. 피그먼트 그린 36, C.I. 피그먼트 그린 136, C.I. 피그먼트 그린 210; C.I. Pigment Green 7, C.I. Pigment Green 36, C.I. Pigment Green 136, C.I. Pigment green 210;
C.I. 피그먼트 브라운 23, C.I. 피그먼트 브라운 25. C.I. Pigment Brown 23, C.I. Pigment Brown 25.
이들 유기 안료는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These organic pigments can be used individually or in mixture of 2 or more types.
본 발명에서 유기 안료는 재결정법, 재침전법, 용제 세정법, 승화법, 진공 가열법이나, 이들의 조합에 의해 정제하여 사용할 수 있다. In the present invention, the organic pigment can be purified by recrystallization, reprecipitation, solvent washing, sublimation, vacuum heating, or a combination thereof.
또한, 상기 무기 안료로는 예를 들면 산화 티탄, 황산바륨, 탄산칼슘, 산화아연, 황산납, 황색 납, 아연황, 벤가라(적색 산화철(III)), 카드뮴 적, 군청, 감 청, 산화크롬 녹, 코발트 녹, 엄버, 티탄 블랙, 합성 철 흑, 카본 블랙 등을 들 수 있다. Examples of the inorganic pigment include titanium oxide, barium sulfate, calcium carbonate, zinc oxide, lead sulfate, yellow lead, zinc sulfur, bengar (red iron oxide (III)), cadmium red, ultramarine blue, blue blue, and oxide. Chromium rust, cobalt rust, umber, titanium black, synthetic iron black, carbon black and the like.
이들 무기 안료는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These inorganic pigments can be used individually or in mixture of 2 or more types.
또한, 본 발명에서는 경우에 따라 상기 안료와 함께 염료나 천연 색소를 1종 이상 병용할 수도 있다. Moreover, in this invention, you may use together 1 or more types of dye and a natural pigment with the said pigment as needed.
본 발명에서 안료는 원하는 대로 그의 입자 표면을 중합체로 개질하여 사용할 수 있다. 안료의 입자 표면을 개질하는 중합체로는, 예를 들면 일본 특허 공개 (평)8-259876호 공보에 기재된 중합체나, 시판되고 있는 각종 안료 분산용 중합체 또는 올리고머 등을 들 수 있다. Pigments in the present invention can be used by modifying their particle surfaces with polymers as desired. As a polymer which modifies the particle surface of a pigment, the polymer of Unexamined-Japanese-Patent No. 8-259876, the polymer for dispersion | distribution of various pigments, or oligomer etc. are mentioned, for example.
-(B) 분산제--(B) dispersant-
본 발명에서의 분산제는, 리빙 음이온 중합을 거쳐 얻어지며 아민가(단위 mgKOH/g. 이하 마찬가지임)과 산가(단위 mgKOH/g. 이하 마찬가지임)이 모두 0을 초과하는 아크릴계 공중합체 (이하, "아크릴계 분산제 (B1)"이라 함)을 함유한다. The dispersant in the present invention is an acrylic copolymer obtained by living anionic polymerization, in which both the amine value (unit mgKOH / g. Or less) and the acid value (unit mgKOH / g or less) are more than 0 (hereinafter, “ Acrylic dispersant ("B1)").
아크릴계 분산제 (B1)의 아민가는, 바람직하게는 10 내지 100, 더욱 바람직하게는 15 내지 50이다. 또한 아크릴계 분산제 (B1)의 산가는, 바람직하게는 5 내지 50, 더욱 바람직하게는 10 내지 30이다. 이 경우, 아크릴계 분산제 (B1)의 아민가가 0이면 얻어지는 조성물의 보존 안정성이 저하하는 경향이 있다. 또한, 아크릴계 분산제 (B1)의 산가가 0이면 기판에의 밀착성이 저하하는 경향이 있다. The amine titer of acrylic dispersant (B1) becomes like this. Preferably it is 10-100, More preferably, it is 15-50. The acid value of the acrylic dispersant (B1) is preferably 5 to 50, more preferably 10 to 30. In this case, when the amine value of an acrylic dispersing agent (B1) is 0, there exists a tendency for the storage stability of the composition obtained to fall. Moreover, when the acid value of acrylic dispersing agent (B1) is 0, there exists a tendency for adhesiveness to a board | substrate to fall.
아크릴계 분산제 (B1)의 시판품으로는, 디스퍼 빅(Disper byk)-2001(아민가=29, 산가=19, 빅케미(BYK)사제) 등을 들 수 있다. As a commercial item of an acryl-type dispersing agent (B1), Disper byk-2001 (amine value = 29, acid value = 19, the product made by BYK Corporation) etc. are mentioned.
본 발명에서 아크릴계 분산제 (B1)은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. In this invention, acrylic dispersing agent (B1) can be used individually or in mixture of 2 or more types.
본 발명에서는, 아크릴계 분산제 (B1)과 함께 다른 분산제를 병용할 수 있다. In this invention, another dispersing agent can be used together with an acrylic dispersing agent (B1).
상기 다른 분산제로는, 예를 들면 폴리옥시에틸렌라우릴에테르, 폴리옥시에틸렌스테아릴에테르, 폴리옥시에틸렌올레일에테르와 같은 폴리옥시에틸렌알킬에테르; 폴리옥시에틸렌 n-옥틸페닐에테르, 폴리옥시에틸렌 n-노닐페닐에테르와 같은 폴리옥시에틸렌알킬페닐에테르; 폴리에틸렌글리콜디라우레이트, 폴리에틸렌글리콜디스테아레이트와 같은 폴리에틸렌글리콜디에스테르; 소르비탄 지방산 에스테르; 지방산 변성 폴리에스테르; 3급 아민 변성 폴리우레탄; 폴리에틸렌이민류 이외에, 이하 상품명으로 KP(신에츠 가가꾸 고교(주)제), 폴리플로우(교에이샤 가가꾸(주)제), 에프톱(토켐 프로덕츠사제), 메가팩(다이닛본 잉크 가가꾸 고교(주)제), 플로라드(스미토모 쓰리엠(주)제), 아사히 가드, 서플론(이상, 아사히 글라스(주)제)나, 디스퍼 빅-101, 동-103, 동-107, 동-110, 동-111, 동-115, 동-130, 동-160, 동-161, 동-162, 동-163, 동-164, 동-165, 동-166, 동-170, 동-180, 동-182, 동-2000(이상, 빅케미·재팬(주)제), 솔스패스 S5000, 동 12000, 동 13240, 동 13940, 동 17000, 동 20000, 동 22000, 동 24000, 동 24000 GR, 동 26000, 동 27000, 동 28000(이상, 아비시아(주)제), EFKA46, 동 47, 동 48, 동 745, 동 4540, 동 4550, 동 6750, EFKA LP4008, 동 4009, 동 4010, 동 4015, 동 4050, 동 4055, 동 4560, 동 4800, EFKA Polymer 400, 동 401, 동 402, 동 403, 동 450, 동 451, 동 453(이 상, 에프카 케미컬즈(주)제); 아지스파 PB-822(아지노모또 파인테크노(주)제) 등을 들 수 있다. As said other dispersing agent, For example, polyoxyethylene alkyl ether, such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether; Polyoxyethylene alkyl phenyl ethers such as polyoxyethylene n-octylphenyl ether and polyoxyethylene n-nonylphenyl ether; Polyethylene glycol diesters such as polyethylene glycol dilaurate and polyethylene glycol distearate; Sorbitan fatty acid esters; Fatty acid modified polyesters; Tertiary amine modified polyurethanes; In addition to polyethyleneimines, KP (manufactured by Shin-Etsu Chemical Co., Ltd.), polyflow (manufactured by Kyoeisha Chemical Co., Ltd.), F-Top (manufactured by Tochem Products Co., Ltd.), and MegaPack (Dainnippon Ink Chemical Co., Ltd.) Kogyo Co., Ltd.), Florad (made by Sumitomo 3M Co., Ltd.), Asahi Guard, Suplon (above, Asahi Glass Co., Ltd.), Disper Big-101, Copper-103, Copper-107, Copper -110, East-111, East-115, East-130, East-160, East-161, East-162, East-163, East-164, East-165, East-166, East-170, East-180 , East-182, East-2000 (above, made by Big Chemi Japan Co., Ltd.), Solspass S5000, East 12000, East 13240, East 13940, East 17000, East 20000, East 22000, East 24000, East 24000 GR, East 26000, East 27000, East 28000 (above, made by Avicia Co., Ltd.), EFKA46, East 47, East 48, East 745, East 4540, East 4550, East 6750, EFKA LP4008, East 4009, East 4010, East 4015 , 4040, 4055, 4560, 4800, EFKA Polymer 400, 401, 402, 403, 450, 451, 453 (above, manufactured by Efka Chemicals Co., Ltd.); Aji spa PB-822 (Ajinomoto Fine Techno Co., Ltd.) etc. are mentioned.
이들 다른 분산제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These other dispersing agents can be used individually or in mixture of 2 or more types.
다른 분산제의 사용 비율은 아크릴계 분산제 (B1)과 다른 분산제와의 합계량에 대하여, 바람직하게는 0 내지 75 중량%, 보다 바람직하게는 0 내지 50 중량%이다. 이 경우, 다른 분산제의 사용 비율이 75 중량%를 초과하면 현상성, 표면 평활성 및 보존 안정성의 양호한 균형을 확보할 수 없게 될 우려가 있다. The use ratio of the other dispersant is preferably 0 to 75% by weight, more preferably 0 to 50% by weight, based on the total amount of the acrylic dispersant (B1) and the other dispersant. In this case, when the use ratio of another dispersing agent exceeds 75 weight%, there exists a possibility that the favorable balance of developability, surface smoothness, and storage stability may not be ensured.
본 발명에서의 아크릴계 분산제 (B1)의 사용량(고형분 환산)은 (A) 안료 100 중량부에 대하여, 바람직하게는 1 내지 50 중량부, 더욱 바람직하게는 3 내지 30 중량부이다. 이 경우, 아크릴계 분산제 (B1)의 사용량이 1 중량부 미만이면 얻어지는 조성물의 보존 안정성이 저하하는 경향이 있고, 한편 50 중량부를 초과하면 기판상에 잔사가 발생하기 쉬워지는 경향이 있다. The usage-amount (solid content conversion) of the acrylic dispersant (B1) in the present invention is preferably 1 to 50 parts by weight, more preferably 3 to 30 parts by weight based on 100 parts by weight of the (A) pigment. In this case, when the usage-amount of an acryl-type dispersing agent (B1) is less than 1 weight part, there exists a tendency for the storage stability of the composition obtained to fall, and when it exceeds 50 weight part, there exists a tendency for residue to generate | occur | produce on a board | substrate.
-(C) 알칼리 가용성 수지--(C) alkali-soluble resin-
본 발명에서의 알칼리 가용성 수지로는, (A) 안료에 대하여 결합제로서 작용하며, 컬러 필터를 제조할 때의 현상 공정에서 사용되는 현상액, 특히 바람직하게는 알칼리 현상액에 대하여 가용성을 갖는 것이면 특별히 한정되는 것은 아니다. 그 중에서도, 카르복실기를 갖는 알칼리 가용성 수지가 바람직하고, 특히 분자 중에 1개 이상의 카르복실기를 갖는 에틸렌성 불포화 단량체 (이하, "카르복실기 함유 불포화 단량체"라 함)과 다른 공중합 가능한 에틸렌성 불포화 단량체 (이하, "공중합성 불포화 단량체"라 함)과의 공중합체 (이하, "카르복실기 함유 공중합체" 라 함)이 바람직하다. As alkali-soluble resin in this invention, it acts as a binder with respect to (A) pigment, and if it has solubility with respect to the developing solution used at the developing process at the time of manufacturing a color filter, Especially preferably, an alkaline developing solution, it will be specifically limited. It is not. Among them, alkali-soluble resins having a carboxyl group are preferable, and in particular, ethylenically unsaturated monomers which can be copolymerized with other ethylenically unsaturated monomers (hereinafter referred to as "carboxyl group-containing unsaturated monomers") having at least one carboxyl group (hereinafter, " Preference is given to copolymers (hereinafter referred to as "carboxyl group-containing copolymers").
카르복실기 함유 불포화 단량체로는, 예를 들면 As a carboxyl group-containing unsaturated monomer, for example
(메트)아크릴산, 크로톤산, α-클로로아크릴산, 신남산과 같은 불포화 모노카르복실산; Unsaturated monocarboxylic acids such as (meth) acrylic acid, crotonic acid, α-chloroacrylic acid and cinnamic acid;
말레산, 말레산 무수물, 푸마르산, 이타콘산, 이타콘산 무수물, 시트라콘산, 시트라콘산 무수물, 메사콘산과 같은 불포화 디카르복실산 또는 그의 무수물; Unsaturated dicarboxylic acids or anhydrides thereof such as maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid;
3가 이상의 불포화 다가 카르복실산 또는 그의 무수물; Trivalent or higher unsaturated polyvalent carboxylic acid or anhydrides thereof;
숙신산 모노〔2-(메트)아크릴로일옥시에틸〕, 프탈산 모노〔2-(메트)아크릴로일옥시에틸〕과 같은 2가 이상의 다가 카르복실산의 모노〔(메트)아크릴로일옥시알킬〕에스테르; Mono ((meth) acryloyloxyalkyl] of a divalent or higher polyhydric carboxylic acid such as succinic acid mono [2- (meth) acryloyloxyethyl] and phthalic acid mono [2- (meth) acryloyloxyethyl] ester;
ω-카르복시폴리카프롤락톤 모노(메트)아크릴레이트와 같은 양쪽 말단에 카르복시기와 수산기를 갖는 중합체의 모노(메트)아크릴레이트 등을 들 수 있다. and mono (meth) acrylates of polymers having a carboxyl group and a hydroxyl group at both ends, such as? -carboxypolycaprolactone mono (meth) acrylate.
이들 카르복실기 함유 불포화 단량체 중, 프탈산 모노(2-아크릴로일옥시에틸)은 M-5400(도아 고오세이(주)제)의 상품명으로 시판되고 있다. Phthalic acid mono (2-acryloyloxyethyl) is marketed under the brand name of M-5400 (made by Toagosei Co., Ltd.) among these carboxyl group-containing unsaturated monomers.
상기 카르복실기 함유 불포화 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said carboxyl group-containing unsaturated monomer can be used individually or in mixture of 2 or more types.
또한, 공중합성 불포화 단량체로는, 예를 들면 As the copolymerizable unsaturated monomer, for example,
말레이미드; Maleimide;
N-페닐말레이미드, N-o-히드록시페닐말레이미드, N-m-히드록시페닐말레이미드, N-p-히드록시페닐말레이미드, N-벤질말레이미드, N-시클로헥실말레이미드, N- 숙신이미딜-3-말레이미드벤조에이트, N-숙신이미딜-4-말레이미드부틸레이트, N-숙신이미딜-6-말레이미드카프로에이트, N-숙신이미딜-3-말레이미드프로피오네이트, N-(아크리디닐)말레이미드와 같은 N-위치 치환 말레이미드; N-phenylmaleimide, No-hydroxyphenylmaleimide, Nm-hydroxyphenylmaleimide, Np-hydroxyphenylmaleimide, N-benzylmaleimide, N-cyclohexylmaleimide, N-succinimidyl-3 Maleimide benzoate, N-succinimidyl-4-maleimide butyrate, N-succinimidyl-6-maleimide caproate, N-succinimidyl-3-maleimide propionate, N- (arc N-position substituted maleimide, such as ridinyl) maleimide;
스티렌, α-메틸스티렌, o-비닐톨루엔, m-비닐톨루엔, p-비닐톨루엔, p-클로로스티렌, o-메톡시스티렌, m-메톡시스티렌, p-메톡시스티렌, p-히드록시-α-메틸스티렌, o-비닐벤질메틸에테르, m-비닐벤질메틸에테르, p-비닐벤질메틸에테르, o-비닐벤질글리시딜에테르, m-비닐벤질글리시딜에테르, p-비닐벤질글리시딜에테르와 같은 방향족 비닐 화합물; Styrene, α-methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, p-chlorostyrene, o-methoxystyrene, m-methoxystyrene, p-methoxystyrene, p-hydroxy- α-methylstyrene, o-vinylbenzylmethyl ether, m-vinylbenzylmethyl ether, p-vinylbenzylmethyl ether, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycid Aromatic vinyl compounds such as dimethyl ether;
인덴, 1-메틸인덴과 같은 인덴류; Indenes such as indene and 1-methylindene;
메틸(메트)아크릴레이트, 에틸(메트)아크릴레이트, n-프로필(메트)아크릴레이트, i-프로필(메트)아크릴레이트, n-부틸(메트)아크릴레이트, i-부틸(메트)아크릴레이트, sec-부틸(메트)아크릴레이트, t-부틸(메트)아크릴레이트, 2-에틸헥실(메트)아크릴레이트, 2-히드록시에틸(메트)아크릴레이트, 2-히드록시프로필(메트)아크릴레이트, 3-히드록시프로필(메트)아크릴레이트, 2-히드록시부틸(메트)아크릴레이트, 3-히드록시부틸(메트)아크릴레이트, 4-히드록시부틸(메트)아크릴레이트, 알릴(메트)아크릴레이트, 벤질(메트)아크릴레이트, 시클로헥실(메트)아크릴레이트, 페닐(메트)아크릴레이트, 2-메톡시에틸(메트)아크릴레이트, 2-페녹시에틸(메트)아크릴레이트, 메톡시디에틸렌글리콜(메트)아크릴레이트, 메톡시트리에틸렌글리콜(메트)아크릴레이트, 메톡시프로필렌글리콜(메트)아크릴레이트, 메톡시디프로필렌글리콜( 메트)아크릴레이트, 이소보르닐(메트)아크릴레이트, 트리시클로[5.2.1.02,6]데칸-8-일(메트)아크릴레이트, 2-히드록시-3-페녹시프로필(메트)아크릴레이트, 글리세롤 모노(메트)아크릴레이트와 같은 불포화 카르복실산 에스테르; Methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, i-propyl (meth) acrylate, n-butyl (meth) acrylate, i-butyl (meth) acrylate, sec-butyl (meth) acrylate, t-butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, allyl (meth) acrylate , Benzyl (meth) acrylate, cyclohexyl (meth) acrylate, phenyl (meth) acrylate, 2-methoxyethyl (meth) acrylate, 2-phenoxyethyl (meth) acrylate, methoxydiethylene glycol ( Meth) acrylate, methoxytriethylene glycol (meth) acrylate, methoxypropyl Lenglycol (meth) acrylate, methoxydipropylene glycol (meth) acrylate, isobornyl (meth) acrylate, tricyclo [5.2.1.0 2,6 ] decane-8-yl (meth) acrylate, 2- Unsaturated carboxylic esters such as hydroxy-3-phenoxypropyl (meth) acrylate, glycerol mono (meth) acrylate;
2-아미노에틸(메트)아크릴레이트, 2-디메틸아미노에틸(메트)아크릴레이트, 2-아미노프로필(메트)아크릴레이트, 2-디메틸아미노프로필(메트)아크릴레이트, 3-아미노프로필(메트)아크릴레이트, 3-디메틸아미노프로필(메트)아크릴레이트와 같은 불포화 카르복실산아미노 알킬에스테르; 2-aminoethyl (meth) acrylate, 2-dimethylaminoethyl (meth) acrylate, 2-aminopropyl (meth) acrylate, 2-dimethylaminopropyl (meth) acrylate, 3-aminopropyl (meth) acrylic Unsaturated carboxylic acid amino alkyl esters such as latex and 3-dimethylaminopropyl (meth) acrylate;
글리시딜(메트)아크릴레이트와 같은 불포화 카르복실산글리시딜에스테르; Unsaturated carboxylic acid glycidyl esters such as glycidyl (meth) acrylate;
아세트산비닐, 프로피온산비닐, 부티르산비닐, 벤조산비닐과 같은 카르복실산비닐에스테르; Carboxylic acid vinyl esters such as vinyl acetate, vinyl propionate, vinyl butyrate and vinyl benzoate;
비닐메틸에테르, 비닐에틸에테르, 알릴글리시딜에테르와 같은 다른 불포화 에테르; Other unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether;
(메트)아크릴로니트릴, α-클로로아크릴로니트릴, 시안화비닐리덴과 같은 시안화비닐 화합물; Vinyl cyanide compounds such as (meth) acrylonitrile, α-chloroacrylonitrile and vinylidene cyanide;
(메트)아크릴아미드, α-클로로아크릴아미드, N-2-히드록시에틸(메트)아크릴아미드와 같은 불포화 아미드; Unsaturated amides such as (meth) acrylamide, α-chloroacrylamide, N-2-hydroxyethyl (meth) acrylamide;
1,3-부타디엔, 이소프렌, 클로로프렌과 같은 지방족 공액 디엔; Aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene;
폴리스티렌, 폴리메틸(메트)아크릴레이트, 폴리-n-부틸(메트)아크릴레이트, 폴리실록산과 같은 중합체 분자쇄의 말단에 모노(메트)아크릴로일기를 갖는 거대 단량체 등을 들 수 있다. And macromonomers having a mono (meth) acryloyl group at the ends of polymer molecular chains such as polystyrene, polymethyl (meth) acrylate, poly-n-butyl (meth) acrylate, and polysiloxane.
