KR20070079007A - Radiation sensitive composition, color filter and liquid crystal display device - Google Patents
Radiation sensitive composition, color filter and liquid crystal display device Download PDFInfo
- Publication number
- KR20070079007A KR20070079007A KR1020070009279A KR20070009279A KR20070079007A KR 20070079007 A KR20070079007 A KR 20070079007A KR 1020070009279 A KR1020070009279 A KR 1020070009279A KR 20070009279 A KR20070009279 A KR 20070009279A KR 20070079007 A KR20070079007 A KR 20070079007A
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- KR
- South Korea
- Prior art keywords
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- meth
- acid
- pigment
- compound
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims abstract description 86
- 230000005855 radiation Effects 0.000 title claims abstract description 52
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 16
- -1 2-methylbenzoyl Chemical group 0.000 claims abstract description 89
- 239000000178 monomer Substances 0.000 claims abstract description 41
- 150000001875 compounds Chemical class 0.000 claims abstract description 31
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 229920005989 resin Polymers 0.000 claims abstract description 27
- 239000011347 resin Substances 0.000 claims abstract description 27
- 239000003086 colorant Substances 0.000 claims abstract description 15
- 239000012965 benzophenone Substances 0.000 claims abstract description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 42
- 125000004432 carbon atom Chemical group C* 0.000 claims description 15
- 125000006165 cyclic alkyl group Chemical group 0.000 claims description 13
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 125000001424 substituent group Chemical group 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 125000003545 alkoxy group Chemical group 0.000 claims description 5
- 125000004122 cyclic group Chemical group 0.000 claims description 5
- 125000005843 halogen group Chemical group 0.000 claims description 5
- 230000007547 defect Effects 0.000 abstract description 9
- CDSULTPOCMWJCM-UHFFFAOYSA-N 4h-chromene-2,3-dione Chemical compound C1=CC=C2OC(=O)C(=O)CC2=C1 CDSULTPOCMWJCM-UHFFFAOYSA-N 0.000 abstract description 2
- 229940126062 Compound A Drugs 0.000 abstract 1
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 abstract 1
- 150000002923 oximes Chemical class 0.000 abstract 1
- 239000000049 pigment Substances 0.000 description 189
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 61
- 239000000758 substrate Substances 0.000 description 43
- 150000003254 radicals Chemical class 0.000 description 36
- 229920001577 copolymer Polymers 0.000 description 32
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 27
- 239000000852 hydrogen donor Substances 0.000 description 27
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 26
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 21
- 239000007788 liquid Substances 0.000 description 19
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 18
- 239000010408 film Substances 0.000 description 18
- 239000002904 solvent Substances 0.000 description 17
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 17
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 16
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- 239000011159 matrix material Substances 0.000 description 14
- 238000000576 coating method Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 11
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 10
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 10
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 10
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 10
- 229940022663 acetate Drugs 0.000 description 10
- 239000002253 acid Substances 0.000 description 10
- 239000003795 chemical substances by application Substances 0.000 description 10
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- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 9
- 229920000642 polymer Polymers 0.000 description 9
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- 238000011109 contamination Methods 0.000 description 8
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 8
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 8
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 8
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 8
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 8
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 8
- 229920002223 polystyrene Polymers 0.000 description 8
- 239000001384 succinic acid Substances 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- 125000003277 amino group Chemical group 0.000 description 7
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 150000007524 organic acids Chemical class 0.000 description 7
- 150000004027 organic amino compounds Chemical class 0.000 description 7
- 125000003396 thiol group Chemical group [H]S* 0.000 description 7
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical class NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 6
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 6
- 125000000623 heterocyclic group Chemical group 0.000 description 6
- 239000012860 organic pigment Substances 0.000 description 6
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000004094 surface-active agent Substances 0.000 description 6
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 5
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 5
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 5
- 239000002202 Polyethylene glycol Substances 0.000 description 5
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 5
- 239000000654 additive Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- LJUJMKJGPIXNAK-UHFFFAOYSA-N ethyl 4-[2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-bis(4-ethoxycarbonylphenyl)imidazol-2-yl]-5-(4-ethoxycarbonylphenyl)imidazol-4-yl]benzoate Chemical compound C1=CC(C(=O)OCC)=CC=C1C1=NC(N2C(=C(N=C2C=2C(=CC=CC=2)Cl)C=2C=CC(=CC=2)C(=O)OCC)C=2C=CC(=CC=2)C(=O)OCC)(C=2C(=CC=CC=2)Cl)N=C1C1=CC=C(C(=O)OCC)C=C1 LJUJMKJGPIXNAK-UHFFFAOYSA-N 0.000 description 5
- 229920001223 polyethylene glycol Polymers 0.000 description 5
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 5
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 5
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 4
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 4
- PLIKAWJENQZMHA-UHFFFAOYSA-N 4-aminophenol Chemical compound NC1=CC=C(O)C=C1 PLIKAWJENQZMHA-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 4
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 4
- XUPYJHCZDLZNFP-UHFFFAOYSA-N butyl butanoate Chemical compound CCCCOC(=O)CCC XUPYJHCZDLZNFP-UHFFFAOYSA-N 0.000 description 4
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
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- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000005227 gel permeation chromatography Methods 0.000 description 4
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 4
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 4
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 4
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- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 4
- 125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 4
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- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 3
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 3
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- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 235000013799 ultramarine blue Nutrition 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- QFKMMXYLAPZKIB-UHFFFAOYSA-N undecan-1-amine Chemical compound CCCCCCCCCCCN QFKMMXYLAPZKIB-UHFFFAOYSA-N 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229940005605 valeric acid Drugs 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Abstract
(A) 착색제, (B) 알칼리 가용성 수지, (C) 다관능성 단량체, 및 (D) 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-아세테이트와 같은 옥심과, 비이미다졸 화합물, 벤조페논 화합물, 티오크산톤 화합물 및 케토쿠마린 화합물로 이루어지는 군에서 선택되는 1종 이상의 성분을 포함하는 광 라디칼 발생제를 함유하고, 또한 착색층 형성에 이용되는 감방사선성 조성물. 이 조성물은 저노광량 및 가혹한 현상 조건하에서도 패턴 단부의 결손 및 언더 컷트가 생기지 않고, 또한 현상시에 미용해물이 잔존하거나 패턴 단부에 스컴이 생기지 않는 화소 및 블랙 매트릭스를 제공한다. (A) colorant, (B) alkali-soluble resin, (C) polyfunctional monomer, and (D) 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl An optical radical comprising an oxime such as] -ethane-1-one oxime-O-acetate and at least one component selected from the group consisting of a biimidazole compound, a benzophenone compound, a thioxanthone compound and a ketocoumarin compound A radiation sensitive composition containing a generator and used for forming a colored layer. The composition provides pixels and black matrices in which no defects and undercuts of the pattern ends are generated under low exposure and harsh developing conditions, and no undissolved matter remains or scum does not occur at the pattern ends during development.
Description
[문헌 1] 일본 특허 공개 (평)2-144502호 공보[Document 1] Japanese Unexamined Patent Publication No. 2-144502
[문헌 2] 일본 특허 공개 (평)3-53201호 공보 [Document 2] Japanese Unexamined Patent Publication No. 3-53201
본 발명은 감방사선성 조성물, 컬러 필터 및 액정 표시 소자에 관한 것이다. 보다 상세하게는, 투과형 또는 반사형 컬러 액정 표시 장치, 컬러 촬상관 소자 등에 이용되는 컬러 필터에 유용한 착색층의 형성에 이용되는 감방사선성 조성물, 해당 감방사선성 조성물로 형성된 착색층을 갖는 컬러 필터, 및 해당 컬러 필터를 구비하는 액정 표시 소자에 관한 것이다. TECHNICAL FIELD This invention relates to a radiation sensitive composition, a color filter, and a liquid crystal display element. More specifically, the radiation sensitive composition used for formation of the colored layer useful for the color filter used for a transmissive or reflective color liquid crystal display device, a color image tube element, etc., the color filter which has the colored layer formed from this radiation sensitive composition, And a liquid crystal display device having the color filter.
종래, 착색 감방사선성 조성물을 이용하여 컬러 필터를 제조함에 있어서는, 기판 상 또는 미리 원하는 패턴의 차광층을 형성한 기판 상에 착색 감방사선성 조성물을 도포하여 건조한 후, 건조 도막을 원하는 패턴 형상으로 방사선을 조사(이하, "노광"이라 함)하고 현상함으로써 각 색의 화소를 얻는 방법(일본 특허 공개 (평)2-144502호 공보 및 일본 특허 공개 (평)3-53201호 공보 참조)이 알려져 있다.Conventionally, in manufacturing a color filter using a colored radiation-sensitive composition, after applying a colored radiation-sensitive composition on a substrate or on a substrate on which a light shielding layer having a desired pattern is formed in advance, the dried coating film is formed into a desired pattern shape. A method of obtaining pixels of each color by irradiating radiation (hereinafter referred to as "exposure") and developing it is known (see Japanese Patent Laid-Open No. Hei 2-144502 and Japanese Patent Laid-Open No. Hei 3-53201). have.
그리고, 최근의 컬러 필터 기술 분야에서는 노광량을 저하시키거나, 현상 공정에서의 기판 반송 속도를 빠르게 함으로써 택트 타임을 단축하는 움직임이 주류로 되어 있다. 그러나, 노광량의 저하나 기판 반송 속도 상승에 의해 현상 조건이 가혹해지기 때문에, 종래의 착색 감방사선성 조성물에서는 현상시에 패턴 단부의 결손이나 언더 컷트가 발생하기 쉬워, 택트 타임을 단축하면서 양호한 패턴 형상의 화소 및 블랙 매트릭스를 얻는 것이 곤란하였다. In recent years, in the field of color filter technology, the movement of shortening the tact time by reducing the exposure amount or increasing the substrate conveyance speed in the developing step has become the mainstream. However, since the development conditions become severe due to a decrease in the exposure dose or an increase in the substrate conveyance speed, in the conventional colored radiation-sensitive composition, defects and undercuts of the pattern ends are likely to occur at the time of development, and a good pattern is shortened while the tact time is shortened. It was difficult to obtain shaped pixels and black matrices.
본 발명의 목적은 첫째로, 우수한 현상성을 나타내는 감방사선성 조성물, 보다 구체적으로는, 저노광량 및 가혹한 현상 조건하에서도 패턴 단부의 결손 및 언더 컷트가 발생하지 않고, 또한 현상시에 미용해물이 잔존하거나 패턴 단부에 스컴이 발생하지 않는 화소 및 블랙 매트릭스를 제공하는 감방사선성 조성물을 제공하는 데에 있다. The object of the present invention is firstly, a radiation sensitive composition exhibiting excellent developability, more specifically, no defects and undercuts at the end of the pattern do not occur even under low exposure amounts and harsh development conditions, and furthermore, SUMMARY OF THE INVENTION An object of the present invention is to provide a radiation-sensitive composition that provides a pixel and a black matrix that remain or do not generate scum at the end of the pattern.
본 발명의 다른 목적은 본 발명의 감방사선성 조성물로 형성된 착색층을 갖는 컬러 필터를 제공하는 데에 있다. Another object of the present invention is to provide a color filter having a colored layer formed of the radiation-sensitive composition of the present invention.
본 발명의 또 다른 목적은 본 발명의 컬러 필터를 구비한 액정 표시 소자를 제공하는 데에 있다. Another object of the present invention is to provide a liquid crystal display device having the color filter of the present invention.
본 발명의 또 다른 목적 및 이점은 이하의 설명으로부터 명백해질 것이다.Still other objects and advantages of the present invention will become apparent from the following description.
본 발명에 따르면, 본 발명의 상기 목적 및 이점은 첫째로, According to the present invention, the above objects and advantages of the present invention are, firstly,
(A) 착색제, (B) 알칼리 가용성 수지, (C) 다관능성 단량체, 및 (D) 하기 화 학식 1로 표시되는 화합물 및 하기 화학식 2로 표시되는 화합물로 이루어지는 군에서 선택되는 1종 이상의 성분과, 비이미다졸 화합물, 벤조페논 화합물, 티오크산톤 화합물 및 케토쿠마린 화합물로 이루어지는 군에서 선택되는 1종 이상의 성분을 포함하는 광 라디칼 발생제를 함유하고, 또한 착색층 형성에 이용되는 것을 특징으로 하는 감방사선성 조성물에 의해 달성된다. (A) a colorant, (B) alkali-soluble resin, (C) polyfunctional monomer, and (D) at least one component selected from the group consisting of a compound represented by the following formula (1) and a compound represented by the following formula (2); And an optical radical generator comprising at least one component selected from the group consisting of a biimidazole compound, a benzophenone compound, a thioxanthone compound and a ketocoumarin compound, and is used for forming a colored layer. It is achieved by a radiation sensitive composition.
화학식 1 및 화학식 2에서, 각 R1은 서로 독립적으로 탄소수 1 내지 12의 직쇄상, 분지상 또는 환상 알킬기 또는 페닐기를 나타내고, 각 R2는 서로 독립적으로 수소 원자, 탄소수 1 내지 12의 직쇄상, 분지상 또는 환상 알킬기 또는 페닐기를 나타내고, 각 R3은 서로 독립적으로 수소 원자 또는 탄소수 1 내지 12의 직쇄상, 분 지상 또는 환상 알킬기를 나타내고, 각 R4, 각 R5 및 각 R6은 서로 독립적으로 수소 원자 또는 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상 알킬기를 나타내되, 단, R1, R2, R3, R4, R5 및 R6의 알킬기는 각각, 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상 알콕실기, 페닐기 및 할로겐 원자의 군에서 선택되는 치환기로 치환될 수 있고, R1 및 R2의 페닐기는 각각 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상 알킬기, 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상 알콕실기, 페닐기 및 할로겐 원자의 군에서 선택되는 치환기로 치환될 수 있다.In formula (1) and formula (2), each R 1 independently of each other represents a straight chain, branched or cyclic alkyl group having 1 to 12 carbon atoms or a phenyl group, and each R 2 independently represents a hydrogen atom, a straight chain having 1 to 12 carbon atoms, Represents a branched or cyclic alkyl group or a phenyl group, each R 3 independently of one another represents a hydrogen atom or a straight, branched or cyclic alkyl group of 1 to 12 carbon atoms, and each R 4 , each R 5 and each R 6 is independent of each other; To a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, provided that the alkyl groups of R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are each of 1 to 6 carbon atoms. It may be substituted with a substituent selected from the group of a linear, branched or cyclic alkoxyl group, a phenyl group and a halogen atom, the phenyl group of R 1 and R 2 are each a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, carbon number 1 to 6 looms It may be substituted with a substituent selected from the group of chain, branched or cyclic alkoxyl groups, phenyl groups and halogen atoms.
본 발명에서 말하는 "착색층"이란 컬러 필터에 이용되는 화소 및/또는 블랙 매트릭스를 포함하는 층을 의미한다. As used herein, the term "colored layer" means a layer containing a pixel and / or a black matrix used in a color filter.
본 발명에 따르면, 본 발명의 상기 목적 및 이점은 둘째로, According to the present invention, the above objects and advantages of the present invention are second,
본 발명의 감방사선성 조성물로 형성된 착색층을 갖는 컬러 필터에 의해 달성된다. It is achieved by a color filter having a colored layer formed of the radiation sensitive composition of the present invention.
본 발명에 따르면, 본 발명의 상기 목적 및 이점은 세째로, According to the present invention, the above objects and advantages of the present invention are third,
본 발명의 컬러 필터를 구비하는 액정 표시 소자에 의해 달성된다. It is achieved by the liquid crystal display element provided with the color filter of this invention.
이하, 본 발명에 대하여 상세히 설명한다. EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail.
감방사선성 조성물Radiation-sensitive composition
-(A) 착색제--(A) colorant-
본 발명에서의 착색제는 색조가 특별히 한정되는 것은 아니며, 얻어지는 컬러 필터의 용도에 따라 적절하게 선정되며, 안료, 염료 또는 천연 색소 중 어느 하 나일 수 있다. The colorant in the present invention is not particularly limited in color tone, is appropriately selected depending on the use of the color filter obtained, and may be any of pigments, dyes or natural dyes.
컬러 필터에는 고정밀한 발색과 내열성이 요구되기 때문에, 본 발명에서의 착색제로는 발색성이 높으면서 내열성이 높은 착색제, 특히 내열분해성이 높은 착색제가 바람직하고, 통상적으로 안료가 이용되며, 특히 바람직하게는 유기 안료, 카본 블랙이 이용된다. Since the color filter requires high color development and heat resistance, as the colorant in the present invention, a colorant having high color resistance and high heat resistance, particularly a colorant having high thermal decomposition resistance, is preferably used, and pigments are usually used, particularly preferably organic. Pigments, carbon blacks are used.
상기 유기 안료로는, 예를 들면 컬러 인덱스(C.I.; The Society of Dyers and Colourists사 발행)에서 피그먼트(Pigment)로 분류되어 있는 화합물, 구체적으로는 하기와 같은 컬러 인덱스(C.I.) 번호가 부여되어 있는 것을 들 수 있다. As the organic pigment, for example, a compound which is classified as Pigment in the color index (CI; issued by The Society of Dyers and Colourists), and specifically, the following color index (CI) number is given. I can hear that.
