KR101935098B1 - 내후성 연마 패드 - Google Patents
내후성 연마 패드 Download PDFInfo
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- KR101935098B1 KR101935098B1 KR1020160102544A KR20160102544A KR101935098B1 KR 101935098 B1 KR101935098 B1 KR 101935098B1 KR 1020160102544 A KR1020160102544 A KR 1020160102544A KR 20160102544 A KR20160102544 A KR 20160102544A KR 101935098 B1 KR101935098 B1 KR 101935098B1
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- isocyanate
- polyurethane prepolymer
- diisocyanate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
- B24D13/147—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face comprising assemblies of felted or spongy material; comprising pads surrounded by a flexible material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/08—Processes
- C08G18/10—Prepolymer processes involving reaction of isocyanates or isothiocyanates with compounds having active hydrogen in a first reaction step
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/40—High-molecular-weight compounds
- C08G18/48—Polyethers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/721—Two or more polyisocyanates not provided for in one single group C08G18/73 - C08G18/80
- C08G18/724—Combination of aromatic polyisocyanates with (cyclo)aliphatic polyisocyanates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/73—Polyisocyanates or polyisothiocyanates acyclic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
- C08G18/75—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
- C08G18/75—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic
- C08G18/751—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring
- C08G18/752—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring containing at least one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group
- C08G18/753—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring containing at least one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group containing one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group having a primary carbon atom next to the isocyanate or isothiocyanate group
- C08G18/755—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring containing at least one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group containing one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group having a primary carbon atom next to the isocyanate or isothiocyanate group and at least one isocyanate or isothiocyanate group linked to a secondary carbon atom of the cycloaliphatic ring, e.g. isophorone diisocyanate
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
- C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
- C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
- C08G18/7614—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring
- C08G18/7628—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring containing at least one isocyanate or isothiocyanate group linked to the aromatic ring by means of an aliphatic group
