KR20030003523A - 고주파 교류 고전압을 이용한 정전기 제거장치 - Google Patents
고주파 교류 고전압을 이용한 정전기 제거장치 Download PDFInfo
- Publication number
- KR20030003523A KR20030003523A KR1020010039421A KR20010039421A KR20030003523A KR 20030003523 A KR20030003523 A KR 20030003523A KR 1020010039421 A KR1020010039421 A KR 1020010039421A KR 20010039421 A KR20010039421 A KR 20010039421A KR 20030003523 A KR20030003523 A KR 20030003523A
- Authority
- KR
- South Korea
- Prior art keywords
- high voltage
- discharge electrode
- high frequency
- needle
- generating
- Prior art date
Links
- 230000003068 static effect Effects 0.000 title claims abstract description 35
- 230000005611 electricity Effects 0.000 title claims abstract description 25
- 150000002500 ions Chemical class 0.000 claims abstract description 39
- 230000001939 inductive effect Effects 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 10
- 230000000694 effects Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 10
- 238000007664 blowing Methods 0.000 description 3
- 230000008030 elimination Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T19/00—Devices providing for corona discharge
- H01T19/04—Devices providing for corona discharge having pointed electrodes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Elimination Of Static Electricity (AREA)
Abstract
Description
Claims (7)
- 전압인가시 코로나방전에 의해 이온을 발생시키는 복수개의 침상 전극이 일렬로 배열된 방전전극부;상기 방전전극부에 소정의 간격으로 두고 배치되고, 상기 방전전극부에 전압이 인가될 경우에 상기 침상전극으로부터 이온발생을 유도하기 위한 접지전극부; 및상기 방전전극부에 연결되고 상기 방전전극의 침상전극에 인가시키기 위한 고주파의 교류 고전압을 생성하는 고주파 고전압 발생부를 포함하는 정전기 제거 장치.
- 제 1 항에 있어서, 상기 고주파 고전압 발생부는설정된 주파수대의 고주파신호를 발생시키는 주파수 발생기;상기 주파수발생기로부터 출력된 주파수신호에 대응하는 펄스신호를 생성시키고, 보상신호에 따라 상기 펄스신호의 폭을 조절하는 펄스폭변조회로;상기 펄스폭변조회로로부터 출력된 펄스신호를 승압함에 의해 교류고전압을 생성시키고 상기 교류고전압을 상기 전극부로 인가하는 고전압발생회로; 및상기 고전압발생회로로부터 출력되는 교류고전압을 피드백받아 적분하여 얻어진 보상신호를 상기 펄스폭변조회로에 인가하는 이온발런싱회로로 구성되는 것을 특징으로 하는 고주파 교류 고전압을 이용한 정전기 제거 장치.
- 제 1 항에 있어서,상기 방전전극부의 후면에 배치되고, 상기 복수개의 침상전극으로부터 발생된 이온이 피대전물체측으로 이동되도록 송풍을 발생시키기 위한 송풍기를 더 포함하는 정전기 제거장치.
- 제 1 항에 있어서,상기 방전전극부의 후단에 일정한 공간으로 형성된 공기통을 더 포함하고,상기 공기통 일측에 제공된 공기주입구를 통해 상기 공기통으로 소정 압력의 공기를 송급하여 상기 침상전극으로부터 발생된 이온을 피대전물체측으로 이동시키는 정전기 제거장치.
- 제1항에 있어서,상기 방전전극부를 2개 구비하고, 상기 2개의 방전전극부는 서로 대향하도록 배치됨을 특징으로 하는 정전기 제거장치.
- 제1항에 있어서,상기 방전전극부는 복수개의 침상전극이 약 20-30mm간격으로 배열됨을 특징으로 하는 정전기 제거장치.
