KR102199998B1 - 발광소자 - Google Patents
발광소자 Download PDFInfo
- Publication number
- KR102199998B1 KR102199998B1 KR1020140069271A KR20140069271A KR102199998B1 KR 102199998 B1 KR102199998 B1 KR 102199998B1 KR 1020140069271 A KR1020140069271 A KR 1020140069271A KR 20140069271 A KR20140069271 A KR 20140069271A KR 102199998 B1 KR102199998 B1 KR 102199998B1
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- layer
- semiconductor layer
- defect suppression
- light emitting
- emitting device
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- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 3
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
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- 239000012780 transparent material Substances 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
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- 241000219289 Silene Species 0.000 description 1
- 101001045744 Sus scrofa Hepatocyte nuclear factor 1-beta Proteins 0.000 description 1
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- 239000012790 adhesive layer Substances 0.000 description 1
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- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- VRIVJOXICYMTAG-IYEMJOQQSA-L iron(ii) gluconate Chemical compound [Fe+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O VRIVJOXICYMTAG-IYEMJOQQSA-L 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
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- 229910052711 selenium Inorganic materials 0.000 description 1
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- 239000002356 single layer Substances 0.000 description 1
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- 229910052712 strontium Inorganic materials 0.000 description 1
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- 229910052714 tellurium Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- 230000005641 tunneling Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/84—Coatings, e.g. passivation layers or antireflective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/8215—Bodies characterised by crystalline imperfections, e.g. dislocations; characterised by the distribution of dopants, e.g. delta-doping
Landscapes
- Led Devices (AREA)
Abstract
Description
도 2는 도 1의 결합 억제층 및 캡핑층의 상세 도면이다.
도 3은 도 1의 발광 소자의 밴드 다이어그램을 나타낸 도면이다.
도 4는 제2실시 예에 따른 발광 소자를 나타낸 측 단면도이다.
도 5는 제3실시 예에 따른 발광 소자를 나타낸 측 단면도이다.
도 6은 도 1의 발광 소자에 전극을 배치한 예이다.
도 7은 도 1의 발광 소자에 전극을 배치한 다른 예이다.
도 8의 (a)-(d)은 도 1의 발광 소자에서의 각 층의 AFM(Atomic force micro-scope) 이미지를 나타낸 도면이다.
도 9는 도 7의 발광 소자를 갖는 패키지를 나타낸 도면이다.
도 10은 실시 예에 따른 표시장치를 나타낸 도면이다.
도 11는 실시 예에 따른 표시장치의 다른 예를 나타낸 도면이다.
도 12은 실시 예에 따른 조명장치를 나타낸 도면이다.
115:제1도전성 반도체층 116: 제2 반도체층
117: 활성층 113: 제3반도체층
119,120: 결함 억제층 121: 캡핑층
123: 전자 차단층 125: 제2도전성 반도체층
Claims (11)
- 삭제
- 제1도전성 반도체층;
상기 제1도전성 반도체층 위에 복수의 피트를 갖는 반도체층;
상기 반도체층 위에 상기 피트가 연장된 활성층;
상기 활성층 위에 배치되며 상기 피트를 메워주는 결함 억제층;
상기 결함 억제층 위에 배치된 캡핑층; 및
상기 캡핑층 위에 배치된 제2도전성 반도체층을 포함하며,
상기 결함 억제층은 상기 캡핑층의 에너지 밴드 갭보다 넓은 에너지 밴드 갭을 포함하고,
상기 결함 억제층은 AlInN으로 형성된 발광 소자. - 제2항에 있어서,
상기 결함 억제층의 인듐 조성은 14% 내지 22% 범위인 발광 소자. - 제3항에 있어서,
상기 결함 억제층은 언도프드 반도체를 포함하는 발광소자. - 삭제
- 제1도전성 반도체층;
상기 제1도전성 반도체층 위에 복수의 피트를 갖는 반도체층;
상기 반도체층 위에 상기 피트가 연장된 활성층;
상기 활성층 위에 배치되며 상기 피트를 메워주는 결함 억제층;
상기 결함 억제층 위에 배치된 캡핑층; 및
상기 캡핑층 위에 배치된 제2도전성 반도체층을 포함하며,
상기 결함 억제층은 상기 캡핑층의 에너지 밴드 갭보다 넓은 에너지 밴드 갭을 포함하고,
상기 캡핑층과 상기 제2도전성 반도체층 사이에 배치된 전자 차단층을 포함하며,
상기 결함 억제층의 에너지 밴드 갭은 상기 전자 차단층의 에너지 밴드 갭보다 넓은 발광소자. - 제6항에 있어서,
상기 결함 억제층은 2nm 이하의 두께를 갖고,
상기 캡핑층은 상기 결함 억제층의 두께보다 두꺼운 두께를 갖는 발광 소자. - 삭제
- 제6항에 있어서,
상기 결함 억제층은 서로 다른 인듐 조성을 갖는 복수의 층을 포함하는 발광 소자. - 삭제
- 삭제
Priority Applications (1)
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KR1020140069271A KR102199998B1 (ko) | 2014-06-09 | 2014-06-09 | 발광소자 |
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KR1020140069271A KR102199998B1 (ko) | 2014-06-09 | 2014-06-09 | 발광소자 |
Publications (2)
Publication Number | Publication Date |
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KR20150140972A KR20150140972A (ko) | 2015-12-17 |
KR102199998B1 true KR102199998B1 (ko) | 2021-01-11 |
Family
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KR1020140069271A Expired - Fee Related KR102199998B1 (ko) | 2014-06-09 | 2014-06-09 | 발광소자 |
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KR (1) | KR102199998B1 (ko) |
Families Citing this family (1)
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WO2018128419A1 (ko) | 2017-01-04 | 2018-07-12 | 엘지이노텍 주식회사 | 반도체 소자 및 이를 포함하는 발광소자 패키지 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008218746A (ja) * | 2007-03-05 | 2008-09-18 | Sumitomo Electric Ind Ltd | Iii族窒化物系半導体発光素子 |
JP2008539585A (ja) * | 2005-04-29 | 2008-11-13 | クリー インコーポレイテッド | 開いたピット中に延びる能動層を有する発光デバイス及びその製造方法 |
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2014
- 2014-06-09 KR KR1020140069271A patent/KR102199998B1/ko not_active Expired - Fee Related
Patent Citations (2)
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JP2008539585A (ja) * | 2005-04-29 | 2008-11-13 | クリー インコーポレイテッド | 開いたピット中に延びる能動層を有する発光デバイス及びその製造方法 |
JP2008218746A (ja) * | 2007-03-05 | 2008-09-18 | Sumitomo Electric Ind Ltd | Iii族窒化物系半導体発光素子 |
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