이들 공중합성 불포화 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These copolymerizable unsaturated monomers can be used individually or in mixture of 2 or more types.
본 발명에서의 카르복실기 함유 공중합체로는, (c1) (메트)아크릴산을 필수 성분으로 하고, 경우에 따라 숙신산 모노〔2-(메트)아크릴로일옥시에틸〕 및(또는)ω-카르복시폴리카프롤락톤 모노(메트)아크릴레이트를 함유하는 카르복실기 함유 불포화 단량체와, (c2) N-위치 치환 말레이미드와, (c3) 스티렌, α-메틸스티렌, p-히드록시-α-메틸스티렌, 메틸(메트)아크릴레이트, n-부틸(메트)아크릴레이트, 2-에틸헥실(메트)아크릴레이트, 2-히드록시에틸(메트)아크릴레이트, 알릴(메트)아크릴레이트, 벤질(메트)아크릴레이트, 글리세롤 모노(메트)아크릴레이트, 폴리스티렌 거대 단량체 및 폴리메틸메타크릴레이트 거대 단량체의 군으로부터 선택되는 다른 공중합성 불포화 단량체의 1종 이상과의 공중합체 (이하, "카르복실기 함유 공중합체 (C1)"이라 함)이 바람직하다. As the carboxyl group-containing copolymer in the present invention, (c1) (meth) acrylic acid is an essential component, and succinic acid mono [2- (meth) acryloyloxyethyl] and / or ω-carboxypolycaprol in some cases Carboxyl group-containing unsaturated monomer containing lactone mono (meth) acrylate, (c2) N-position substituted maleimide, (c3) styrene, α-methylstyrene, p-hydroxy-α-methylstyrene, methyl (meth ) Acrylate, n-butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, allyl (meth) acrylate, benzyl (meth) acrylate, glycerol mono Copolymers with at least one of other copolymerizable unsaturated monomers selected from the group of (meth) acrylates, polystyrene macromonomers and polymethylmethacrylate macromonomers (hereinafter referred to as "carboxyl group-containing copolymers (C1)") This is preferable All.
카르복실기 함유 공중합체 (C1)의 바람직한 구체예로는, As a preferable specific example of a carboxyl group-containing copolymer (C1),
(메트)아크릴산/N-페닐말레이미드/스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/N-m-히드록시페닐말레이미드/스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-m-hydroxyphenylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/N-p-히드록시페닐말레이미드/스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-p-hydroxyphenylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/N-시클로헥실말레이미드/스티렌/벤질(메트)아크릴레이트 공 중합체, (Meth) acrylic acid / N-cyclohexylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/α-메틸스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / α-methylstyrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/스티렌/n-부틸(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / n-butyl (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/스티렌/2-에틸헥실(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / 2-ethylhexyl (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/p-히드록시-α-메틸스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / p-hydroxy-α-methylstyrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/스티렌/n-부틸(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / n-butyl (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/스티렌/2-에틸헥실(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / 2-ethylhexyl (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/스티렌/2-히드록시에틸(메트)아크릴레이트/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/스티렌/벤질(메트)아크릴레이트/글리세롤 모노(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / benzyl (meth) acrylate / glycerol mono (meth) acrylate copolymer,
(메트)아크릴산/N-p-히드록시페닐말레이미드/스티렌/벤질(메트)아크릴레이트/글리세롤 모노(메트)아크릴레이트 공중합체, (Meth) acrylic acid / N-p-hydroxyphenylmaleimide / styrene / benzyl (meth) acrylate / glycerol mono (meth) acrylate copolymer,
(메트)아크릴산/N-페닐말레이미드/스티렌/페닐(메트)아크릴레이트/2-히드록 시에틸(메트)아크릴레이트/폴리스티렌 거대 단량체 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / phenyl (meth) acrylate / 2-hydroxyethyl (meth) acrylate / polystyrene macromonomer copolymer,
(메트)아크릴산/N-페닐말레이미드/스티렌/페닐(메트)아크릴레이트/2-히드록시에틸(메트)아크릴레이트/폴리메틸메타크릴레이트 거대 단량체 공중합체, (Meth) acrylic acid / N-phenylmaleimide / styrene / phenyl (meth) acrylate / 2-hydroxyethyl (meth) acrylate / polymethylmethacrylate macromonomer copolymer,
(메트)아크릴산/숙신산 모노〔2-(메트)아크릴로일옥시에틸〕/N-페닐말레이미드/스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / N-phenylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/숙신산 모노〔2-(메트)아크릴로일옥시에틸〕/N-p-히드록시페닐말레이미드/스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / N-p-hydroxyphenylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/숙신산 모노〔2-(메트)아크릴로일옥시에테르〕/N-페닐말레이미드/스티렌/알릴(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyether] / N-phenylmaleimide / styrene / allyl (meth) acrylate copolymer,
(메트)아크릴산/숙신산 모노〔2-(메트)아크릴로일옥시에틸〕/N-시클로헥실말레이미드/스티렌/알릴(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / N-cyclohexylmaleimide / styrene / allyl (meth) acrylate copolymer,
(메트)아크릴산/숙신산 모노〔2-(메트)아크릴로일옥시에틸〕/N-시클로헥실말레이미드/스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / N-cyclohexylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/ω-카르복시폴리카프롤락톤 모노(메트)아크릴레이트/N-m-히드록시페닐말레이미드/스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / ω-carboxypolycaprolactone mono (meth) acrylate / N-m-hydroxyphenylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/ω-카르복시폴리카프롤락톤 모노(메트)아크릴레이트/N-p-히드록시페닐말레이미드/스티렌/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / ω-carboxypolycaprolactone mono (meth) acrylate / N-p-hydroxyphenylmaleimide / styrene / benzyl (meth) acrylate copolymer,
(메트)아크릴산/ω-카르복시폴리카프롤락톤 모노(메트)아크릴레이트/N-페닐말레이미드/스티렌/벤질(메트)아크릴레이트/글리세롤 모노(메트)아크릴레이트 공중합체, (Meth) acrylic acid / ω-carboxypolycaprolactone mono (meth) acrylate / N-phenylmaleimide / styrene / benzyl (meth) acrylate / glycerol mono (meth) acrylate copolymer,
(메트)아크릴산/ω-카르복시폴리카프롤락톤 모노(메트)아크릴레이트/N-p-히드록시페닐말레이미드/스티렌/벤질(메트)아크릴레이트/글리세롤 모노(메트)아크릴레이트 공중합체 등을 들 수 있다. (Meth) acrylic acid / ω-carboxypolycaprolactone mono (meth) acrylate / Np-hydroxyphenylmaleimide / styrene / benzyl (meth) acrylate / glycerol mono (meth) acrylate copolymer, etc. may be mentioned. .
또한, 카르복실기 함유 공중합체 (C1) 이외의 카르복실기 함유 공중합체로는, 예를 들면 In addition, as carboxyl group-containing copolymers other than a carboxyl group-containing copolymer (C1), for example,
(메트)아크릴산/메틸(메트)아크릴레이트 공중합체, (Meth) acrylic acid / methyl (meth) acrylate copolymer,
(메트)아크릴산/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / benzyl (meth) acrylate copolymers,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate copolymer,
(메트)아크릴산/메틸(메트)아크릴레이트/폴리스티렌 거대 단량체 공중합체, (Meth) acrylic acid / methyl (meth) acrylate / polystyrene macromonomer copolymer,
(메트)아크릴산/메틸(메트)아크릴레이트/폴리메틸메타크릴레이트 거대 단량체 공중합체, (Meth) acrylic acid / methyl (meth) acrylate / polymethylmethacrylate macromonomer copolymer,
(메트)아크릴산/벤질(메트)아크릴레이트/폴리스티렌 거대 단량체 공중합체, (Meth) acrylic acid / benzyl (meth) acrylate / polystyrene macromonomer copolymer,
(메트)아크릴산/벤질(메트)아크릴레이트/폴리메틸메타크릴레이트 거대 단량체 공중합체, (Meth) acrylic acid / benzyl (meth) acrylate / polymethylmethacrylate macromonomer copolymer,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/벤질(메트)아크릴레이트/폴리스티렌 거대 단량체 공중합체, (Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate / polystyrene macromonomer copolymer,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/벤질(메트)아크릴레이트/폴리메틸메타크릴레이트 거대 단량체 공중합체 등을 들 수 있다. (Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate / polymethylmethacrylate macromonomer copolymer etc. are mentioned.
카르복실기 함유 공중합체에서, 카르복실기 함유 불포화 단량체의 공중합 비 율은 바람직하게는 5 내지 50 중량%, 더욱 바람직하게는 10 내지 40 중량%이다. 이 경우, 상기 공중합 비율이 5 중량% 미만이면 얻어지는 감방사선성 조성물의 알칼리 현상액에 대한 용해성이 저하하는 경향이 있고, 한편 50 중량%를 초과하면 알칼리 현상액에 대한 용해성이 과대해져 알칼리 현상액에 의해 현상할 때에 기판으로부터의 화소 탈락이나 화소 표면의 막 거칠어 짐을 초래하기 쉬워지는 경향이 있다. In the carboxyl group-containing copolymer, the copolymerization ratio of the carboxyl group-containing unsaturated monomer is preferably 5 to 50% by weight, more preferably 10 to 40% by weight. In this case, when the said copolymerization ratio is less than 5 weight%, the solubility with respect to the alkaline developing solution of the radiation sensitive composition obtained tends to fall, and when it exceeds 50 weight%, the solubility with respect to an alkaline developing solution will become excessive and it will develop by alkaline developing solution. When doing so, there is a tendency that the dropping of the pixel from the substrate and the roughness of the surface of the pixel tend to be caused.
알칼리 가용성 수지의 겔 투과 크로마토그래피(GPC, 용출 용매: 테트라히드로푸란)으로 측정한 Mw는, 바람직하게는 3,000 내지 300,000, 보다 바람직하게는 5,000 내지 100,000이다. Mw measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) of alkali-soluble resin becomes like this. Preferably it is 3,000-300,000, More preferably, it is 5,000-100,000.
또한, 알칼리 가용성 수지의 겔 투과 크로마토그래피(GPC, 용출 용매: 테트라히드로푸란)으로 측정한 Mn은 바람직하게는 3,000 내지 60,000, 보다 바람직하게는 5,000 내지 25,000이다. In addition, Mn measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) of alkali-soluble resin becomes like this. Preferably it is 3,000-60,000, More preferably, it is 5,000-25,000.
또한, 알칼리 가용성 수지의 Mw와 Mn의 비(Mw/Mn)는 바람직하게는 1 내지 5, 보다 바람직하게는 1 내지 4이다. Moreover, ratio (Mw / Mn) of Mw and Mn of alkali-soluble resin becomes like this. Preferably it is 1-5, More preferably, it is 1-4.
본 발명에서는, 이러한 특정한 Mw 및 Mn을 갖는 알칼리 가용성 수지를 사용함으로써 현상성이 우수한 감방사선성 조성물이 얻어지고, 그에 따라 예리한 패턴 엣지를 갖는 화소 패턴을 형성할 수 있음과 동시에, 현상시에 미노광부의 기판상 및 차광층상에 잔사, 바탕 오염, 막 잔여물 등이 발생하기 어려워진다. In the present invention, a radiation sensitive composition having excellent developability is obtained by using an alkali-soluble resin having such specific Mw and Mn, whereby a pixel pattern having a sharp pattern edge can be formed and at the same time a minnow during development. Residues, background contamination, film residues, etc., on the substrate and the light shielding layer of the miner are less likely to occur.
본 발명에서 알칼리 가용성 수지는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. Alkali-soluble resin in this invention can be used individually or in mixture of 2 or more types.
본 발명에서의 알칼리 가용성 수지의 사용량은 (A) 안료 100 중량부에 대하여, 바람직하게는 10 내지 1,000 중량부, 보다 바람직하게는 20 내지 500 중량부이다. 이 경우, 알칼리 가용성 수지의 사용량이 10 중량부 미만이면 예를 들면 알칼리 현상성이 저하하거나, 미노광부의 기판상이나 차광층상에 바탕 오염이나 막 잔여물이 발생할 우려가 있고, 한편 1,000 중량부를 초과하면 상대적으로 안료 농도가 저하하기 때문에, 박막으로서 목적으로 하는 색 농도를 달성하는 것이 곤란해질 우려가 있다. The usage-amount of alkali-soluble resin in this invention is preferably 10-1,000 weight part, More preferably, it is 20-500 weight part with respect to 100 weight part of (A) pigments. In this case, when the amount of the alkali-soluble resin is less than 10 parts by weight, for example, alkali developability may decrease, or background contamination or film residue may occur on the substrate or the light shielding layer of the unexposed part, and when it exceeds 1,000 parts by weight, Since the pigment concentration decreases relatively, there is a fear that it is difficult to achieve the target color density as a thin film.
-(D) 다관능성 단량체-(D) polyfunctional monomer
본 발명에서의 다관능성 단량체는 2개 이상의 중합성 불포화 결합을 갖는 단량체이다. The polyfunctional monomer in the present invention is a monomer having two or more polymerizable unsaturated bonds.
다관능성 단량체로는, 예를 들면 As a polyfunctional monomer, for example
에틸렌글리콜, 프로필렌글리콜과 같은 알킬렌글리콜의 디(메트)아크릴레이트; Di (meth) acrylates of alkylene glycols such as ethylene glycol and propylene glycol;
폴리에틸렌글리콜, 폴리프로필렌글리콜과 같은 폴리알킬렌글리콜의 디(메트)아크릴레이트; Di (meth) acrylates of polyalkylene glycols such as polyethylene glycol and polypropylene glycol;
글리세린, 트리메틸올프로판, 펜타에리쓰리톨, 디펜타에리쓰리톨과 같은 3가 이상의 다가 알코올의 폴리(메트)아크릴레이트나 그의 디카르복실산 변성물; Poly (meth) acrylates of trihydric or higher polyhydric alcohols such as glycerin, trimethylolpropane, pentaerythritol, dipentaerythritol, or dicarboxylic acid modified substances thereof;
폴리에스테르, 에폭시 수지, 우레탄 수지, 알키드 수지, 실리콘 수지, 스피란 수지와 같은 올리고(메트)아크릴레이트; Oligo (meth) acrylates such as polyesters, epoxy resins, urethane resins, alkyd resins, silicone resins, and spiran resins;
양쪽 말단 히드록시폴리-1,3-부타디엔, 양쪽 말단 히드록시폴리이소프렌, 양 쪽 말단 히드록시폴리카프롤락톤과 같은 양쪽 말단 히드록실화 중합체의 디(메트)아크릴레이트나, Di (meth) acrylates of both terminal hydroxylated polymers such as both terminal hydroxypoly-1,3-butadiene, both terminal hydroxypolyisoprene and both terminal hydroxypolycaprolactone,
트리스〔2-(메트)아크릴로일옥시에틸〕포스페이트 등을 들 수 있다. Tris [2- (meth) acryloyloxyethyl] phosphate etc. are mentioned.
