KR20030075385A - 칩 패키지 및 그 제조방법 - Google Patents
칩 패키지 및 그 제조방법 Download PDFInfo
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- KR20030075385A KR20030075385A KR1020020014571A KR20020014571A KR20030075385A KR 20030075385 A KR20030075385 A KR 20030075385A KR 1020020014571 A KR1020020014571 A KR 1020020014571A KR 20020014571 A KR20020014571 A KR 20020014571A KR 20030075385 A KR20030075385 A KR 20030075385A
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Abstract
Description
Claims (27)
- 두 개의 단자가 형성된 제1 면과 상기 제1 면과 대향하며 하나의 단자가 형성된 제2 면을 갖는 칩 소자;상기 두 개의 단자영역을 제외한 상기 제1 면에 형성된 절연층;상기 절연층 상에 형성되어 상기 제1 면 상에 있는 각 단자에 연결되며, 소정의 간격으로 전기적으로 분리된 제1 및 제2 도전층;상기 칩 소자의 제2 면에 형성되어 그 제2 면의 단자와 연결된 제3 도전층; 및상기 제1, 제2 및 제3 도전층의 측면 중 상기 칩 소자의 동일한 측면과 접하는 일측면 각각에 형성된 전극면을 포함하는 칩 패키지.
- 제1항에 있어서,상기 칩 패키지는, 상기 전극면이 형성된 일측면을 제외한, 상기 도전층의 외곽면에 형성된 보호층을 더 포함하는 것을 특징으로 하는 칩 패키지.
- 제2항에 있어서,상기 보호층은 절연성 수지를 도포하여 형성된 피막으로 이루어진 것을 특징으로 하는 칩 패키지.
- 제1항에 있어서,상기 칩 소자의 측면과 상기 도전층의 전극면이 형성된 측면은 하나의 평탄한 면을 형성하는 것을 특징으로 칩 패키지.
- 제1항에 있어서,상기 도전층은 구리를 포함한 금속층인 것을 특징으로 하는 칩 패키지.
- 제1항에 있어서,상기 전극면은 금을 포함한 금속층인 것을 특징으로 하는 칩 패키지.
- 제1항에 있어서,상기 도전층은 도금층으로 이루어진 제1 층과, 상기 제1 층 상에 적층된 적어도 하나의 동박으로 이루어진 제2 층으로 포함하는 것을 특징으로 하는 칩 패키지.
- 제1항에 있어서,상기 칩 소자는 트랜지스터인 것을 특징으로 하는 칩 패키지.
- 두 개의 단자가 형성된 제1 면과 상기 제1 면과 대향하며 하나의 단자가 형성된 제2 면을 갖는 칩 소자와, 상기 두 개의 단자영역을 제외한 상기 제1 면에 형성된 절연층과, 상기 절연층 상에 형성되어 상기 제1 면 상에 있는 각 단자에 연결되며, 소정의 간격으로 분리된 제1 및 제2 도전층과, 상기 칩 소자의 제2 면에 단자와 연결되어 형성된 제3 도전층과, 상기 제1, 제2 및 제3 도전층의 측면 중 상기 칩 소자의 동일한 측면과 접하는 일측면 각각에 형성된 전극면을 포함한 칩 패키지; 및,적어도 3개의 연결패드와 상기 연결패드에 각각 연결된 소정의 회로패턴이 형성된 인쇄회로기판을 포함하며,상기 전극면이 각각 상기 연결패드에 부착되어 상기 칩 패키지가 상기 인쇄회로기판에 실장된 구조물로 이루어진 칩 패키지 어셈블리.
- 제9항에 있어서,상기 칩 패키지는 상기 인쇄회로기판에 실장되는 면을 제외한, 상기 도전층의 외곽면에 형성된 보호층을 더 포함하는 것을 특징으로 하는 칩 패키지 어셈블리.
- 제10항에 있어서,상기 보호층은 절연성 수지를 도포하여 형성된 피막으로 이루어진 것을 특징으로 하는 칩 패키지 어셈블리.
- 제9항에 있어서,상기 도전층은 구리를 포함한 금속층인 것을 특징으로 하는 칩 패키지 어셈블리.