- C08G18/7642—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring containing at least one isocyanate or isothiocyanate group linked to the aromatic ring by means of an aliphatic group containing at least two isocyanate or isothiocyanate groups linked to the aromatic ring by means of an aliphatic group having a primary carbon atom next to the isocyanate or isothiocyanate groups, e.g. xylylene diisocyanate or homologues substituted on the aromatic ring
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
- C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
- C08G18/7657—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings
- C08G18/7664—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups
- C08G18/7671—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups containing only one alkylene bisphenyl group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/01—Use of inorganic substances as compounding ingredients characterized by their specific function
- C08K3/013—Fillers, pigments or reinforcing additives
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polyurethanes Or Polyureas (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
샘플 번호 | 조사시간 (h) | ||||
200 | 400 | 600 | 800 | 1000 | |
연마층 1 | 3.6 | 3.7 | 3.8 | 3.9 | 4.1 |
연마층 2 | 4 | 4.6 | 4.8 | 5.2 | 5.9 |
연마층 3 | 12.9 | 13.8 | 14.6 | 15.8 | 17.1 |
연마층 4 | 6.5 | 8.9 | 9.4 | 9.6 | 10.3 |
연마층 5 | 6.8 | 9.2 | 9.8 | 10.5 | 11.4 |
연마층 6 | 14.2 | 15 | 15.9 | 16.7 | 17.9 |
연마층 7 | 14.8 | 15.8 | 16.7 | 17.8 | 19.5 |
연마층 8 | 15.2 | 16 | 17.2 | 18.4 | 20.3 |
연마층 9 | 19.5 | 20.6 | 22.4 | 24.1 | 25.9 |
연마층 10 | 25.8 | 27.2 | 29.9 | 31.7 | 34.5 |
연마층 11 | 26.3 | 27.9 | 30.4 | 32.1 | 35 |
Claims (18)
- 상부 연마층;
버퍼층; 및
투명 베이스;를 포함하는 연마 패드로서,
상기 버퍼층은 상기 상부 연마층과 상기 투명 베이스 사이에 개재되고, 상기 상부 연마층, 버퍼층 및 투명 베이스는 점착제 또는 접착제를 통해 결합되며;
상기 상부 연마층은 폴리우레탄 프리폴리머, 경화제 및 기능성 충진제를 포함하고;
상기 폴리우레탄 프리폴리머는 폴리올과 다관능성 이소시아네이트의 중합 생성물이며;
상기 다관능성 이소시아네이트는 간접적으로 연결된 이소시아나토 그룹 및 벤젠 그룹을 갖는 제1 이소시네이트를 포함하고,
상기 간접적으로 연결된 이소시아나토 그룹 및 벤젠 그룹을 갖는 제1 이소시네이트는 벤젠 디메틸렌 디이소시아네이트(benzene dimethylene diisocyanate)인, 연마 패드. - 삭제
- 제1항에 있어서,
상기 다관능성 이소시아네이트는, 직접적으로 연결된 이소시아나토 그룹과 벤젠 그룹을 갖는 제2 이소시아네이트를 더 포함하는 연마 패드. - 삭제
- 제3항에 있어서,
상기 직접적으로 연결된 이소시아나토 그룹 및 벤젠 그룹을 갖는 제2 이소시아네이트는 디페닐 메탄 디이소시아네이트(diphenyl methane diisocyanate), 메틸 벤젠 디이소시아네이트(methyl benzene diisocyanate), 폴리메틸렌 폴리페닐 폴리이소시아네이트(polymethylene polyphenyl polyisocyanate), 나프탈렌-1,5-디이소시아네이트(naphthalene-1,5-diisocyanate), 3,3'-디메틸-4,4'비페닐 디이소시아네이트(3,3'-dimethyl-4,4'biphenyl diisocyanate), p-페닐렌 디이소시아네이트(p-phenylene diisocyanate), 3,3'-디메틸-4,4'디페닐 메탄 디이소시아네이트(3,3'-dimethyl-4,4' diphenyl methane diisocyanate), 이들의 개질된 화합물, 이들의 유도체, 이들의 올리고머 또는 이들의 혼합물인 연마 패드. - 삭제
- 제3항에 있어서,
상기 다관능성 이소시아네이트의 제1 이소시아네이트와 제2 이소시아네이트의 질량비는 100:24-150인 연마 패드. - 삭제
- 제5항에 있어서,
상기 다관능성 이소시아네이트의 제1 이소시아네이트와 제2 이소시아네이트의 질량비는 100:24-150인 연마 패드. - 삭제
- 제1항에 있어서,
상기 폴리우레탄 프리폴리머의 점도는 1000 내지 35000 mPa·S인 연마 패드. - 삭제
- 제3항에 있어서,
상기 폴리우레탄 프리폴리머의 점도는 1000 내지 35000 mPa·S인 연마 패드. - 제5항에 있어서,
상기 폴리우레탄 프리폴리머의 점도는 1000 내지 35000 mPa·S인 연마 패드. - 제7항에 있어서,
상기 폴리우레탄 프리폴리머의 점도는 1000 내지 35000 mPa·S인 연마 패드. - 삭제
- 제1항에 있어서,
상기 폴리우레탄 프리폴리머, 경화제 및 기능성 충진제의 질량비는 100:2.5-41:0.15-5인 연마 패드. - 제1항에 있어서,
상기 폴리올과 다관능성 이소시아네이트의 질량비는 1.5-4:1인 연마 패드.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510488969.2A CN105171593B (zh) | 2015-08-11 | 2015-08-11 | 耐候性化学机械抛光垫 |