이들 다관능성 단량체 중, 3가 이상의 다가 알코올의 폴리(메트)아크릴레이트나 그의 디카르복실산 변성물, 구체적으로는 트리메틸올프로판트리(메트)아크릴레이트, 펜타에리쓰리톨트리(메트)아크릴레이트, 펜타에리쓰리톨테트라(메트)아크릴레이트, 디펜타에리쓰리톨펜타(메트)아크릴레이트, 디펜타에리쓰리톨헥사(메트)아크릴레이트 등이 바람직하고, 특히 트리메틸올프로판트리아크릴레이트, 펜타에리쓰리톨트리아크릴레이트 및 디펜타에리쓰리톨헥사아크릴레이트가 화소의 강도 및 표면 평활성이 우수하며, 미노광부의 기판상 및 차광층상에 바탕 오염, 막 잔여물 등이 발생하기 어렵다는 점에서 바람직하다. Of these polyfunctional monomers, poly (meth) acrylates of trivalent or higher polyhydric alcohols and their dicarboxylic acid modified substances, specifically trimethylolpropane tri (meth) acrylate and pentaerythritol tri (meth) acrylate , Pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and the like are preferable, and trimethylolpropane triacrylate and pentaery are particularly preferred. Ritthritol triacrylate and dipentaerythritol hexaacrylate are preferred in that they are excellent in intensity and surface smoothness of pixels, and background contamination, film residue, and the like are less likely to occur on the substrate and the light shielding layer of the unexposed portion.
상기 다관능성 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said polyfunctional monomer can be used individually or in mixture of 2 or more types.
본 발명에서의 다관능성 단량체의 사용량은 (C) 알칼리 가용성 수지 100 중량부에 대하여, 바람직하게는 5 내지 500 중량부, 보다 바람직하게는 20 내지 300 중량부이다. 이 경우, 다관능성 단량체의 사용량이 5 중량부 미만이면 화소의 강도나 표면 평활성이 저하하는 경향이 있고, 한편 500 중량부를 초과하면 예를 들면 알칼리 현상성이 저하하거나, 미노광부의 기판상이나 차광층상에 바탕 오염, 막 잔여물 등이 발생하기 쉬워지는 경향이 있다. The usage-amount of the polyfunctional monomer in this invention becomes like this. Preferably it is 5-500 weight part, More preferably, it is 20-300 weight part with respect to 100 weight part of (C) alkali-soluble resin. In this case, when the usage-amount of a polyfunctional monomer is less than 5 weight part, the intensity | strength and surface smoothness of a pixel tend to fall, whereas when it exceeds 500 weight part, alkali developability will fall, for example, or the board | substrate image or light-shielding layer image of an unexposed part There is a tendency for background contamination, film residues, etc. to occur easily.
또한, 본 발명에서는 다관능성 단량체의 일부를 중합성 불포화 결합을 1개 갖는 단관능성 단량체로 대체할 수도 있다. In the present invention, a part of the polyfunctional monomer may be replaced by a monofunctional monomer having one polymerizable unsaturated bond.
상기 단관능성 단량체로는, 예를 들면 (C) 알칼리 가용성 수지에 대해서 예시한 카르복실기 함유 불포화 단량체나 공중합성 불포화 단량체와 마찬가지의 단량체나, N-(메트)아크릴로일모르폴린, N-비닐피롤리돈, N-비닐-ε-카프롤락탐 이외에, 상품명으로 M-5600(도아 고오세이(주)제) 등을 들 수 있다. As said monofunctional monomer, the monomer similar to the carboxyl group-containing unsaturated monomer and copolymerizable unsaturated monomer which were illustrated, for example for (C) alkali-soluble resin, N- (meth) acryloyl morpholine, N-vinyl-pyrrole In addition to a ralidone and N-vinyl- epsilon caprolactam, M-5600 (made by Toagosei Co., Ltd.) etc. are mentioned by brand name.
이들 단관능성 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These monofunctional monomers can be used individually or in mixture of 2 or more types.
본 발명에서의 단관능성 단량체의 사용 비율은 다관능성 단량체와 단관능성 단량체와의 합계량에 대하여, 바람직하게는 90 중량% 이하, 보다 바람직하게는 50 중량% 이하이다. 이 경우, 단관능성 단량체의 사용 비율이 90 중량%를 초과하면 화소의 강도나 표면 평활성이 불충분해질 우려가 있다. The use ratio of the monofunctional monomer in the present invention is preferably 90% by weight or less, and more preferably 50% by weight or less, based on the total amount of the polyfunctional monomer and the monofunctional monomer. In this case, when the use ratio of monofunctional monomer exceeds 90 weight%, there exists a possibility that intensity | strength or surface smoothness of a pixel may become inadequate.
본 발명에서의 다관능성 단량체와 단관능성 단량체와의 합계 사용량은 (C) 알칼리 가용성 수지 100 중량부에 대하여, 바람직하게는 5 내지 500 중량부, 보다 바람직하게는 20 내지 300 중량부이다. 이 경우, 상기 합계 사용량이 5 중량부 미만이면 화소의 강도나 표면 평활성이 저하하는 경향이 있고, 한편 500 중량부를 초과하면 예를 들면 알칼리 현상성이 저하하거나, 미노광부의 기판상이나 차광층상에 바탕 오염, 막 잔여물 등이 발생하기 쉬워지는 경향이 있다. The total amount of the polyfunctional monomer and the monofunctional monomer used in the present invention is preferably 5 to 500 parts by weight, more preferably 20 to 300 parts by weight based on 100 parts by weight of the (C) alkali-soluble resin. In this case, when the total amount used is less than 5 parts by weight, the intensity or surface smoothness of the pixel tends to be lowered. On the other hand, when the total amount exceeds 500 parts by weight, for example, alkali developability is lowered, or on the substrate or light shielding layer of the unexposed part. There is a tendency for contamination, film residues, etc. to occur easily.
-(E) 광중합 개시제--(E) photoinitiator-
본 발명에서의 광중합 개시제는 가시광선, 자외선, 원자외선, 전자선, X선 등의 방사선의 노광에 의해 상기 (D) 다관능성 단량체 및 경우에 따라 사용되는 단 관능성 단량체의 중합을 개시할 수 있는 활성종을 발생할 수 있는 화합물이다. The photopolymerization initiator in the present invention can initiate polymerization of the above-mentioned (D) polyfunctional monomer and the monofunctional monomer used in some cases by exposure to radiation such as visible light, ultraviolet ray, far ultraviolet ray, electron beam, X-ray and the like. Compounds capable of generating active species.
이러한 광중합 개시제로는, 예를 들면 아세토페논계 화합물, 비이미다졸계 화합물, 트리아진계 화합물, 벤조인계 화합물, 벤조페논계 화합물, α-디케톤계 화합물, 다핵 퀴논계 화합물, 크산톤계 화합물, 디아조계 화합물 등을 들 수 있다. As such a photoinitiator, an acetophenone type compound, a biimidazole type compound, a triazine type compound, a benzoin type compound, a benzophenone type compound, the (alpha)-diketone type compound, a polynuclear quinone type compound, a xanthone type compound, a diazo type, Compounds and the like.
본 발명에서 광중합 개시제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. 본 발명에서의 광중합 개시제로는, 아세토페논계 화합물, 비이미다졸계 화합물 및 트리아진계 화합물의 군으로부터 선택되는 1종 이상이 바람직하다. In this invention, a photoinitiator can be used individually or in mixture of 2 or more types. As a photoinitiator in this invention, 1 or more types chosen from the group of an acetophenone type compound, a biimidazole type compound, and a triazine type compound are preferable.
본 발명에서의 바람직한 광중합 개시제 중, 아세토페논계 화합물의 구체예로는, 2-히드록시-2-메틸-1-페닐프로파논-1, 2-메틸-1-(4-메틸티오페닐)-2-모르폴리노프로파논-1, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부타논-1, 1-히드록시시클로헥실·페닐케톤, 2,2-디메톡시-1,2-디페닐에타논-1 등을 들 수 있다. As a specific example of an acetophenone type compound among the preferable photoinitiators in this invention, 2-hydroxy-2-methyl-1- phenyl propane 1, 2-methyl-1- (4-methylthio phenyl)- 2-morpholinopropanone-1, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) butanone-1, 1-hydroxycyclohexyl phenyl ketone, 2,2-dimethoxy -1,2-diphenylethanone-1, etc. are mentioned.
이들 아세토페논계 화합물 중, 특히 2-메틸-1-(4-메틸티오페닐)-2-모르폴리노프로파논-1, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부타논-1 등이 바람직하다. Among these acetophenone compounds, 2-methyl-1- (4-methylthiophenyl) -2-morpholinopropaneone-1, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl Butanone-1 and the like are preferable.
상기 아세토페논계 화합물은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The acetophenone compounds may be used alone or in combination of two or more thereof.
본 발명에서 광중합 개시제로서 아세토페논계 화합물을 사용하는 경우의 사용량은 (D) 다관능성 단량체와 단관능성 단량체와의 합계 100 중량부에 대하여, 바람직하게는 0.01 내지 100 중량부, 보다 바람직하게는 1 내지 80 중량부, 더욱 바람직하게는 5 내지 60 중량부이다. 이 경우, 아세토페논계 화합물의 사용량이 0.01 중량부 미만이면 노광에 의한 경화가 불충분해지고, 화소 패턴이 소정의 배열에 따라 배치된 착색층을 얻는 것이 곤란해질 우려가 있으며, 한편 100 중량부를 초과하면 형성된 화소가 현상시에 기판으로부터 탈락하기 쉬워지는 경향이 있다. In the present invention, when the acetophenone-based compound is used as the photopolymerization initiator, the amount of the acetophenone-based compound used is preferably 0.01 to 100 parts by weight, more preferably 1, based on 100 parts by weight of the total of the (D) polyfunctional monomer and the monofunctional monomer. To 80 parts by weight, more preferably 5 to 60 parts by weight. In this case, when the usage-amount of an acetophenone type compound is less than 0.01 weight part, hardening by exposure may become inadequate, and it may become difficult to obtain the colored layer arrange | positioned according to a predetermined | prescribed arrangement of a pixel pattern, and when it exceeds 100 weight part There exists a tendency for the formed pixel to fall easily from a board | substrate at the time of image development.
또한, 상기 비이미다졸계 화합물의 구체예로는, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸, 2,2'-비스(2-브로모페닐)-4,4',5,5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2,4,6-트리클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2-브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2,4-디브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2,4,6-트리브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 등을 들 수 있다. Moreover, as a specific example of the said biimidazole type compound, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'- tetrakis (4-ethoxycarbonylphenyl) -1 , 2'-biimidazole, 2,2'-bis (2-bromophenyl) -4,4 ', 5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'-ratio Imidazole, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2,4-dichloro Phenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2,4,6-trichlorophenyl) -4,4', 5, 5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2-bromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole , 2,2'-bis (2,4-dibromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2,4 , 6-tribromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, etc. are mentioned.
이들 비이미다졸계 화합물 중, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-비스(2,4,6-트리클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 등이 보다 바람직하고, 특히 2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸이 바람직하다. Among these biimidazole compounds, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis ( 2,4-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole, 2,2'-bis (2,4,6-trichlorophenyl) -4, 4 ', 5,5'-tetraphenyl-1,2'-biimidazole and the like are more preferred, in particular 2,2'-bis (2,4-dichlorophenyl) -4,4', 5,5 ' Tetraphenyl-1,2'-biimidazole is preferred.
상기 비이미다졸계 화합물은 용제에 대한 용해성이 우수하고, 미용해물, 석출물 등의 이물질을 발생하지 않으며, 감도가 높고, 적은 에너지량의 노광에 의해 경화 반응을 충분히 진행시킴과 동시에, 미노광부에서 경화 반응이 발생하지 않기 때문에, 노광 후의 피막은 현상액에 대하여 불용성의 경화 부분과 현상액에 대하여 높은 용해성을 갖는 미경화 부분으로 명확히 구분되고, 그에 따라 언더 컷트가 없는 화소 패턴이 소정의 배열에 따라 배치된 고정밀한 착색층을 형성할 수 있다. The non-imidazole-based compound is excellent in solubility in solvents, does not generate foreign matters such as undissolved products, precipitates, etc., has high sensitivity, and sufficiently proceeds the curing reaction by exposure of a small amount of energy, Since no curing reaction occurs, the film after exposure is clearly divided into an insoluble hardened portion with respect to the developer and an uncured portion with high solubility with the developer, whereby a pixel pattern without undercuts is arranged according to a predetermined arrangement. High-precision colored layer can be formed.
상기 비이미다졸계 화합물은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said biimidazole type compound can be used individually or in mixture of 2 or more types.
본 발명에서 광중합 개시제로서 비이미다졸계 화합물을 사용하는 경우의 사용량은 (D) 다관능성 단량체와 단관능성 단량체와의 합계 100 중량부에 대하여, 바람직하게는 0.01 내지 40 중량부, 보다 바람직하게는 1 내지 30 중량부, 더욱 바람직하게는 1 내지 20 중량부이다. 이 경우, 비이미다졸계 화합물의 사용량이 0.01 중량부 미만이면 노광에 의한 경화가 불충분해지고, 화소 패턴이 소정의 배열에 따라 배치된 착색층을 얻는 것이 곤란해질 우려가 있으며, 한편 40 중량부를 초과하면 형성된 화소가 현상시에 기판으로부터 탈락하기 쉬워지는 경향이 있다. In the present invention, the amount of use of the biimidazole-based compound as the photopolymerization initiator is preferably 0.01 to 40 parts by weight, more preferably based on 100 parts by weight of the total of the (D) polyfunctional monomer and the monofunctional monomer. 1 to 30 parts by weight, more preferably 1 to 20 parts by weight. In this case, when the usage-amount of a biimidazole type compound is less than 0.01 weight part, hardening by exposure may become inadequate, and it may become difficult to obtain the colored layer arrange | positioned according to a predetermined | prescribed arrangement of a pixel pattern, while exceeding 40 weight part There is a tendency that the formed pixels tend to fall off the substrate during development.
-수소 공여체-Hydrogen donor
본 발명에서는, 광중합 개시제로서 비이미다졸계 화합물을 사용하는 경우, 하기의 수소 공여체를 병용하는 것은 감도를 더욱 개량할 수 있기 때문에 바람직하다. In this invention, when using a biimidazole type compound as a photoinitiator, using the following hydrogen donor together is preferable because a sensitivity can be improved further.
여기서 말하는 "수소 공여체"란, 노광에 의해 비이미다졸계 화합물로부터 발생된 라디칼에 대하여 수소 원자를 공여할 수 있는 화합물을 의미한다. The term "hydrogen donor" as used herein means a compound capable of donating a hydrogen atom to radicals generated from a biimidazole compound by exposure.
본 발명에서의 수소 공여체로는, 하기에 정의하는 머캅탄계 화합물, 아민계 화합물 등이 바람직하다. As a hydrogen donor in this invention, a mercaptan type compound, an amine compound, etc. which are defined below are preferable.
상기 머캅탄계 화합물은 벤젠환 또는 복소환을 모핵으로 하고, 상기 모핵에 직접 결합한 머캅토기를 1개 이상, 바람직하게는 1 내지 3개, 더욱 바람직하게는 1 내지 2개를 갖는 화합물(이하, "머캅탄계 수소 공여체"라 함)을 포함한다. The mercaptan compound is a compound having a benzene ring or a heterocycle as a mother nucleus, and having at least one, preferably one to three, more preferably one to two mercapto groups directly bonded to the mother nucleus (hereinafter, “ Mercaptan-based hydrogen donors ".
또한, 상기 아민계 화합물은 벤젠환 또는 복소환을 모핵으로 하고, 상기 모핵에 직접 결합한 아미노기를 1개 이상, 바람직하게는 1 내지 3개, 더욱 바람직하게는 1 내지 2개를 갖는 화합물(이하, "아민계 수소 공여체"라 함)을 포함한다. In addition, the amine compound is a compound having a benzene ring or a heterocycle as a mother nucleus, and having at least one, preferably 1 to 3, more preferably 1 to 2 amino groups directly bonded to the mother nucleus (hereinafter, &Quot; amine-based hydrogen donors ").
또한, 이들 수소 공여체는 머캅토기와 아미노기를 동시에 가질 수도 있다.These hydrogen donors may also have a mercapto group and an amino group at the same time.
이하, 이들 수소 공여체에 대해서 보다 구체적으로 설명한다. Hereinafter, these hydrogen donors will be described in more detail.
머캅탄계 수소 공여체는, 벤젠환 또는 복소환을 각각 1개 이상 가질 수 있으며, 벤젠환과 복소환 모두를 가질 수 있으며, 이들 환을 2개 이상 갖는 경우, 축합환을 형성하여도, 형성하지 않아도 좋다. The mercaptan-based hydrogen donor may have one or more benzene rings or heterocycles, and may have both benzene rings and heterocycles, and in the case of having two or more of these rings, a condensed ring may or may not be formed. .
또한, 머캅탄계 수소 공여체는 머캅토기를 2개 이상 갖는 경우, 1개 이상의 유리된 머캅토기가 잔존하는 한, 나머지 머캅토기의 1개 이상이 알킬, 아랄킬 또는 아릴기로 치환되어 있을 수 있으며, 1개 이상의 유리된 머캅토기가 잔존하는 한, 2개의 황 원자가 알킬렌기 등의 2가의 유기기를 개재하여 결합한 구조 단위, 또는 2개의 황 원자가 디술피드 형으로 결합한 구조 단위를 가질 수 있다. In addition, when the mercaptan-based hydrogen donor has two or more mercapto groups, as long as one or more free mercapto groups remain, one or more of the remaining mercapto groups may be substituted with an alkyl, aralkyl or aryl group, 1 As long as at least two free mercapto groups remain, it may have a structural unit in which two sulfur atoms are bonded via a divalent organic group such as an alkylene group, or a structural unit in which two sulfur atoms are bonded in a disulfide type.
또한, 머캅탄계 수소 공여체는 머캅토기 이외의 개소에서 카르복실기, 알콕시카르보닐기, 치환 알콕시카르보닐기, 페녹시카르보닐기, 치환 페녹시카르보닐기, 니트릴기 등에 의해 치환될 수도 있다. The mercaptan-based hydrogen donor may be substituted by a carboxyl group, an alkoxycarbonyl group, a substituted alkoxycarbonyl group, a phenoxycarbonyl group, a substituted phenoxycarbonyl group, a nitrile group, or the like at a position other than the mercapto group.