- 제9항에 있어서,상기 전극면은 금을 포함한 금속층인 것을 특징으로 하는 칩 패키지 어셈블리.
- 제9항에 있어서,상기 도전층은 도금층으로 이루어진 제1 층과 상기 제1 층 상에 적층된 적어도 하나의 동박으로 이루어진 제2 층을 포함하는 것을 특징으로 하는 칩 패키지 어셈블리.
- 제9항에 있어서,상기 칩 소자는 트랜지스터인 것을 특징으로 하는 칩 패키지 어셈블리.
- 상면에 두 개의 단자와 하면에 하나의 단자를 갖는 복수개의 칩 소자가 형성된 웨이퍼를 마련하는 단계;상기 두 개의 단자가 형성된 영역을 제외하고, 상기 웨이퍼 상면에 절연층을 형성하는 단계;상기 절연층 상에 상기 웨이퍼 상면에 형성된 두 개의 단자와 연결되도록 상부 도전층을 형성하는 단계;상기 웨이퍼의 하면에 그 하면의 단자와 연결되도록 하부 도전층을 형성하는 단계;칩 패키지의 일측면이 형성되도록 상기 웨이퍼를 1차 다이싱하는 단계;상기 1차 다이싱에 의해 형성된 상기 도전층의 일측면에 각각 전극면을 형성하는 단계;상기 절연층 상에 형성된 도전층을 상기 두 개의 단자에 각각 연결된 2개의 도전층으로 분리시키는 단계; 및,칩 패키지 단위로 완전히 분리되도록 상기 결과물을 2차 다이싱하는 단계를 포함하는 칩 패키지 제조방법.
- 제16항에 있어서,상기 상부 및 하부 도전층을 형성한 후에, 상기 상부 및 하부 도전층 상에 보호층을 형성하는 단계와,상기 2차 다이싱한 후에, 상기 전극면이 형성되지 않은 도전층의 측면에 보호층을 형성하는 단계를 더 포함하는 것을 특징으로 하는 칩 패키지 제조방법.
- 제16항에 있어서,상기 2차 다이싱한 후에, 상기 전극면이 형성되지 않은 상기 도전층의 외부면에 보호층을 형성하는 단계를 더 포함하는 것을 특징으로 하는 칩 패키지 제조방법.
- 제17항 또는 제18항에 있어서,상기 보호층은 절연성 수지를 도포하여 형성되는 것을 특징으로 하는 칩 패키지 제조방법.
- 제16항에 있어서,상기 1차 다이싱하는 단계는,상기 웨이퍼 상에 칩 소자가 배열된 라인을 기준으로 두 개의 라인단위로 분리되도록 상기 웨이퍼를 다이싱하는 단계인 것을 특징으로 하는 칩 패키지 제조방법.
- 제16항에 있어서,상기 절연층 상에 형성된 도전층을 두 개의 도전층으로 분리시키는 단계는, 절삭깊이를 조절하여 상기 2차 다이싱하는 단계와 동시에 수행됨을 특징으로 하는 칩 패키지 제조방법.
- 제16항에 있어서,상기 도전층은 도금법을 이용하여 형성되는 것을 특징으로 하는 칩 패키지 제조방법.
- 제16항에 있어서,상기 도전층은 구리를 포함한 금속층인 것을 특징으로 하는 칩 패키지.
- 제16항에 있어서,상기 전극면은 금을 포함한 금속층인 것을 특징으로 하는 칩 패키지.
- 제16항에 있어서,상기 도전층을 형성하는 단계는 상기 각 단자와 연결되는 도금층을 형성한 후에 그 상면에 적어도 하나의 동박을 적층하는 단계인 것을 특징으로 하는 칩 패키지 제조방법.
- 제16항에 있어서,상기 전극면은 도금법을 이용하여 형성되는 것은 것을 특징으로 하는 칩 패키지 제조방법
- 제16항에 있어서,상기 칩 소자는 트랜지스터인 것을 특징을 하는 칩 패키지 제조방법.