CN201510488969.2 | 2015-08-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20170019331A KR20170019331A (ko) | 2017-02-21 |
KR101935098B1 true KR101935098B1 (ko) | 2019-01-03 |
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ID=54894262
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Application Number | Title | Priority Date | Filing Date |
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KR1020160102544A Active KR101935098B1 (ko) | 2015-08-11 | 2016-08-11 | 내후성 연마 패드 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10414025B2 (ko) |
KR (1) | KR101935098B1 (ko) |
CN (1) | CN105171593B (ko) |
TW (1) | TW201706341A (ko) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI612084B (zh) * | 2016-04-05 | 2018-01-21 | Kpx化學股份有限公司 | 研磨墊的製造方法 |
US10722999B2 (en) * | 2016-06-17 | 2020-07-28 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | High removal rate chemical mechanical polishing pads and methods of making |
CN107163213A (zh) * | 2017-05-31 | 2017-09-15 | 蓝思科技(长沙)有限公司 | 抛光垫、制备方法及其应用 |
CN108161713B (zh) * | 2017-12-15 | 2020-06-12 | 湖北鼎龙控股股份有限公司 | 一种抛光垫及用于制备抛光垫的方法 |
CN108789135B (zh) * | 2018-05-25 | 2019-11-22 | 湖北鼎龙控股股份有限公司 | 化学机械抛光垫 |
US10464188B1 (en) * | 2018-11-06 | 2019-11-05 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad and polishing method |
CN112094493A (zh) * | 2020-08-14 | 2020-12-18 | 沈阳化工大学 | 一种纳米改性热塑性聚氨酯弹性体抛光材料及其制备方法 |
CN115284165A (zh) * | 2022-07-12 | 2022-11-04 | 安徽禾臣新材料有限公司 | 一种多孔聚氨酯抛光垫及其制备方法 |
CN115157111B (zh) * | 2022-07-13 | 2024-03-15 | 安徽禾臣新材料有限公司 | 一种玻璃加工用抛光垫及其制备方法 |
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JP2008254170A (ja) | 2001-12-20 | 2008-10-23 | Ppg Ind Ohio Inc | 研磨パッド |
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TWI222390B (en) | 2001-11-13 | 2004-10-21 | Toyo Boseki | Polishing pad and its production method |
JP3769581B1 (ja) * | 2005-05-18 | 2006-04-26 | 東洋ゴム工業株式会社 | 研磨パッドおよびその製造方法 |
US8304467B2 (en) | 2005-05-17 | 2012-11-06 | Toyo Tire & Rubber Co., Ltd. | Polishing pad |
JP4897238B2 (ja) | 2005-05-17 | 2012-03-14 | 東洋ゴム工業株式会社 | 研磨パッド |
JP5184448B2 (ja) * | 2009-06-23 | 2013-04-17 | 富士紡ホールディングス株式会社 | 研磨パッド、その製造方法および研磨加工方法 |
CN103862365B (zh) * | 2014-01-21 | 2016-05-04 | 湖北鼎龙化学股份有限公司 | 聚氨酯材料抛光垫及其制备方法 |
US10092998B2 (en) * | 2015-06-26 | 2018-10-09 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method of making composite polishing layer for chemical mechanical polishing pad |
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2015
- 2015-08-11 CN CN201510488969.2A patent/CN105171593B/zh active Active
-
2016
- 2016-08-10 US US15/233,922 patent/US10414025B2/en active Active
- 2016-08-11 KR KR1020160102544A patent/KR101935098B1/ko active Active
- 2016-08-11 TW TW105125604A patent/TW201706341A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008254170A (ja) | 2001-12-20 | 2008-10-23 | Ppg Ind Ohio Inc | 研磨パッド |
CN1628138A (zh) * | 2002-02-04 | 2005-06-15 | 株式会社Skc | 具有高硬度和极好的耐磨性的聚氨酯弹性体用组合物 |
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CN105171593B (zh) | 2017-12-26 |
US20170043451A1 (en) | 2017-02-16 |
CN105171593A (zh) | 2015-12-23 |
KR20170019331A (ko) | 2017-02-21 |
TW201706341A (zh) | 2017-02-16 |
US10414025B2 (en) | 2019-09-17 |
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