이러한 머캅탄계 수소 공여체의 구체예로는, 2-머캅토벤조티아졸, 2-머캅토 벤조옥사졸, 2-머캅토벤조이미다졸, 2,5-디머캅토-1,3,4-티아디아졸, 2-머캅토-2,5-디메틸아미노피리딘 등을 들 수 있다. Specific examples of such mercaptan-based hydrogen donors include 2-mercaptobenzothiazole, 2-mercapto benzoxazole, 2-mercaptobenzoimidazole, 2,5-dimercapto-1,3,4-thiadia Sol, 2-mercapto-2,5-dimethylaminopyridine, and the like.
이들 머캅탄계 수소 공여체 중, 2-머캅토벤조티아졸, 2-머캅토벤조옥사졸 등이 바람직하고, 특히 2-머캅토벤조티아졸이 바람직하다. Among these mercaptan-based hydrogen donors, 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, and the like are preferable, and 2-mercaptobenzothiazole is particularly preferable.
이어서, 아민계 수소 공여체는 벤젠환 또는 복소환을 각각 1개 이상 가질 수 있으며, 벤젠환과 복소환 모두를 가질 수 있고, 이들 환을 2개 이상 갖는 경우, 축합환을 형성하여도, 형성하지 않아도 좋다. Subsequently, the amine-based hydrogen donor may have one or more benzene rings or heterocycles, and may have both a benzene ring and a heterocycle, and in the case of having two or more of these rings, even if a condensed ring is formed, it is not necessary to form good.
또한, 아민계 수소 공여체는 아미노기의 1개 이상이 알킬기 또는 치환 알킬기로 치환될 수도 있으며, 아미노기 이외의 개소에서 카르복실기, 알콕시카르보닐기, 치환 알콕시카르보닐기, 페녹시카르보닐기, 치환 페녹시카르보닐기, 니트릴기 등에 의해 치환될 수도 있다. In addition, the amine-based hydrogen donor may be substituted with at least one amino group by an alkyl group or a substituted alkyl group, and may be substituted by a carboxyl group, an alkoxycarbonyl group, a substituted alkoxycarbonyl group, a phenoxycarbonyl group, a substituted phenoxycarbonyl group, a nitrile group, or the like at a position other than the amino group. It may be substituted.
이러한 아민계 수소 공여체의 구체예로는, 4,4'-비스(디메틸아미노)벤조페논, 4,4'-비스(디에틸아미노)벤조페논, 4-디에틸아미노아세토페논, 4-디메틸아미노프로피오페논, 에틸-4-디메틸아미노벤조에이트, 4-디메틸아미노벤조산, 4-디메틸아미노벤조니트릴 등을 들 수 있다. Specific examples of such amine hydrogen donors include 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone, 4-diethylaminoacetophenone, 4-dimethylamino Propiophenone, ethyl-4-dimethylaminobenzoate, 4-dimethylaminobenzoic acid, 4-dimethylaminobenzonitrile and the like.
이들 아민계 수소 공여체 중, 4,4'-비스(디메틸아미노)벤조페논, 4,4'-비스(디에틸아미노)벤조페논 등이 바람직하고, 특히 4,4'-비스(디에틸아미노)벤조페논이 바람직하다. Among these amine-based hydrogen donors, 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone, and the like are preferable, and 4,4'-bis (diethylamino) is particularly preferred. Benzophenone is preferred.
또한, 아민계 수소 공여체는, 비이미다졸계 화합물 이외의 광중합 개시제의 경우에서도, 증감제로서의 작용을 갖는다. The amine hydrogen donor also has a function as a sensitizer even in the case of photopolymerization initiators other than the biimidazole compound.
본 발명에서 수소 공여체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있지만, 1종 이상의 머캅탄계 수소 공여체와 1종 이상의 아민계 수소 공여체를 조합하여 사용하는 것이 형성된 화소가 현상시에 기판으로부터 탈락하기 어려우며, 화소의 강도 및 감도도 높다는 점에서 바람직하다. In the present invention, the hydrogen donor may be used alone or in combination of two or more thereof. However, a pixel formed by using one or more mercaptan-based hydrogen donors and one or more amine-based hydrogen donors in combination may be eliminated from the substrate during development. It is difficult and preferable at the point that the intensity and sensitivity of a pixel are also high.
머캅탄계 수소 공여체와 아민계 수소 공여체의 바람직한 조합의 구체예로는, 2-머캅토벤조티아졸/4,4'-비스(디메틸아미노)벤조페논, 2-머캅토벤조티아졸/4,4'-비스(디에틸아미노)벤조페논, 2-머캅토벤조옥사졸/4,4'-비스(디메틸아미노)벤조페논, 2-머캅토벤조옥사졸/4,4'-비스(디에틸아미노)벤조페논 등을 들 수 있고, 보다 바람직한 조합은 2-머캅토벤조티아졸/4,4'-비스(디에틸아미노)벤조페논, 2-머캅토벤조옥사졸/4,4'-비스(디에틸아미노)벤조페논 등이며, 특히 바람직한 조합은 2-머캅토벤조티아졸/4,4'-비스(디에틸아미노)벤조페논이다. Specific examples of preferred combinations of mercaptan-based hydrogen donors and amine-based hydrogen donors include 2-mercaptobenzothiazole / 4,4'-bis (dimethylamino) benzophenone and 2-mercaptobenzothiazole / 4,4 '-Bis (diethylamino) benzophenone, 2-mercaptobenzoxazole / 4,4'-bis (dimethylamino) benzophenone, 2-mercaptobenzooxazole / 4,4'-bis (diethylamino Benzophenone, and the like, and more preferred combinations include 2-mercaptobenzothiazole / 4,4'-bis (diethylamino) benzophenone and 2-mercaptobenzooxazole / 4,4'-bis ( Diethylamino) benzophenone and the like, and a particularly preferred combination is 2-mercaptobenzothiazole / 4,4'-bis (diethylamino) benzophenone.
머캅탄계 수소 공여체와 아민계 수소 공여체와의 조합에서의 머캅탄계 수소 공여체와 아민계 수소 공여체와의 중량비는, 바람직하게는 1:1 내지 1:4, 보다 바람직하게는 1:1 내지 1:3이다. The weight ratio of the mercaptan-based hydrogen donor to the amine-based hydrogen donor in the combination of the mercaptan-based hydrogen donor and the amine-based hydrogen donor is preferably 1: 1 to 1: 4, more preferably 1: 1 to 1: 3. to be.
본 발명에서 수소 공여체를 비이미다졸계 화합물과 병용하는 경우의 사용량은 (D) 다관능성 단량체와 단관능성 단량체와의 합계 100 중량부에 대하여, 바람직하게는 0.01 내지 40 중량부, 더욱 바람직하게는 1 내지 30 중량부, 특히 바람직하게는 1 내지 20 중량부이다. 이 경우, 수소 공여체의 사용량이 0.01 중량부 미만이면 감도의 개량 효과가 저하하는 경향이 있고, 한편 40 중량부를 초과하면 형성된 화소가 현상시에 기판으로부터 탈락하기 쉬워지는 경향이 있다. In the present invention, the amount of the hydrogen donor used in combination with the biimidazole compound is preferably 0.01 to 40 parts by weight, more preferably based on 100 parts by weight of the total of the (D) polyfunctional monomer and the monofunctional monomer. 1 to 30 parts by weight, particularly preferably 1 to 20 parts by weight. In this case, when the amount of the hydrogen donor used is less than 0.01 part by weight, the effect of improving the sensitivity tends to be lowered. On the other hand, when the amount of the hydrogen donor used exceeds 40 parts by weight, the formed pixels tend to fall off the substrate during development.
또한, 상기 트리아진계 화합물의 구체예로는 2,4,6-트리스(트리클로로메틸)-s-트리아진, 2-메틸-4,6-비스(트리클로로메틸)-s-트리아진, 2-〔2-(5-메틸푸란-2-일)에테닐〕-4,6-비스(트리클로로메틸)-s-트리아진, 2-〔2-(푸란-2-일)에테닐〕-4,6-비스(트리클로로메틸)-s-트리아진, 2-〔2-(4-디에틸아미노-2-메틸페닐)에테닐〕-4,6-비스(트리클로로메틸)-s-트리아진, 2-〔2-(3,4-디메톡시페닐)에테닐〕-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-에톡시스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-n-부톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진 등의 할로메틸기를 갖는 트리아진계 화합물을 들 수 있다. In addition, specific examples of the triazine-based compound include 2,4,6-tris (trichloromethyl) -s-triazine, 2-methyl-4,6-bis (trichloromethyl) -s-triazine, 2 [2- (5-methylfuran-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (furan-2-yl) ethenyl] 4,6-bis (trichloromethyl) -s-triazine, 2- [2- (4-diethylamino-2-methylphenyl) ethenyl] -4,6-bis (trichloromethyl) -s-tri Azine, 2- [2- (3,4-dimethoxyphenyl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxyphenyl) -4,6- Bis (trichloromethyl) -s-triazine, 2- (4-ethoxystyryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-n-butoxyphenyl) And triazine compounds having halomethyl groups, such as -4,6-bis (trichloromethyl) -s-triazine.
이들 트리아진계 화합물 중, 특히 2-〔2-(3,4-디메톡시페닐)에테닐〕-4,6-비스(트리클로로메틸)-s-트리아진이 바람직하다. Among these triazine compounds, 2- [2- (3,4-dimethoxyphenyl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine is particularly preferable.
상기 트리아진계 화합물은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said triazine type compound can be used individually or in mixture of 2 or more types.
본 발명에서 광중합 개시제로서 트리아진계 화합물을 사용하는 경우의 사용량은 (D) 다관능성 단량체와 단관능성 단량체와의 합계 100 중량부에 대하여, 바람직하게는 0.01 내지 40 중량부, 보다 바람직하게는 1 내지 30 중량부, 더욱 바람직하게는 1 내지 20 중량부이다. 이 경우, 트리아진계 화합물의 사용량이 0.01 중량부 미만이면 노광에 의한 경화가 불충분해지고, 화소 패턴이 소정의 배열에 따라 배치된 착색층을 얻는 것이 곤란해질 우려가 있으며, 한편 40 중량부를 초과하면 형성된 화소가 현상시에 기판으로부터 탈락하기 쉬워지는 경향이 있다. In the present invention, the amount of the triazine compound used as the photopolymerization initiator is preferably 0.01 to 40 parts by weight, more preferably 1 to 1, based on 100 parts by weight of the total of the (D) polyfunctional monomer and the monofunctional monomer. 30 parts by weight, more preferably 1 to 20 parts by weight. In this case, when the amount of the triazine-based compound used is less than 0.01 part by weight, curing by exposure may be insufficient, and it may be difficult to obtain a colored layer in which the pixel pattern is arranged according to a predetermined arrangement. There exists a tendency for a pixel to fall easily from a board | substrate at the time of image development.
-첨가제 성분-Additive Ingredients
본 발명에서의 컬러 필터용 감방사선성 조성물은 필요에 따라 다양한 첨가제 성분을 함유할 수도 있다. The radiation sensitive composition for color filters in this invention may contain various additive components as needed.
상기 첨가제 성분으로는, 감방사선성 조성물의 알칼리 현상액에 대한 용해 특성을 보다 개선하며, 현상 후 미용해물의 잔존을 보다 억제하는 작용 등을 나타내는 유기산 또는 유기 아미노 화합물(단, 상기 수소 공여체는 제외함) 등을 들 수 있다. As the additive component, an organic acid or an organic amino compound exhibiting an effect of further improving the dissolution property of the radiation-sensitive composition with respect to the alkaline developer and further suppressing the remaining of the undissolved product after development (except the hydrogen donor) ), And the like.
상기 유기산으로는, 분자 중에 1개 이상의 카르복실기를 갖는 지방족 카르복실산 또는 페닐기 함유 카르복실산이 바람직하다. As said organic acid, the aliphatic carboxylic acid or phenyl group containing carboxylic acid which has 1 or more carboxyl group in a molecule | numerator is preferable.
상기 지방족 카르복실산으로는, 예를 들면 As said aliphatic carboxylic acid, for example
포름산, 아세트산, 프로피온산, 부티르산, 발레르산, 피발산, 카프로산, 디에틸아세트산, 에난트산, 카프릴산과 같은 지방족 모노카르복실산; Aliphatic monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, diethylacetic acid, enanthic acid, caprylic acid;
옥살산, 말론산, 숙신산, 글루타르산, 아디프산, 피멜린산, 수베르산, 아젤라산, 세박산, 브라실산, 메틸말론산, 에틸말론산, 디메틸말론산, 메틸숙신산, 테트라메틸숙신산, 시클로헥산디카르복실산, 이타콘산, 시트라콘산, 말레산, 푸마르산, 메사콘산과 같은 지방족 디카르복실산; Oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, brasyl acid, methylmalonic acid, ethylmalonic acid, dimethylmalonic acid, methyl succinic acid, tetramethylsuccinic acid Aliphatic dicarboxylic acids such as cyclohexanedicarboxylic acid, itaconic acid, citraconic acid, maleic acid, fumaric acid, mesaconic acid;
트리카르바릴산, 아코니트산, 캄포론산과 같은 지방족 트리카르복실산 등을 들 수 있다. And aliphatic tricarboxylic acids such as tricarbaric acid, aconitic acid and camphoronic acid.
또한, 상기 페닐기 함유 카르복실산으로는, 예를 들면 카르복실기가 직접 페닐기에 결합한 화합물이나, 카르복실기가 2가의 탄소쇄를 통해 페닐기에 결합한 화 합물 등을 들 수 있다. Moreover, as said phenyl group containing carboxylic acid, the compound which the carboxyl group couple | bonded with the phenyl group directly, the compound which the carboxyl group couple | bonded with the phenyl group via the bivalent carbon chain, etc. are mentioned, for example.
페닐기 함유 카르복실산으로는, 예를 들면 As a phenyl group containing carboxylic acid, for example
벤조산, 톨루일산, 쿠민산, 헤멜리트산, 메시틸렌산과 같은 방향족 모노카르복실산; Aromatic monocarboxylic acids such as benzoic acid, toluic acid, cuminic acid, hemelic acid, mesitylene acid;
프탈산, 이소프탈산, 테레프탈산과 같은 방향족 디카르복실산; Aromatic dicarboxylic acids such as phthalic acid, isophthalic acid, terephthalic acid;
트리멜리트산, 트리메신산, 메로판산, 피로멜리트산과 같은 3가 이상의 방향족 폴리카르복실산이나, Trivalent or higher aromatic polycarboxylic acids such as trimellitic acid, trimesic acid, meropanic acid and pyromellitic acid;
페닐아세트산, 히드로아트로판산, 히드로신남산, 만델산, 페닐숙신산, 아트로판산, 신남산, 신나밀리덴산, 쿠마르산, 운벨산 등을 들 수 있다. And phenylacetic acid, hydroatropanic acid, hydrocinnamic acid, mandelic acid, phenylsuccinic acid, atropanic acid, cinnamic acid, cinnamiledic acid, kumaric acid and unbelic acid.
이들 유기산 중, 알칼리 용해성, 후술하는 용매에 대한 용해성, 미노광부의 기판상 및 차광층상에서의 바탕 오염이나 막 잔여물 방지 등의 관점에서, 지방족 카르복실산으로는 지방족 디카르복실산이 바람직하고, 특히 말론산, 아디프산, 이타콘산, 시트라콘산, 푸마르산, 메사콘산 등이 바람직하며, 페닐기 함유 카르복실산으로는 방향족 디카르복실산이 바람직하고, 특히 프탈산이 바람직하다. Among these organic acids, aliphatic dicarboxylic acid is preferable as the aliphatic carboxylic acid from the viewpoint of alkali solubility, solubility in a solvent to be described later, prevention of background contamination and film residue on the substrate and the light shielding layer on the unexposed portion, In particular, malonic acid, adipic acid, itaconic acid, citraconic acid, fumaric acid, mesaconic acid and the like are preferable. As the phenyl group-containing carboxylic acid, aromatic dicarboxylic acid is preferable, and phthalic acid is particularly preferable.
상기 유기산은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said organic acid can be used individually or in mixture of 2 or more types.
유기산의 사용량은 (A) 내지 (E) 성분 및 첨가제 성분의 합계 100 중량부에 대하여, 바람직하게는 15 중량부 이하, 보다 바람직하게는 10 중량부 이하이다. 이 경우, 유기산의 사용량이 15 중량부를 초과하면 형성된 화소의 기판에의 밀착성이 저하하는 경향이 있다. The amount of the organic acid used is preferably 15 parts by weight or less, more preferably 10 parts by weight or less based on 100 parts by weight of the total of the components (A) to (E) and the additive component. In this case, when the usage-amount of organic acid exceeds 15 weight part, there exists a tendency for the adhesiveness to the board | substrate of the formed pixel to fall.
또한, 상기 유기 아미노 화합물로는, 분자 중에 1개 이상의 아미노기를 갖는 지방족 아민 또는 페닐기 함유 아민이 바람직하다. Moreover, as said organic amino compound, the aliphatic amine or phenyl group containing amine which has 1 or more amino group in a molecule | numerator is preferable.
