KR102065778B1 - 발광소자 - Google Patents
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- KR102065778B1 KR102065778B1 KR1020130088199A KR20130088199A KR102065778B1 KR 102065778 B1 KR102065778 B1 KR 102065778B1 KR 1020130088199 A KR1020130088199 A KR 1020130088199A KR 20130088199 A KR20130088199 A KR 20130088199A KR 102065778 B1 KR102065778 B1 KR 102065778B1
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- light emitting
- emitting device
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- 229910052738 indium Inorganic materials 0.000 description 8
- -1 YAG Chemical compound 0.000 description 7
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 6
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- VRIVJOXICYMTAG-IYEMJOQQSA-L iron(ii) gluconate Chemical compound [Fe+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O VRIVJOXICYMTAG-IYEMJOQQSA-L 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
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- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000006089 photosensitive glass Substances 0.000 description 2
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- 229910052718 tin Inorganic materials 0.000 description 2
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- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910018229 Al—Ga Inorganic materials 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910001029 Hf alloy Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
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- 229920012310 Polyamide 9T (PA9T) Polymers 0.000 description 1
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- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 101001045744 Sus scrofa Hepatocyte nuclear factor 1-beta Proteins 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 229910008842 WTi Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
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- 150000004645 aluminates Chemical class 0.000 description 1
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- 238000000071 blow moulding Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
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- 238000005530 etching Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
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- 229910052702 rhenium Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
- H10H20/8252—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN characterised by the dopants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/815—Bodies having stress relaxation structures, e.g. buffer layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/816—Bodies having carrier transport control structures, e.g. highly-doped semiconductor layers or current-blocking structures
- H10H20/8162—Current-blocking structures
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- Led Devices (AREA)
Abstract
Description
도 2a은 도 1의 A-A 선을 따른 단면을 도시한 단면도,
도 2b는 도 2a의 B-B 선을 따른 단면을 도시한 단면도,
도 2c는 도 2a의 C-C 선을 따른 단면을 도시한 단면도,
도 3은 도 2a의 D 영역을 확대한 확대 단면도,
도 4은 실시예에 따른 제1층 상에 제1만입부를 설명하기 위한 참고도,
도 5은 실시예에 따른 발광소자를 포함하는 발광소자 패키지를 나타낸 사시도이고,
도 6는 실시예에 따른 발광소자를 포함하는 발광소자 패키지를 나타낸 단면도이다.
도 7는 실시예에 따른 발광소자를 포함하는 표시장치의 분해 사시도,
도 8은 도 7의 표시장치의 단면도,
도 9은 실시예에 따른 발광소자를 포함하는 조명 장치의 분해 사시도이다.
Claims (13)
- 기판;
상기 기판상의 제1 도전성 반도체층;
상기 제1 도전성 반도체층 상의 스트레인 완화층;
상기 스트레인 완화층 상의 활성층; 및
상기 활성층 상의 제2 도전성 반도체층;을 포함하고,
상기 제1 도전성 반도체층은,
상면에 오목한 복수의 제1만입부를 포함하는 제1층, 상기 제1층 상에 배치되는 제2층 및 상기 제2층 상에 배치되는 제3층을 포함하며,
상기 제2층은 상기 제1만입부와 수직적으로 중첩되는 위치에 형성되는 제2만입부를 포함하고,
상기 제3층은 상기 제2만입부와 수직적으로 중첩되는 위치에 형성되는 제3만입부를 포함하고,
상기 제1층은 불순물이 도핑되고,
상기 제2층은 불순물이 도핑되지 않은 언도프층이고,
상기 제3층은 InxAlyGa(1-x-y)N(0≤x≤1, 0≤y≤1, 0≤x+y≤1)을 포함하고,
상기 제1만입부는 육각뿔 또는 쐐기 형상이고,
상기 제3층의 두께는 2nm 내지 20nm인 발광소자. - 제1항에 있어서,
상기 제3층은 In의 함량이 0.02(2%) 내지 0.05(5%)이고,
상기 제3층은 Al의 함량이 0.06(6%) 내지 0.1(10%)이고,
상기 제3만입부의 폭은 상기 제2만입부의 폭보다 큰 발광소자. - 삭제
- 삭제
- 삭제
- 제1항에 있어서,
상기 제1만입부는 상기 제1층에 형성된 전위(Dislocation) 상에 수직적으로 중첩되게 배치되는 발광소자. - 제6항에 있어서,
상기 스트레인 완화층은 상기 제3만입부와 수직적으로 중첩되는 위치에 형성되는 제4만입부를 포함하는 발광소자. - 삭제
- 제7항에 있어서,
상기 활성층은 상기 제4만입부와 수직적으로 중첩되는 위치에 형성되는 제5만입부를 포함하고,
상기 제4만입부의 크기는 상기 제3만입부의 크기보다 작고,
상기 제2 도전성 반도체층은 상기 제5만입부를 채우며 형성되는 발광소자. - 제9항에 있어서,
상기 제5만입부의 폭은 상기 제4만입부의 폭보다 작은 발광소자. - 삭제
- 삭제
- 삭제
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KR101164026B1 (ko) | 2007-07-12 | 2012-07-18 | 삼성전자주식회사 | 질화물계 반도체 발광소자 및 그 제조방법 |
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KR101164026B1 (ko) | 2007-07-12 | 2012-07-18 | 삼성전자주식회사 | 질화물계 반도체 발광소자 및 그 제조방법 |
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