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KR10-2002-0014571A KR100452818B1 (ko) | 2002-03-18 | 2002-03-18 | 칩 패키지 및 그 제조방법 |
US10/329,810 US6841416B2 (en) | 2002-03-18 | 2002-12-27 | Chip scale package and method of fabricating the same |
CN03101448A CN1445846A (zh) | 2002-03-18 | 2003-01-09 | 芯片比例封装及其制造方法 |
JP2003003804A JP3632024B2 (ja) | 2002-03-18 | 2003-01-10 | チップパッケージ及びその製造方法 |
DE10302022A DE10302022B4 (de) | 2002-03-18 | 2003-01-21 | Verfahren zur Herstellung eines verkleinerten Chippakets |
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JP (1) | JP3632024B2 (ko) |
KR (1) | KR100452818B1 (ko) |
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Cited By (1)
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KR101124099B1 (ko) * | 2009-03-11 | 2012-03-22 | 가부시끼가이샤 도시바 | 반도체 장치 및 그 제조 방법 |
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FI119307B (fi) * | 2005-06-17 | 2008-09-30 | Vti Technologies Oy | Menetelmä mikromekaanisen liikeanturin valmistamiseksi ja mikromekaaninen liikeanturi |
US8053891B2 (en) * | 2008-06-30 | 2011-11-08 | Alpha And Omega Semiconductor Incorporated | Standing chip scale package |
US8703543B2 (en) * | 2009-07-14 | 2014-04-22 | Honeywell International Inc. | Vertical sensor assembly method |
US20120119345A1 (en) * | 2010-11-15 | 2012-05-17 | Cho Sungwon | Integrated circuit packaging system with device mount and method of manufacture thereof |
US9054063B2 (en) * | 2013-04-05 | 2015-06-09 | Infineon Technologies Ag | High power single-die semiconductor package |
CN104576416A (zh) * | 2013-10-24 | 2015-04-29 | 扬州倍英斯微电子有限公司 | 一种双层凸点二极管芯片制备方法 |
JP6899246B2 (ja) * | 2016-06-10 | 2021-07-07 | モレックス エルエルシー | 電子部品 |
WO2017214370A1 (en) * | 2016-06-10 | 2017-12-14 | Molex, Llc | Electronic component |
Family Cites Families (8)
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JP3369410B2 (ja) * | 1996-09-02 | 2003-01-20 | 松下電器産業株式会社 | 半導体装置の実装方法 |
JPH10150065A (ja) * | 1996-11-15 | 1998-06-02 | Japan Aviation Electron Ind Ltd | チップサイズパッケージ |
US5994167A (en) * | 1997-05-21 | 1999-11-30 | Zowie Technology Corporation | Method of making a fiberglass reinforced resin plate |
JP3312121B2 (ja) * | 1998-12-09 | 2002-08-05 | シャープ株式会社 | チップ部品型の発光ダイオードの製造方法 |
TW408411B (en) * | 1999-03-31 | 2000-10-11 | Huang Jr Gung | Semiconductor chip scale package |
KR100364926B1 (ko) * | 1999-06-03 | 2002-12-16 | 사단법인 고등기술연구원 연구조합 | 측면 실장이 가능한 저온 동시 소성 세라믹 모듈 및 그 제조 방법 |
KR20010009350A (ko) * | 1999-07-09 | 2001-02-05 | 윤종용 | 기판이 없는 칩 스케일 패키지 및 그 제조방법 |
US6271060B1 (en) * | 1999-09-13 | 2001-08-07 | Vishay Intertechnology, Inc. | Process of fabricating a chip scale surface mount package for semiconductor device |
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2002
- 2002-03-18 KR KR10-2002-0014571A patent/KR100452818B1/ko not_active IP Right Cessation
- 2002-12-27 US US10/329,810 patent/US6841416B2/en not_active Expired - Fee Related
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- 2003-01-10 JP JP2003003804A patent/JP3632024B2/ja not_active Expired - Fee Related
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KR101124099B1 (ko) * | 2009-03-11 | 2012-03-22 | 가부시끼가이샤 도시바 | 반도체 장치 및 그 제조 방법 |
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US20030176015A1 (en) | 2003-09-18 |
US6841416B2 (en) | 2005-01-11 |
KR100452818B1 (ko) | 2004-10-15 |
DE10302022B4 (de) | 2008-05-29 |
CN1445846A (zh) | 2003-10-01 |
JP2003273281A (ja) | 2003-09-26 |
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JP3632024B2 (ja) | 2005-03-23 |
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