상기 지방족 아민으로는, 예를 들면 As said aliphatic amine, it is, for example
n-프로필아민, i-프로필아민, n-부틸아민, i-부틸아민, sec-부틸아민, t-부틸아민, n-펜틸아민, n-헥실아민과 같은 모노(시클로)알킬아민; mono (cyclo) alkylamines such as n-propylamine, i-propylamine, n-butylamine, i-butylamine, sec-butylamine, t-butylamine, n-pentylamine, n-hexylamine;
메틸·에틸아민, 디에틸아민, 메틸·n-프로필아민, 에틸·n-프로필아민, 디-n-프로필아민, 디-i-프로필아민, 디-n-부틸아민, 디-i-부틸아민, 디-sec-부틸아민, 디-t-부틸아민과 같은 디(시클로)알킬아민; Methyl ethylamine, diethylamine, methyl n-propylamine, ethyl n-propylamine, di-n-propylamine, di-i-propylamine, di-n-butylamine, di-i-butylamine Di (cyclo) alkylamines such as di-sec-butylamine, di-t-butylamine;
디메틸·에틸아민, 메틸·디에틸아민, 트리에틸아민, 디메틸·n-프로필아민, 디에틸·n-프로필아민, 메틸·디- n-프로필아민, 에틸·디- n-프로필아민, 트리-n-프로필아민, 트리-i-프로필아민, 트리-n-부틸아민, 트리-i-부틸아민, 트리-sec-부틸아민, 트리-t-부틸아민과 같은 트리(시클로)알킬아민; Dimethyl ethylamine, methyl diethylamine, triethylamine, dimethyl n-propylamine, diethyl n-propylamine, methyl di-n-propylamine, ethyl di-n-propylamine, tri- tri (cyclo) alkylamines such as n-propylamine, tri-i-propylamine, tri-n-butylamine, tri-i-butylamine, tri-sec-butylamine, tri-t-butylamine;
2-아미노에탄올, 3-아미노-1-프로판올, 1-아미노-2-프로판올, 4-아미노-1-부탄올과 같은 모노(시클로)알칸올아민; Mono (cyclo) alkanolamines such as 2-aminoethanol, 3-amino-1-propanol, 1-amino-2-propanol, 4-amino-1-butanol;
디에탄올아민, 디-n-프로판올아민, 디-i-프로판올아민, 디-n-부탄올아민, 디-i-부탄올아민과 같은 디(시클로)알칸올아민; Di (cyclo) alkanolamines such as diethanolamine, di-n-propanolamine, di-i-propanolamine, di-n-butanolamine, di-i-butanolamine;
트리에탄올아민, 트리-n-프로판올아민, 트리-i-프로판올아민, 트리-n-부탄올아민, 트리-i-부탄올아민과 같은 트리(시클로)알칸올아민; Tri (cyclo) alkanolamines such as triethanolamine, tri-n-propanolamine, tri-i-propanolamine, tri-n-butanolamine, tri-i-butanolamine;
3-아미노-1,2-프로판디올, 2-아미노-1,3-프로판디올, 4-아미노-1,2-부탄디올, 4-아미노-1,3-부탄디올, 3-디메틸아미노-1,2-프로판디올, 3-디에틸아미노-1,2-프로판디올, 2-디메틸아미노-1,3-프로판디올, 2-디에틸아미노-1,3-프로판디올과 같 은 아미노(시클로)알칸디올; 3-amino-1,2-propanediol, 2-amino-1,3-propanediol, 4-amino-1,2-butanediol, 4-amino-1,3-butanediol, 3-dimethylamino-1,2 Amino (cyclo) alkanediols such as propanediol, 3-diethylamino-1,2-propanediol, 2-dimethylamino-1,3-propanediol, 2-diethylamino-1,3-propanediol ;
β-알라닌, 2-아미노부티르산, 3-아미노부티르산, 4-아미노부티르산, 2-아미노이소부티르산, 3-아미노이소부티르산과 같은 아미노카르복실산 등을 들 수 있다. and aminocarboxylic acids such as β-alanine, 2-aminobutyric acid, 3-aminobutyric acid, 4-aminobutyric acid, 2-aminoisobutyric acid, and 3-aminoisobutyric acid.
또한, 페닐기 함유 아민으로는, 예를 들면 아미노기가 직접 페닐기에 결합한 화합물, 아미노기가 2가의 탄소쇄를 통해 페닐기에 결합한 화합물 등을 들 수 있다. Moreover, as a phenyl group containing amine, the compound which the amino group couple | bonded with the phenyl group directly, the compound which the amino group couple | bonded with the phenyl group via the bivalent carbon chain, etc. are mentioned, for example.
페닐기 함유 아민으로는, 예를 들면 As a phenyl group containing amine, it is, for example
아닐린, o-메틸아닐린, m-메틸아닐린, p-메틸아닐린, p-에틸아닐린, 1-나프틸아민, 2-나프틸아민, N,N-디메틸아닐린, N,N-디에틸아닐린, p-메틸-N,N-디메틸아닐린과 같은 방향족 아민; Aniline, o-methylaniline, m-methylaniline, p-methylaniline, p-ethylaniline, 1-naphthylamine, 2-naphthylamine, N, N-dimethylaniline, N, N-diethylaniline, p Aromatic amines such as -methyl-N, N-dimethylaniline;
o-아미노벤질 알코올, m-아미노벤질 알코올, p-아미노벤질 알코올, p-디메틸아미노벤질 알코올, p-디에틸아미노벤질 알코올과 같은 아미노벤질 알코올류; aminobenzyl alcohols such as o-aminobenzyl alcohol, m-aminobenzyl alcohol, p-aminobenzyl alcohol, p-dimethylaminobenzyl alcohol, p-diethylaminobenzyl alcohol;
o-아미노페놀, m-아미노페놀, p-아미노페놀, p-디메틸아미노페놀, p-디에틸아미노페놀과 같은 아미노페놀류; aminophenols such as o-aminophenol, m-aminophenol, p-aminophenol, p-dimethylaminophenol and p-diethylaminophenol;
m-아미노벤조산, p-아미노벤조산, p-디메틸아미노벤조산, p-디에틸아미노벤조산과 같은 아미노벤조산류 등을 들 수 있다. and aminobenzoic acids such as m-aminobenzoic acid, p-aminobenzoic acid, p-dimethylaminobenzoic acid, and p-diethylaminobenzoic acid.
이들 유기 아미노 화합물 중, 후술하는 용매에 대한 용해성, 미노광부의 기판상 및 차광층상에서의 바탕 오염이나 막 잔여물 방지 등의 관점에서, 지방족 아민으로는 모노(시클로)알칸올아민 및 아미노(시클로)알칸디올이 바람직하고, 특히 2-아미노에탄올, 3-아미노-1-프로판올, 5-아미노-1-펜탄올, 3-아미노-1,2-프로판디 올, 2-아미노-1,3-프로판디올, 4-아미노-1,2-부탄디올 등이 바람직하며, 페닐기 함유 아민으로는 아미노페놀류가 바람직하고, 특히 o-아미노페놀, m-아미노페놀, p-아미노페놀 등이 바람직하다. Among these organic amino compounds, mono (cyclo) alkanolamines and amino (cyclo) s include aliphatic amines from the viewpoints of solubility in a solvent to be described later, prevention of background contamination and film residue on the substrate and the light shielding layer of the unexposed portion. Alkanediol is preferred, especially 2-aminoethanol, 3-amino-1-propanol, 5-amino-1-pentanol, 3-amino-1,2-propanediol, 2-amino-1,3- Propanediol, 4-amino-1,2-butanediol, and the like are preferable. As the phenyl group-containing amine, aminophenols are preferable, and o-aminophenol, m-aminophenol, p-aminophenol and the like are particularly preferable.
상기 유기 아미노 화합물은 단독으로 또는 2종 이상 혼합하여 사용할 수 있다. The said organic amino compound can be used individually or in mixture of 2 or more types.
유기 아미노 화합물의 사용량은 (A) 내지 (E) 성분 및 첨가제 성분의 합계 100 중량부에 대하여, 바람직하게는 15 중량부 이하, 보다 바람직하게는 10 중량부 이하이다. 이 경우, 유기 아미노 화합물의 사용량이 15 중량부를 초과하면 형성된 화소의 기판에의 밀착성이 저하하는 경향이 있다. The use amount of the organic amino compound is preferably 15 parts by weight or less, more preferably 10 parts by weight or less based on 100 parts by weight of the total of the components (A) to (E) and the additive component. In this case, when the usage-amount of an organic amino compound exceeds 15 weight part, there exists a tendency for the adhesiveness to the board | substrate of the formed pixel to fall.
또한, 상기 이외의 첨가제 성분으로는, 예를 들면 In addition, as an additive component of that excepting the above, for example
구리 프탈로시아닌 유도체와 같은 청색 안료 유도체나 황색 안료 유도체 등의 분산 조제; Dispersion aids such as blue pigment derivatives such as copper phthalocyanine derivatives and yellow pigment derivatives;
유리, 알루미나 등의 충전제; Fillers such as glass and alumina;
폴리비닐 알코올, 폴리에틸렌글리콜 모노알킬에테르, 폴리(플루오로알킬아크릴레이트) 등의 고분자 화합물; Polymer compounds such as polyvinyl alcohol, polyethylene glycol monoalkyl ether, and poly (fluoroalkyl acrylate);
비이온계, 양이온계, 음이온계 등의 계면활성제; Surfactants such as nonionic, cationic and anionic systems;
비닐트리메톡시실란, 비닐트리에톡시실란, 비닐트리스(2-메톡시에톡시)실란, N-(2-아미노에틸)-3-아미노프로필·메틸·디메톡시실란, N-(2-아미노에틸)-3-아미노프로필트리메톡시실란, 3-아미노프로필트리에톡시실란, 3-글리시독시프로필트리메톡시실란, 3-글리시독시프로필·메틸·디메톡시실란, 2-(3,4-에폭시시클로헥실) 에틸트리메톡시실란, 3-클로로프로필·메틸·디메톡시실란, 3-클로로프로필트리메톡시실란, 3-메타크릴로일옥시프로필트리메톡시실란, 3-머캅토프로필트리메톡시실란 등의 밀착 촉진제; Vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris (2-methoxyethoxy) silane, N- (2-aminoethyl) -3-aminopropylmethyl dimethoxysilane, N- (2-amino Ethyl) -3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2- (3, 4-epoxycyclohexyl) ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloyloxypropyltrimethoxysilane, 3-mercaptopropyl Adhesion promoters such as trimethoxysilane;
2,2-티오비스(4-메틸-6-t-부틸페놀), 2,6-디-t-부틸페놀 등의 산화 방지제; Antioxidants such as 2,2-thiobis (4-methyl-6-t-butylphenol) and 2,6-di-t-butylphenol;
2-(3-t-부틸-5-메틸-2-히드록시페닐)-5-클로로벤조트리아졸, 알콕시벤조페논류 등의 자외선 흡수제; Ultraviolet absorbers such as 2- (3-t-butyl-5-methyl-2-hydroxyphenyl) -5-chlorobenzotriazole and alkoxybenzophenones;
폴리아크릴산나트륨 등의 응집 방지제; Aggregation inhibitors such as sodium polyacrylate;
1,1'-아조비스(시클로헥산-1-카르보니트릴), 2-페닐아조-4-메톡시-2,4-디메틸발레로니트릴 등의 열 라디칼 발생제 등을 들 수 있다. And thermal radical generators such as 1,1'-azobis (cyclohexane-1-carbonitrile) and 2-phenylazo-4-methoxy-2,4-dimethylvaleronitrile.
-(F) 용매--(F) solvent-
본 발명에서의 용매로는, 감방사선성 조성물을 구성하는 (A) 내지 (E) 성분이나 첨가제 성분을 분산 또는 용해하며, 이들 성분과 반응하지 않고, 알맞은 휘발성을 갖는 것을 적절히 선택하여 사용할 수 있다. As a solvent in this invention, the thing (A)-(E) component and additive component which comprise a radiation sensitive composition are disperse | distributed or melt | dissolved, and it does not react with these components, and can have a suitable volatility, and can select suitably. .
이러한 용매로는, 예를 들면 As such a solvent, for example
메탄올, 에탄올, 벤질 알코올과 같은 알코올류; Alcohols such as methanol, ethanol and benzyl alcohol;
에틸렌글리콜 모노메틸에테르, 에틸렌글리콜 모노에틸에테르, 에틸렌글리콜 모노-n-프로필에테르, 에틸렌글리콜 모노-n-부틸에테르, 디에틸렌글리콜 모노메틸에테르, 디에틸렌글리콜 모노에틸에테르, 디에틸렌글리콜 모노-n-프로필에테르, 디에틸렌글리콜 모노-n-부틸에테르, 트리에틸렌글리콜 모노메틸에테르, 트리에틸렌글리콜 모노에틸에테르, 프로필렌글리콜 모노메틸에테르, 프로필렌글리콜 모노에틸에 테르, 디프로필렌글리콜 모노메틸에테르, 디프로필렌글리콜 모노에틸에테르, 디프로필렌글리콜 모노-n-프로필에테르, 디프로필렌글리콜 모노-n-부틸에테르, 트리프로필렌글리콜 모노메틸에테르, 트리프로필렌글리콜 모노에틸에테르와 같은 (폴리)알킬렌글리콜 모노알킬에테르; Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n -Propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene (Poly) alkylene glycol monoalkyl ethers such as glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether;
에틸렌글리콜 모노메틸에테르아세테이트, 에틸렌글리콜 모노에틸에테르아세테이트, 에틸렌글리콜 모노-n-프로필에테르아세테이트, 에틸렌글리콜 모노-n-부틸에테르아세테이트, 디에틸렌글리콜 모노메틸에테르아세테이트, 디에틸렌글리콜 모노에틸에테르아세테이트, 디에틸렌글리콜 모노-n-프로필에테르아세테이트, 디에틸렌글리콜 모노-n-부틸에테르아세테이트, 프로필렌글리콜 모노메틸에테르아세테이트, 프로필렌글리콜 모노에틸에테르아세테이트, 3-메톡시부틸아세테이트와 같은 (폴리)알킬렌글리콜 모노알킬에테르아세테이트; Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-propyl ether acetate, ethylene glycol mono-n-butyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, (Poly) alkylene glycols such as diethylene glycol mono-n-propyl ether acetate, diethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, 3-methoxybutyl acetate Monoalkyl ether acetates;
디에틸렌글리콜디메틸에테르, 디에틸렌글리콜 메틸에틸에테르, 디에틸렌글리콜디에틸에테르, 테트라히드로푸란과 같은 다른 에테르류; Other ethers such as diethylene glycol dimethyl ether, diethylene glycol methylethyl ether, diethylene glycol diethyl ether, tetrahydrofuran;
메틸에틸케톤, 시클로헥사논, 2-헵타논, 3-헵타논, 디아세톤 알코올(4-히드록시-4-메틸펜탄-2-온), 4-히드록시-4-메틸헥산-2-온 등의 케톤류; Methylethylketone, cyclohexanone, 2-heptanone, 3-heptanone, diacetone alcohol (4-hydroxy-4-methylpentan-2-one), 4-hydroxy-4-methylhexan-2-one Ketones such as these;
락트산메틸, 락트산에틸과 같은 락트산알킬에스테르: Lactic acid alkyl esters, such as methyl lactate and ethyl lactate:
아세트산에틸, 아세트산 n-프로필, 아세트산 i-프로필, 아세트산 n-부틸, 아세트산 i-부틸, 포름산 n-펜틸, 아세트산 i-펜틸, 3-메틸-3-메톡시부틸아세테이트, 프로피온산 n-부틸, 3-메틸-3-메톡시부틸프로피오네이트, 부티르산에틸, 부티르산 n-프로필, 부티르산 i-프로필, 부티르산 n-부틸, 히드록시아세트산에틸, 에톡시아 세트산에틸, 3-메톡시프로피온산메틸, 3-메톡시프로피온산에틸, 3-에톡시프로피온산메틸, 3-에톡시프로피온산에틸, 피루브산메틸, 피루브산에틸, 피루브산 n-프로필, 아세토아세트산메틸, 아세토아세트산에틸, 2-히드록시-2-메틸프로피온산에틸, 2-히드록시-3-메틸부티르산메틸, 2-옥소부티르산에틸 등과 같은 에스테르류; Ethyl acetate, n-propyl acetate, i-propyl acetate, n-butyl acetate, i-butyl acetate, n-pentyl acetate, i-pentyl acetate, 3-methyl-3-methoxybutylacetate, n-butyl propionate, 3 -Methyl-3-methoxybutyl propionate, ethyl butyrate, n-propyl butyrate, butyric acid i-propyl, butyric acid n-butyl, ethyl hydroxyacetate, ethyl ethoxyacetate, 3-methoxypropionate, 3- Ethyl methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, ethyl 2-hydroxy-2-methylpropionate, 2 Esters such as methyl hydroxy-3-methylbutyrate and ethyl 2-oxobutyrate;
톨루엔, 크실렌과 같은 방향족 탄화수소; Aromatic hydrocarbons such as toluene and xylene;
N-메틸피롤리돈, N,N-디메틸포름아미드, N,N-디메틸아세트아미드와 같은 아미드류 등을 들 수 있다. And amides such as N-methylpyrrolidone, N, N-dimethylformamide, and N, N-dimethylacetamide.
이들 용매 중, 용해성, 안료 분산성, 도포성 등의 관점에서 벤질 알코올, 에틸렌글리콜 모노-n-부틸에테르, 프로필렌글리콜 모노메틸에테르, 프로필렌글리콜 모노에틸에테르, 에틸렌글리콜 모노메틸에테르아세테이트, 에틸렌글리콜 모노-n-부틸에테르아세테이트, 디에틸렌글리콜 모노-n-부틸에테르아세테이트, 프로필렌글리콜 모노메틸에테르아세테이트, 프로필렌글리콜 모노에틸에테르아세테이트, 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜 메틸에틸에테르, 시클로헥사논, 2-헵타논, 3-헵타논, 아세트산 n-부틸, 아세트산 i-부틸, 포름산 n-펜틸, 아세트산 i-펜틸, 3-메톡시부틸아세테이트, 프로피온산 n-부틸, 부티르산에틸, 부티르산 i-프로필, 부티르산 n-부틸, 3-메톡시프로피온산에틸, 3-에톡시프로피온산메틸, 3-에톡시프로피온산에틸, 3-메틸-3-메톡시부틸프로피오네이트, 피루브산에틸 등이 바람직하다. Among these solvents, benzyl alcohol, ethylene glycol mono-n-butyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, ethylene glycol monomethyl ether acetate, and ethylene glycol mono from the viewpoint of solubility, pigment dispersibility, and applicability. -n-butyl ether acetate, diethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, cyclohexanone, 2 -Heptanone, 3-heptanone, n-butyl acetate, i-butyl acetate, n-pentyl formate, i-pentyl acetate, 3-methoxybutyl acetate, n-butyl propionate, ethyl butyrate, butyric acid i-propyl, butyric acid n-butyl, 3-methoxy ethylpropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, 3-methyl-3- methoxy Cibutyl propionate, ethyl pyruvate, etc. are preferable.