C.I. 피그먼트 옐로우 1, C.I. 피그먼트 옐로우 3, C.I. 피그먼트 옐로우 12, C.I. 피그먼트 옐로우 13, C.I. 피그먼트 옐로우 14, C.I. 피그먼트 옐로우 15, C.I. 피그먼트 옐로우 16, C.I. 피그먼트 옐로우 17, C.I. 피그먼트 옐로우 20, C.I. 피그먼트 옐로우 24, C.I. 피그먼트 옐로우 31, C.I. 피그먼트 옐로우55, C.I. 피그먼트 옐로우 60, C.I. 피그먼트 옐로우 61, C.I. 피그먼트 옐로우 65, C.I. 피그먼트 옐로우 71, C.I. 피그먼트 옐로우 73, C.I. 피그먼트 옐로우 74, C.I. 피그먼트 옐로우 81, C.I. 피그먼트 옐로우 83, C.I. 피그먼트 옐로우 93, C.I. 피그먼트 옐로우 95, C.I. 피그먼트 옐로우 97, C.I. 피그먼트 옐로우 98, C.I. 피그먼트 옐로우 100, C.I. 피그먼트 옐로우 101, C.I. 피그먼트 옐로우 104, C.I. 피그먼트 옐로우 106, C.I. 피그먼트 옐로우 108, C.I. 피그먼트 옐로우 109, C.I. 피그먼트 옐로우 110, C.I. 피그먼트 옐로우 113, C.I. 피그먼트 옐로우 114, C.I. 피그먼트 옐로우 116, C.I. 피그먼트 옐로우 117, C.I. 피그먼트 옐로우 119, C.I. 피그먼트 옐로우 120, C.I. 피그먼트 옐로우 126, C.I. 피그먼트 옐로우 127, C.I. 피그먼트 옐로우 128, C.I. 피그먼트 옐로우 129, C.I. 피그먼트 옐로우 138, C.I. 피그먼트 옐로우 139, C.I. 피그먼트 옐로우 150, C.I. 피그먼트 옐로우 151, C.I. 피그먼트 옐로우 152, C.I. 피그먼트 옐로우 153, C.I. 피그먼트 옐로우 154, C.I. 피그먼트 옐로우 155, C.I. 피그먼트 옐로우 156, C.I. 피그먼트 옐로우 166, C.I. 피그먼트 옐로우 168, C.I. 피그먼트 옐로우 175, C.I. 피그먼트 옐로우 180, C.I. 피그먼트 옐로우 185,C.I. Pigment Yellow 1, C.I. Pigment Yellow 3, C.I. Pigment Yellow 12, C.I. Pigment Yellow 13, C.I. Pigment Yellow 14, C.I. Pigment Yellow 15, C.I. Pigment Yellow 16, C.I. Pigment Yellow 17, C.I. Pigment Yellow 20, C.I. Pigment Yellow 24, C.I. Pigment Yellow 31, C.I. Pigment Yellow 55, C.I. Pigment Yellow 60, C.I. Pigment Yellow 61, C.I. Pigment Yellow 65, C.I. Pigment Yellow 71, C.I. Pigment Yellow 73, C.I. Pigment Yellow 74, C.I. Pigment Yellow 81, C.I. Pigment Yellow 83, C.I. Pigment Yellow 93, C.I. Pigment Yellow 95, C.I. Pigment Yellow 97, C.I. Pigment Yellow 98, C.I. Pigment Yellow 100, C.I. Pigment Yellow 101, C.I. Pigment Yellow 104, C.I. Pigment Yellow 106, C.I. Pigment Yellow 108, C.I. Pigment Yellow 109, C.I. Pigment Yellow 110, C.I. Pigment Yellow 113, C.I. Pigment Yellow 114, C.I. Pigment Yellow 116, C.I. Pigment Yellow 117, C.I. Pigment Yellow 119, C.I. Pigment Yellow 120, C.I. Pigment Yellow 126, C.I. Pigment Yellow 127, C.I. Pigment Yellow 128, C.I. Pigment Yellow 129, C.I. Pigment Yellow 138, C.I. Pigment Yellow 139, C.I. Pigment Yellow 150, C.I. Pigment Yellow 151, C.I. Pigment Yellow 152, C.I. Pigment Yellow 153, C.I. Pigment Yellow 154, C.I. Pigment Yellow 155, C.I. Pigment Yellow 156, C.I. Pigment Yellow 166, C.I. Pigment Yellow 168, C.I. Pigment Yellow 175, C.I. Pigment Yellow 180, C.I. Pigment Yellow 185,
C.I. 피그먼트 오렌지 1, C.I. 피그먼트 오렌지 5, C.I. 피그먼트 오렌지 13, C.I. 피그먼트 오렌지 14, C.I. 피그먼트 오렌지 16, C.I. 피그먼트 오렌지 17, C.I. 피그먼트 오렌지 24, C.I. 피그먼트 오렌지 34, C.I. 피그먼트 오렌지 36, C.I. 피그먼트 오렌지 38, C.I. 피그먼트 오렌지 40, C.I. 피그먼트 오렌지 43, C.I. 피그먼트 오렌지 46, C.I. 피그먼트 오렌지 49, C.I. 피그먼트 오렌지 51, C.I. 피그먼트 오렌지 61, C.I. 피그먼트 오렌지 63, C.I. 피그먼트 오렌지 64, C.I. 피그먼트 오렌지 71, C.I. 피그먼트 오렌지 73, C.I. Pigment Orange 1, C.I. Pigment Orange 5, C.I. Pigment Orange 13, C.I. Pigment Orange 14, C.I. Pigment Orange 16, C.I. Pigment Orange 17, C.I. Pigment Orange 24, C.I. Pigment Orange 34, C.I. Pigment Orange 36, C.I. Pigment Orange 38, C.I. Pigment Orange 40, C.I. Pigment Orange 43, C.I. Pigment Orange 46, C.I. Pigment Orange 49, C.I. Pigment Orange 51, C.I. Pigment Orange 61, C.I. Pigment Orange 63, C.I. Pigment Orange 64, C.I. Pigment Orange 71, C.I. Pigment orange 73,
C.I. 피그먼트 바이올렛 1, C.I. 피그먼트 바이올렛 19, C.I. 피그먼트 바이올렛 23, C.I. 피그먼트 바이올렛 29, C.I. 피그먼트 바이올렛 32, C.I. 피그먼트 바이올렛 36, C.I. 피그먼트 바이올렛 38, C.I. Pigment Violet 1, C.I. Pigment Violet 19, C.I. Pigment Violet 23, C.I. Pigment Violet 29, C.I. Pigment violet 32, C.I. Pigment Violet 36, C.I. Pigment violet 38,
C.I. 피그먼트 레드 1, C.I. 피그먼트 레드 2, C.I. 피그먼트 레드 3, C.I. 피그먼트 레드 4, C.I. 피그먼트 레드 5, C.I. 피그먼트 레드 6, C.I. 피그먼트 레드 7, C.I. 피그먼트 레드 8, C.I. 피그먼트 레드 9, C.I. 피그먼트 레드 10, C.I. 피그먼트 레드 11, C.I. 피그먼트 레드 12, C.I. 피그먼트 레드 14, C.I. 피그먼트 레드 15, C.I. 피그먼트 레드 16, C.I. 피그먼트 레드 17, C.I. 피그먼트 레드 18, C.I. 피그먼트 레드 19, C.I. 피그먼트 레드 21, C.I. 피그먼트 레드 22, C.I. 피그먼트 레드 23, C.I. 피그먼트 레드 30, C.I. 피그먼트 레드 31, C.I. 피그먼트 레드 32, C.I. 피그먼트 레드 37, C.I. 피그먼트 레드 38, C.I. 피그먼트 레드 40, C.I. 피그먼트 레드 41, C.I. 피그먼트 레드 42, C.I. 피그먼트 레드 48:1, C.I. 피그먼트 레드 48:2, C.I. 피그먼트 레드 48:3, C.I. 피그먼트 레드 48:4, C.I. 피그먼트 레드 49:1, C.I. 피그먼트 레드 49:2, C.I. 피그먼트 레드 50:1, C.I. 피그먼트 레드 52:1, C.I. 피그먼트 레드 53:1, C.I. 피그먼트 레드 57, C.I. 피그먼트 레드 57:1, C.I. 피그먼트 레드 57:2, C.I. 피그먼트 레드 58:2, C.I. 피그먼트 레드 58:4, C.I. 피그먼트 레드 60:1, C.I. 피그먼트 레드 63:1, C.I. 피그먼트 레드 63:2, C.I. 피그먼트 레드 64:1, C.I. 피그먼트 레드 81:1, C.I. 피그먼트 레드 83, C.I. 피그먼트 레드 88, C.I. 피그먼트 레드 90:1, C.I. 피그먼트 레드 97, C.I. Pigment Red 1, C.I. Pigment Red 2, C.I. Pigment Red 3, C.I. Pigment Red 4, C.I. Pigment Red 5, C.I. Pigment Red 6, C.I. Pigment Red 7, C.I. Pigment Red 8, C.I. Pigment Red 9, C.I. Pigment Red 10, C.I. Pigment Red 11, C.I. Pigment Red 12, C.I. Pigment Red 14, C.I. Pigment Red 15, C.I. Pigment Red 16, C.I. Pigment Red 17, C.I. Pigment Red 18, C.I. Pigment Red 19, C.I. Pigment Red 21, C.I. Pigment Red 22, C.I. Pigment Red 23, C.I. Pigment Red 30, C.I. Pigment Red 31, C.I. Pigment Red 32, C.I. Pigment Red 37, C.I. Pigment Red 38, C.I. Pigment Red 40, C.I. Pigment Red 41, C.I. Pigment Red 42, C.I. Pigment Red 48: 1, C.I. Pigment Red 48: 2, C.I. Pigment Red 48: 3, C.I. Pigment Red 48: 4, C.I. Pigment Red 49: 1, C.I. Pigment Red 49: 2, C.I. Pigment Red 50: 1, C.I. Pigment Red 52: 1, C.I. Pigment Red 53: 1, C.I. Pigment Red 57, C.I. Pigment Red 57: 1, C.I. Pigment Red 57: 2, C.I. Pigment Red 58: 2, C.I. Pigment Red 58: 4, C.I. Pigment Red 60: 1, C.I. Pigment Red 63: 1, C.I. Pigment Red 63: 2, C.I. Pigment Red 64: 1, C.I. Pigment Red 81: 1, C.I. Pigment Red 83, C.I. Pigment Red 88, C.I. Pigment Red 90: 1, C.I. Pigment Red 97,
C.I. 피그먼트 레드 101, C.I. 피그먼트 레드 102, C.I. 피그먼트 레드 104, C.I. 피그먼트 레드 105, C.I. 피그먼트 레드 106, C.I. 피그먼트 레드 108, C.I. 피그먼트 레드 112, C.I. 피그먼트 레드 113, C.I. 피그먼트 레드 114, C.I. 피그먼트 레드 122, C.I. 피그먼트 레드 123, C.I. 피그먼트 레드 144, C.I. 피그먼트 레드 146, C.I. 피그먼트 레드 149, C.I. 피그먼트 레드 150, C.I. 피그먼트 레드 151, C.I. 피그먼트 레드 166, C.I. 피그먼트 레드 168, C.I. 피그먼트 레드 170, C.I. 피그먼트 레드 171, C.I. 피그먼트 레드 172, C.I. 피그먼트 레드 174, C.I. 피그먼트 레드 175, C.I. 피그먼트 레드 176, C.I. 피그먼트 레드 177, C.I. 피그먼트 레드 178, C.I. 피그먼트 레드 179, C.I. 피그먼트 레드 180, C.I. 피그먼트 레드 185, C.I. 피그먼트 레드 187, C.I. 피그먼트 레드 188, C.I. 피그먼트 레드 190, C.I. 피그먼트 레드 193, C.I. 피그먼트 레드 194, C.I. 피그먼트 레드 202, C.I. 피그먼트 레드 206, C.I. 피그먼트 레드 207, C.I. 피그먼트 레드 208, C.I. 피그먼트 레드 209, C.I. 피그먼트 레드 215, C.I. 피그먼트 레드 216, C.I. 피그먼트 레드 220, C.I. 피그먼트 레드 224, C.I. 피그먼트 레드 226, C.I. 피그먼트 레드 242, C.I. 피그먼트 레드 243, C.I. 피그먼트 레드 245, C.I. 피그먼트 레드 254, C.I. 피그먼트 레드 255, C.I. 피그먼트 레드 264, C.I. 피그먼트 레드 265, C.I. Pigment Red 101, C.I. Pigment Red 102, C.I. Pigment Red 104, C.I. Pigment Red 105, C.I. Pigment Red 106, C.I. Pigment Red 108, C.I. Pigment Red 112, C.I. Pigment Red 113, C.I. Pigment Red 114, C.I. Pigment Red 122, C.I. Pigment Red 123, C.I. Pigment Red 144, C.I. Pigment Red 146, C.I. Pigment Red 149, C.I. Pigment Red 150, C.I. Pigment Red 151, C.I. Pigment Red 166, C.I. Pigment Red 168, C.I. Pigment Red 170, C.I. Pigment Red 171, C.I. Pigment Red 172, C.I. Pigment Red 174, C.I. Pigment Red 175, C.I. Pigment Red 176, C.I. Pigment Red 177, C.I. Pigment Red 178, C.I. Pigment Red 179, C.I. Pigment Red 180, C.I. Pigment Red 185, C.I. Pigment Red 187, C.I. Pigment Red 188, C.I. Pigment Red 190, C.I. Pigment Red 193, C.I. Pigment Red 194, C.I. Pigment Red 202, C.I. Pigment Red 206, C.I. Pigment Red 207, C.I. Pigment Red 208, C.I. Pigment Red 209, C.I. Pigment Red 215, C.I. Pigment Red 216, C.I. Pigment Red 220, C.I. Pigment Red 224, C.I. Pigment Red 226, C.I. Pigment Red 242, C.I. Pigment Red 243, C.I. Pigment Red 245, C.I. Pigment Red 254, C.I. Pigment Red 255, C.I. Pigment Red 264, C.I. Pigment Red 265,
C.I. 피그먼트 블루 15, C.I. 피그먼트 블루 15:3, C.I. 피그먼트 블루 15:4, C.I. 피그먼트 블루 15:6, C.I. 피그먼트 블루 60, C.I. Pigment Blue 15, C.I. Pigment Blue 15: 3, C.I. Pigment Blue 15: 4, C.I. Pigment Blue 15: 6, C.I. Pigment blue 60,
C.I. 피그먼트 그린 7, C.I. 피그먼트 그린 36, C.I. Pigment Green 7, C.I. Pigment green 36,
C.I. 피그먼트 브라운 23, C.I. 피그먼트 브라운 25,C.I. Pigment Brown 23, C.I. Pigment Brown 25,
C.I. 피그먼트 블랙 1, C.I. 피그먼트 블랙 7. C.I. Pigment Black 1, C.I. Pigment Black 7.
이들 유기 안료는, 예를 들면 황산 재결정법 및 용제 세정법이나, 이들의 조합 등에 의해 정제하여 사용할 수 있다. These organic pigments can be refine | purified by the sulfuric acid recrystallization method, the solvent washing method, these combinations, etc., for example.
또한, 무기 안료로는, 예를 들면 산화티탄, 황산바륨, 탄산칼슘, 아연화, 황산납, 황색납, 아연황, 철단(적색 산화철(III)), 카드뮴적, 군청, 감청, 산화크롬녹, 코발트녹, 엄버, 티탄 블랙, 합성 철흑, 카본 블랙 등을 들 수 있다.In addition, examples of the inorganic pigment include titanium oxide, barium sulfate, calcium carbonate, zincation, lead sulfate, yellow lead, zinc sulfur, iron group (red iron (III) oxide), cadmium, ultramarine blue, blue blue, chromium oxide, Cobalt rust, umber, titanium black, synthetic iron black, carbon black, etc. are mentioned.
본 발명에서, 상기 유기 안료 및 무기 안료는 각각 단독으로 또는 2종 이상 을 혼합하여 사용할 수 있다. 예를 들면, 또한 유기 안료와 무기 안료를 병용할 수 있다. 화소를 형성할 때에는 바람직하게는 1종 이상의 유기 안료가 사용되고, 또한 블랙 매트릭스를 형성할 때에는 바람직하게는 2종 이상의 유기 안료 및/또는 카본 블랙이 사용된다. In the present invention, the organic pigment and the inorganic pigment may be used alone or in combination of two or more. For example, an organic pigment and an inorganic pigment can also be used together. When forming a pixel, preferably at least one organic pigment is used, and when forming a black matrix, preferably at least two organic pigments and / or carbon black are used.
본 발명에서는 상기 각 안료는 필요할 경우 그의 입자 표면을 중합체로 개질하여 사용할 수 있다. 안료의 입자 표면을 개질하는 중합체로는 일본 특허 공개 (평)8-259876호 공보 등에 기재된 중합체나, 시판되는 각종 안료 분산용 중합체 또는 올리고머 등을 들 수 있다. In the present invention, each of the pigments may be used by modifying the particle surface thereof with a polymer if necessary. As a polymer which modifies the particle surface of a pigment, the polymer of Unexamined-Japanese-Patent No. 8-259876, etc., the polymer for various pigment dispersions, or oligomer, etc. which are mentioned are mentioned.
또한, 본 발명에서, 착색제는 필요할 경우 분산제와 함께 사용할 수 있다. In addition, in the present invention, the colorant may be used together with a dispersant if necessary.
상기 분산제로는, 예를 들면 양이온계, 음이온계, 비이온계, 양쪽성, 실리콘계, 불소계 등의 계면활성제를 들 수 있다. As said dispersing agent, surfactant, such as a cationic type, an anionic type, a nonionic type, amphoteric, a silicone type, and a fluorine type, is mentioned, for example.
상기 계면활성제로서는, 예를 들면 폴리옥시에틸렌 라우릴에테르, 폴리옥시에틸렌 스테아릴에테르, 폴리옥시에틸렌 올레일에테르 등의 폴리옥시에틸렌 알킬에테르; 폴리옥시에틸렌 n-옥틸페닐에테르, 폴리옥시에틸렌 n-노닐페닐에테르 등의 폴리옥시에틸렌 알킬페닐에테르; 폴리에틸렌글리콜 디라우레이트, 폴리에틸렌글리콜 디스테아레이트 등의 폴리에틸렌글리콜 디에스테르; 소르비탄 지방산 에스테르; 지방산 변성 폴리에스테르; 3급 아민 변성 폴리우레탄; 폴리에틸렌이민류 등 외에, 이하 상품명으로 KP(신에쓰 가가꾸 고교(주) 제조), 폴리플로우(교에이샤 가가꾸(주) 제조), 에프톱(토켐 프로덕츠사 제조), 메가팩(다이닛본 잉크 가가꾸 고교(주) 제조), 플로라드(스미또모 쓰리엠(주) 제조), 아사히 가드, 서프론(이상, 아사히 가라스(주) 제조), 디스퍼빅(Disperbyk)(빅케미 재팬(주) 제조), 솔스파스(제네카(주) 제조) 등을 들 수 있다. As said surfactant, For example, polyoxyethylene alkyl ether, such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether; Polyoxyethylene alkylphenyl ethers such as polyoxyethylene n-octylphenyl ether and polyoxyethylene n-nonylphenyl ether; Polyethylene glycol diesters such as polyethylene glycol dilaurate and polyethylene glycol distearate; Sorbitan fatty acid esters; Fatty acid modified polyesters; Tertiary amine modified polyurethanes; In addition to polyethyleneimines, KP (manufactured by Shin-Etsu Chemical Co., Ltd.), polyflow (manufactured by Kyoeisha Chemical Co., Ltd.), F-Top (manufactured by Tochem Products Co., Ltd.), and MegaPack (Dainitbon) Ink Kagaku Kogyo Co., Ltd.), Florad (Sumitomo 3M Co., Ltd.), Asahi Guard, Supron (above, Asahi Glass Co., Ltd.), Disperbyk (Bikkemi Japan Co., Ltd.) (Manufactured by < RTI ID = 0.0 >), < / RTI >
이들 계면활성제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These surfactant can be used individually or in mixture of 2 or more types.
계면활성제의 사용량은 착색제 100 중량부에 대하여 바람직하게는 50 중량부 이하, 보다 바람직하게는 0 내지 30 중량부이다. The amount of the surfactant to be used is preferably 50 parts by weight or less, more preferably 0 to 30 parts by weight with respect to 100 parts by weight of the colorant.
-(B) 알칼리 가용성 수지--(B) alkali-soluble resin-
본 발명에서의 알칼리 가용성 수지로는 (A) 착색제에 대하여 결합제로서 작용하면서 컬러 필터를 제조할 때에 그의 현상 처리 공정에서 이용되는 현상액, 특히 바람직하게는 알칼리 현상액에 대하여 가용성을 갖는 것이면, 특별히 한정되지 않는다. 이들 중 카르복실기를 갖는 알칼리 가용성 수지가 바람직하고, 특히, 1개 이상의 카르복실기를 갖는 에틸렌계 불포화 단량체(이하, "카르복실기 함유 불포화 단량체"라 함)와 다른 공중합 가능한 에틸렌계 불포화 단량체(이하, "공중합성 불포화 단량체"라 함)와의 공중합체(이하, "카르복실기 함유 공중합체"라 함)가 바람직하다. The alkali-soluble resin in the present invention is not particularly limited as long as the alkali-soluble resin has solubility in a developer, particularly preferably an alkali developer, used in its development treatment step when producing a color filter while acting as a binder for the (A) colorant. Do not. Of these, alkali-soluble resins having a carboxyl group are preferred, and in particular, ethylenically unsaturated monomers having one or more carboxyl groups (hereinafter referred to as "carboxyl group-containing unsaturated monomers") and other copolymerizable ethylenically unsaturated monomers (hereinafter, "copolymerizable" Preferred is a copolymer with " unsaturated monomer ") (hereinafter referred to as " carboxyl group-containing copolymer ").