- 제1항에 있어서,상기 침상전극 끝단의 곡률반경은 약 2㎜임을 특징으로 하는 정전기 제거장치.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2001-0039421A KR100489819B1 (ko) | 2001-07-03 | 2001-07-03 | 고주파 교류 고전압을 이용한 정전기 제거장치 |
CNB021188467A CN100389638C (zh) | 2001-07-03 | 2002-04-29 | 使用高频高交流电压的用于去除静电的装置 |
US10/135,523 US6646856B2 (en) | 2001-07-03 | 2002-05-01 | Apparatus for removing static electricity using high-frequency high AC voltage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2001-0039421A KR100489819B1 (ko) | 2001-07-03 | 2001-07-03 | 고주파 교류 고전압을 이용한 정전기 제거장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030003523A true KR20030003523A (ko) | 2003-01-10 |
KR100489819B1 KR100489819B1 (ko) | 2005-05-16 |
Family
ID=19711697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2001-0039421A KR100489819B1 (ko) | 2001-07-03 | 2001-07-03 | 고주파 교류 고전압을 이용한 정전기 제거장치 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6646856B2 (ko) |
KR (1) | KR100489819B1 (ko) |
CN (1) | CN100389638C (ko) |
Cited By (2)
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WO2006016738A1 (en) * | 2004-08-13 | 2006-02-16 | Sunje Hitek Co., Ltd. | A bar type corona discharged electrostatic eliminator equipped with air vessel using pulse ac high voltage power source |
WO2006112595A1 (en) * | 2005-04-19 | 2006-10-26 | Sunje Hitek Co., Ltd. | A bar type ionizer |
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JP3910501B2 (ja) * | 2002-07-17 | 2007-04-25 | 浜松ホトニクス株式会社 | エアロゾル粒子荷電装置 |
US7679026B1 (en) | 2004-04-08 | 2010-03-16 | Mks Instruments, Inc. | Multi-frequency static neutralization of moving charged objects |
US7057130B2 (en) * | 2004-04-08 | 2006-06-06 | Ion Systems, Inc. | Ion generation method and apparatus |
US7479615B2 (en) * | 2004-04-08 | 2009-01-20 | Mks Instruments, Inc. | Wide range static neutralizer and method |
US8063336B2 (en) * | 2004-04-08 | 2011-11-22 | Ion Systems, Inc. | Multi-frequency static neutralization |
US7504628B2 (en) * | 2005-01-06 | 2009-03-17 | Junhong Chen | Nanoscale corona discharge electrode |
US20090207547A1 (en) * | 2005-03-25 | 2009-08-20 | Hugle Electronics Inc. | Ion Blower |
US7785404B2 (en) * | 2006-10-02 | 2010-08-31 | Sylmark Holdings Limited | Ionic air purifier with high air flow |
KR100903315B1 (ko) * | 2006-10-31 | 2009-06-16 | 한라공조주식회사 | 이온발생장치 및 이를 이용한 차량용 공조장치 |
US8885317B2 (en) | 2011-02-08 | 2014-11-11 | Illinois Tool Works Inc. | Micropulse bipolar corona ionizer and method |
US8773837B2 (en) | 2007-03-17 | 2014-07-08 | Illinois Tool Works Inc. | Multi pulse linear ionizer |
US8009405B2 (en) | 2007-03-17 | 2011-08-30 | Ion Systems, Inc. | Low maintenance AC gas flow driven static neutralizer and method |
US20090316325A1 (en) * | 2008-06-18 | 2009-12-24 | Mks Instruments | Silicon emitters for ionizers with high frequency waveforms |
US9380689B2 (en) * | 2008-06-18 | 2016-06-28 | Illinois Tool Works Inc. | Silicon based charge neutralization systems |
US8038775B2 (en) * | 2009-04-24 | 2011-10-18 | Peter Gefter | Separating contaminants from gas ions in corona discharge ionizing bars |
US8048200B2 (en) | 2009-04-24 | 2011-11-01 | Peter Gefter | Clean corona gas ionization for static charge neutralization |