상기 용매는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said solvent can be used individually or in mixture of 2 or more types.
또한, 상기 용매와 함께 벤질에틸에테르, 디헥실에테르, 아세토닐아세톤, 이소포론, 카프로산, 카프릴산, 1-옥탄올, 1-노난올, 아세트산벤질, 벤조산에틸, 옥 살산디에틸, 말레산디에틸, γ-부티롤락톤, 탄산에틸렌, 탄산프로필렌, 에틸렌글리콜 모노페닐에테르아세테이트 등의 고비점 용매를 병용할 수도 있다. In addition, benzyl ethyl ether, dihexyl ether, acetonyl acetone, isophorone, caproic acid, caprylic acid, 1-octanol, 1-nonanol, benzyl acetate, ethyl benzoate, diethyl oxalate, maleic together with the above solvent. High boiling point solvents, such as acid diethyl, (gamma) -butyrolactone, ethylene carbonate, a propylene carbonate, and ethylene glycol monophenyl ether acetate, can also be used together.
상기 고비점 용매는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said high boiling point solvent can be used individually or in mixture of 2 or more types.
용매의 사용량은 특별히 한정되는 것은 아니지만, 얻어지는 감방사선성 조성물의 도포성, 보존 안정성 등의 관점에서 해당 조성물의 용매를 제외한 각 성분의 합계 농도가 바람직하게는 5 내지 50 중량%, 더욱 바람직하게는 10 내지 40 중량%가 되는 양이 바람직하다. Although the usage-amount of a solvent is not specifically limited, From the viewpoint of the applicability | paintability, storage stability, etc. of the radiation sensitive composition obtained, the total concentration of each component except the solvent of the said composition becomes like this. Preferably it is 5-50 weight%, More preferably, Preference is given to amounts of from 10 to 40% by weight.
-컬러 필터용 감방사선성 조성물의 제조법-Production method of radiation sensitive composition for color filters
본 발명의 컬러 필터용 감방사선성 조성물의 제조법으로는, 특별히 한정되는 것은 아니지만, 미리 (A) 안료를 (B) 분산제, (C) 알칼리 가용성 수지 및 (F) 용매를 포함하는 매체 중에 분산시키는 공정을 거쳐 제조하는 것이 바람직하다. Although it does not specifically limit as a manufacturing method of the radiation sensitive composition for color filters of this invention, The (A) pigment is previously disperse | distributed in the medium containing (B) dispersing agent, (C) alkali-soluble resin, and (F) solvent. It is preferable to manufacture through a process.
이하에서는, 미리 (A) 안료를 상기 매체 중에 분산시키는 공정을 "예비 분산 공정"이라 하고, 미리 (A) 안료를 상기 매체 중에 분산시킨 분산액을 "예비 분산액"이라 한다. Hereinafter, the process of disperse | distributing (A) pigment in the said medium previously is called "preliminary dispersion process", and the dispersion liquid which disperse | distributed (A) pigment in the said medium previously is called "preliminary dispersion liquid".
예비 분산 공정에서, (C) 알칼리 가용성 수지의 사용량은 컬러 필터용 감방사선성 조성물에서의 (C) 알칼리 가용성 수지의 사용량에 대하여, 바람직하게는 5 내지 100 중량%, 보다 바람직하게는 10 내지 50 중량%이다. 이 경우, (C) 알칼리 가용성 수지의 사용량이 5 중량% 미만이면 얻어지는 조성물의 보존 안정성이 저하하거나, 기판상에 잔사가 발생하기 쉬워지는 경향이 있다. In the preliminary dispersion step, the amount of the (C) alkali-soluble resin used is preferably 5 to 100% by weight, more preferably 10 to 50, relative to the amount of the (C) alkali-soluble resin used in the radiation-sensitive composition for color filters. Weight percent. In this case, when the usage-amount of (C) alkali-soluble resin is less than 5 weight%, there exists a tendency for the storage stability of the composition obtained to fall, or a residue tends to arise on a board | substrate.
예비 분산 공정은 예를 들면 디졸바, 비드밀, 로드밀 등의 혼합 장치를 이용 하고, 상기 각 성분을 혼합함으로써 실시할 수 있다. A preliminary dispersion process can be performed by mixing each said component using mixing apparatuses, such as a dissolve bar, a bead mill, a rod mill, etc., for example.
이와 같이 하여 얻어지는 예비 분산액 중 (A) 안료의 평균 입경은 바람직하게는 50 내지 400 nm, 보다 바람직하게는 50 내지 150 nm 이다. The average particle diameter of (A) pigment in the preliminary dispersion obtained in this way becomes like this. Preferably it is 50-400 nm, More preferably, it is 50-150 nm.
예비 분산 공정에 이어서, 예비 분산액을 (D) 다관능성 단량체 및 (E) 광중합 개시제와, 경우에 따라 (C) 알칼리 가용성 수지 및 (F) 용매를 더 첨가하여 이들과 함께 통상법에 의해 혼합함으로써, 본 발명의 컬러 필터용 감방사선성 조성물을 얻을 수 있다. Following the predispersion step, the predispersion is further mixed with (D) polyfunctional monomer and (E) photopolymerization initiator, optionally (C) alkali-soluble resin and (F) solvent, and mixed with them by a conventional method, The radiation sensitive composition for color filters of this invention can be obtained.
[컬러 필터의 형성 방법][Formation method of color filter]
이어서, 본 발명의 컬러 필터용 감방사선성 조성물(이하, 간단히 "감방사선성 조성물"이라고도 함)을 사용하여 본 발명의 컬러 필터를 형성하는 방법에 대해서 설명한다. Next, the method of forming the color filter of this invention using the radiation sensitive composition for color filters of this invention (henceforth simply a "radiation-sensitive composition") is demonstrated.
본 발명의 컬러 필터를 형성하는 방법은 적어도 하기 (1) 내지 (4)의 공정을 포함하고 있다. The method of forming the color filter of this invention includes the process of following (1)-(4) at least.
(1) 본 발명의 감방사선성 조성물의 피막을 기판상에 형성하는 공정. (1) The process of forming the film of the radiation sensitive composition of this invention on a board | substrate.
(2) 상기 피막의 적어도 일부에 방사선을 노광하는 공정. (2) Process of exposing radiation to at least a part of said film.
(3) 노광 후 상기 피막을 현상하는 공정. (3) Process of developing the said film after exposure.
(4) 현상 후 상기 피막을 후 베이킹하는 공정. (4) The process of post-baking the said film after image development.
이하, 이들 공정에 대해서 순서대로 설명한다. Hereinafter, these processes are demonstrated in order.
-(1) 공정-(1) process
우선, 기판의 표면상에 필요에 따라 화소를 형성하는 부분을 구획하도록 차 광층을 형성하고, 이 기판상에 본 발명의 감방사선성 조성물을 도포한 후, 예비 베이킹을 행하고 용매를 증발시켜 피막을 형성한다. First, a light shielding layer is formed on the surface of a substrate so as to partition a portion forming a pixel as necessary, and after applying the radiation-sensitive composition of the present invention on the substrate, preliminary baking is carried out and the solvent is evaporated to form a film. Form.
이 공정에서 사용되는 기판으로는, 예를 들면 유리, 실리콘, 폴리카르보네이트, 폴리에스테르, 방향족 폴리아미드, 폴리아미드이미드, 폴리이미드, 폴리에테르술폰 이외에, 환상 올레핀의 개환 중합체나 그의 수소 첨가물 등을 들 수 있다. As a board | substrate used at this process, for example, ring-opening polymer of cyclic olefin, its hydrogenated substance, etc. other than glass, silicone, polycarbonate, polyester, aromatic polyamide, polyamideimide, polyimide, polyether sulfone, etc. Can be mentioned.
또한, 이들 기판에는 원하는 대로 실란 커플링제 등에 의한 약품 처리, 플라즈마 처리, 이온 도금, 스퍼터링, 기상 반응법, 진공 증착 등의 적절한 전처리를 실시할 수도 있다. In addition, these substrates may be subjected to appropriate pretreatment such as chemical treatment with a silane coupling agent, plasma treatment, ion plating, sputtering, vapor phase reaction, vacuum deposition, or the like as desired.
감방사선성 조성물을 기판에 도포할 때는, 회전 도포, 유연 도포, 롤 도포 등의 적절한 도포법을 채용할 수 있다. 그 중에서도 스핀 코터 또는 슬릿 다이 코터를 이용하는 도포법이 바람직하다. When apply | coating a radiation sensitive composition to a board | substrate, the appropriate coating methods, such as rotational coating, casting | flow_spread coating, roll coating, can be employ | adopted. Especially, the coating method using a spin coater or a slit die coater is preferable.
예비 베이킹의 조건은 바람직하게는 70 내지 110 ℃에서 2 내지 4 분 정도이다. The conditions of the prebaking are preferably about 2 to 4 minutes at 70 to 110 ° C.
도포 두께는, 건조 후의 막 두께로서 바람직하게는 0.1 내지 8.0 ㎛, 보다 바람직하게는 0.2 내지 6.0 ㎛, 더욱 바람직하게는 0.2 내지 4.0 ㎛이다. Coating thickness is 0.1-8.0 micrometers, More preferably, it is 0.2-6.0 micrometers, More preferably, it is 0.2-4.0 micrometers as a film thickness after drying.
-(2) 공정-(2) process
이어서, 형성된 피막의 적어도 일부에 방사선을 노광한다. 이 공정에서 피막의 일부에 노광할 때는, 바람직하게는 소정의 패턴을 갖는 포토마스크를 통해 노광한다. Subsequently, at least part of the formed film is exposed to radiation. In exposing part of a film in this process, it exposes preferably through the photomask which has a predetermined pattern.
노광에 사용되는 방사선으로는, 예를 들면 가시광선, 자외선, 원자외선, 전 자선, X선 등의 방사선을 적절하게 선택하여 사용할 수 있다. 파장이 190 내지 450 nm의 범위에 있는 방사선이 바람직하다. As radiation used for exposure, radiation, such as visible light, an ultraviolet-ray, an ultraviolet-ray, an electron beam, X-rays, can be selected suitably and used, for example. Preference is given to radiation in which the wavelength is in the range of 190 to 450 nm.
방사선의 노광량은 바람직하게는 10 내지 10,000 J/㎡ 정도이다. The exposure dose of radiation is preferably about 10 to 10,000 J / m 2.
-(3) 공정-(3) process-
이어서, 노광 후의 피막을 현상액, 바람직하게는 알칼리 현상액을 사용하여 현상하고, 피막의 미노광부를 용해 제거함으로써 소정의 패턴을 형성한다. Next, the film after exposure is developed using a developing solution, preferably an alkaline developing solution, and a predetermined pattern is formed by dissolving and removing the unexposed part of the film.
상기 알칼리 현상액으로는, 예를 들면 탄산나트륨, 수산화나트륨, 수산화칼륨, 테트라메틸암모늄히드록시드, 콜린, 1,8-디아자비시클로-[5.4.0]-7-운데센, 1,5-디아자비시클로-[4.3.0]-5-노넨 등의 수용액이 바람직하다. Examples of the alkali developer include sodium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, choline, 1,8-diazabicyclo- [5.4.0] -7-undecene, 1,5-dia Aqueous solutions, such as xabicyclo- [4.3.0] -5-nonene, are preferable.
상기 알칼리 현상액에는, 예를 들면 메탄올, 에탄올 등의 수용성 유기 용제나 계면활성제 등을 적당량 첨가할 수도 있다. 또한, 알칼리 현상 후에는 바람직하게는 수세한다. A suitable amount of water-soluble organic solvents such as methanol and ethanol, surfactants, and the like can also be added to the alkaline developer. In addition, after alkali development, water washing is preferable.
현상 처리법으로는, 샤워 현상법, 분무 현상법, 침지 현상법, 패들 현상법 등을 적용할 수 있다. As the developing treatment method, a shower developing method, a spray developing method, an immersion developing method, a paddle developing method, or the like can be applied.
현상 조건은 상온에서 5 내지 300 초 정도가 바람직하다. As for image development conditions, about 5 to 300 second is preferable at normal temperature.
-(4) 공정-(4) process
이어서, 현상 후의 피막을 후 베이킹함으로써 화소 패턴이 소정의 배열로 배치된 기판을 얻을 수 있다. Subsequently, by post-baking the film after development, the board | substrate with which the pixel pattern was arrange | positioned in a predetermined | prescribed array can be obtained.
후 베이킹의 처리 조건으로는, 예를 들면 180 내지 240 ℃에서 15 내지 90 분 정도가 바람직하다. 이와 같이 하여 형성된 화소의 막 두께는, 바람직하게는 0.1 내지 6.0 ㎛, 보다 바람직하게는 0.5 내지 3.0 ㎛이다. As processing conditions of post-baking, about 15 to 90 minutes are preferable, for example at 180-240 degreeC. The film thickness of the pixel thus formed is preferably 0.1 to 6.0 mu m, more preferably 0.5 to 3.0 mu m.
상기 (1) 내지 (4) 공정을 적색, 녹색 또는 청색의 안료가 분산된 각 감방사선성 조성물을 사용하여 반복함으로써, 적색, 녹색 및 청색의 화소 패턴을 동일한 기판상에 형성함으로써, 적색, 녹색 및 청색의 3원색의 화소 패턴이 소정의 배열로 배치된 착색층을 기판상에 형성할 수 있다. The steps (1) to (4) are repeated using each radiation-sensitive composition in which red, green, or blue pigments are dispersed, thereby forming red, green, and blue pixel patterns on the same substrate, whereby red, green And a colored layer on which blue three primary pixel patterns are arranged in a predetermined arrangement.
또한, 본 발명에서는 각 색의 화소 패턴의 형성의 순서는 임의로 선택할 수 있다. In addition, in this invention, the order of formation of the pixel pattern of each color can be selected arbitrarily.
컬러 필터Color filter
본 발명의 컬러 필터는 본 발명의 컬러 필터용 감방사선성 조성물로 형성된 것이다. The color filter of this invention is formed from the radiation sensitive composition for color filters of this invention.
본 발명의 컬러 필터는 투과형 또는 반사형의 컬러 액정 표시 장치 이외에, 컬러 촬상관 소자, 컬러 센서 등에 매우 유용하다. The color filter of the present invention is very useful for color image tube elements, color sensors and the like in addition to color liquid crystal display devices of transmissive or reflective type.
컬러 액정 표시 장치Color liquid crystal display
본 발명의 컬러 액정 표시 장치는 본 발명의 컬러 필터를 구비하는 것이다. The color liquid crystal display device of this invention is equipped with the color filter of this invention.
본 발명의 컬러 액정 표시 장치는, 적절한 구조를 취할 수 있다. 예를 들면 컬러 필터를 박막 트랜지스터(TFT)가 배치된 구동용 기판과는 별도의 기판상에 형성하고, 구동용 기판과 컬러 필터를 형성한 기판이 액정층을 통해 대향한 구조를 취할 수 있으며, 박막 트랜지스터(TFT)가 배치된 구동용 기판의 표면상에 컬러 필터를 형성한 기판과, ITO(주석을 도핑한 산화인듐) 전극을 형성한 기판이 액정층을 통해 대향한 구조를 취할 수도 있다. 후자의 구조는, 개구율을 현격히 향상시킬 수 있어 밝고 고정밀한 액정 표시 장치가 얻어진다는 이점을 갖는다. The color liquid crystal display device of this invention can take a suitable structure. For example, the color filter may be formed on a substrate separate from the driving substrate on which the thin film transistor (TFT) is disposed, and the driving substrate and the substrate on which the color filter is formed may have an opposite structure through the liquid crystal layer. The substrate in which the color filter is formed on the surface of the driving substrate on which the thin film transistor TFT is disposed, and the substrate in which the ITO (indium oxide doped with tin) electrode is formed may be opposed through the liquid crystal layer. The latter structure has the advantage that the aperture ratio can be significantly improved and a bright and high precision liquid crystal display device is obtained.
<실시예><Example>
이하, 실시예를 들어 본 발명의 실시 형태를 더욱 구체적으로 설명한다. 단, 본 발명이 하기 실시예로 한정되는 것은 아니다. Hereinafter, an Example is given and embodiment of this invention is described further more concretely. However, the present invention is not limited to the following examples.
<실시예 1><Example 1>
(A) 안료로서 C.I. 피그먼트 레드 254/C.I. 피그먼트 레드 177=80/20(중량비) 혼합물 15 중량부, (B) 분산제로서 디스퍼 빅-2001(고형분 농도 45.1 중량%) 5 중량부(고형분 환산 약 2.26 중량부), (C) 알칼리 가용성 수지로서 메타크릴산/N-페닐말레이미드/스티렌/벤질메타크릴레이트 공중합체 (공중합 중량비=20/30/20/30, Mw=9,500, Mn=5,000) 6 중량부 및 (F) 용매로서 프로필렌글리콜 모노메틸에테르아세테이트 37 중량부와 3-에톡시프로피온산에틸 37 중량부를 비드밀에 의해 처리하여 예비 분산액 (R1)을 제조하였다. (A) As a pigment, C.I. Pigment Red 254 / C.I. Pigment Red 177 = 80/20 (weight ratio) 15 parts by weight of the mixture, (B) 5 parts by weight of Dispervic-2001 (solid concentration 45.1% by weight) as a dispersant (about 2.26 parts by weight in terms of solids), (C) alkali solubility 6 parts by weight of methacrylic acid / N-phenylmaleimide / styrene / benzyl methacrylate copolymer (copolymer weight ratio = 20/30/20/30, Mw = 9,500, Mn = 5,000) and propylene as (F) solvent 37 parts by weight of glycol monomethyl ether acetate and 37 parts by weight of ethyl 3-ethoxypropionate were treated with a bead mill to prepare a preliminary dispersion (R1).