카르복실기 함유 불포화 단량체로는, 예를 들면 As a carboxyl group-containing unsaturated monomer, for example
(메트)아크릴산, 크로톤산, α-클로로아크릴산, 신남산 등의 불포화 모노카르복실산, Unsaturated monocarboxylic acids such as (meth) acrylic acid, crotonic acid, α-chloroacrylic acid, cinnamic acid,
말레산, 무수 말레산, 푸마르산, 이타콘산, 무수 이타콘산, 시트라콘산, 무수 시트라콘산, 메사콘산 등의 불포화 디카르복실산 또는 그의 무수물, Unsaturated dicarboxylic acids or anhydrides thereof such as maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid,
3가 이상의 불포화 다가 카르복실산 또는 그의 무수물, Trivalent or higher unsaturated polyvalent carboxylic acid or anhydrides thereof,
숙신산 모노[2-(메트)아크릴로일옥시에틸], 프탈산 모노[2-(메트)아크릴로일옥시에틸] 등의 2가 이상의 다가 카르복실산의 모노[(메트)아크릴로일옥시알킬]에스테르, Mono [(meth) acryloyloxyalkyl] of divalent or more polyvalent carboxylic acid, such as succinic acid mono [2- (meth) acryloyloxyethyl] and phthalic acid mono [2- (meth) acryloyloxyethyl] ester,
ω-카르복시폴리카프로락톤 모노(메트)아크릴레이트 등의 양쪽 말단에 카르복실기와 수산기를 갖는 중합체의 모노(메트)아크릴레이트 등을 들 수 있다. The mono (meth) acrylate etc. of the polymer which has a carboxyl group and a hydroxyl group in both terminal, such as (omega)-carboxy polycaprolactone mono (meth) acrylate, are mentioned.
이들 카르복실기 함유 불포화 단량체 중, 숙신산 모노(2-아크릴로일옥시에틸) 및 프탈산 모노(2-아크릴로일옥시에틸)은 각각 M-5300 및 M-5400(도아 고세이(주) 제조)의 상품명으로 시판되고 있다. Among these carboxyl group-containing unsaturated monomers, succinic acid mono (2-acryloyloxyethyl) and phthalic acid mono (2-acryloyloxyethyl) are trademarks of M-5300 and M-5400 (manufactured by Toagosei Co., Ltd.), respectively. It is commercially available.
상기 카르복실기 함유 불포화 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said carboxyl group-containing unsaturated monomer can be used individually or in mixture of 2 or more types.
또한, 공중합성 불포화 단량체로는, 예를 들면As the copolymerizable unsaturated monomer, for example,
스티렌, α-메틸스티렌, o-비닐톨루엔, m-비닐톨루엔, p-비닐톨루엔, p-클로로스티렌, o-메톡시스티렌, m-메톡시스티렌, p-메톡시스티렌, o-비닐벤질메틸에테르, m-비닐벤질메틸에테르, p-비닐벤질메틸에테르, o-비닐벤질글리시딜에테르, m-비닐벤질글리시딜에테르, p-비닐벤질글리시딜에테르 등의 방향족 비닐 화합물, Styrene, α-methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, p-chlorostyrene, o-methoxystyrene, m-methoxystyrene, p-methoxystyrene, o-vinylbenzylmethyl Aromatic vinyl compounds such as ether, m-vinyl benzyl methyl ether, p-vinyl benzyl methyl ether, o-vinyl benzyl glycidyl ether, m-vinyl benzyl glycidyl ether, and p-vinyl benzyl glycidyl ether;
인덴, 1-메틸인덴 등의 인덴,Indenes such as indene and 1-methylindene,
말레이미드, N-페닐말레이미드, N-시클로헥실말레이미드 등의 불포화 이미드, Unsaturated imides such as maleimide, N-phenylmaleimide, N-cyclohexylmaleimide,
메틸(메트)아크릴레이트, 에틸(메트)아크릴레이트, n-프로필(메트)아크릴레이트, i-프로필(메트)아크릴레이트, n-부틸(메트)아크릴레이트, i-부틸(메트)아크 릴레이트, sec-부틸(메트)아크릴레이트, t-부틸(메트)아크릴레이트, 2-히드록시에틸(메트)아크릴레이트, 2-히드록시프로필(메트)아크릴레이트, 3-히드록시프로필(메트)아크릴레이트, 2-히드록시부틸(메트)아크릴레이트, 3-히드록시부틸(메트)아크릴레이트, 4-히드록시부틸(메트)아크릴레이트, 알릴(메트)아크릴레이트, 벤질(메트)아크릴레이트, 시클로헥실(메트)아크릴레이트, 페닐(메트)아크릴레이트, 2-메톡시에틸(메트)아크릴레이트, 2-페녹시에틸(메트)아크릴레이트, 메톡시디에틸렌글리콜(메트)아크릴레이트, 메톡시트리에틸렌글리콜(메트)아크릴레이트, 메톡시프로필렌글리콜(메트)아크릴레이트, 메톡시디프로필렌글리콜(메트)아크릴레이트, 이소보르닐(메트)아크릴레이트, 디시클로펜타디에닐(메트)아크릴레이트, 2-히드록시-3-페녹시프로필(메트)아크릴레이트, 글리세롤모노(메트)아크릴레이트 등의 불포화 카르복실산 에스테르, Methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, i-propyl (meth) acrylate, n-butyl (meth) acrylate, i-butyl (meth) arcrelate , sec-butyl (meth) acrylate, t-butyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylic Latex, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, allyl (meth) acrylate, benzyl (meth) acrylate, cyclo Hexyl (meth) acrylate, phenyl (meth) acrylate, 2-methoxyethyl (meth) acrylate, 2-phenoxyethyl (meth) acrylate, methoxydiethylene glycol (meth) acrylate, methoxytriethylene Glycol (meth) acrylate, methoxypropylene glycol (meth) acrylate, Toxydipropylene glycol (meth) acrylate, isobornyl (meth) acrylate, dicyclopentadienyl (meth) acrylate, 2-hydroxy-3-phenoxypropyl (meth) acrylate, glycerol mono (meth Unsaturated carboxylic esters such as acrylate,
2-아미노에틸(메트)아크릴레이트, 2-디메틸아미노에틸(메트)아크릴레이트, 2-아미노프로필(메트)아크릴레이트, 2-디메틸아미노프로필(메트)아크릴레이트, 3-아미노프로필(메트)아크릴레이트, 3-디메틸아미노프로필(메트)아크릴레이트 등의 불포화 카르복실산 아미노알킬에스테르, 2-aminoethyl (meth) acrylate, 2-dimethylaminoethyl (meth) acrylate, 2-aminopropyl (meth) acrylate, 2-dimethylaminopropyl (meth) acrylate, 3-aminopropyl (meth) acrylic Unsaturated carboxylic acid aminoalkyl esters such as acrylate and 3-dimethylaminopropyl (meth) acrylate,
글리시딜(메트)아크릴레이트 등의 불포화 카르복실산 글리시딜 에스테르, Unsaturated carboxylic acid glycidyl esters such as glycidyl (meth) acrylate,
(메트)아크릴로니트릴, α-클로로아크릴로니트릴, 시안화 비닐리덴 등의 시안화 비닐 화합물, Vinyl cyanide compounds such as (meth) acrylonitrile, α-chloroacrylonitrile, vinylidene cyanide,
(메트)아크릴아미드, α-클로로아크릴아미드, N-2-히드록시에틸(메트)아크릴아미드 등의 불포화 아미드, Unsaturated amides such as (meth) acrylamide, α-chloroacrylamide, N-2-hydroxyethyl (meth) acrylamide,
아세트산비닐, 프로피온산비닐, 부티르산비닐, 벤조산비닐 등의 카르복실산비닐 에스테르, Carboxylic acid vinyl esters, such as vinyl acetate, a vinyl propionate, a vinyl butyrate, and a vinyl benzoate,
비닐메틸에테르, 비닐에틸에테르, 알릴글리시딜에테르 등의 불포화 에테르, Unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether,
1,3-부타디엔, 이소프렌, 클로로프렌 등의 지방족 공액 디엔, Aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene,
폴리스티렌, 폴리메틸(메트)아크릴레이트, 폴리-n-부틸(메트)아크릴레이트, 폴리실록산 등의 중합체 분자쇄의 말단에 모노(메트)아크릴로일기를 갖는 거대 단량체 등을 들 수 있다. The macromonomer etc. which have a mono (meth) acryloyl group at the terminal of polymer molecular chains, such as polystyrene, polymethyl (meth) acrylate, poly-n-butyl (meth) acrylate, and polysiloxane, are mentioned.
이들 공중합성 불포화 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These copolymerizable unsaturated monomers can be used individually or in mixture of 2 or more types.
본 발명에서의 카르복실기 함유 공중합체로는, (b1) (메트)아크릴산을 필수 성분으로 하고, 경우에 따라, 숙신산 모노[2-(메트)아크릴로일옥시에틸] 및 ω-카르복시폴리카프로락톤 모노(메트)아크릴레이트의 군에서 선택되는 1종 이상의 화합물을 추가로 함유하는 카르복실기 함유 불포화 단량체 성분과, (b2) 스티렌, N-페닐말레이미드, 메틸(메트)아크릴레이트, 2-히드록시에틸(메트)아크릴레이트, 알릴(메트)아크릴레이트, 벤질(메트)아크릴레이트, 글리세롤 모노(메트)아크릴레이트, 폴리스티렌 거대 단량체 및 폴리메틸메타크릴레이트 거대 단량체의 군에서 선택되는 1종 이상의 공중합성 불포화 단량체와의 공중합체(이하, "카르복실기 함유 공중합체(B1)"라 함)가 바람직하다. As the carboxyl group-containing copolymer in the present invention, (b1) (meth) acrylic acid is an essential component, and optionally succinic acid mono [2- (meth) acryloyloxyethyl] and ω-carboxypolycaprolactone mono ( A carboxyl group-containing unsaturated monomer component which further contains 1 or more types of compounds chosen from the group of a meth) acrylate, (b2) Styrene, N-phenylmaleimide, methyl (meth) acrylate, 2-hydroxyethyl (meth ) At least one copolymerizable unsaturated monomer selected from the group consisting of acrylate, allyl (meth) acrylate, benzyl (meth) acrylate, glycerol mono (meth) acrylate, polystyrene macromonomer and polymethyl methacrylate macromonomer The copolymer of (hereinafter referred to as "carboxyl group-containing copolymer (B1)") is preferable.
카르복실기 함유 공중합체(B1)의 구체예로는, As a specific example of a carboxyl group-containing copolymer (B1),
(메트)아크릴산/메틸(메트)아크릴레이트 공중합체, (Meth) acrylic acid / methyl (meth) acrylate copolymer,
(메트)아크릴산/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / benzyl (meth) acrylate copolymers,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트 공중합체,(Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate copolymer,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/벤질(메트)아크릴레이트 공중합체,(Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate copolymer,
(메트)아크릴산/메틸(메트)아크릴레이트/폴리스티렌 거대 단량체 공중합체,(Meth) acrylic acid / methyl (meth) acrylate / polystyrene macromonomer copolymer,
(메트)아크릴산/메틸(메트)아크릴레이트/폴리메틸메타크릴레이트 거대 단량체 공중합체, (메트)아크릴산/벤질(메트)아크릴레이트/폴리스티렌 거대 단량체 공중합체,(Meth) acrylic acid / methyl (meth) acrylate / polymethylmethacrylate macromonomer copolymer, (meth) acrylic acid / benzyl (meth) acrylate / polystyrene macromonomer copolymer,
(메트)아크릴산/벤질(메트)아크릴레이트/폴리메틸(메트)아크릴레이트 거대 단량체 공중합체,(Meth) acrylic acid / benzyl (meth) acrylate / polymethyl (meth) acrylate macromonomer copolymer,
(메트)아크릴산/벤질(메트)아크릴레이트/글리세롤모노(메트)아크릴레이트 공중합체, (메트)아크릴산/스티렌/2-히드록시에틸(메트)아크릴레이트 공중합체, (메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/벤질(메트)아크릴레이트 공중합체,(Meth) acrylic acid / benzyl (meth) acrylate / glycerol mono (meth) acrylate copolymer, (meth) acrylic acid / styrene / 2-hydroxyethyl (meth) acrylate copolymer, (meth) acrylic acid / 2-hydride Oxyethyl (meth) acrylate / benzyl (meth) acrylate copolymer,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/페닐(메트)아크릴레이트 공중합체,(Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / phenyl (meth) acrylate copolymer,
(메트)아크릴산/스티렌/N-페닐말레이미드/벤질(메트)아크릴레이트 공중합체,(Meth) acrylic acid / styrene / N-phenylmaleimide / benzyl (meth) acrylate copolymer,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/벤질(메트)아크릴레이트/폴리스티렌 거대 단량체 공중합체, (Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate / polystyrene macromonomer copolymer,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/벤질(메트)아크릴레이트/폴리메틸(메트)아크릴레이트 거대 단량체 공중합체, (Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / benzyl (meth) acrylate / polymethyl (meth) acrylate macromonomer copolymer,
(메트)아크릴산/스티렌/N-페닐말레이미드/벤질(메트)아크릴레이트/글리세롤 모노(메트)아크릴레이트 공중합체, (Meth) acrylic acid / styrene / N-phenylmaleimide / benzyl (meth) acrylate / glycerol mono (meth) acrylate copolymer,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/스티렌/N-페닐말레이미드/페닐(메트)아크릴레이트/폴리스티렌 거대 단량체 공중합체, (Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / styrene / N-phenylmaleimide / phenyl (meth) acrylate / polystyrene macromonomer copolymer,
(메트)아크릴산/2-히드록시에틸(메트)아크릴레이트/스티렌/N-페닐말레이미드/페닐(메트)아크릴레이트/폴리메틸메타크릴레이트 거대 단량체 공중합체, (Meth) acrylic acid / 2-hydroxyethyl (meth) acrylate / styrene / N-phenylmaleimide / phenyl (meth) acrylate / polymethylmethacrylate macromonomer copolymer,
(메트)아크릴산/숙신산 모노[2-(메트)아크릴로일옥시에틸]/벤질(메트)아크릴레이트/글리세롤 모노(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / benzyl (meth) acrylate / glycerol mono (meth) acrylate copolymer,
(메트)아크릴산/숙신산 모노[2-(메트)아크릴로일옥시에틸]/스티렌/N-페닐말레이미드/알릴(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / styrene / N-phenylmaleimide / allyl (meth) acrylate copolymer,
(메트)아크릴산/숙신산 모노[2-(메트)아크릴로일옥시에틸]/스티렌/N-페닐말레이미드/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / styrene / N-phenylmaleimide / benzyl (meth) acrylate copolymer,
(메트)아크릴산/숙신산 모노[2-(메트)아크릴로일옥시에틸]/스티렌/N-시클로헥실말레이미드/알릴(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / styrene / N-cyclohexylmaleimide / allyl (meth) acrylate copolymer,
(메트)아크릴산/숙신산 모노[2-(메트)아크릴로일옥시에틸]/스티렌/N-시클로헥실말레이미드/벤질(메트)아크릴레이트 공중합체, (Meth) acrylic acid / succinic acid mono [2- (meth) acryloyloxyethyl] / styrene / N-cyclohexylmaleimide / benzyl (meth) acrylate copolymer,
(메트)아크릴산/ω-카르복시폴리카프로락톤 모노(메트)아크릴레이트/스티렌/N-페닐말레이미드/벤질(메트)아크릴레이트/글리세롤 모노(메트)아크릴레이트 공중합체 등을 들 수 있다.(Meth) acrylic acid / omega-carboxypolycaprolactone mono (meth) acrylate / styrene / N-phenylmaleimide / benzyl (meth) acrylate / glycerol mono (meth) acrylate copolymer, etc. are mentioned.
카르복실기 함유 공중합체에서의 카르복실기 함유 불포화 단량체의 공중합 비율은 바람직하게는 5 내지 50 중량%, 보다 바람직하게는 10 내지 40 중량%이다. 공중합 비율이 5 중량% 미만이면, 얻어지는 감방사선성 조성물의 알칼리 현상액에 대한 용해성이 저하되는 경향이 있고, 한편 50 중량%를 초과하면, 알칼리 현상액에 대한 용해성이 과대해져, 알칼리 현상액으로 현상할 때에 착색층이 기판으로부터 탈락되거나 착색층 표면의 막 요철을 초래하기 쉬워지는 경향이 있다.The copolymerization ratio of the carboxyl group-containing unsaturated monomer in the carboxyl group-containing copolymer is preferably 5 to 50% by weight, more preferably 10 to 40% by weight. If the copolymerization ratio is less than 5% by weight, the solubility in the alkali developer of the obtained radiation-sensitive composition tends to be lowered, while if it exceeds 50% by weight, the solubility in the alkaline developer is excessive, and when developing with an alkaline developer. There exists a tendency for a colored layer to fall out from a board | substrate, or to become easy to cause the film | membrane unevenness of the colored layer surface.
본 발명에서의 알칼리 가용성 수지의 겔 투과 크로마토그래피(GPC, 용출 용매: 테트라히드로푸란)로 측정한 폴리스티렌 환산 중량 평균 분자량(이하, "Mw"라 함)은 바람직하게는 3,000 내지 300,000, 보다 바람직하게는 5,000 내지 100,000이다. The polystyrene reduced weight average molecular weight (hereinafter referred to as "Mw") measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) of the alkali-soluble resin in the present invention is preferably 3,000 to 300,000, more preferably Is 5,000 to 100,000.
또한, 본 발명에서의 알칼리 가용성 수지의 겔 투과 크로마토그래피(GPC, 용출 용매: 테트라히드로푸란)로 측정한 폴리스티렌 환산 수 평균 분자량(이하, "Mn"이라 함)은 바람직하게는 3,000 내지 60,000, 보다 바람직하게는 5,000 내지 25,000이다. In addition, the polystyrene reduced number average molecular weight (hereinafter referred to as "Mn") measured by gel permeation chromatography (GPC, elution solvent: tetrahydrofuran) of the alkali-soluble resin in the present invention is preferably 3,000 to 60,000, and more. Preferably 5,000 to 25,000.
본 발명에서는 이러한 특정 Mw 및 Mn을 갖는 알칼리 가용성 수지를 사용함으로써, 현상성이 우수한 감방사선성 조성물이 얻어지고, 이에 따라, 샤프한 패턴 단부를 갖는 화소 및 블랙 매트릭스를 형성할 수 있는 동시에, 현상시에 미노광부의 기판 상 및 차광층 상에 잔사, 바탕 오염, 막 잔여 등이 발생하기 어려워진다.In the present invention, by using an alkali-soluble resin having such specific Mw and Mn, a radiation-sensitive composition excellent in developability is obtained, whereby a pixel and a black matrix having sharp pattern ends can be formed, and at the same time Residues, background contamination, film residues, etc., on the substrate and the light shielding layer of the unexposed portion become less likely to occur.
또한, 본 발명에서의 알칼리 가용성 수지의 Mw와 Mn의 비(Mw/Mn)는 바람직하게는 1 내지 5, 더욱 바람직하게는 1 내지 4이다.Moreover, ratio (Mw / Mn) of Mw and Mn of alkali-soluble resin in this invention becomes like this. Preferably it is 1-5, More preferably, it is 1-4.
본 발명에서, 알칼리 가용성 수지는 단독으로 또는 2종 이상을 혼합하여 사 용할 수 있다. In this invention, alkali-soluble resin can be used individually or in mixture of 2 or more types.
본 발명에서의 알칼리 가용성 수지의 사용량은 (A) 착색제 100 중량부에 대하여 바람직하게는 10 내지 1,000 중량부, 보다 바람직하게는 20 내지 500 중량부이다. 알칼리 가용성 수지의 사용량이 10 중량부 미만이면, 예를 들면, 알칼리 현상성이 저하되거나, 미노광부의 기판 상 또는 차광층 상에 바탕 오염이나 막 잔여가 발생할 우려가 있고, 한편 1,000 중량부를 초과하면, 상대적으로 착색제 농도가 저하되기 때문에, 박막으로서 목적으로 하는 색 농도를 달성하는 것이 곤란해질 우려가 있다.The usage-amount of alkali-soluble resin in this invention becomes like this. Preferably it is 10-1,000 weight part, More preferably, it is 20-500 weight part with respect to 100 weight part of (A) coloring agents. If the amount of the alkali-soluble resin is less than 10 parts by weight, for example, alkali developability may be lowered, or background contamination or film residue may occur on the substrate or the light shielding layer of the unexposed part. Since the colorant concentration decreases relatively, there is a possibility that it is difficult to achieve the target color density as a thin film.