JP2011060537A (ja) * | 2009-09-09 | 2011-03-24 | Three M Innovative Properties Co | 除電装置 |
US8416552B2 (en) | 2009-10-23 | 2013-04-09 | Illinois Tool Works Inc. | Self-balancing ionized gas streams |
US8143591B2 (en) * | 2009-10-26 | 2012-03-27 | Peter Gefter | Covering wide areas with ionized gas streams |
JP5914015B2 (ja) * | 2011-02-18 | 2016-05-11 | 株式会社コガネイ | 除電装置および方法 |
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US9125284B2 (en) | 2012-02-06 | 2015-09-01 | Illinois Tool Works Inc. | Automatically balanced micro-pulsed ionizing blower |
USD743017S1 (en) | 2012-02-06 | 2015-11-10 | Illinois Tool Works Inc. | Linear ionizing bar |
US9918374B2 (en) | 2012-02-06 | 2018-03-13 | Illinois Tool Works Inc. | Control system of a balanced micro-pulsed ionizer blower |
JP6247967B2 (ja) * | 2014-03-14 | 2017-12-13 | 株式会社キーエンス | 除電装置 |
EP3175285B1 (en) * | 2014-07-30 | 2020-05-06 | Hewlett-Packard Development Company, L.P. | Ion writing unit with rate control |
EP3275060B1 (en) | 2015-03-23 | 2018-12-12 | Illinois Tool Works Inc. | Silicon based charge neutralization systems |
CN105223425B (zh) * | 2015-10-27 | 2018-05-18 | 上海斐讯数据通信技术有限公司 | 自动除静电系统 |
CN109390637B (zh) * | 2018-11-27 | 2024-08-13 | 深圳市万德自动化科技有限公司 | 一种锂电池电芯离子风除静电下料卷针机构 |
CN109688682A (zh) * | 2018-12-30 | 2019-04-26 | 上海安平静电科技有限公司 | 一种直流粉体电荷消除器及消除系统 |
CN109739150B (zh) * | 2019-01-24 | 2020-08-14 | 上海安平静电科技有限公司 | 一种静电消除设备的监控方法及装置 |
KR20210050859A (ko) | 2019-10-29 | 2021-05-10 | (주)선재하이테크 | 대향 전극이 구비된 방전 전극 소켓 |
WO2021097700A1 (en) * | 2019-11-20 | 2021-05-27 | Esd Technology Consulting & Licensing Co., Ltd | Static charge reduction device |
KR20210094694A (ko) * | 2020-01-21 | 2021-07-30 | 삼성전자주식회사 | 기판 처리 장치, 물질막 증착 장치, 및 상압 화학 기상 증착 장치 |
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US4271451A (en) * | 1976-07-20 | 1981-06-02 | Hercules Incorporated | Method and apparatus for controlling static charges |
DE2849222A1 (de) * | 1978-11-13 | 1980-05-22 | Hoechst Ag | Verfahren zum elektrostatischen aufladen einer dielektrischen schicht sowie vorrichtung zur durchfuehrung des verfahrens |
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-
2001
- 2001-07-03 KR KR10-2001-0039421A patent/KR100489819B1/ko not_active IP Right Cessation
-
2002
- 2002-04-29 CN CNB021188467A patent/CN100389638C/zh not_active Expired - Fee Related
- 2002-05-01 US US10/135,523 patent/US6646856B2/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006016738A1 (en) * | 2004-08-13 | 2006-02-16 | Sunje Hitek Co., Ltd. | A bar type corona discharged electrostatic eliminator equipped with air vessel using pulse ac high voltage power source |
WO2006112595A1 (en) * | 2005-04-19 | 2006-10-26 | Sunje Hitek Co., Ltd. | A bar type ionizer |
US7746621B2 (en) | 2005-04-19 | 2010-06-29 | Sunje Hitek Co., Ltd. | Bar type ionizer |
Also Published As
Publication number | Publication date |
---|---|
US6646856B2 (en) | 2003-11-11 |
CN100389638C (zh) | 2008-05-21 |
US20030007307A1 (en) | 2003-01-09 |
KR100489819B1 (ko) | 2005-05-16 |
CN1394108A (zh) | 2003-01-29 |
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