계속해서, 예비 분산액 (R1) 100 중량부, (C) 알칼리 가용성 수지로서 메타크릴산/숙신산 모노(2-메타크릴로일옥시에틸)/N-페닐말레이미드/스티렌/벤질메타크릴레이트 공중합체 (공중합 중량비=25/10/30/20/15, Mw=12,000, Mn=6,500) 5 중량부, (D) 다관능성 단량체로서 디펜타에리쓰리톨헥사아크릴레이트 10 중량부, (E) 광중합 개시제로서 2-메틸-(4-메틸티오페닐)-2-모르폴리노-1-프로파논-1 5 중량부, 및 (F) 용매로서 3-메톡시부틸아세테이트 70 중량부를 혼합하여 감방사선성 조성물을 제조하였다. Subsequently, 100 parts by weight of the preliminary dispersion (R1) and (C) methacrylic acid / succinic acid mono (2-methacryloyloxyethyl) / N-phenylmaleimide / styrene / benzyl methacrylate copolymer as alkali-soluble resins. (Copolymerization weight ratio = 25/10/30/20/15, Mw = 12,000, Mn = 6,500) 5 parts by weight, (D) 10 parts by weight of dipentaerythritol hexaacrylate as the polyfunctional monomer, (E) photopolymerization initiator 5 parts by weight of 2-methyl- (4-methylthiophenyl) -2-morpholino-1-propanone-1 as a solvent, and 70 parts by weight of 3-methoxybutyl acetate as a solvent (F) to form a radiation-sensitive composition Was prepared.
<실시예 2><Example 2>
(A) 안료로서 C.I. 피그먼트 그린 36/C.I. 피그먼트 옐로우 138/C.I. 피그먼트 옐로우 150=50/40/10(중량비) 혼합물 15 중량부, (B) 분산제로서 디스퍼 빅-2001 7.5 중량부(고형분 환산 약 3.38 중량부), (C) 알칼리 가용성 수지로서 메타크릴산/ω-카르복시디카프롤락톤 모노아크릴레이트/N-페닐말레이미드/스티렌/벤질메타크릴레이트/글리세롤 모노메타크릴레이트 공중합체(공중합 중량비=15/10/20/10/35/10, Mw=6,000, Mn=3,000) 4 중량부, 및 (F) 용매로서 프로필렌글리콜 모노메틸에테르아세테이트 73.5 중량부를 실시예 1과 마찬가지로 처리하여, 예비 분산액 (G1)을 제조하였다. (A) As a pigment, C.I. Pigment Green 36 / C.I. Pigment Yellow 138 / C.I. Pigment Yellow 150 = 50/40/10 (weight ratio) 15 parts by weight of the mixture, (B) 7.5 parts by weight of Dispervic-2001 as a dispersant (about 3.38 parts by weight in terms of solids), (C) methacrylic acid as an alkali-soluble resin / ω-carboxydicaprolactone monoacrylate / N-phenylmaleimide / styrene / benzyl methacrylate / glycerol monomethacrylate copolymer (copolymerization weight ratio = 15/10/20/10/35/10, Mw = 6,000 , Mn = 3,000) 4 parts by weight, and (F) 73.5 parts by weight of propylene glycol monomethyl ether acetate as a solvent were treated in the same manner as in Example 1 to prepare a preliminary dispersion (G1).
계속해서, 예비 분산액 (G1) 100 중량부, (C) 알칼리 가용성 수지로서 메타크릴산/N-페닐말레이미드/스티렌/벤질메타크릴레이트/글리세롤 모노메타크릴레이트 공중합체 (공중합 중량비=15/25/15/35/10, Mw=13,500, Mn=6,000) 5 중량부, (D) 다관능성 단량체로서 디펜타에리쓰리톨헥사아크릴레이트 10 중량부, (E) 광중합 개시제로서 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부타논-1 5 중량부, 및 (F) 용매로서 3-에톡시프로피온산에틸 70 중량부를 혼합하여 감방사선성 조성물을 제조하였다. Subsequently, 100 parts by weight of the preliminary dispersion (G1), (C) methacrylic acid / N-phenylmaleimide / styrene / benzyl methacrylate / glycerol monomethacrylate copolymer (copolymer weight ratio = 15/25) / 15/35/10, Mw = 13,500, Mn = 6,000) 5 parts by weight, (D) 10 parts by weight of dipentaerythritol hexaacrylate as the polyfunctional monomer, (E) 2-benzyl-2- as the photopolymerization initiator 5 parts by weight of dimethylamino-1- (4-morpholinophenyl) butanone-1 and 70 parts by weight of ethyl 3-ethoxypropionate as a solvent (F) were mixed to prepare a radiation sensitive composition.
<실시예 3><Example 3>
(A) 안료로서 C.I. 피그먼트 블루 15/C.I. 피그먼트 바이올렛 23=90/10(중량비) 혼합물 15 중량부, (B) 분산제로서 디스퍼 빅-2001 10 중량부(고형분 환산 4.51 중량부), (C) 알칼리 가용성 수지로서 아크릴산/N-페닐말레이미드/스티렌/페닐메타크릴레이트/2-히드록시에틸메타크릴레이트/폴리메틸메타크릴레이트 거대 단 량체 공중합체 (공중합 중량비=15/20/10/35/10/10, Mw=23,000, Mn=11,000) 2 중량부, 및 (F) 용매로서 프로필렌글리콜 모노메틸에테르아세테이트 63 중량부와 프로필렌글리콜 모노메틸에테르 10 중량부를 실시예 1과 마찬가지로 처리하여 예비 분산액 (B1)을 제조하였다. (A) As a pigment, C.I. Pigment Blue 15 / C.I. Pigment Violet 23 = 90/10 (weight ratio) 15 parts by weight of the mixture, (B) 10 parts by weight of Dispervic-2001 (4.51 parts by weight in terms of solids) as a dispersant, (C) acrylic acid / N-phenylmalee as alkali-soluble resin Mid / styrene / phenyl methacrylate / 2-hydroxyethyl methacrylate / polymethyl methacrylate macromonomer copolymer (copolymer weight ratio = 15/20/10/35/10/10, Mw = 23,000, Mn = 11,000) 2 parts by weight, and (F) 63 parts by weight of propylene glycol monomethyl ether acetate and 10 parts by weight of propylene glycol monomethyl ether were treated in the same manner as in Example 1 to prepare a preliminary dispersion (B1).
계속해서, 예비 분산액 (B1) 100 중량부, (C) 알칼리 가용성 수지로서 메타크릴산/N-페닐말레이미드/α-메틸스티렌/벤질메타크릴레이트 공중합체(공중합 중량비=20/25/25/30, Mw=43,000, Mn=21,000) 10 중량부, (D) 다관능성 단량체로서 디펜타에리쓰리톨헥사아크릴레이트 20 중량부, (E) 광중합 개시제로서 2-메틸-(4-메틸티오페닐)-2-모르폴리노-1-프로파논-1 5 중량부, 및 (F) 용매로서 3-메틸-3-메톡시부틸아세테이트 30 중량부와 프로필렌글리콜 모노에틸에테르아세테이트 80 중량부를 혼합하여 감방사선성 조성물을 제조하였다. Subsequently, 100 parts by weight of the preliminary dispersion (B1) and (C) methacrylic acid / N-phenylmaleimide / α-methylstyrene / benzyl methacrylate copolymer (copolymerization weight ratio = 20/25/25 / 30, Mw = 43,000, Mn = 21,000) 10 parts by weight, (D) 20 parts by weight of dipentaerythritol hexaacrylate as the polyfunctional monomer, (E) 2-methyl- (4-methylthiophenyl) as a photopolymerization initiator 5 parts by weight of -2-morpholino-1-propanone-1 and (F) a solvent by mixing 30 parts by weight of 3-methyl-3-methoxybutyl acetate and 80 parts by weight of propylene glycol monoethyl ether acetate The sexual composition was prepared.
<실시예 4><Example 4>
실시예 1에서의 예비 분산 공정에서 (C) 알칼리 가용성 수지 6 중량부 대신에 메타크릴산/N-페닐말레이미드/스티렌/n-부틸메타크릴레이트 공중합체 (공중합 중량비=20/30/20/30, Mw=8,000, Mn=4,000) 6 중량부를 사용하고, 예비 분산액 (R1)과 혼합하는 공정에서 (C) 알칼리 가용성 수지 5 중량부 대신에 메타크릴산/N-페닐말레이미드/스티렌/2-에틸헥실메타크릴레이트 공중합체 (공중합 중량비=20/30/20/30, Mw=14,000, Mn=6,500) 5 중량부를 사용한 것 이외에는, 실시예 1과 동일하게 하여 감방사선성 조성물을 제조하였다. (C) methacrylic acid / N-phenylmaleimide / styrene / n-butylmethacrylate copolymer (copolymerization weight ratio = 20/30/20 / in the preliminary dispersion process in Example 1 instead of 6 parts by weight of the alkali-soluble resin 30, Mw = 8,000, Mn = 4,000) 6 parts by weight of methacrylic acid / N-phenylmaleimide / styrene / 2 in place of 5 parts by weight of alkali-soluble resin (C) in the step of mixing with preliminary dispersion (R1). A radiation sensitive composition was prepared in the same manner as in Example 1 except that 5 parts by weight of an ethylhexyl methacrylate copolymer (copolymerization weight ratio = 20/30/20/30, Mw = 14,000, Mn = 6,500) was used.
<비교예 1>Comparative Example 1
실시예 1에서의 예비 분산액 (R1)의 (B) 분산제인 디스퍼 빅-2001 5 중량부 대신에 솔스패스 S 24000(아민가=50, 산가=25) 2.5 중량부를 사용한 것 이외에는, 실시예 1과 동일하게 하여 감방사선성 조성물을 제조하였다. Example 1 except that 2.5 parts by weight of Solpass S 24000 (amine value = 50, acid value = 25) was used instead of 5 parts by weight of Dispervic-2001, which is the dispersant (B) of the preliminary dispersion (R1). In the same manner, a radiation sensitive composition was prepared.
<비교예 2>Comparative Example 2
실시예 1에서의 예비 분산액 (R1)의 (C) 알칼리 가용성 수지인 메타크릴산/N-페닐말레이미드/스티렌/벤질메타크릴레이트 공중합체 대신에 메타크릴산/벤질메타크릴레이트 공중합체 (공중합 중량비=25/75, Mw=13,000, Mn=6,500)을 사용하고, 실시예 1에서의 (C) 알칼리 가용성 수지인 메타크릴산/숙신산 모노(2-메타크릴로일옥시에틸)/N-페닐말레이미드/스티렌/벤질메타크릴레이트 공중합체 대신에 메타크릴산/2-히드록시에틸메타크릴레이트/벤질메타크릴레이트 공중합체 (공중합 중량비=15/15/70, Mw=16,000, Mn=7,500)을 사용한 것 이외에는, 실시예 1과 동일하게 하여 감방사선성 조성물을 제조하였다. Methacrylic acid / benzyl methacrylate copolymer (copolymerization) instead of methacrylic acid / N-phenylmaleimide / styrene / benzyl methacrylate copolymer of (C) alkali-soluble resin of the preliminary dispersion (R1) in Example 1 (C) methacrylic acid / succinic acid mono (2-methacryloyloxyethyl) / N-phenyl which is (C) alkali-soluble resin in Example 1 using a weight ratio = 25/75, Mw = 13,000, Mn = 6,500) Methacrylic acid / 2-hydroxyethyl methacrylate / benzyl methacrylate copolymer (copolymer weight ratio = 15/15/70, Mw = 16,000, Mn = 7,500) instead of maleimide / styrene / benzyl methacrylate copolymer A radiation sensitive composition was produced in the same manner as in Example 1 except that was used.
<비교예 3>Comparative Example 3
실시예 2에서의 예비 분산액 (G1)의 (B) 분산제인 디스퍼 빅-2001 7.5 중량부 대신에 디스퍼 빅-182(아민가=14, 산가=0, 고형분 농도 44.6 중량%) 7.5 중량부(고형분 환산 약 3.35 중량부)를 사용한 것 이외에는, 실시예 2와 동일하게 하여 감방사선성 조성물을 제조하였다. 7.5 parts by weight of dispervic-182 (amine value = 14, acid value = 0, solid content concentration 44.6% by weight) instead of 7.5 parts by weight of dispervic-2001 which is the dispersant (B) of the preliminary dispersion (G1) in Example 2 A radiation sensitive composition was prepared in the same manner as in Example 2, except that about 3.35 parts by weight of solid content was used.
<비교예 4><Comparative Example 4>
실시예 2에서의 예비 분산액 (G1)의 (C) 알칼리 가용성 수지인 메타크릴산/ω-카르복시디카프롤락톤 모노아크릴레이트/N-페닐말레이미드/스티렌/벤질메타크릴 레이트/글리세롤 모노메타크릴레이트 공중합체 대신에 메타크릴산/ω-카르복시폴리카프롤락톤 모노아크릴레이트/스티렌/벤질메타크릴레이트/글리세롤 모노메타크릴레이트 공중합체 (공중합 중량비=15/15/20/35/15, Mw=15,500, Mn=6,500)을 사용하고, 실시예 2에서의 (C) 알칼리 가용성 수지인 메타크릴산/N-페닐말레이미드/스티렌/벤질메타크릴레이트/글리세롤 모노메타크릴레이트 공중합체 대신에 메타크릴산/벤질메타크릴레이트 공중합체 (공중합 중량비=25/75, Mw=22,000, Mn=10,000)을 사용한 것 이외에는, 실시예 2와 동일하게 하여 감방사선성 조성물을 제조하였다. Methacrylic acid / ω-carboxydicaprolactone monoacrylate / N-phenylmaleimide / styrene / benzyl methacrylate / glycerol monomethacrylate as (C) alkali-soluble resin of the preliminary dispersion (G1) in Example 2 Methacrylic acid / ω-carboxypolycaprolactone monoacrylate / styrene / benzyl methacrylate / glycerol monomethacrylate copolymer instead of copolymer (copolymerization weight ratio = 15/15/20/35/15, Mw = 15,500 , Mn = 6,500), and instead of methacrylic acid / N-phenylmaleimide / styrene / benzyl methacrylate / glycerol monomethacrylate copolymer which is (C) alkali-soluble resin in Example 2 A radiation sensitive composition was prepared in the same manner as in Example 2 except that the / benzyl methacrylate copolymer (copolymerization weight ratio = 25/75, Mw = 22,000, Mn = 10,000) was used.
<비교예 5>Comparative Example 5
실시예 3에서의 예비 분산액 (B1)의 (B) 분산제인 디스퍼 빅-2001 10 중량부 대신에 아지스파-PB-822(아민가=13, 산가=16) 4.5 중량부를 사용한 것 이외에는, 실시예 3과 동일하게 하여 감방사선성 조성물을 제조하였다. Except having used 4.5 weight part of azispa-PB-822 (amine value = 13, acid value = 16) instead of 10 weight part of dispervic-2001 which is (B) dispersing agent of the predispersion liquid (B1) in Example 3, In the same manner as in 3, a radiation sensitive composition was prepared.
각 실시예 및 각 비교예에서 얻은 감방사선성 조성물에 대해서, 하기의 요령으로 평가를 행하였다. 평가 결과를 하기 표 1에 나타낸다. The radiation sensitive composition obtained by each Example and each comparative example was evaluated in the following way. The evaluation results are shown in Table 1 below.
밀착성의 평가Evaluation of adhesion
코닝사제 #1737 유리 기판을 2장 준비하고, 각 감방사선성 조성물을 각 기판의 표면상에 스핀 코터를 이용하여 도포한 후, 70 ℃에서 3 분간 예비 소성하여 막 두께 2.5 ㎛의 피막을 형성하였다. 그 후, 각 기판을 실온으로 냉각한 후, 고압 수은 램프(조도 250 W/㎡)를 이용하고, 포토마스크를 통해 365 nm, 405 nm 및 436 nm의 각 파장을 포함하는 자외선을 한 쪽 기판의 피막에 1,000 J/㎡의 노광량으로, 또한 다른 쪽 기판의 피막에 500 J/㎡의 노광량으로 각각 노광하였다. 그 후 각 기판상의 피막을 현상액으로서 23 ℃의 JSR(주)제 현상액 CD150CR(수산화칼륨 0.04 중량%를 포함함)을 사용하고, 현상액 토출압 0.3 MPa(노즐 직경 1.0 mm)에서 1 분간 샤워 현상한 후, 초순수로 세정하며, 200 ℃에서 30 분간 후 베이킹하여 각 기판상에 90/210 ㎛의 라인·앤드·스페이스 패턴의 줄무늬상 화소 패턴을 형성하였다. Two # 1737 glass substrates made by Corning Corporation were prepared, each radiation-sensitive composition was applied onto the surface of each substrate using a spin coater, and then pre-baked at 70 ° C. for 3 minutes to form a film having a thickness of 2.5 μm. . Subsequently, after cooling each substrate to room temperature, using a high pressure mercury lamp (roughness 250 W / m 2), ultraviolet rays containing each wavelength of 365 nm, 405 nm, and 436 nm through a photomask were applied to one substrate. The film was exposed at an exposure amount of 1,000 J / m 2 and the film at the other substrate at an exposure amount of 500 J / m 2. After that, the film on each substrate was subjected to shower development for one minute at 23 MPa (nozzle diameter 1.0 mm) using a developer discharge pressure CD150CR (containing 0.04% by weight of potassium hydroxide) manufactured by JSR Inc. at 23 ° C as a developer. Thereafter, the resultant was washed with ultrapure water, and baked at 200 ° C. for 30 minutes to form a striped pixel pattern of a line and space pattern of 90/210 μm on each substrate.
얻어진 화소 패턴을 광학 현미경으로 관찰하고, 화소 패턴에 결함 및 박리가 인정되지 않는 경우를 "○", 결함이나 박리가 인정되는 경우를 "×"로 평가하였다. The obtained pixel pattern was observed with the optical microscope, and "(circle)" evaluated the case where defect and peeling were not recognized by a pixel pattern as "x".
표면 평활성의 평가Evaluation of Surface Smoothness
상기 밀착성의 평가에서 얻어진 각 화소 패턴의 상부의 표면 조도를 디지탈·인스트루먼트사제 원자간력 현미경을 이용하여 측정하고 평가하였다. 일반적으로, 표면 조도가 60 Å 이하일 때 표면 평활성이 양호하다고 할 수 있다. The surface roughness of the upper part of each pixel pattern obtained by the said adhesiveness evaluation was measured and evaluated using the atomic force microscope by a digital instrument company. Generally, it can be said that surface smoothness is favorable when surface roughness is 60 Pa or less.