-(C) 다관능성 단량체--(C) polyfunctional monomer-
본 발명에서의 다관능성 단량체는 분자 내에 2개 이상의 중합성 불포화 결합을 갖는 단량체를 포함한다.Multifunctional monomers in the present invention include monomers having two or more polymerizable unsaturated bonds in a molecule.
다관능성 단량체로는, 예를 들면 As a polyfunctional monomer, for example
에틸렌글리콜, 프로필렌글리콜 등의 알킬렌글리콜의 디(메트)아크릴레이트,Di (meth) acrylates of alkylene glycols such as ethylene glycol and propylene glycol,
폴리에틸렌글리콜, 폴리프로필렌글리콜 등의 폴리알킬렌글리콜의 디(메트)아크릴레이트,Di (meth) acrylates of polyalkylene glycols such as polyethylene glycol and polypropylene glycol,
글리세린, 트리메틸올프로판, 펜타에리트리톨, 디펜타에리트리톨 등의 3가 이상의 다가 알코올의 폴리(메트)아크릴레이트나, 이들의 디카르복실산 변성물,Poly (meth) acrylates of trihydric or higher polyhydric alcohols such as glycerin, trimethylolpropane, pentaerythritol, dipentaerythritol, and modified dicarboxylic acids thereof;
폴리에스테르, 에폭시 수지, 우레탄 수지, 알키드 수지, 실리콘 수지, 스피란 수지 등의 올리고(메트)아크릴레이트,Oligo (meth) acrylates such as polyester, epoxy resin, urethane resin, alkyd resin, silicone resin, spiran resin,
양쪽 말단 히드록시폴리-1,3-부타디엔, 양쪽 말단 히드록시폴리이소프렌, 양 쪽 말단 히드록시폴리카프로락톤 등의 양쪽 말단 히드록실화 중합체의 디(메트)아크릴레이트, 및 Di (meth) acrylates of both terminal hydroxylated polymers such as both terminal hydroxypoly-1,3-butadiene, both terminal hydroxypolyisoprene and both terminal hydroxypolycaprolactone, and
트리스[2-(메트)아크릴로일옥시에틸]포스페이트 등을 들 수 있다. Tris [2- (meth) acryloyloxyethyl] phosphate etc. are mentioned.
이들 다관능성 단량체 중, 3가 이상의 다가 알코올의 폴리(메트)아크릴레이트나 이들의 디카르복실산 변성물, 구체적으로는 트리메틸올프로판 트리아크릴레이트, 트리메틸올프로판 트리메타크릴레이트, 펜타에리트리톨 트리아크릴레이트, 펜타에리트리톨 트리메타크릴레이트, 펜타에리트리톨 테트라아크릴레이트, 펜타에리트리톨 테트라메타크릴레이트, 디펜타에리트리톨 펜타아크릴레이트, 디펜타에리트리톨 펜타메타크릴레이트, 디펜타에리트리톨 헥사아크릴레이트, 디펜타에리트리톨 헥사메타크릴레이트, Of these polyfunctional monomers, poly (meth) acrylates of trivalent or higher polyhydric alcohols and their dicarboxylic acid modified substances, specifically trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, pentaerythritol tri Acrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, dipentaerythritol hexaacrylate , Dipentaerythritol hexamethacrylate,
하기 화학식 3으로 표시되는 화합물 및 하기 화학식 4로 표시되는 화합물 등이 바람직하다. Preferred are compounds represented by the following formula (3), compounds represented by the following formula (4), and the like.
특히, 트리메틸올프로판 트리아크릴레이트, 펜타에리트리톨 트리아크릴레이트 및 디펜타에리트리톨 헥사아크릴레이트가, 착색층의 강도가 높고, 착색층의 표면 평활성이 우수하며, 또한 미노광부의 기판 상 및 차광층 상에 바탕 오염 및 막 잔여 등을 잘 발생시키지 않는다는 점에서 바람직하다. In particular, trimethylolpropane triacrylate, pentaerythritol triacrylate, and dipentaerythritol hexaacrylate have high strength of the colored layer, excellent surface smoothness of the colored layer, and further, on the substrate and the light shielding layer of the unexposed part. It is preferable in that it does not generate | occur | produce background contamination, film | membrane residue, etc. well.
상기 다관능성 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said polyfunctional monomer can be used individually or in mixture of 2 or more types.
본 발명에서의 다관능성 단량체의 사용량은 (B) 알칼리 가용성 수지 100 중량부에 대하여 바람직하게는 5 내지 500 중량부, 보다 바람직하게는 20 내지 300 중량부이다. 다관능성 단량체의 사용량이 5 중량부 미만이면, 착색층의 강도나 표면 평활성이 저하되는 경향이 있고, 한편 500 중량부를 초과하면, 예를 들면, 알칼리 현상성이 저하되거나, 미노광부의 기판 상 또는 차광층 상에 바탕 오염, 막 잔여 등이 발생하기 쉬워지는 경향이 있다. The amount of the polyfunctional monomer used in the present invention is preferably 5 to 500 parts by weight, more preferably 20 to 300 parts by weight based on 100 parts by weight of the (B) alkali-soluble resin. If the amount of the polyfunctional monomer used is less than 5 parts by weight, the strength and surface smoothness of the colored layer tends to decrease, while if it exceeds 500 parts by weight, for example, alkali developability is lowered, or on the substrate of the unexposed part, Background contamination, film residues, etc. tend to occur on the light shielding layer.
또한, 본 발명에서는 다관능성 단량체와 함께 중합성 불포화 결합을 1개갖는 단관능성 단량체를 함께 사용할 수도 있다. Moreover, in this invention, you may use together the monofunctional monomer which has one polymerizable unsaturated bond with a polyfunctional monomer.
상기 단관능성 단량체로는, 예를 들면 (B) 알칼리 가용성 수지에 대해서 예시한 상기 카르복실기 함유 불포화 단량체나 공중합성 불포화 단량체와 동일한 화합물이나, N-(메트)아크릴로일모르폴린, N-비닐피롤리돈, N-비닐-ε-카프로락탐 외에 시판품으로서 M-5600(상품명, 도아 고세이(주) 제조) 등을 들 수 있다.As said monofunctional monomer, the compound similar to the said carboxyl group-containing unsaturated monomer and copolymerizable unsaturated monomer which were illustrated about (B) alkali-soluble resin, for example, N- (meth) acryloyl morpholine, and N-vinyl-pipi M-5600 (brand name, Toagosei Co., Ltd.) etc. are mentioned as a commercial item other than a ralidone and N-vinyl- epsilon caprolactam.
이들 단관능성 단량체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. 단관능성 단량체의 사용 비율은 다관능성 단량체와 단관능성 단량체의 합계에 대하여, 바람직하게는 90 중량% 이하, 보다 바람직하게는 50 중량% 이하이다. 단관능성 단량체의 사용 비율이 90 중량%를 초과하면, 얻어지는 착색층의 강도나 표면 평활성이 불충분해질 우려가 있다. These monofunctional monomers can be used individually or in mixture of 2 or more types. The use ratio of the monofunctional monomer is preferably 90% by weight or less, and more preferably 50% by weight or less, based on the total of the polyfunctional monomer and the monofunctional monomer. When the use ratio of a monofunctional monomer exceeds 90 weight%, there exists a possibility that the intensity | strength and surface smoothness of the colored layer obtained may become inadequate.
본 발명에서의 다관능성 단량체와 단관능성 단량체의 합계 사용량은 (B) 알칼리 가용성 수지 100 중량부에 대하여, 바람직하게는 5 내지 500 중량부, 보다 바람직하게는 20 내지 300 중량부이다. 상기 합계 사용량이 5 중량부 미만이면, 착색층의 강도나 표면 평활성이 저하되는 경향이 있고, 한편 500 중량부를 초과하면, 예를 들면, 알칼리 현상성이 저하되거나, 미노광부의 기판 상 또는 차광층 상에 바탕 오염, 막 잔여 등이 발생하기 쉬워지는 경향이 있다. The total amount of the polyfunctional monomer and the monofunctional monomer in the present invention is preferably 5 to 500 parts by weight, more preferably 20 to 300 parts by weight based on 100 parts by weight of the (B) alkali-soluble resin. If the total amount of use is less than 5 parts by weight, the strength and surface smoothness of the colored layer tends to be lowered. On the other hand, if the total amount exceeds 500 parts by weight, for example, alkali developability is lowered, or the substrate or the light shielding layer of the unexposed part is reduced. Background contamination, film residues, etc. tend to occur.
-(D) 광 라디칼 발생제--(D) photo radical generator-
본 발명에서의 광 라디칼 발생제는 상기 화학식 1로 표시되는 화합물 및 상기 화학식 2로 표시되는 화합물로 이루어지는 군에서 선택되는 1종 이상의 성분(이하, "광 라디칼 발생제(D1)"라 함)과, 비이미다졸 화합물, 벤조페논 화합물, 티오크산톤 화합물 및 케토쿠마린 화합물로 이루어지는 군에서 선택되는 1종 이상의 성분(이하, "광 라디칼 발생제(D2)"라 함)을 포함한다. 이러한 광 라디칼 발생제는, 예를 들면 가시광선, 자외선, 원자외선, 하전 입자선, X선 등의 방사선에 의한 노광에 의해, (C) 다관능성 단량체 및 경우에 따라 사용되는 단관능성 단량체의 중합을 개시할 수 있는 라디칼을 발생한다. The optical radical generator in the present invention is one or more components selected from the group consisting of the compound represented by the formula (1) and the compound represented by the formula (2) (hereinafter referred to as "photo radical generator (D1)") and And at least one component selected from the group consisting of a biimidazole compound, a benzophenone compound, a thioxanthone compound and a ketocoumarin compound (hereinafter referred to as "photo radical generator (D2)"). Such an optical radical generator is, for example, polymerization of (C) a polyfunctional monomer and a monofunctional monomer used in some cases by exposure to radiation such as visible light, ultraviolet light, far ultraviolet ray, charged particle beam, or X-ray. Generates radicals that can initiate.
화학식 1 및 화학식 2에서, R1, R2 및 R3의 탄소수 1 내지 12의 직쇄상, 분지 상 또는 환상 알킬기로는, 예를 들면 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, i-부틸기, sec-부틸기, t-부틸기, n-펜틸기, n-헥실기, n-헵틸기, n-옥틸기, n-노닐기, n-데실기, n-운데실기, n-도데실기, 시클로펜틸기, 시클로헥실기 등을 들 수 있다. In the general formulas (1) and (2), examples of the linear, branched or cyclic alkyl group having 1 to 12 carbon atoms of R 1 , R 2 and R 3 include, for example, methyl group, ethyl group, n-propyl group, i-propyl group, n -Butyl group, i-butyl group, sec-butyl group, t-butyl group, n-pentyl group, n-hexyl group, n-heptyl group, n-octyl group, n-nonyl group, n-decyl group, n -An undecyl group, n-dodecyl group, a cyclopentyl group, a cyclohexyl group, etc. are mentioned.
또한, R4, R5 및 R6의 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상 알킬기로는, 예를 들면 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, i-부틸기, sec-부틸기, t-부틸기, n-펜틸기, n-헥실기, 시클로펜틸기, 시클로헥실기 등을 들 수 있다. Moreover, as a C1-C6 linear, branched, or cyclic alkyl group of R <4> , R <5> and R <6> , a methyl group, an ethyl group, n-propyl group, i-propyl group, n-butyl group, i -Butyl group, sec-butyl group, t-butyl group, n-pentyl group, n-hexyl group, cyclopentyl group, cyclohexyl group, etc. are mentioned.
R1, R2, R3, R4, R5 및 R6의 각 알킬기에 대한 치환기, 및 R1 및 R2의 각 페닐기에 대한 치환기 중, 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상 알콕실기로는, 예를 들면 메톡시기, 에톡시기, n-프로폭시기, i-프로폭시기, n-부톡시기, t-부톡시기 등을 들 수 있고, 할로겐 원자로는, 예를 들면 불소 원자, 염소 원자 등을 들 수 있다. Linear, branched or cyclic having 1 to 6 carbon atoms in the substituent for each alkyl group of R 1 , R 2 , R 3 , R 4 , R 5 and R 6 , and the substituent for each phenyl group of R 1 and R 2 As an alkoxyl group, a methoxy group, an ethoxy group, n-propoxy group, i-propoxy group, n-butoxy group, t-butoxy group, etc. are mentioned, for example, As a halogen atom, For example, a fluorine atom And a chlorine atom.
또한, R1 및 R2의 각 페닐기에 대한 치환기 중, 탄소수 1 내지 6의 직쇄상, 분지상 또는 환상 알킬기로는, 예를 들면 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, t-부틸기 등을 들 수 있다. In addition, as a C1-C6 linear, branched, or cyclic alkyl group among the substituents for each phenyl group of R <1> and R <2> , a methyl group, an ethyl group, n-propyl group, i-propyl group, n- A butyl group, t-butyl group, etc. are mentioned.
이들 치환기는 각 알킬기 및 각 페닐기에 1개 이상 또는 1종 이상 존재할 수 있다. One or more of these substituents may be present in each alkyl group and each phenyl group.
화학식 1 및 화학식 2에서, R1로서는 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, 페닐기 등이 바람직하고, R2로서는 수소 원자, 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기, n-펜틸기, n-헥실기, n-헵틸기, n-옥틸기 등이 바람직하고, R3으로서는 수소 원자, 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기 등이 바람직하고, 또한 R4, R5 및 R6으로서는 수소 원자, 메틸기, 에틸기, n-프로필기, i-프로필기, n-부틸기 등이 바람직하다.In formulas (1) and (2), R 1 is preferably a methyl group, an ethyl group, n-propyl group, i-propyl group, n-butyl group, or a phenyl group, and as R 2 , a hydrogen atom, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, n-pentyl group, n-hexyl group, n-heptyl group, n-octyl group, etc. are preferable, and as R <3> , a hydrogen atom, a methyl group, an ethyl group, n-propyl group, i -Propyl group, n-butyl group, etc. are preferable, and as R <4> , R <5> and R <6> , a hydrogen atom, a methyl group, an ethyl group, n-propyl group, i-propyl group, n-butyl group, etc. are preferable.
본 발명에서의 바람직한 광 라디칼 발생제(D1)의 구체예로서는, 1-[9-에틸-6-벤조일-9.H.-카르바졸-3-일]-노난-1,2-노난-2-옥심-O-벤조에이트, 1-[9-에틸-6-벤조일-9.H.-카르바졸-3-일]-노난-1,2-노난-2-옥심-O-아세테이트, 1-[9-에틸-6-벤조일-9.H.-카르바졸-3-일]-펜탄-1,2-펜탄-2-옥심-O-아세테이트, 1-[9-에틸-6-벤조일-9.H.-카르바졸-3-일]-옥탄-1-온옥심-O-아세테이트, 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-벤조에이트, 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-아세테이트, 1-[9-에틸-6-(1,3,5-트리메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-벤조에이트, 1-[9-n-부틸-6-(2-에틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-벤조에이트 등을 들 수 있다. As a specific example of the preferable radical photogenerating agent (D1) in this invention, 1- [9-ethyl-6-benzoyl-9.H.-carbazol-3-yl] -nonane-1,2-nonan-2- Oxime-O-benzoate, 1- [9-ethyl-6-benzoyl-9.H.-carbazol-3-yl] -nonane-1,2-nonan-2-oxime-O-acetate, 1- [ 9-ethyl-6-benzoyl-9.H.-carbazol-3-yl] -pentane-1,2-pentane-2-oxime-O-acetate, 1- [9-ethyl-6-benzoyl-9. H.-carbazol-3-yl] -octane-1-one oxime-O-acetate, 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl] Ethane-1-one oxime-O-benzoate, 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime-O Acetate, 1- [9-ethyl-6- (1,3,5-trimethylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime-O-benzoate, 1- [9-n-butyl-6- (2-ethylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime-O-benzoate and the like.
이들 광 라디칼 발생제(D1) 중, 특히 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-아세테이트가 바람직하다. Among these optical radical generators (D1), in particular, 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime-O-acetate Is preferred.
상기 광 라디칼 발생제(D1)는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said photo radical generating agent (D1) can be used individually or in mixture of 2 or more types.
다음으로, 광 라디칼 발생제(D2) 중 비이미다졸 화합물로는, 예를 들면 하기 화학식 5a, 화학식 5b 또는 화학식 5c로 표시되는 주요 골격을 1종 이상 갖는 화합물 등을 들 수 있고, 비이미다졸 화합물의 구체예로서는 Next, as a biimidazole compound in an optical radical generating agent (D2), the compound etc. which have 1 or more types of main skeleton represented by following formula (5a), (5b) or (5c) are mentioned, for example, biimidazole As a specific example of a compound
2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'-biimidazole,
2,2'-비스(2-브로모페닐)-4,4',5,5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸, 2,2'-bis (2-bromophenyl) -4,4 ', 5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'-biimidazole,
2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2,4-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2,4,6-트리클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2,4,6-trichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2-브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2-bromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2,4-디브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸, 2,2'-bis (2,4-dibromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole,
2,2'-비스(2,4,6-트리브로모페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 등을 들 수 있다. 2,2'-bis (2,4,6-tribromophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole etc. are mentioned.
이들 비이미다졸 화합물 중, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸, 2,2'-비스(2,4-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 및 2,2'-비스(2,4,6-트리클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸이 바람직하고, 특히 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸이 바람직하다.Among these biimidazole compounds, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'-biimidazole , 2,2'-bis (2,4-dichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole and 2,2'-bis (2,4,6 -Trichlorophenyl) -4,4 ', 5,5'-tetraphenyl-1,2'-biimidazole is preferred, in particular 2,2'-bis (2-chlorophenyl) -4,4', 5,5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'-biimidazole is preferred.
상기 비이미다졸 화합물은 용제에 대한 용해성이 우수하여 미용해물, 석출물 등의 이물질이 생기지 않고, 게다가 감도가 높아, 적은 에너지량의 노광에 의해 경화 반응을 충분히 진행시키는 동시에, 콘트라스트가 높아, 미노광부에서 경화 반응이 생기지 않기 때문에, 노광 후의 도막은 현상액에 대하여 불용성인 경화 부분과 현상액에 대하여 높은 용해성을 갖는 미경화 부분으로 명확히 구분되며, 이에 따라, 언더 컷트가 없는 화소 패턴 및 블랙 매트릭스 패턴이 소정 배열에 따라서 배치된 고정밀한 패턴 어레이를 형성할 수 있다. The non-imidazole compound is excellent in solubility in a solvent and does not generate foreign matters such as undissolved products and precipitates, and also has high sensitivity, while sufficiently advancing the curing reaction by exposure of a small amount of energy, and high contrast. Since no hardening reaction occurs at, the coated film after exposure is clearly divided into a hardened part which is insoluble in the developer and an uncured part having high solubility in the developer, whereby the pixel pattern and the black matrix pattern without undercut are predetermined. It is possible to form a precise pattern array arranged in accordance with the arrangement.
-수소 공여체-Hydrogen donor
또한, 본 발명에서는 비이미다졸 화합물을 이용하는 경우, 하기 수소 공여체를 병용하는 것이 감도를 더욱 개량할 수 있다는 점에서 바람직하다. Moreover, in this invention, when using a biimidazole compound, using the following hydrogen donor together is preferable at the point which can improve a sensitivity further.
여기서 말하는 "수소 공여체"란, 노광에 의해 비이미다졸계 화합물로부터 발생한 라디칼에 수소 원자를 공여할 수 있는 화합물을 의미한다. The "hydrogen donor" as used here means the compound which can donate a hydrogen atom to the radical which generate | occur | produced from the biimidazole type compound by exposure.
이러한 수소 공여체로서는 하기에서 정의하는 머캅탄 화합물, 하기에서 정의하는 아민 화합물 등이 바람직하다. As such a hydrogen donor, the mercaptan compound defined below, the amine compound defined below, etc. are preferable.
상기 머캅탄 화합물은 벤젠환 또는 복소환을 모핵으로 하고, 상기 모핵에 직접 결합한 머캅토기를 1개 이상, 바람직하게는 1 내지 3개, 더욱 바람직하게는 1 내지 2개 갖는 화합물(이하 "머캅탄 수소 공여체"라 함)을 포함한다. The mercaptan compound is a compound having a benzene ring or a heterocycle as a mother nucleus, and having at least one mercapto group directly bonded to the mother nucleus, preferably 1 to 3, more preferably 1 to 2 (hereinafter "mercaptan"). Hydrogen donor ".
또한, 상기 아민 화합물은 벤젠환 또는 복소환을 모핵으로 하고, 상기 모핵에 직접 결합한 아미노기를 1개 이상, 바람직하게는 1 내지 3개, 더욱 바람직하게는 1 내지 2개 갖는 화합물(이하 "아민 수소 공여체"라 함)을 포함한다. In addition, the amine compound is a compound having a benzene ring or a heterocycle as a mother nucleus, and having at least one, preferably 1 to 3, more preferably 1 to 2 amino groups directly bonded to the mother nucleus (hereinafter referred to as "amine hydrogen Donor ".
한편, 이들 수소 공여체는 머캅토기와 아미노기를 동시에 가질 수도 있다.On the other hand, these hydrogen donors may have a mercapto group and an amino group simultaneously.
이하, 수소 공여체에 대하여 보다 구체적으로 설명한다. The hydrogen donor will be described in more detail below.
머캅탄 수소 공여체는 벤젠환 또는 복소환을 각각 1개 이상 가질 수 있고, 또한 벤젠환과 복소환 모두를 가질 수 있으며, 이들 환을 2개 이상 갖는 경우, 축합환을 형성할 수도 있고, 형성하지 않을 수도 있다.The mercaptan hydrogen donor may have one or more benzene rings or heterocycles, and may have both a benzene ring and a heterocycle, and in the case of having two or more of these rings, a condensed ring may or may not be formed. It may be.
또한, 머캅탄 수소 공여체는 머캅토기를 2개 이상 갖는 경우, 1개 이상의 유리 머캅토기가 잔존하는 한, 나머지 머캅토기 중 1개 이상이 알킬기, 아르알킬기 또는 아릴기로 치환될 수도 있고, 나아가 1개 이상의 유리 머캅토기가 잔존하는 한 , 2개의 황 원자가 알킬렌기 등의 2가 유기기를 개재하여 결합된 구조 단위, 또는 2개의 황 원자가 디술피드의 형태로 결합된 구조 단위를 가질 수 있다. In addition, when the mercaptan hydrogen donor has two or more mercapto groups, as long as one or more free mercapto groups remain, one or more of the remaining mercapto groups may be substituted with an alkyl group, an aralkyl group or an aryl group, and further, one As long as the above free mercapto group remains, it may have a structural unit bonded via a divalent organic group such as two sulfur atom alkylene groups or a structural unit bonded by two sulfur atoms in the form of disulfide.
또한, 머캅탄 수소 공여체는 머캅토기 이외의 부분에서, 카르복실기, 치환 또는 비치환된 알콕시카르보닐기, 치환 또는 비치환된 페녹시카르보닐기, 니트릴기 등에 의해 치환될 수도 있다. In addition, the mercaptan hydrogen donor may be substituted by a carboxyl group, a substituted or unsubstituted alkoxycarbonyl group, a substituted or unsubstituted phenoxycarbonyl group, a nitrile group, or the like at a portion other than the mercapto group.
이러한 머캅탄 수소 공여체의 구체예로는, 2-머캅토벤조티아졸, 2-머캅토벤조옥사졸, 2-머캅토벤조이미다졸, 2,5-디머캅토-1,3,4-티아디아졸, 2-머캅토-2,5-디메틸아미노피리딘 등을 들 수 있다.Specific examples of such mercaptan hydrogen donors include 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzoimidazole, 2,5-dimercapto-1,3,4-thiadia Sol, 2-mercapto-2,5-dimethylaminopyridine, and the like.
이들 머캅탄 수소 공여체 중 2-머캅토벤조티아졸, 2-머캅토벤조옥사졸 등이 바람직하고, 특히 2-머캅토벤조티아졸이 바람직하다.Among these mercaptan hydrogen donors, 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, and the like are preferable, and 2-mercaptobenzothiazole is particularly preferable.
다음으로, 아민 수소 공여체는 벤젠환 또는 복소환을 각각 1개 이상 가질 수 있고, 또한 벤젠환과 복소환 모두를 가질 수 있으며, 이들 환을 2개 이상 갖는 경우, 축합환을 형성할 수도 있고, 형성하지 않을 수도 있다.Next, the amine hydrogen donor may have one or more benzene rings or heterocycles, and may also have both benzene rings and heterocycles, and in the case of having two or more of these rings, may form a condensed ring. You may not.
또한, 아민 수소 공여체는 아미노기 중 1개 이상이 알킬기 또는 치환 알킬기로 치환될 수도 있고, 아미노기 이외의 부분에서 카르복실기, 치환 또는 비치환된 알콕시카르보닐기, 치환 또는 비치환된 페녹시카르보닐기, 니트릴기 등에 의해 치환될 수도 있다. In addition, the amine hydrogen donor may be substituted with at least one amino group by an alkyl group or a substituted alkyl group, and may be substituted by a carboxyl group, a substituted or unsubstituted alkoxycarbonyl group, a substituted or unsubstituted phenoxycarbonyl group, a nitrile group, or the like in a portion other than the amino group. It may be substituted.
이러한 아민 수소 공여체의 구체예로서는 4,4'-비스(디메틸아미노)벤조페논, 4,4'-비스(디에틸아미노)벤조페논, 4-디에틸아미노아세토페논, 4-디메틸아미노프로피오페논, 4-디메틸아미노벤조산 에틸, 4-디메틸아미노벤조산 i-아밀, 4-디메틸아 미노벤조산, 4-디메틸아미노벤조니트릴 등을 들 수 있다. Specific examples of such amine hydrogen donors include 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone, 4-diethylaminoacetophenone, 4-dimethylaminopropiophenone, Ethyl 4-dimethylaminobenzoic acid, 4-dimethylaminobenzoic acid i-amyl, 4-dimethylaminobenzoic acid, 4-dimethylaminobenzonitrile, etc. are mentioned.
이들 아민 수소 공여체 중, 4,4'-비스(디메틸아미노)벤조페논, 4,4'-비스(디에틸아미노)벤조페논이 바람직하고, 특히, 4,4'-비스(디에틸아미노)벤조페논이 바람직하다.Among these amine hydrogen donors, 4,4'-bis (dimethylamino) benzophenone and 4,4'-bis (diethylamino) benzophenone are preferable, and 4,4'-bis (diethylamino) benzo is particularly preferable. Phenones are preferred.
본 발명에서, 수소 공여체는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있지만, 1종 이상의 머캅탄 수소 공여체와 1종 이상의 아민 수소 공여체를 조합하여 사용하는 것이, 형성된 착색층이 현상시에 기판으로부터 잘 탈락되지 않고, 또한 착색층의 강도 및 감도도 높은 점에서 바람직하다. In the present invention, the hydrogen donor may be used alone or in combination of two or more thereof, but the combination of one or more mercaptan hydrogen donors and one or more amine hydrogen donors may be performed by using a colored layer formed from a substrate during development. It is preferable at the point which does not fall easily but also the intensity | strength and the sensitivity of a colored layer are high.
머캅탄 수소 공여체와 아민 수소 공여체의 바람직한 조합의 구체예로는, 2-머캅토벤조티아졸/4,4'-비스(디메틸아미노)벤조페논, 2-머캅토벤조티아졸/4,4'-비스(디에틸아미노)벤조페논, 2-머캅토벤조옥사졸/4,4'-비스(디메틸아미노)벤조페논, 2-머캅토벤조옥사졸/4,4'-비스(디에틸아미노)벤조페논 등을 들 수 있고, 더욱 바람직한 조합은 2-머캅토벤조티아졸/4,4'-비스(디에틸아미노)벤조페논, 2-머캅토벤조옥사졸/4,4'-비스(디에틸아미노)벤조페논이고, 특히 바람직한 조합은 2-머캅토벤조티아졸/4,4'-비스(디에틸아미노)벤조페논이다. Specific examples of preferred combinations of mercaptan hydrogen donors and amine hydrogen donors include 2-mercaptobenzothiazole / 4,4'-bis (dimethylamino) benzophenone and 2-mercaptobenzothiazole / 4,4 '. -Bis (diethylamino) benzophenone, 2-mercaptobenzooxazole / 4,4'-bis (dimethylamino) benzophenone, 2-mercaptobenzooxazole / 4,4'-bis (diethylamino) Benzophenone etc. are mentioned, A more preferable combination is 2-mercaptobenzothiazole / 4,4'-bis (diethylamino) benzophenone, 2-mercaptobenzoxazole / 4,4'-bis (di Ethylamino) benzophenone, a particularly preferred combination is 2-mercaptobenzothiazole / 4,4'-bis (diethylamino) benzophenone.
머캅탄 수소 공여체와 아민 수소 공여체의 조합에서 머캅탄 수소 공여체와 아민 수소 공여체의 중량비는 바람직하게는 1:1 내지 1:4, 보다 바람직하게는 1:1 내지 1:3이다. The weight ratio of mercaptan hydrogen donor and amine hydrogen donor in the combination of mercaptan hydrogen donor and amine hydrogen donor is preferably 1: 1 to 1: 4, more preferably 1: 1 to 1: 3.
또한, 상기 벤조페논 화합물로는, 예를 들면 4,4'-비스(디메틸아미노)벤조페논, 4,4'-비스(디에틸아미노)벤조페논 등을 들 수 있다. Moreover, as said benzophenone compound, 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone, etc. are mentioned, for example.
또한, 상기 티오크산톤 화합물로는, 예를 들면 티오크산톤, 2-클로로티오크산톤, 2,4-디에틸티오크산톤, 2-메틸티오크산톤, 2-i-프로필티오크산톤 등을 들 수 있다.Moreover, as said thioxanthone compound, For example, thioxanthone, 2-chloro thioxanthone, 2, 4- diethyl thioxanthone, 2-methyl thioxanthone, 2-i-propyl thioxanthone, etc. Can be mentioned.
또한, 상기 케토쿠마린 화합물로는, 예를 들면 3-케토쿠마린 등을 들 수 있다. Moreover, as said ketocoumarin compound, 3-ketocoumarin etc. are mentioned, for example.
본 발명에서, 광 라디칼 발생제(D2)로서는 2,4-디에틸티오크산톤, 2,2'-비스(2-클로로페닐)-4,5,4',5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸, 4,4'-비스(디에틸아미노)벤조페논, 2-머캅토벤조티아졸 등이 바람직하다. In the present invention, as the optical radical generator (D2), 2,4-diethyl thioxanthone, 2,2'-bis (2-chlorophenyl) -4,5,4 ', 5'-tetrakis (4- Ethoxycarbonylphenyl) -1,2'-biimidazole, 4,4'-bis (diethylamino) benzophenone, 2-mercaptobenzothiazole, etc. are preferable.
상기 광 라디칼 발생제(D2)는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said photo radical generating agent (D2) can be used individually or in mixture of 2 or more types.
본 발명에서의 광 라디칼 발생제는 추가로, 광 라디칼 발생제(D1) 및 광 라디칼 발생제(D2) 이외의 성분(이하, "다른 광 라디칼 발생제"라 함)을 포함할 수 있다. The optical radical generator in the present invention may further include components other than the optical radical generator (D1) and the optical radical generator (D2) (hereinafter referred to as "other optical radical generators").
다른 광 라디칼 발생제로는, 예를 들면 다른 O-아실옥심 화합물, 벤조인 화합물, 아세토페논 화합물, α-디케톤 화합물, 다핵 퀴논 화합물, 포스핀 화합물, 트리아진 화합물 등을 들 수 있다. As another optical radical generating agent, other O-acyl oxime compound, a benzoin compound, an acetophenone compound, the (alpha)-diketone compound, a polynuclear quinone compound, a phosphine compound, a triazine compound, etc. are mentioned, for example.
상기 다른 O-아실옥심 화합물로는,예를 들면 1,2-옥타디온-1-[4-(페닐티오)페닐]-2-(O-벤조일옥심), 1,2-부탄디온-1-[4-(페닐티오)페닐]-2-(O-벤조일옥심), 1,2-부탄디온-1-[4-(페닐티오)페닐]-2-(O-아세틸옥심), 1,2-옥타디온-1-[4-(메틸티오)페닐]-2-(O-벤조일옥심), 1,2-옥타디온-1-[4-(페닐티오)페닐]-2-[O-(4-메틸벤조 일옥심)] 등을 들 수 있다. As said other O-acyl oxime compound, the 1,2-octadione-1- [4- (phenylthio) phenyl] -2- (O-benzoyl oxime), 1,2-butanedione-1-, for example [4- (phenylthio) phenyl] -2- (O-benzoyloxime), 1,2-butanedione-1- [4- (phenylthio) phenyl] -2- (O-acetyloxime), 1,2 -Octadione-1- [4- (methylthio) phenyl] -2- (O-benzoyloxime), 1,2-octadione-1- [4- (phenylthio) phenyl] -2- [O- ( 4-methylbenzoyloxime)] etc. are mentioned.
또한, 상기 벤조인 화합물로는, 예를 들면 벤조인, 벤조인메틸에테르, 벤조인에틸에테르, 벤조인이소프로필에테르, 벤조인이소부틸에테르, 2-벤조일벤조산메틸 등을 들 수 있다.Moreover, as said benzoin compound, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, methyl 2-benzoyl benzoate etc. are mentioned, for example.
또한, 상기 아세토페논 화합물로는, 예를 들면 2,2-디메톡시아세토페논, 2,2-디에톡시아세토페논, 2,2-디메톡시-2-페닐아세토페논, 2-히드록시-2-메틸-1-페닐프로판-1-온, 1-(4-i-프로필페닐)-2-히드록시-2-메틸프로판-1-온, 2-메틸-(4-메틸티오페닐)-2-모르폴리노-1-프로판-1-온, 4-(2-히드록시에톡시)페닐-(2-히드록시-2-프로필)케톤, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온, 1-히드록시시클로헥실페닐케톤, 2,2-디메톡시-1,2-디페닐에탄-1-온 등을 들 수 있다. As the acetophenone compound, for example, 2,2-dimethoxyacetophenone, 2,2-diethoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2-hydroxy-2- Methyl-1-phenylpropan-1-one, 1- (4-i-propylphenyl) -2-hydroxy-2-methylpropan-1-one, 2-methyl- (4-methylthiophenyl) -2- Morpholino-1-propane-1-one, 4- (2-hydroxyethoxy) phenyl- (2-hydroxy-2-propyl) ketone, 2-benzyl-2-dimethylamino-1- (4- Morpholinophenyl) butan-1-one, 1-hydroxycyclohexylphenyl ketone, 2,2-dimethoxy-1,2-diphenylethan-1-one, and the like.
또한, 상기 α-디케톤 화합물로는, 예를 들면 디아세틸, 디벤조일, 메틸벤조일포르메이트 등을 들 수 있다. Moreover, as said (alpha)-diketone compound, diacetyl, dibenzoyl, methyl benzoyl formate, etc. are mentioned, for example.
또한, 상기 다핵 퀴논 화합물로는, 예를 들면 안트라퀴논, 2-에틸안트라퀴논, 2-t-부틸안트라퀴논, 1,4-나프토퀴논 등을 들 수 있다. Moreover, as said polynuclear quinone compound, anthraquinone, 2-ethyl anthraquinone, 2-t-butyl anthraquinone, 1, 4- naphthoquinone etc. are mentioned, for example.
또한, 상기 포스핀 화합물로는, 예를 들면 비스(2,4,6-트리메틸벤조일)페닐포스핀옥시드, 2,4,6-트리메틸벤조일디페닐포스핀옥시드 등을 들 수 있다. Moreover, as said phosphine compound, bis (2, 4, 6- trimethyl benzoyl) phenyl phosphine oxide, 2, 4, 6- trimethyl benzoyl diphenyl phosphine oxide, etc. are mentioned, for example.
또한, 상기 트리아진 화합물로는, 예를 들면 2,4,6-트리스(트리클로로메틸)-s-트리아진, 2-메틸-4,6-비스(트리클로로메틸)-s-트리아진, 2-[2-(푸란-2-일)에테닐]-4,6-비스(트리클로로메틸)-s-트리아진, 2-[2-(5-메틸푸란-2-일)에테닐]-4,6-비스(트리클로로메틸)-s-트리아진, 2-[2-(4-디에틸아미노-2-메틸페닐)에테닐]-4,6-비 스(트리클로로메틸)-s-트리아진, 2-[2-(3,4-디메톡시페닐)에테닐]-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-메톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-에톡시스티릴)-4,6-비스(트리클로로메틸)-s-트리아진, 2-(4-n-부톡시페닐)-4,6-비스(트리클로로메틸)-s-트리아진, 하기 화학식 6으로 표시되는 화합물, 하기 화학식 7로 표시되는 화합물 등의 할로메틸기를 갖는 화합물 등을 들 수 있다. As the triazine compound, for example, 2,4,6-tris (trichloromethyl) -s-triazine, 2-methyl-4,6-bis (trichloromethyl) -s-triazine, 2- [2- (furan-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (5-methylfuran-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (4-diethylamino-2-methylphenyl) ethenyl] -4,6-bis (trichloromethyl) -s -Triazine, 2- [2- (3,4-dimethoxyphenyl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxyphenyl) -4, 6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxystyryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-n-butoxy And compounds having a halomethyl group, such as phenyl) -4,6-bis (trichloromethyl) -s-triazine, a compound represented by the following formula (6), and a compound represented by the following formula (7).
본 발명에서, 다른 광 라디칼 발생제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. In the present invention, other photoradical generators may be used alone or in combination of two or more thereof.
본 발명에서, 광 라디칼 발생제의 합계 사용량은 (C) 다관능성 단량체와 경우에 따라 사용되는 단관능성 단량체의 합계 100 중량부에 대하여, 바람직하게는 0.01 내지 200 중량부, 보다 바람직하게는 1 내지 120 중량부, 특히 바람직하게는 1 내지 100 중량부이다. 광 라디칼 발생제의 합계 사용량이 0.01 중량부 미만이면, 노광에 의한 경화가 불충분해지고, 화소 패턴 또는 블랙 매트릭스 패턴이 소정 배열에 따라서 배치된 패턴 어레이를 얻는 것이 곤란해질 우려가 있고, 한편 200 중량부를 초과하면, 형성된 착색층이 현상시에 기판으로부터 탈락되기 쉬워지고, 또한 미노광부의 기판 상 또는 차광층 상에 바탕 오염, 막 잔여 등이 생기기 쉬워진다.In the present invention, the total amount of the radical generating agent used is preferably 0.01 to 200 parts by weight, more preferably 1 to 1, based on 100 parts by weight of the total amount of the (C) polyfunctional monomer and the monofunctional monomer used in some cases. 120 parts by weight, particularly preferably 1 to 100 parts by weight. When the total amount of use of the radical radical generating agent is less than 0.01 part by weight, curing by exposure may be insufficient, and it may be difficult to obtain a pattern array in which the pixel pattern or the black matrix pattern is arranged in accordance with a predetermined arrangement. When it exceeds, the formed colored layer will fall easily from a board | substrate at the time of image development, and a background contamination, a film | membrane residual, etc. will be easy to generate | occur | produce on the board | substrate or the light shielding layer of an unexposed part.