현상성의 평가 Developability
각 감방사선성 조성물을 코닝사제 #1737 유리 기판의 표면상에 스핀 코팅을 이용하여 도포한 후, 90 ℃에서 3 분간 예비 베이킹하여 막 두께 2.5 ㎛의 피막을 형성하였다. 그 후, 기판을 실온으로 냉각한 후, 고압 수은 램프(조도 250 W/㎡)를 이용하고, 포토마스크를 통해 피막에 365 nm, 405 nm 및 436 nm의 각 파장을 포함하는 자외선을 1,000 J/㎡의 노광량으로 노광하였다. 그 후 피막을 현상액으로서 JSR(주)제 현상액 CD150CR(수산화칼륨 0.04 중량%를 포함함)을 사용하고, 현상액 토출압 0.1 MPa(노즐 직경 0.3 mm)에서 1 분간 샤워 현상한 후, 초순수로 세정하며, 200 ℃에서 30 분간 후 베이킹하여 기판상에 90/210 ㎛의 라인·앤드·스페 이스 패턴의 줄무늬상 화소 패턴을 형성하였다. Each radiation-sensitive composition was applied onto the surface of Corning's # 1737 glass substrate by spin coating, and then prebaked at 90 ° C. for 3 minutes to form a film having a thickness of 2.5 μm. Then, after cooling the substrate to room temperature, using a high pressure mercury lamp (roughness 250 W / m 2), ultraviolet light containing each wavelength of 365 nm, 405 nm, and 436 nm in the film through the photomask was 1,000 J / It exposed at the exposure amount of m <2>. Thereafter, the film was used as a developer, developer CD150CR (containing 0.04 wt% of potassium hydroxide) manufactured by JSR Corporation, showered for 1 minute at a developing pressure of 0.1 MPa (0.3 mm nozzle diameter), and then washed with ultrapure water. After baking for 30 minutes at 200 ° C., a striped pixel pattern having a line and space pattern of 90/210 μm was formed on the substrate.
얻어진 화소 패턴을 광학 현미경으로 관찰하고, 미노광부의 기판상에 잔사 및 바탕 오염이 인정되지 않는 경우를 "○", 잔사나 바탕 오염이 인정되는 경우를 "×"로 평가하였다. The obtained pixel pattern was observed with an optical microscope, and "(circle)" evaluated the case where residue and background contamination were not recognized on the board | substrate of an unexposed part as "(circle)", and "x".
보존 안정성의 평가Evaluation of Preservation Stability
각 감방사선성 조성물에 대해서, 도쿄 게이끼제 E형 점도계를 이용하여 초기 점도를 측정하였다. 또한, 각 감방사선성 조성물 50 g을 차광 유리 용기에 넣고, 밀폐 상태로 23 ℃에서 14 일간 정치한 후, 도쿄 게이끼제 E형 점도계를 이용하여 정치 후 점도를 측정하였다. 이 때, 정치 후 점도의 초기 점도에 대한 변화율을 산출하고, 변화율이 5 % 미만인 경우를 "○", 5 % 이상 10 % 미만인 경우를 "△", 10 % 이상인 경우를 "×"로 평가하였다. About each radiation sensitive composition, initial viscosity was measured using the Tokyo Keiki E-type viscosity meter. Moreover, 50 g of each radiation sensitive composition was put into the light-shielding glass container, and after leaving still for 14 days at 23 degreeC in a sealed state, the viscosity after standing was measured using the Tokyo Keiki E-type viscosity meter. At this time, the change rate with respect to the initial viscosity of the viscosity after stationary was computed, and when the change rate was less than 5%, "(circle)" and the case where 5% or more and less than 10% were evaluated as "(triangle | delta)" and the case where it was 10% or more as "x" .
본 발명의 컬러 필터용 감방사선성 조성물은 기판에의 밀착성이 우수하고, 적은 노광량만으로도 충분한 현상성 및 패턴의 표면 평활성을 가지며, 보존 안정성 등도 우수하다. The radiation sensitive composition for color filters of this invention is excellent in adhesiveness to a board | substrate, has sufficient developability and surface smoothness of a pattern only by a small exposure amount, and is excellent also in storage stability.
따라서, 본 발명의 컬러 필터용 감방사선성 조성물은 전자 공업 분야에서의 컬러 액정 표시 장치용 컬러 필터를 비롯한 각종 컬러 필터의 형성에 매우 바람직하게 사용할 수 있다. Therefore, the radiation sensitive composition for color filters of this invention can be used very preferably for formation of various color filters including the color filter for color liquid crystal display devices in the electronic industry.
Claims (4)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2004-00097380 | 2004-03-30 | ||
JP2004097380 | 2004-03-30 | ||
JP2005016799A JP2005316388A (en) | 2004-03-30 | 2005-01-25 | Radiation sensitive composition for color filter, color filter and color liquid crystal display |
JPJP-P-2005-00016799 | 2005-01-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060044916A true KR20060044916A (en) | 2006-05-16 |
KR100887096B1 KR100887096B1 (en) | 2009-03-04 |
Family
ID=35049757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050025907A KR100887096B1 (en) | 2004-03-30 | 2005-03-29 | Radiation Sensitive Compositions for Color Filters, Color Filters and Color Liquid Crystal Display Devices |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2005316388A (en) |
KR (1) | KR100887096B1 (en) |
CN (1) | CN100376905C (en) |
SG (1) | SG115803A1 (en) |
TW (1) | TWI358611B (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101301160B1 (en) * | 2008-09-30 | 2013-09-03 | 후지필름 가부시키가이샤 | Colored curable composition, color filter and method for production thereof, and solid imaging element |
KR101408422B1 (en) * | 2007-01-22 | 2014-06-17 | 제이에스알 가부시끼가이샤 | Sensitive radiation-sensitive resin composition and color filter |
KR101424509B1 (en) * | 2007-05-22 | 2014-07-31 | 주식회사 동진쎄미켐 | Organic protective film composition |
KR20200137989A (en) * | 2019-05-29 | 2020-12-09 | 사카타 인쿠스 가부시키가이샤 | Pigment dispersion composition for color filter and pigment dispersion resist composition for color filter |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007163911A (en) * | 2005-12-15 | 2007-06-28 | Toyo Ink Mfg Co Ltd | Colored composition and color filter |
JP2007277502A (en) * | 2006-03-13 | 2007-10-25 | Soken Chem & Eng Co Ltd | Yellowing-resistant resin and use thereof |
JP4745110B2 (en) * | 2006-04-19 | 2011-08-10 | 東京応化工業株式会社 | Photosensitive composition and color filter formed with the photosensitive composition |
KR100796517B1 (en) * | 2006-07-18 | 2008-01-21 | 제일모직주식회사 | Photosensitive resin composition for color filter and image sensor color filter using same |
WO2008013140A1 (en) * | 2006-07-25 | 2008-01-31 | Hitachi Chemical Company, Ltd. | Resin composition for optical material, resin film for optical material, and optical waveguide |
JP4846484B2 (en) * | 2006-08-11 | 2011-12-28 | 富士フイルム株式会社 | Photocurable coloring composition and color filter using the same |
WO2008056750A1 (en) * | 2006-11-10 | 2008-05-15 | Showa Highpolymer Co., Ltd. | Photosensitive resin composition |
JP2008242081A (en) * | 2007-03-27 | 2008-10-09 | Jsr Corp | Radiation-sensitive resin composition for colored layer formation, color filter and color liquid crystal display element |
JP2009025783A (en) * | 2007-06-19 | 2009-02-05 | Sakata Corp | Pigment dispersed resist composition for color filter |
JP2009025782A (en) * | 2007-06-19 | 2009-02-05 | Sakata Corp | Pigment dispersed resist composition for color filter |
JP5298653B2 (en) * | 2007-07-06 | 2013-09-25 | Jsr株式会社 | Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element |
WO2009047949A1 (en) * | 2007-10-09 | 2009-04-16 | Showa Highpolymer Co., Ltd. | Photosensitive graft polymer, and photosensitive resin composition comprising the same |
JP5109903B2 (en) * | 2007-10-19 | 2012-12-26 | Jsr株式会社 | Radiation-sensitive composition for forming colored layer, color filter, and liquid crystal display device |
CN102875745B (en) | 2011-07-14 | 2014-07-09 | 京东方科技集团股份有限公司 | Alkali soluble resin, photosensitive resin composition containing it and application thereof |
CN102402119B (en) * | 2011-11-15 | 2013-06-26 | 东南大学 | Positive photoresist composition and preparation method thereof |
JP6377898B2 (en) * | 2013-10-23 | 2018-08-22 | 株式会社日本触媒 | Resin composition for color filter |
JP7216522B2 (en) * | 2017-11-16 | 2023-02-01 | 住友化学株式会社 | Blue curable resin composition, blue color filter and display device containing the same |
JP7203573B2 (en) * | 2017-11-16 | 2023-01-13 | 住友化学株式会社 | Blue curable resin composition, blue color filter and display device containing the same |
CN112210035A (en) * | 2020-10-27 | 2021-01-12 | 江苏准信自动化科技股份有限公司 | Photosensitive resin for color photoresist and preparation method thereof |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3922757B2 (en) | 1997-04-24 | 2007-05-30 | 三菱化学株式会社 | Resist composition for color filter |
JP3867177B2 (en) | 1997-04-30 | 2007-01-10 | Jsr株式会社 | Radiation sensitive composition for color filter |
JP2000155209A (en) * | 1998-11-20 | 2000-06-06 | Jsr Corp | Radiation sensitive composition for color filter |
JP3940535B2 (en) | 1998-11-30 | 2007-07-04 | Jsr株式会社 | Radiation sensitive composition for black resist |
JP2001031900A (en) * | 1999-05-20 | 2001-02-06 | Hitachi Maxell Ltd | Dispersion composition and its production |
JP3726556B2 (en) | 1999-05-24 | 2005-12-14 | Jsr株式会社 | Preparation method of radiation sensitive composition for color filter |
JP4805467B2 (en) * | 2001-03-15 | 2011-11-02 | 日本ペイント株式会社 | Ground treatment agent |
JP2002365795A (en) | 2001-06-06 | 2002-12-18 | Jsr Corp | Radiation sensitive composition for color liquid crystal display |
US7371783B2 (en) * | 2001-09-25 | 2008-05-13 | Nippon Shokubai Co., Ltd. | Alkali-soluble maleimide copolymer and liquid crystal display comprising the same |
JP4094857B2 (en) * | 2002-01-30 | 2008-06-04 | 日本ペイント株式会社 | Method for forming coating film using cationic electrodeposition coating composition for intermediate coating |
JP4428911B2 (en) * | 2002-07-05 | 2010-03-10 | Jsr株式会社 | Radiation sensitive composition for color filter, color filter and color liquid crystal display element |
-
2005
- 2005-01-25 JP JP2005016799A patent/JP2005316388A/en not_active Withdrawn
- 2005-03-29 TW TW094109806A patent/TWI358611B/en not_active IP Right Cessation
- 2005-03-29 KR KR1020050025907A patent/KR100887096B1/en active IP Right Grant
- 2005-03-29 SG SG200501868A patent/SG115803A1/en unknown
- 2005-03-30 CN CNB2005100627042A patent/CN100376905C/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101408422B1 (en) * | 2007-01-22 | 2014-06-17 | 제이에스알 가부시끼가이샤 | Sensitive radiation-sensitive resin composition and color filter |
KR101424509B1 (en) * | 2007-05-22 | 2014-07-31 | 주식회사 동진쎄미켐 | Organic protective film composition |
KR101301160B1 (en) * | 2008-09-30 | 2013-09-03 | 후지필름 가부시키가이샤 | Colored curable composition, color filter and method for production thereof, and solid imaging element |
KR20200137989A (en) * | 2019-05-29 | 2020-12-09 | 사카타 인쿠스 가부시키가이샤 | Pigment dispersion composition for color filter and pigment dispersion resist composition for color filter |
Also Published As
Publication number | Publication date |
---|---|
KR100887096B1 (en) | 2009-03-04 |
TWI358611B (en) | 2012-02-21 |
JP2005316388A (en) | 2005-11-10 |
CN100376905C (en) | 2008-03-26 |
CN1677138A (en) | 2005-10-05 |
SG115803A1 (en) | 2005-10-28 |
TW200540566A (en) | 2005-12-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100887096B1 (en) | Radiation Sensitive Compositions for Color Filters, Color Filters and Color Liquid Crystal Display Devices | |
KR100869214B1 (en) | Radiosensitive Composition for Color Filter, Color Filter, Color Liquid Crystal Display Device and Process for Forming Colored Layer for Color Filter | |
JP4561101B2 (en) | Radiation sensitive composition for color filter and color filter | |
KR100807494B1 (en) | Radiation sensitive compositions for forming colored layers, color filters and color liquid crystal display panel | |
KR19990063073A (en) | Radiation-sensitive composition | |
JP4998735B2 (en) | Radiation sensitive composition, color filter, black matrix, and liquid crystal display device | |
KR100870325B1 (en) | Radiation sensitive composition for forming a colored layer, color filter and color liquid crystal display panel | |
JP2006010793A (en) | Radiation sensitive composition for forming colored layer and color filter | |
KR100850170B1 (en) | Radiation-sensitive composition, color filter, and color liquid crystal display panel for forming a colored layer | |
KR20060047458A (en) | Radiation sensitive composition for forming a colored layer, color filter and liquid crystal display panel | |
KR101134278B1 (en) | Radiation sensitive composition and method for the preparation of the same | |
JP3807108B2 (en) | Radiation sensitive composition for color filter | |
JP2006047686A (en) | Radiation-sensitive composition for color filter, its preparation method, color filter and color liquid crystal display | |
JP3900078B2 (en) | Radiation sensitive composition for color filter, color filter, and color liquid crystal display device | |
KR101442255B1 (en) | Radiation-sensitive composition for forming colored layer | |
KR20070079007A (en) | Radiation sensitive composition, color filter and liquid crystal display device | |
KR20090003125A (en) | Radiation sensitive composition, color filter and solid-state image sensor for forming color filter for solid-state image sensor | |
KR100839745B1 (en) | Radiation-sensitive composition, color filter, and color liquid crystal display device for color filter | |
JP2006030674A (en) | Radiation sensitive composition for color filter, method for preparing the same, color filter and color liquid crystal display | |
KR101066504B1 (en) | Photosensitive resin composition | |
KR100907594B1 (en) | Radiation-sensitive composition for color filters, formation method of a colored layer, a color filter, and a color liquid crystal display device | |
JP4081967B2 (en) | Radiation sensitive composition for color filter and color filter | |
JP5080715B2 (en) | Radiation sensitive composition for color filter, color filter, and color liquid crystal display device | |
JP2003004929A (en) | Radiation sensitive composition for color filter, pixel for color filter and color liquid crystal display device | |
KR20010029663A (en) | Radiosensitive Compositions for Color Filter and Color Filters |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20050329 |
|
PG1501 | Laying open of application | ||
A201 | Request for examination | ||
PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20070306 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 20050329 Comment text: Patent Application |
|
E902 | Notification of reason for refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20080227 Patent event code: PE09021S01D |
|
AMND | Amendment | ||
E601 | Decision to refuse application | ||
PE0601 | Decision on rejection of patent |
Patent event date: 20080826 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 20080227 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |
|
J201 | Request for trial against refusal decision | ||
PJ0201 | Trial against decision of rejection |
Patent event date: 20080926 Comment text: Request for Trial against Decision on Refusal Patent event code: PJ02012R01D Patent event date: 20080826 Comment text: Decision to Refuse Application Patent event code: PJ02011S01I Appeal kind category: Appeal against decision to decline refusal Decision date: 20090205 Appeal identifier: 2008101009895 Request date: 20080926 |
|
AMND | Amendment | ||
PB0901 | Examination by re-examination before a trial |
Comment text: Amendment to Specification, etc. Patent event date: 20081027 Patent event code: PB09011R02I Comment text: Request for Trial against Decision on Refusal Patent event date: 20080926 Patent event code: PB09011R01I Comment text: Amendment to Specification, etc. Patent event date: 20080428 Patent event code: PB09011R02I |
|
E90F | Notification of reason for final refusal | ||
PE0902 | Notice of grounds for rejection |
Comment text: Final Notice of Reason for Refusal Patent event date: 20081124 Patent event code: PE09021S02D |
|
B701 | Decision to grant | ||
PB0701 | Decision of registration after re-examination before a trial |
Patent event date: 20090205 Comment text: Decision to Grant Registration Patent event code: PB07012S01D Patent event date: 20081103 Comment text: Transfer of Trial File for Re-examination before a Trial Patent event code: PB07011S01I |
|
GRNT | Written decision to grant | ||
PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20090226 Patent event code: PR07011E01D |
|
PR1002 | Payment of registration fee |
Payment date: 20090226 End annual number: 3 Start annual number: 1 |
|
PG1601 | Publication of registration | ||
PR1001 | Payment of annual fee |
Payment date: 20120217 Start annual number: 4 End annual number: 4 |
|
FPAY | Annual fee payment |
Payment date: 20130215 Year of fee payment: 5 |
|
PR1001 | Payment of annual fee |
Payment date: 20130215 Start annual number: 5 End annual number: 5 |
|
FPAY | Annual fee payment |
Payment date: 20140214 Year of fee payment: 6 |
|
PR1001 | Payment of annual fee |
Payment date: 20140214 Start annual number: 6 End annual number: 6 |
|
FPAY | Annual fee payment |
Payment date: 20150217 Year of fee payment: 7 |
|
PR1001 | Payment of annual fee |
Payment date: 20150217 Start annual number: 7 End annual number: 7 |
|
FPAY | Annual fee payment |
Payment date: 20160222 Year of fee payment: 8 |
|
PR1001 | Payment of annual fee |
Payment date: 20160222 Start annual number: 8 End annual number: 8 |
|
FPAY | Annual fee payment |
Payment date: 20170217 Year of fee payment: 9 |
|
PR1001 | Payment of annual fee |
Payment date: 20170217 Start annual number: 9 End annual number: 9 |
|
FPAY | Annual fee payment |
Payment date: 20180219 Year of fee payment: 10 |
|
PR1001 | Payment of annual fee |
Payment date: 20180219 Start annual number: 10 End annual number: 10 |
|
PC1903 | Unpaid annual fee |
Termination category: Default of registration fee Termination date: 20231209 |