또한, 광 라디칼 발생제(D2)의 사용 비율은 광 라디칼 발생제(D1)와 광 라디칼 발생제(D2)의 합계에 대하여, 바람직하게는 10 내지 50 중량%, 더욱 바람직하게는 10 내지 30 중량%이다. 광 라디칼 발생제(D2)의 사용 비율이 10 중량% 미만이면, 화소 패턴을 얻는 것이 곤란해질 우려가 있고, 한편 50 중량%를 초과하면, 본 발명의 소기의 효과가 손상될 우려가 있다. In addition, the use ratio of the photoradical generator (D2) is preferably 10 to 50% by weight, more preferably 10 to 30% by weight, based on the total of the photoradical generator (D1) and the photoradical generator (D2). %to be. If the use ratio of the optical radical generating agent (D2) is less than 10% by weight, it may be difficult to obtain a pixel pattern, while if it exceeds 50% by weight, the desired effect of the present invention may be impaired.
또한, 다른 광 라디칼 발생제의 사용 비율은 광 라디칼 발생제의 합계에 대하여 바람직하게는 50 중량% 이하, 보다 바람직하게는 30 중량% 이하이다. 다른 광 라디칼 발생제의 사용 비율이 50 중량%를 초과하면, 본 발명의 소기의 효과가 손상될 우려가 있다. In addition, the use ratio of another optical radical generator is preferably 50 weight% or less, and more preferably 30 weight% or less with respect to the total of the optical radical generators. When the use ratio of another photo radical generating agent exceeds 50 weight%, the desired effect of this invention may be impaired.
본 발명에서는 상기 광 라디칼 발생제와 함께, 필요에 따라 증감제, 경화 촉진제 또는 고분자 광가교·증감제 중 1종 이상을 병용할 수도 있다. In the present invention, one or more of a sensitizer, a curing accelerator, or a polymer photocrosslinker and a sensitizer may be used in combination with the optical radical generator.
-첨가제--additive-
본 발명의 감방사선성 조성물은 필요에 따라 다양한 첨가제를 함유할 수도 있다. The radiation sensitive composition of this invention may contain various additives as needed.
상기 첨가제로는 감방사선성 조성물의 알칼리 현상액에 대한 용해성을 보다 개선하면서, 현상 후의 미용해물의 잔존을 보다 억제하는 작용 등을 나타내는, 유 기산 또는 유기 아미노 화합물(단, 상기 수소 공여체를 제외함) 등을 들 수 있다.The additive includes an organic acid or an organic amino compound (except for the hydrogen donor), which further improves the solubility of the radiation-sensitive composition in the alkaline developer and further suppresses the residual of the undissolved product after development. Etc. can be mentioned.
상기 유기산으로는 분자 중에 1개 이상의 카르복실기를 갖는, 지방족 카르복실산 또는 페닐기 함유 카르복실산이 바람직하다. As said organic acid, the aliphatic carboxylic acid or phenyl group containing carboxylic acid which has 1 or more carboxyl group in a molecule | numerator is preferable.
상기 지방족 카르복실산으로는, 예를 들면 As said aliphatic carboxylic acid, for example
포름산, 아세트산, 프로피온산, 부티르산, 발레르산, 피발산, 카프로산, 디에틸아세트산, 에난트산, 카프릴산 등의 모노카르복실산, Monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, diethylacetic acid, enanthic acid, caprylic acid,
옥살산, 말론산, 숙신산, 글루타르산, 아디프산, 피멜산, 수베르산, 아젤라산, 세박산, 브라실산, 메틸말론산, 에틸말론산, 디메틸말론산, 메틸숙신산, 테트라메틸숙신산, 시클로헥산디카르복실산, 이타콘산, 시트라콘산, 말레산, 푸마르산, 메사콘산 등의 디카르복실산, Oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, brasilic acid, methylmalonic acid, ethylmalonic acid, dimethylmalonic acid, methylsuccinic acid, tetramethylsuccinic acid, Dicarboxylic acids such as cyclohexanedicarboxylic acid, itaconic acid, citraconic acid, maleic acid, fumaric acid, mesaconic acid,
트리카르발릴산, 아코니트산, 캄포르산 등의 트리카르복실산 등을 들 수 있다. Tricarboxylic acids, such as a tricarvalic acid, aconitic acid, and a camphoric acid, etc. are mentioned.
또한, 상기 페닐기 함유 카르복실산으로는, 예를 들면 카르복실기가 직접페닐기에 결합된 화합물, 카르복실기가 탄소쇄를 통해 페닐기에 결합된 카르복실산 등을 들 수 있다. Examples of the phenyl group-containing carboxylic acid include compounds in which a carboxyl group is directly bonded to a phenyl group, carboxylic acid in which the carboxyl group is bonded to a phenyl group via a carbon chain, and the like.
페닐기 함유 카르복실산으로는, 예를 들면 As a phenyl group containing carboxylic acid, for example
벤조산, 톨루일산, 쿠민산, 헤멜리트산, 메시틸렌산 등의 방향족 모노카르복실산, Aromatic monocarboxylic acids such as benzoic acid, toluic acid, cuminic acid, hemelic acid and mesitylene acid,
프탈산, 이소프탈산, 테레프탈산 등의 방향족 디카르복실산, Aromatic dicarboxylic acids such as phthalic acid, isophthalic acid and terephthalic acid,
트리멜리트산, 트리메스산, 멜로판산, 피로멜리트산 등의 3가 이상의 방향족 폴리카르복실산, 및 Trivalent or higher aromatic polycarboxylic acids such as trimellitic acid, trimesic acid, melanoic acid and pyromellitic acid, and
페닐아세트산, 히드라트로프산, 히드로신남산, 만델산, 페닐숙신산, 아트로프산, 신남산, 신나밀리덴산, 쿠마르산, 움벨산 등을 들 수 있다. Phenylacetic acid, hydratropic acid, hydrocinnamic acid, mandelic acid, phenylsuccinic acid, atroic acid, cinnamic acid, cinnamiledic acid, kumaric acid, umbelic acid and the like.
이들 유기산 중, 알칼리 용해성, 후술하는 용매에 대한 용해성, 미노광부의 기판 상 또는 차광층 상에 있어서의 바탕 오염이나 막 잔여 방지 등의 측면에서, 지방족 카르복실산으로는 지방족 디카르복실산이 바람직하고, 특히, 말론산, 아디프산, 이타콘산, 시트라콘산, 푸마르산, 메사콘산 등이 바람직하다. 또한, 페닐기 함유 카르복실산으로는 방향족 디카르복실산이 바람직하고, 특히, 프탈산이 바람직하다. Among these organic acids, aliphatic dicarboxylic acid is preferable as the aliphatic carboxylic acid from the viewpoint of alkali solubility, solubility in a solvent to be described later, ground contamination on the substrate or light shielding layer of the unexposed part, and prevention of film residue. In particular, malonic acid, adipic acid, itaconic acid, citraconic acid, fumaric acid, mesaconic acid and the like are preferable. Moreover, as a phenyl group containing carboxylic acid, aromatic dicarboxylic acid is preferable and phthalic acid is especially preferable.
상기 유기산은 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said organic acid can be used individually or in mixture of 2 or more types.
유기산의 사용량은 감방사선성 조성물 전체에 대하여 바람직하게는 15 중량% 이하, 보다 바람직하게는 10 중량% 이하이다. 유기산의 사용량이 15 중량%를 초과하면, 형성된 착색층의 기판에 대한 밀착성이 저하되는 경향이 있다. The amount of the organic acid used is preferably 15% by weight or less, and more preferably 10% by weight or less based on the whole radiation-sensitive composition. When the usage-amount of an organic acid exceeds 15 weight%, there exists a tendency for adhesiveness with respect to the board | substrate of the formed colored layer to fall.
또한, 상기 유기 아미노 화합물로는 분자 중에 1개 이상의 아미노기를 갖는, 지방족 아민 또는 페닐기 함유 아민이 바람직하다. As the organic amino compound, an aliphatic amine or a phenyl group-containing amine having one or more amino groups in the molecule is preferable.
상기 지방족 아민으로는, 예를 들면As said aliphatic amine, it is, for example
n-프로필아민, i-프로필아민, n-부틸아민, i-부틸아민, sec-부틸아민, t-부틸아민, n-펜틸아민, n-헥실아민, n-헵틸아민, n-옥틸아민, n-노닐아민, n-데실아민, n-운데실아민, n-도데실아민, 시클로헥실아민, 2-메틸시클로헥실아민, 3-메틸시클로헥실아민, 4-메틸시클로헥실아민, 2-에틸시클로헥실아민, 3-에틸시클로헥실 아민, 4-에틸시클로헥실아민 등의 모노(시클로)알킬아민,n-propylamine, i-propylamine, n-butylamine, i-butylamine, sec-butylamine, t-butylamine, n-pentylamine, n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, n-decylamine, n-undecylamine, n-dodecylamine, cyclohexylamine, 2-methylcyclohexylamine, 3-methylcyclohexylamine, 4-methylcyclohexylamine, 2-ethyl Mono (cyclo) alkylamines such as cyclohexylamine, 3-ethylcyclohexyl amine, 4-ethylcyclohexylamine,
메틸에틸아민, 디에틸아민, 메틸 n-프로필아민, 에틸 n-프로필아민, 디-n-프로필아민, 디-i-프로필아민, 디-n-부틸아민, 디-i-부틸아민, 디-sec-부틸아민, 디-t-부틸아민, 디-n-펜틸아민, 디-n-헥실아민, 메틸시클로헥실아민, 에틸시클로헥실아민, 디시클로헥실아민 등의 디(시클로)알킬아민, Methylethylamine, diethylamine, methyl n-propylamine, ethyl n-propylamine, di-n-propylamine, di-i-propylamine, di-n-butylamine, di-i-butylamine, di- di (cyclo) alkylamines such as sec-butylamine, di-t-butylamine, di-n-pentylamine, di-n-hexylamine, methylcyclohexylamine, ethylcyclohexylamine, dicyclohexylamine,
디메틸에틸아민, 메틸디에틸아민, 트리에틸아민, 디메틸 n-프로필아민, 디에틸 n-프로필아민, 메틸 디-n-프로필아민, 에틸 디-n-프로필아민, 트리-n-프로필아민, 트리-i-프로필아민, 트리-n-부틸아민, 트리-i-부틸아민, 트리-sec-부틸아민, 트리-t-부틸아민, 트리-n-펜틸아민, 트리-n-헥실아민, 디메틸시클로헥실아민, 디에틸시클로헥실아민, 메틸디시클로헥실아민, 에틸디시클로헥실아민, 트리시클로헥실아민 등의 트리(시클로)알킬아민, Dimethylethylamine, methyldiethylamine, triethylamine, dimethyl n-propylamine, diethyl n-propylamine, methyl di-n-propylamine, ethyl di-n-propylamine, tri-n-propylamine, tri -i-propylamine, tri-n-butylamine, tri-i-butylamine, tri-sec-butylamine, tri-t-butylamine, tri-n-pentylamine, tri-n-hexylamine, dimethylcyclo Tri (cyclo) alkylamines such as hexylamine, diethylcyclohexylamine, methyldicyclohexylamine, ethyldicyclohexylamine, tricyclohexylamine,
2-아미노에탄올, 3-아미노-1-프로판올, 1-아미노-2-프로판올, 4-아미노-1-부탄올, 5-아미노-1-펜탄올, 6-아미노-1-헥산올, 4-아미노-1-시클로헥산올 등의 모노(시클로)알칸올아민, 2-aminoethanol, 3-amino-1-propanol, 1-amino-2-propanol, 4-amino-1-butanol, 5-amino-1-pentanol, 6-amino-1-hexanol, 4-amino Mono (cyclo) alkanolamines such as -1-cyclohexanol,
디에탄올아민, 디-n-프로판올아민, 디-i-프로판올아민, 디-n-부탄올아민, 디-i-부탄올아민, 디-n-펜탄올아민, 디-n-헥산올아민, 디(4-시클로헥산올)아민 등의 디(시클로)알칸올아민, Diethanolamine, di-n-propanolamine, di-i-propanolamine, di-n-butanolamine, di-i-butanolamine, di-n-pentanolamine, di-n-hexanolamine, di ( Di (cyclo) alkanolamines such as 4-cyclohexanol) amine,
트리에탄올아민, 트리-n-프로판올아민, 트리-i-프로판올아민, 트리-n-부탄올아민, 트리-i-부탄올아민, 트리-n-펜탄올아민, 트리-n-헥산올아민, 트리(4-시클로헥산올)아민 등의 트리(시클로)알칸올아민, Triethanolamine, tri-n-propanolamine, tri-i-propanolamine, tri-n-butanolamine, tri-i-butanolamine, tri-n-pentanolamine, tri-n-hexanolamine, tri (4 Tri (cyclo) alkanolamines such as -cyclohexanol) amine,
3-아미노-1,2-프로판디올, 2-아미노-1,3-프로판디올, 4-아미노-1,2-부탄디올, 4-아미노-1,3-부탄디올, 4-아미노-1,2-시클로헥산디올, 4-아미노-1,3-시클로헥산디올, 3-디메틸아미노-1,2-프로판디올, 3-디에틸아미노-1,2-프로판디올, 2-디메틸아미노-1,3-프로판디올, 2-디에틸아미노-1,3-프로판디올 등의 아미노(시클로)알칸디올, 3-amino-1,2-propanediol, 2-amino-1,3-propanediol, 4-amino-1,2-butanediol, 4-amino-1,3-butanediol, 4-amino-1,2- Cyclohexanediol, 4-amino-1,3-cyclohexanediol, 3-dimethylamino-1,2-propanediol, 3-diethylamino-1,2-propanediol, 2-dimethylamino-1,3- Amino (cyclo) alkanediols such as propanediol and 2-diethylamino-1,3-propanediol,
1-아미노시클로펜탄메탄올, 4-아미노시클로펜탄메탄올, 1-아미노시클로헥산메탄올, 4-아미노시클로헥산메탄올, 4-디메틸아미노시클로펜탄메탄올, 4-디에틸아미노시클로펜탄메탄올, 4-디메틸아미노시클로헥산메탄올, 4-디에틸아미노시클로헥산메탄올 등의 아미노기 함유 시클로알칸메탄올, 1-aminocyclopentanmethanol, 4-aminocyclopentanmethanol, 1-aminocyclohexanemethanol, 4-aminocyclohexanemethanol, 4-dimethylaminocyclopentanmethanol, 4-diethylaminocyclopentanmethanol, 4-dimethylaminocyclo Amino group-containing cycloalkanethanol, such as hexanemethanol and 4-diethylaminocyclohexanemethanol,
β-알라닌, 2-아미노부티르산, 3-아미노부티르산, 4-아미노부티르산, 2-아미노이소부티르산, 3-아미노이소부티르산, 2-아미노발레르산, 5-아미노발레르산, 6-아미노카프로산, 1-아미노시클로프로판카르복실산, 1-아미노시클로헥산카르복실산, 4-아미노시클로헥산카르복실산 등의 아미노카르복실산 등을 들 수 있다. β-alanine, 2-aminobutyric acid, 3-aminobutyric acid, 4-aminobutyric acid, 2-aminoisobutyric acid, 3-aminoisobutyric acid, 2-aminovaleric acid, 5-aminovaleric acid, 6-aminocaproic acid, 1 And aminocarboxylic acids such as -aminocyclopropanecarboxylic acid, 1-aminocyclohexanecarboxylic acid, and 4-aminocyclohexanecarboxylic acid.
또한, 상기 페닐기 함유 아민으로는, 예를 들면 아미노기가 직접 페닐기에 결합된 화합물, 아미노기가 탄소쇄를 통해 페닐기에 결합된 화합물 등을 들 수 있다. Moreover, as said phenyl group containing amine, the compound etc. which the amino group couple | bonded with the phenyl group directly, the amino group couple | bonded with the phenyl group through the carbon chain, etc. are mentioned, for example.
페닐기 함유 아민으로는, 예를 들면 As a phenyl group containing amine, it is, for example
아닐린, 2-메틸아닐린, 3-메틸아닐린, 4-메틸아닐린, 4-에틸아닐린, 4-n-프로필아닐린, 4-i-프로필아닐린, 4-n-부틸아닐린, 4-t-부틸아닐린, 1-나프틸아민, 2-나프틸아민, N,N-디메틸아닐린, N,N-디에틸아닐린, 4-메틸-N,N-디메틸아닐린 등 의 방향족 아민, Aniline, 2-methylaniline, 3-methylaniline, 4-methylaniline, 4-ethylaniline, 4-n-propylaniline, 4-i-propylaniline, 4-n-butylaniline, 4-t-butylaniline, Aromatic amines such as 1-naphthylamine, 2-naphthylamine, N, N-dimethylaniline, N, N-diethylaniline, 4-methyl-N, N-dimethylaniline,
2-아미노벤질알코올, 3-아미노벤질알코올, 4-아미노벤질알코올, 4-디메틸아미노벤질알코올, 4-디에틸아미노벤질알코올 등의 아미노벤질알코올, Aminobenzyl alcohols such as 2-aminobenzyl alcohol, 3-aminobenzyl alcohol, 4-aminobenzyl alcohol, 4-dimethylaminobenzyl alcohol, 4-diethylaminobenzyl alcohol,
2-아미노페놀, 3-아미노페놀, 4-아미노페놀, 4-디메틸아미노페놀, 4-디에틸아미노페놀 등의 아미노페놀 등을 들 수 있다. And aminophenols such as 2-aminophenol, 3-aminophenol, 4-aminophenol, 4-dimethylaminophenol, and 4-diethylaminophenol.
후술하는 용매에 대한 용해성, 미노광부의 기판 상 또는 차광층 상의 바탕 오염이나 막 잔여 방지 등의 측면에서, 이들 유기 아미노 화합물 중, 지방족 아민으로서는 모노(시클로)알칸올아민, 아미노(시클로)알칸디올이 바람직하고, 특히, 2-아미노에탄올, 3-아미노-1-프로판올, 5-아미노-1-펜탄올, 3-아미노-1,2-프로판디올, 2-아미노-1,3-프로판디올, 4-아미노-1,2-부탄디올 등이 바람직하다. 또한, 페닐기 함유 아민으로는 아미노페놀류가 바람직하고, 특히, 2-아미노페놀, 3-아미노페놀, 4-아미노페놀 등이 바람직하다. Among these organic amino compounds, mono (cyclo) alkanolamines and amino (cyclo) alkanediols are mentioned as aliphatic amines in view of solubility in a solvent to be described later, background contamination on the substrate or the light shielding layer of the unexposed part, and the like. Preferred are, in particular, 2-aminoethanol, 3-amino-1-propanol, 5-amino-1-pentanol, 3-amino-1,2-propanediol, 2-amino-1,3-propanediol, 4-amino-1,2-butanediol and the like are preferable. Moreover, as a phenyl group containing amine, aminophenols are preferable and 2-aminophenol, 3-aminophenol, 4-aminophenol etc. are especially preferable.
상기 유기 아미노 화합물은 단독으로 또는 2종 이상 혼합하여 사용할 수 있다. The said organic amino compound can be used individually or in mixture of 2 or more types.
유기 아미노 화합물의 사용량은 감방사선성 조성물 전체에 대하여 바람직하게는 15 중량% 이하, 보다 바람직하게는 10 중량% 이하이다. 유기 아미노 화합물의 사용량이 15 중량%를 초과하면, 형성된 착색층의 기판에 대한 밀착성이 저하되는 경향이 있다. The usage-amount of an organic amino compound becomes like this. Preferably it is 15 weight% or less, More preferably, it is 10 weight% or less with respect to the whole radiation sensitive composition. When the usage-amount of an organic amino compound exceeds 15 weight%, there exists a tendency for adhesiveness with respect to the board | substrate of the formed colored layer to fall.
또한, 상기 유기산 및 유기 아미노 화합물 이외의 첨가제로는, 예를 들면 구리 프탈로시아닌 유도체 등의 청색 안료 유도체나 황색 안료 유도체 등의 분산 보 조제, Moreover, as additives other than the said organic acid and organic amino compound, For example, dispersion adjuvant, such as blue pigment derivatives, such as a copper phthalocyanine derivative, a yellow pigment derivative,
유리, 알루미나 등의 충전제, Fillers such as glass and alumina,
폴리비닐알코올, 폴리에틸렌글리콜모노알킬에테르, 폴리(플루오로알킬아크릴레이트) 등의 고분자 화합물, Polymer compounds such as polyvinyl alcohol, polyethylene glycol monoalkyl ether, poly (fluoroalkyl acrylate),
비이온계, 양이온계, 음이온계 등의 계면활성제, Surfactants such as nonionic, cationic and anionic systems,
비닐트리메톡시실란, 비닐트리에톡시실란, 비닐트리스(2-메톡시에톡시)실란, N-(2-아미노에틸)-3-아미노프로필메틸디메톡시실란, N-(2-아미노에틸)-3-아미노프로필트리메톡시실란, 3-아미노프로필트리에톡시실란, 3-글리시독시프로필트리메톡시실란, 3-글리시독시프로필메틸디메톡시실란, 2-(3,4-에폭시시클로헥실)에틸트리메톡시실란, 3-클로로프로필메틸디메톡시실란, 3-클로로프로필트리메톡시실란, 3-메타크릴로일옥시프로필트리메톡시실란, 3-머캅토프로필트리메톡시실란 등의 밀착 촉진제, Vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris (2-methoxyethoxy) silane, N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane, N- (2-aminoethyl) 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2- (3,4-epoxycyclo Hexyl) ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloyloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, etc. Adhesion promoter,
2,2'-티오비스(4-메틸-6-t-부틸페놀), 2,6-디-t-부틸페놀 등의 산화 방지제,Antioxidants such as 2,2'-thiobis (4-methyl-6-t-butylphenol) and 2,6-di-t-butylphenol,
2-(3-t-부틸-5-메틸-2-히드록시페닐)-5-클로로벤조트리아졸, 알콕시벤조페논류 등의 자외선 흡수제, Ultraviolet absorbers such as 2- (3-t-butyl-5-methyl-2-hydroxyphenyl) -5-chlorobenzotriazole and alkoxybenzophenones,
폴리아크릴산나트륨 등의 응집 방지제, Agglomeration inhibitors such as sodium polyacrylate,
1,1'-아조비스(시클로헥산-1-카르보니트릴), 2-페닐아조-4-메톡시-2,4-디메틸발레로니트릴 등의 열 라디칼 발생제 등을 들 수 있다. And thermal radical generators such as 1,1'-azobis (cyclohexane-1-carbonitrile) and 2-phenylazo-4-methoxy-2,4-dimethylvaleronitrile.
용매menstruum
본 발명의 감방사선성 조성물은 상기 (A) 내지 (D) 성분을 필수 성분으로 하 며, 필요에 따라 상기 첨가제 성분을 함유하지만, 바람직하게는 용매를 배합하여 액상 조성물로서 제조된다. The radiation sensitive composition of the present invention contains the above-mentioned (A) to (D) components as essential components and, if necessary, contains the additive component, but is preferably prepared as a liquid composition by blending a solvent.
상기 용매로는 감방사선성 조성물을 구성하는 (A) 내지 (D) 성분이나 첨가제 성분을 분산 또는 용해시키면서, 이들 성분과 반응하지 않고, 적절한 휘발성을 갖는 것인 한, 적절히 선택하여 사용할 수 있다. The solvent may be appropriately selected and used as long as it does not react with these components while dispersing or dissolving the components (A) to (D) and the additive component constituting the radiation-sensitive composition.
이러한 용매로는, 예를 들면 As such a solvent, for example
에틸렌글리콜 모노메틸에테르, 에틸렌글리콜 모노에틸에테르, 에틸렌글리콜 모노-n-프로필에테르, 에틸렌글리콜 모노-n-부틸에테르, 디에틸렌글리콜 모노메틸에테르, 디에틸렌글리콜 모노에틸에테르, 디에틸렌글리콜 모노-n-프로필에테르, 디에틸렌글리콜 모노-n-부틸에테르, 트리에틸렌글리콜 모노메틸에테르, 트리에틸렌글리콜 모노에틸에테르, 프로필렌글리콜 모노메틸에테르, 프로필렌글리콜 모노에틸에테르, 프로필렌글리콜 모노-n-프로필에테르, 프로필렌글리콜 모노-n-부틸에테르, 디프로필렌글리콜 모노메틸에테르, 디프로필렌글리콜 모노에틸에테르, 디프로필렌글리콜 모노-n-프로필에테르, 디프로필렌글리콜 모노-n-부틸에테르, 트리프로필렌글리콜 모노메틸에테르, 트리프로필렌글리콜 모노에틸에테르 등의 (폴리)알킬렌글리콜 모노알킬에테르, Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol mono-n -Propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene Glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tri (Poly) alkylene glycol monoalkyl such as propylene glycol monoethyl ether Termini,
에틸렌글리콜 모노메틸에테르아세테이트, 에틸렌글리콜 모노에틸에테르아세테이트, 디에틸렌글리콜 모노메틸에테르아세테이트, 디에틸렌글리콜 모노에틸에테르아세테이트, 프로필렌글리콜 모노메틸에테르아세테이트, 프로필렌글리콜 모노에틸에테르아세테이트 등의 (폴리)알킬렌글리콜 모노알킬에테르아세테이트,(Poly) alkylenes such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate Glycol monoalkyl ether acetates,
디에틸렌글리콜 디메틸에테르, 디에틸렌글리콜 메틸에틸에테르, 디에틸렌글리콜 디에틸에테르, 테트라히드로푸란 등의 다른 에테르, Other ethers such as diethylene glycol dimethyl ether, diethylene glycol methylethyl ether, diethylene glycol diethyl ether, tetrahydrofuran,
메틸에틸케톤, 시클로헥사논, 2-헵타논, 3-헵타논 등의 케톤, Ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone,
락트산메틸, 락트산에틸 등의 락트산알킬 에스테르, Lactic acid alkyl esters such as methyl lactate and ethyl lactate,
2-히드록시-2-메틸프로피온산 에틸, 3-메톡시프로피온산 메틸, 3-메톡시프로피온산 에틸, 3-에톡시프로피온산 메틸, 3-에톡시프로피온산 에틸, 에톡시아세트산 에틸, 히드록시아세트산 에틸, 2-히드록시-3-메틸부탄산 메틸, 3-메틸-3-메톡시부틸아세테이트, 3-메틸-3-메톡시부틸프로피오네이트, 아세트산 에틸, 아세트산 n-프로필, 아세트산 i-프로필, 아세트산 n-부틸, 아세트산 i-부틸, 포름산 n-아밀, 아세트산 i-아밀, 프로피온산 n-부틸, 부티르산 에틸, 부티르산 n-프로필, 부티르산 i-프로필, 부티르산 n-부틸, 피루브산 메틸, 피루브산 에틸, 피루브산 n-프로필, 아세토아세트산 메틸, 아세토아세트산 에틸, 2-옥소부탄산 에틸 등의 다른 에스테르, Ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, 2 Methyl hydroxy-3-methylbutanoate, 3-methyl-3-methoxybutylacetate, 3-methyl-3-methoxybutylpropionate, ethyl acetate, n-propyl acetate, i-propyl acetate, acetic acid n -Butyl, i-butyl acetate, n-amyl formate, i-amyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, i-propyl butyrate, n-butyl butyrate, methyl pyruvate, ethyl pyruvate, n-pyruvate Other esters such as propyl, methyl acetoacetate, ethyl acetoacetate, ethyl 2-oxobutanoate,
톨루엔, 크실렌 등의 방향족 탄화수소, Aromatic hydrocarbons such as toluene and xylene,
N,N-디메틸포름아미드, N,N-디메틸아세트아미드, N-메틸피롤리돈 등의 아미드 또는 락탐 등을 들 수 있다. Amides or lactams such as N, N-dimethylformamide, N, N-dimethylacetamide, N-methylpyrrolidone and the like.
이들 용매 중, 용해성, 안료 분산성, 도포성 등의 측면에서, 프로필렌글리콜 모노메틸에테르, 에틸렌글리콜 모노메틸에테르아세테이트, 프로필렌글리콜 모노메틸에테르아세테이트, 프로필렌글리콜 모노에틸에테르아세테이트, 디에틸렌글리콜 디메틸에테르, 디에틸렌글리콜 메틸에틸에테르, 시클로헥사논, 2-헵타논, 3-헵타 논, 락트산 에틸, 3-메톡시프로피온산 에틸, 3-에톡시프로피온산 메틸, 3-에톡시프로피온산 에틸, 3-메틸-3-메톡시부틸프로피오네이트, 아세트산 n-부틸, 아세트산 i-부틸, 포름산 n-아밀, 아세트산 i-아밀, 프로피온산 n-부틸, 부티르산 에틸, 부티르산 i-프로필, 부티르산 n-부틸, 피루브산 에틸 등이 바람직하다. Among these solvents, propylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, diethylene glycol dimethyl ether, in view of solubility, pigment dispersibility, coating property, etc. Diethylene glycol methylethyl ether, cyclohexanone, 2-heptanone, 3-heptanone, ethyl lactate, 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, 3-methyl-3 Methoxybutyl propionate, n-butyl acetate, i-butyl acetate, n-amyl formate, i-amyl acetate, n-butyl propionate, ethyl butyrate, ethyl butyrate i-propyl, n-butyl butyrate, ethyl pyruvate, etc. desirable.
상기 용매는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. The said solvent can be used individually or in mixture of 2 or more types.
또한, 상기 용매와 함께, 벤질에틸에테르, 디-n-헥실에테르, 아세토닐아세톤, 이소포론, 카프로산, 카프릴산, 1-옥탄올, 1-노난올, 벤질알코올, 아세트산 벤질, 벤조산 에틸, 옥살산 디에틸, 말레산 디에틸, γ-부티로락톤, 탄산에틸렌, 탄산프로필렌, 에틸렌글리콜 모노페닐에테르아세테이트 등의 고비점 용매를 병용할 수도 있다. In addition, with the solvent, benzyl ethyl ether, di-n-hexyl ether, acetonyl acetone, isophorone, caproic acid, caprylic acid, 1-octanol, 1-nonanol, benzyl alcohol, benzyl acetate, ethyl benzoate And high boiling point solvents such as diethyl oxalate, diethyl maleate, γ-butyrolactone, ethylene carbonate, propylene carbonate, and ethylene glycol monophenyl ether acetate.
이들 고비점 용매는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. These high boiling point solvents can be used individually or in mixture of 2 or more types.
용매의 사용량은 특별히 한정되는 것은 아니지만, 얻어지는 감방사선성 조성물의 도포성, 안정성 등의 측면에서, 해당 조성물의 용매를 제외한 각 성분의 합계 농도가 바람직하게는 5 내지 50 중량%, 보다 바람직하게는 10 내지 40 중량%가 되는 양이 바람직하다. Although the usage-amount of a solvent is not specifically limited, From a viewpoint of the applicability | paintability, stability, etc. of the radiation sensitive composition obtained, the total concentration of each component except the solvent of the said composition becomes like this. Preferably it is 5-50 weight%, More preferably, It is preferable that the amount is 10 to 40% by weight.
컬러 필터Color filter
본 발명의 컬러 필터는 본 발명의 감방사선성 조성물로 형성된 착색층을 갖는다. The color filter of this invention has the colored layer formed from the radiation sensitive composition of this invention.
이하에, 본 발명의 컬러 필터를 형성하는 방법에 대하여 설명한다. Hereinafter, the method of forming the color filter of this invention is demonstrated.
우선, 기판의 표면 상에 필요에 따라 화소를 형성하는 부분을 구획하도록 차 광층을 형성하고, 이 기판 상에, 예를 들면 적색 안료가 분산된 감방사선성 조성물의 액상 조성물을 도포한 후, 프리베이킹을 행하여 용매를 증발시켜서 도막을 형성한다. First, a light shielding layer is formed on the surface of a substrate so as to partition a part which forms a pixel as needed, and after apply | coating the liquid composition of the radiation sensitive composition which red pigment disperse | distributed on this board | substrate, for example, Baking is performed to evaporate the solvent to form a coating film.
이어서, 이 도막을 포토마스크를 통해 노광한 후, 알칼리 현상액을 이용하여 현상하여 도막의 미노광부를 용해 제거하고, 그 후 포스트베이킹함으로써, 적색의 화소 패턴이 소정 배열로 배치된 화소 어레이를 형성한다. Subsequently, after exposing this coating film through a photomask, it develops using alkaline developing solution, melt | dissolves and removes the unexposed part of a coating film, and then post-bakes, and forms the pixel array in which the red pixel pattern was arrange | positioned in the predetermined array. .
그 후, 녹색 또는 청색의 안료가 분산된 각 감방사선성 조성물의 액상 조성물을 이용하여, 상기와 동일하게 각 액상 조성물의 도포, 프리베이킹, 노광, 현상 및 포스트베이킹을 행하여, 녹색의 화소 어레이 및 청색의 화소 어레이를 동일 기판 상에 차례로 형성함으로써, 적색, 녹색 및 청색의 3원색의 화소 어레이가 기판 상에 배치된 컬러 필터를 얻는다. 단, 본 발명에서는 각 색의 화소를 형성하는 순서는 상기한 것에 한정되지 않는다. Thereafter, using the liquid composition of each radiation-sensitive composition in which a green or blue pigment is dispersed, coating, prebaking, exposure, developing and postbaking of each liquid composition are carried out in the same manner as above, and the green pixel array and By sequentially forming blue pixel arrays on the same substrate, a color filter in which pixel arrays of three primary colors of red, green and blue are arranged on a substrate is obtained. However, in the present invention, the order of forming the pixels of each color is not limited to the above.
또한, 블랙 매트릭스는 본 발명의 감방사선성 조성물을 이용하여 상기 화소 형성의 경우와 동일하게 하여 형성할 수 있다. The black matrix can be formed in the same manner as in the case of the pixel formation by using the radiation-sensitive composition of the present invention.
화소 및/또는 블랙 매트릭스를 형성할 때에 사용되는 기판으로는, 예를 들면 유리, 실리콘, 폴리카보네이트, 폴리에스테르, 방향족 폴리아미드, 폴리 아미드이미드, 폴리이미드 등을 들 수 있다. As a board | substrate used when forming a pixel and / or a black matrix, glass, silicone, a polycarbonate, polyester, aromatic polyamide, polyamideimide, polyimide, etc. are mentioned, for example.
또한, 이들 기판에는 원한다면 실란 커플링제 등에 의한 약품 처리, 플라즈마 처리, 이온 플레이팅, 스퍼터링, 기상 반응법, 진공 증착 등의 적절한 전처리를 실시해 둘 수도 있다.If desired, these substrates may be subjected to appropriate pretreatment such as chemical treatment with a silane coupling agent or the like, plasma treatment, ion plating, sputtering, vapor phase reaction, vacuum deposition, or the like.
감방사선성 조성물의 액상 조성물을 기판에 도포할 때에는, 예를 들면 분무법, 롤 코팅법, 회전 도포법(스핀 코팅법), 슬릿 다이 도포법, 바 도포법, 잉크젯법 등의 적절한 도포법을 채용할 수 있다. 특히, 스핀 코팅법, 슬릿 다이 도포법이 바람직하다. When apply | coating the liquid composition of a radiation sensitive composition to a board | substrate, the appropriate coating methods, such as the spraying method, the roll coating method, the spin coating method (spin coating method), the slit die coating method, the bar coating method, the inkjet method, are employ | adopted, for example. can do. In particular, the spin coating method and the slit die coating method are preferable.
도포 두께는 건조 후의 막 두께로서, 바람직하게는 0.1 내지 10 ㎛, 보다 바람직하게는 0.2 내지 8.0 ㎛, 특히 바람직하게는 0.2 내지 6.0 ㎛이다. The coating thickness is a film thickness after drying, preferably 0.1 to 10 mu m, more preferably 0.2 to 8.0 mu m, particularly preferably 0.2 to 6.0 mu m.
화소 및/또는 블랙 매트릭스를 형성할 때에 사용되는 방사선으로는, 예를 들면 가시광선, 자외선, 원자외선, 전자선, X선 등을 사용할 수 있다. 파장이 190 내지 450 ㎚의 범위에 있는 방사선이 바람직하다. As radiation used when forming the pixel and / or black matrix, for example, visible light, ultraviolet light, deep ultraviolet light, electron beam, X-ray, or the like can be used. Preference is given to radiation in which the wavelength is in the range of 190 to 450 nm.
방사선의 노광량은 바람직하게는 10 내지 10,000 J/㎡이다. The exposure dose of radiation is preferably 10 to 10,000 J / m 2.
또한, 상기 알칼리 현상액으로는, 예를 들면 탄산나트륨, 수산화나트륨, 수산화칼륨, 테트라메틸암모늄히드록시드, 콜린, 1,8-디아자비시클로-[5.4.0]-7-운데센, 1,5-디아자비시클로-[4.3.0]-5-노넨 등의 수용액이 바람직하다. Moreover, as said alkaline developing solution, for example, sodium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, choline, 1,8- diazabicyclo- [5.4.0] -7-undecene, 1,5 Aqueous solutions, such as -diazabicyclo- [4.3.0] -5-nonene, are preferable.
상기 알칼리 현상액에는, 예를 들면 메탄올, 에탄올 등의 수용성 유기 용제나 계면활성제 등을 적량 첨가할 수도 있다. 한편, 알칼리 현상 후에는 바람직하게는 수세한다. An appropriate amount of water-soluble organic solvents such as methanol and ethanol, surfactants, and the like may be added to the alkaline developer. On the other hand, after alkali development, it washes with water preferably.
현상 처리법으로는, 예를 들면 샤워 현상법, 분무 현상법, 딥(침지) 현상법, 퍼들(액 담금) 현상법 등을 적용할 수 있다. 현상 조건은 상온에서 5 내지 300초가 바람직하다. As the development treatment method, for example, a shower development method, a spray development method, a dip (immersion) development method, a puddle (liquid immersion) development method, or the like can be applied. As for image development conditions, 5 to 300 second is preferable at normal temperature.
이와 같이 하여 얻어지는 본 발명의 컬러 필터는, 예를 들면 투과형 또는 반 사형 컬러 액정 표시 소자, 컬러 촬상관 소자, 컬러 센서 등에 매우 유용하다. Thus, the color filter of this invention obtained is very useful for a transmissive or semi-reflective color liquid crystal display element, a color image tube element, a color sensor, etc., for example.
액정 표시 소자Liquid crystal display device
본 발명의 액정 표시 소자는 본 발명의 컬러 필터를 구비하는 것이다. The liquid crystal display element of this invention is equipped with the color filter of this invention.
또한, 본 발명의 액정 표시 소자의 일 실시 형태로서, 본 발명의 감방사선성 조성물을 이용하여, 박막 트랜지스터 기판 어레이 상에, 상술한 바와 같이 하여 화소 및/또는 블랙 매트릭스를 형성함으로써, 특히 우수한 특성을 갖는 액정 표시 소자를 제조할 수 있다. Moreover, as one Embodiment of the liquid crystal display element of this invention, using the radiation sensitive composition of this invention, forming a pixel and / or a black matrix on a thin film transistor substrate array as mentioned above is especially excellent characteristic. The liquid crystal display element which has can be manufactured.
본 발명의 감방사선성 조성물은 상기 (A) 내지 (D) 성분을 필수 성분으로서 함유하는 것이지만, 특히 바람직한 조성물을 구체적으로 예시하면, 하기 (가) 내지 (다)와 같다. Although the radiation sensitive composition of this invention contains the said (A)-(D) component as an essential component, when a particularly preferable composition is concretely illustrated, it is as follows (a)-(c).
(가) (B) 알칼리 가용성 수지가 카르복실기 함유 공중합체(B1)를 포함하는 감방사선성 조성물. (A) The radiation sensitive composition in which (B) alkali-soluble resin contains a carboxyl group-containing copolymer (B1).
(나) (C) 다관능성 단량체가 트리메틸올프로판 트리아크릴레이트, 펜타에리트리톨 트리아크릴레이트 및 디펜타에리트리톨 헥사아크릴레이트의 군에서 선택되는 1종 이상을 포함하는 상기 (가)의 감방사선성 조성물. (B) The radiation-sensitive properties of (a), wherein the polyfunctional monomer (C) comprises at least one member selected from the group consisting of trimethylolpropane triacrylate, pentaerythritol triacrylate, and dipentaerythritol hexaacrylate. Composition.
(다) 광 라디칼 발생제(D1)가 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-아세테이트를 포함하는 상기 (가) 또는 (나)의 감방사선성 조성물. (C) The radical radical generator (D1) is 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime-O-acetate The radiation-sensitive composition of the (A) or (B) comprising a.
또한, 본 발명의 바람직한 컬러 필터는 In addition, the preferred color filter of the present invention
(라) 상기 (가), (나) 또는 (다)의 감방사선성 조성물로 형성된 화소 및/또 는 블랙 매트릭스를 갖는다. (D) It has a pixel and / or a black matrix formed from the radiation sensitive composition of said (A), (B) or (C).
또한, 본 발명의 바람직한 액정 표시 소자는 Moreover, the preferable liquid crystal display element of this invention is
(마) 상기 (라)의 컬러 필터를 구비하고,(E) comprising the color filter of (d) above,
본 발명의 보다 바람직한 액정 표시 소자는 More preferred liquid crystal display device of the present invention
(바) 박막 트랜지스터 기판 어레이 상에 상기 (라)의 컬러 필터를 구비하고 있다. (F) The color filter of (d) is provided on the thin film transistor substrate array.
이상과 같이, 본 발명의 감방사선성 조성물은 특히 방사선에 대한 감도가 높은 광 라디칼 발생제(D1)와, 비이미다졸 화합물, 벤조페논 화합물, 티오크산톤 화합물 및 케토쿠마린 화합물로 이루어지는 군에서 선택되는 1종 이상의 광 라디칼 발생제(D2)를 포함하는 광 라디칼 발생제를 이용함으로써, 저노광량, 예를 들면, 설정 노광량 400 J/㎡, 및 가혹한 현상 조건, 예를 들면, 현상 온도 30 ℃, 샤워 압력 110 KPa, 현상액 유량 1.2 리터/분 하에서도 패턴 단부의 결손 및 언더 컷트가 생기지 않고, 또한 현상시에 미용해물이 잔존하거나, 패턴 단부에 스컴이 생기지 않는 양호한 화소 패턴 및 블랙 매트릭스 패턴을 형성할 수 있다. As mentioned above, the radiation sensitive composition of this invention is especially the group which consists of an optical radical generating agent (D1) with high sensitivity to radiation, a biimidazole compound, a benzophenone compound, a thioxanthone compound, and a ketocoumarin compound. By using an optical radical generator comprising at least one selected radical radical generator (D2), a low exposure amount, for example, a set exposure amount of 400 J / m 2, and a severe development condition, for example, a development temperature of 30 ° C. Even when the shower pressure is 110 KPa and the developer flow rate is 1.2 liter / min, there is no defect or undercut of the end of the pattern, and a good pixel pattern and a black matrix pattern in which undissolved matter remains at the time of development or scum does not occur at the end of the pattern are produced. Can be formed.
또한, 본 발명의 감방사선성 조성물을 이용하여 형성된 화소 및 블랙 매트릭스는 표면 평활성이 높고, 또한 기판과의 밀착성도 우수하다. Moreover, the pixel and black matrix formed using the radiation sensitive composition of this invention have high surface smoothness, and are excellent also in adhesiveness with a board | substrate.
따라서, 본 발명의 감방사선성 조성물은 전자 공업 분야에서의 액정 표시 소자용 컬러 필터를 비롯한 각종 컬러 필터의 제조에 매우 바람직하게 사용할 수 있다. Therefore, the radiation sensitive composition of this invention can be used very favorably for manufacture of various color filters including the color filter for liquid crystal display elements in the electronic industry.
실시예Example
이하, 실시예를 들어 본 발명을 더욱 구체적으로 설명한다. 본 발명은 하기 실시예에 한정되는 것은 아니다. Hereinafter, an Example is given and this invention is demonstrated further more concretely. The present invention is not limited to the following examples.
여기서, 부 및 %는 중량 기준이다.Where parts and% are based on weight.
<(B) 알칼리 가용성 수지의 제조><(B) Production of Alkali Soluble Resin>
합성예Synthesis Example 1 One
냉각관 및 교반기를 구비한 플라스크에, 2,2'-아조비스(2,4-디메틸발레로니트릴) 3부 및 프로필렌글리콜 모노메틸에테르아세테이트 200부를 넣고, 계속해서 메타크릴산 15부, 스티렌 15부, N-페닐말레이미드 25부, 벤질메타크릴레이트35부, 글리세롤 모노메타크릴레이트 10부 및 연쇄 이동제인 α-메틸스티렌 이량체 5부를 투입하여 질소 치환한 후, 서서히 교반하여 반응 용액을 80 ℃로 승온시키고, 이 온도를 유지하여 3 시간 중합하였다. 그 후, 반응 용액을 100 ℃로 승온시키고, 2,2'-아조비스(2,4-디메틸발레로니트릴) 0.5부를 가하고, 추가로 1 시간 중합함으로써 수지 용액(고형분 농도=33.0%)을 얻었다. In a flask equipped with a cooling tube and a stirrer, 3 parts of 2,2'-azobis (2,4-dimethylvaleronitrile) and 200 parts of propylene glycol monomethyl ether acetate were added, followed by 15 parts of methacrylic acid and styrene 15. Part, 25 parts of N-phenylmaleimide, 35 parts of benzyl methacrylate, 10 parts of glycerol monomethacrylate, and 5 parts of α-methylstyrene dimer as a chain transfer agent were added thereto for nitrogen replacement, and then the mixture was gradually stirred to give 80 parts of the reaction solution. It heated up at ° C, maintained this temperature, and superposed | polymerized for 3 hours. Thereafter, the reaction solution was heated to 100 ° C, 0.5 part of 2,2'-azobis (2,4-dimethylvaleronitrile) was added, and the resin solution (solid content concentration = 33.0%) was obtained by further polymerizing for 1 hour. .
얻어진 수지는 Mw=10,000, Mn=5,900이었다. 이 수지를 "수지(B-1)"로 한다. Obtained resin was Mw = 10,000 and Mn = 5,900. This resin is referred to as "resin (B-1)".
실시예Example 1 One
<액상 조성물의 제조><Production of Liquid Composition>
(A) 착색제로서 C.I. 피그먼트 블루 15:6과 C.I. 피그먼트 바이올렛 23과의 95/5(중량비) 혼합물 78부, (B) 알칼리 가용성 수지로서 수지(B-1) 60부, (C) 다관능성 단량체로서 디펜타에리트리톨 헥사아크릴레이트 90부, 광 라디칼 발생제(D1) 로서 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-아세테이트(상품명 CGI-242, 시바 스페셜티 케미컬즈사 제조. 이하 동일) 10부와 광 라디칼 발생제(D2)로서 2,4-디에틸티오크산톤(상품명 KAYACUREDETX-S, 닛본 가야꾸(주) 제조) 15부, 및 용매로서 시클로헥사논과 프로필렌글리콜 모노메틸에테르아세테이트와의 80/20(중량비) 혼합물 1,000 중량부를 혼합하여 감방사선성 조성물의 액상 조성물(B1)을 제조하였다. (A) As a coloring agent, C.I. Pigment Blue 15: 6 and C.I. 78 parts 95/5 (weight ratio) mixture with pigment violet 23, (B) 60 parts resin (B-1) as alkali-soluble resin, (C) 90 parts dipentaerythritol hexaacrylate as a polyfunctional monomer, light 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime-O-acetate (trade name CGI-) as a radical generator (D1) 242, manufactured by Ciba Specialty Chemicals Co., Ltd., 10 parts, and 2,4-diethyl thioxanthone (trade name KAYACUREDETX-S, manufactured by Nippon Kayaku Co., Ltd.) as a photo radical generator (D2), and 15 parts of solvent As a mixture, 1,000 parts by weight of a 80/20 (weight ratio) mixture of cyclohexanone and propylene glycol monomethyl ether acetate was mixed to prepare a liquid composition (B1) of a radiation sensitive composition.
<착색층의 형성><Formation of Colored Layer>
액상 조성물(B1)을, 표면에 나트륨 이온의 용출을 방지하는 SiO2막이 형성된 소다 유리 기판에 스핀 코터를 이용하여 도포한 후, 80 ℃의 핫 플레이트 상에서 100초간 프리베이킹을 행하여 막 두께 2.5 ㎛의 도막을 형성하였다. The liquid composition (B1) was applied to a soda glass substrate having a SiO 2 film formed thereon to prevent elution of sodium ions on its surface using a spin coater, and then prebaked for 100 seconds on an 80 ° C hot plate to obtain a film thickness of 2.5 μm. A coating film was formed.
이어서, 기판을 실온으로 냉각한 후, 고압 수은 램프를 이용하여 포토마스크(슬릿 폭 90 ㎛)를 통해 도막에 365 ㎚, 405 ㎚ 및 436 ㎚의 각 파장을 포함하는 자외선을 노광하였다. 이 때의 노광량은 400 J/㎡으로 낮은 값으로 설정하였다. 그 후, 기판을 0.04% 수산화칼륨 수용액을 이용하여 현상 온도 30 ℃, 샤워 압력 110 KPa, 현상액 유량 1.2 리터/분의 조건으로 샤워 현상하였다. 그 후, 기판을 초순수로 세정하고, 풍건한 후, 220 ℃의 클린 오븐 내에서 30분간 포스트베이킹을 행하여 기판 상에 청색 줄무늬형 화소 패턴이 배열된 화소 어레이를 형성하였다. Subsequently, after cooling the substrate to room temperature, ultraviolet rays containing respective wavelengths of 365 nm, 405 nm and 436 nm were exposed to the coating film through a photomask (slit width 90 mu m) using a high pressure mercury lamp. The exposure amount at this time was set to a low value at 400 J / m 2. Then, the board | substrate was shower-developed on the conditions of developing temperature of 30 degreeC, shower pressure of 110 KPa, and developing solution flow volume 1.2 liter / min using 0.04% potassium hydroxide aqueous solution. Subsequently, the substrate was washed with ultrapure water and air dried, followed by postbaking in a clean oven at 220 ° C. for 30 minutes to form a pixel array in which blue striped pixel patterns were arranged on the substrate.
<평가><Evaluation>
기판 상의 화소 어레이를 광학 현미경으로 관찰한 결과, 미노광부의 기판 상 에 현상 잔사는 보이지 않았고, 또한 화소 패턴의 단부에 스컴 및 결손은 보이지 않았다. As a result of observing the pixel array on the substrate with an optical microscope, no developing residue was observed on the substrate of the unexposed portion, and scum and defects were not seen at the end of the pixel pattern.
또한, 화소 패턴의 단면을 주사형 전자 현미경(SEM)으로 관찰한 결과, 언더 컷트는 보이지 않았다. Moreover, when the cross section of the pixel pattern was observed with the scanning electron microscope (SEM), the undercut was not seen.
비교예Comparative example 1 One
<액상 조성물의 제조 및 착색층의 형성><Production of Liquid Composition and Formation of Colored Layer>
광 라디칼 발생제로서, 광 라디칼 발생제(D1)인 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-아세테이트 10부만을 이용한 것 이외에는, 실시예 1과 동일하게 하여 감방사선성 조성물(b1)을 제조하였다. As an optical radical generator, 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime- which is an optical radical generator (D1) A radiation sensitive composition (b1) was produced in the same manner as in Example 1 except that only 10 parts of O-acetate were used.
이어서, 액상 조성물(B1) 대신에 액상 조성물(b1)을 이용한 것 이외에는, 실시예 1과 동일하게 하여 기판 상에 청색 줄무늬형 화소 패턴이 배열된 화소 어레이를 형성하였다. Subsequently, except for using the liquid composition (b1) instead of the liquid composition (B1), a pixel array in which blue striped pixel patterns were arranged on a substrate was formed in the same manner as in Example 1.
<평가><Evaluation>
기판 상의 화소 어레이를 광학 현미경으로 관찰한 결과, 미노광부의 기판 상에 현상 잔사는 보이지 않았지만, 화소 패턴의 단부의 결손 및 패턴 자체의 박리가 보였다. When the pixel array on the board | substrate was observed with the optical microscope, although the image development residue was not seen on the board | substrate of an unexposed part, the defect of the edge part of a pixel pattern and peeling of the pattern itself were seen.
또한, 화소 패턴의 단면을 주사형 전자 현미경(SEM)으로 관찰한 결과, 언더 컷트가 보였다. Moreover, when the cross section of the pixel pattern was observed with the scanning electron microscope (SEM), the undercut was seen.
실시예Example 2 2
<액상 조성물의 제조 및 착색층의 형성><Production of Liquid Composition and Formation of Colored Layer>
(A) 착색제로서 C.I. 피그먼트 블루 15:6과 C.I. 피그먼트 바이올렛 23의 95/5(중량비) 혼합물 80부, (B) 알칼리 가용성 수지로서 수지(B-1) 60부, (C) 다관능성 단량체로서 디펜타에리트리톨 헥사아크릴레이트 90부, 광 라디칼 발생제(D1)로서 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-아세테이트 5부와, 광 라디칼 발생제(D2)로서 2,2'-비스(2-클로로페닐)-4,5,4',5'-테트라키스(4-에톡시카르보닐페닐)-1,2'-비이미다졸 2부, 4,4'-비스(디에틸아미노)벤조페논 6부 및 2-머캅토벤조티아졸 2부, 및 용매로서 시클로헥사논과 프로필렌글리콜 모노메틸에테르아세테이트의 80/20(중량비) 혼합물 1,000 중량부를 혼합하여 감방사선성 조성물의 액상 조성물(B2)을 제조하였다. (A) As a coloring agent, C.I. Pigment Blue 15: 6 and C.I. 80 parts of 95/5 (weight ratio) mixture of pigment violet 23, (B) 60 parts of resin (B-1) as alkali-soluble resin, (C) 90 parts of dipentaerythritol hexaacrylate as a polyfunctional monomer, an optical radical 5 parts of 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime-O-acetate as a generator (D1), 2,2'-bis (2-chlorophenyl) -4,5,4 ', 5'-tetrakis (4-ethoxycarbonylphenyl) -1,2'-biimidazole as radical generator (D2) 2 parts, 4 parts of 4,4'-bis (diethylamino) benzophenone and 2 parts of 2-mercaptobenzothiazole and 80/20 (weight ratio) mixture of cyclohexanone and propylene glycol monomethyl ether acetate as solvent 1,000 By mixing the parts by weight to prepare a liquid composition (B2) of the radiation sensitive composition.
이어서, 액상 조성물(B1) 대신에 액상 조성물(B2)을 이용한 것 이외에는, 실시예 1과 동일하게 하여 기판 상에 청색 줄무늬형 화소 패턴이 배열된 화소 어레이를 형성하였다. Subsequently, except for using the liquid composition (B2) instead of the liquid composition (B1), a pixel array in which blue striped pixel patterns were arranged on a substrate was formed in the same manner as in Example 1.
<평가><Evaluation>
기판 상의 화소 어레이를 광학 현미경으로 관찰한 결과, 미노광부의 기판 상에 현상 잔사는 보이지 않았고, 또한 화소 패턴의 단부에 스컴 및 결손은 보이지 않았다.When the pixel array on the board | substrate was observed with the optical microscope, the development residue was not seen on the board | substrate of the unexposed part, and scum and defect were not seen at the edge part of a pixel pattern.
또한, 화소 패턴의 단면을 주사형 전자 현미경(SEM)으로 관찰한 결과, 언더 컷트는 보이지 않았다. Moreover, when the cross section of the pixel pattern was observed with the scanning electron microscope (SEM), the undercut was not seen.
비교예Comparative example 2 2
<액상 조성물의 제조 및 착색층의 형성><Production of Liquid Composition and Formation of Colored Layer>
광 라디칼 발생제로서, 광 라디칼 발생제(D1)인 1-[9-에틸-6-(2-메틸벤조일)-9.H.-카르바졸-3-일]-에탄-1-온옥심-O-아세테이트 5부만을 이용한 것 이외에는, 실시예 2와 동일하게 하여 감방사선성 조성물(b2)을 제조하였다. As an optical radical generator, 1- [9-ethyl-6- (2-methylbenzoyl) -9.H.-carbazol-3-yl] -ethane-1-one oxime- which is an optical radical generator (D1) A radiation sensitive composition (b2) was prepared in the same manner as in Example 2 except that only 5 parts of O-acetate were used.
이어서, 액상 조성물(B2) 대신에 액상 조성물(b2)을 이용한 것 이외에는, 실시예 2와 동일하게 하여 기판 상에 청색 줄무늬형 화소 패턴이 배열된 화소 어레이를 형성하였다. Subsequently, except for using the liquid composition (b2) instead of the liquid composition (B2), in the same manner as in Example 2, a pixel array in which blue striped pixel patterns were arranged on a substrate was formed.
<평가><Evaluation>
기판 상의 화소 어레이를 광학 현미경으로 관찰한 결과, 미노광부의 기판 상에 현상 잔사는 보이지 않았지만, 화소 패턴의 단부의 결손 및 패턴 자체의 박리가 보였다. When the pixel array on the board | substrate was observed with the optical microscope, although the image development residue was not seen on the board | substrate of an unexposed part, the defect of the edge part of a pixel pattern and peeling of the pattern itself were seen.
또한, 화소 패턴의 단면을 주사형 전자 현미경(SEM)으로 관찰한 결과, 언더 컷트가 보였다. Moreover, when the cross section of the pixel pattern was observed with the scanning electron microscope (SEM), the undercut was seen.
본 발명에 따르면, 우수한 현상성을 나타내는 감방사선성 조성물, 보다 구체적으로는, 저노광량 및 가혹한 현상 조건하에서도 패턴 단부의 결손 및 언더 컷트가 발생하지 않고, 또한 현상시에 미용해물이 잔존하거나 패턴 단부에 스컴이 발생하지 않는 화소 및 블랙 매트릭스를 제공하는 감방사선성 조성물을 제공할 수 있다.According to the present invention, a radiation-sensitive composition exhibiting excellent developability, more specifically, no defects and undercuts at the end of the pattern do not occur even under low exposure amount and harsh developing conditions, and undissolved matters remain during development It is possible to provide a radiation-sensitive composition that provides a pixel and a black matrix in which scum does not occur at an end portion.
또한 본 발명에 따르면, 본 발명의 감방사선성 조성물로 형성된 착색층을 갖는 컬러 필터 및 이를 구비한 액정 표시 소자를 제공할 수 있다.In addition, according to the present invention, it is possible to provide a color filter having a colored layer formed of the radiation-sensitive composition of the present invention and a liquid crystal display device having the same.
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