KR101638730B1 - Ultrasonic transducer, ultrasonic device including the same and method for manufacturing the same - Google Patents

Abstract

An ultrasonic transducer includes: a piezoelectric body for converting ultrasonic waves into mechanical vibrations; An upper electrode formed on the piezoelectric body and transmitting the electric energy to the piezoelectric body, the upper electrode including a plurality of division patterns; A matching layer formed on the upper electrode, the matching layer being formed in the same pattern as the divided patterns of the upper electrode; And a multifocal lens formed on the matching layer and having at least two curvatures to form a multi-focal point. Accordingly, it is possible to provide a high-performance ultrasonic transducer by improving the beam shape in the width direction.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ultrasonic transducer, an ultrasonic transducer including the ultrasonic transducer,

The present invention relates to an ultrasonic transducer, an ultrasonic device including the ultrasonic transducer, and a method of manufacturing the same. More particularly, the present invention relates to an ultrasonic transducer for improving a beam shape in a width direction, an ultrasonic device including the same, and a method of manufacturing the same.

Micro-Electro-Mechanical System (MEMS) technology is a micro-electromechanical system (micro-machining or micro-system) that is used to fabricate micro-mechanical structures by processing silicon, quartz or glass.

MEMS technology has the advantage of mass-production of micro-sized products at low cost by applying semiconductor micro-processing technology that repeats deposition and etching processes structurally, and it is important that the nano and system-on-chip (SoC) This day is highlighted.

MEMS is the most promising technology in the 21st century, which is comparable to semi-conductor technology, which is a typical industrial technology of the 20th century. Currently, the application range of MEMS technology is deviated from the acceleration sensor of automobile airbag, inkjet printer head, Parts, optical parts, and micro machines.

On the other hand, the ultrasonic wave has various applications such as an ultrasonic diagnosis machine for diagnosing human diseases, an ultrasonic wave detector using ultrasonic waves, acupuncture therapy using ultrasonic waves, and an ultrasonic wave processing device for other mechanical microfabrication.

The ultrasonic wave is an unacceptable vibration sound wave generated by a piezoelectric effect and has a frequency of about 17000 to 20000 Hz or higher. The ultrasonic wave can be directly irradiated to a human body for the purpose of treating a human body disease, and can utilize a thermal effect and / And may be used for the treatment of pain, the treatment of bones, and the massage.

The ultrasonic apparatus using the ultrasonic wave includes an ultrasonic wave generator for generating the ultrasonic wave, a high frequency oscillator for generating the high frequency current to input a high frequency current to the ultrasonic wave generator, and a controller for controlling the high frequency oscillator .

However, there is a problem that the beam of the ultrasonic wave is not uniform, and various attempts have been made to form a uniform beam shape. Specifically, a method of adjusting the beam shape of the ultrasonic transducer generally uses a single focus lens (similar to a solar focusing system using a magnifying glass). However, in the case of a single focal point, since a sound wave is focused at a specific depth, there is a problem that only the beam width of the focused portion is narrowed and the beam width of the other portion is widened.

US 5792058 B1 KR 0975830 B1 KR 2013-0091773 A

Accordingly, it is an object of the present invention to provide an ultrasonic transducer for improving a beam shape in a width direction.

Another object of the present invention is to provide an ultrasonic device including the ultrasonic transducer.

It is still another object of the present invention to provide a method of manufacturing the ultrasonic transducer.

According to an aspect of the present invention, there is provided an ultrasonic transducer including: a piezoelectric body for converting ultrasonic waves into mechanical vibrations; An upper electrode formed on the piezoelectric body and transmitting the electric energy to the piezoelectric body, the upper electrode including a plurality of division patterns; A matching layer formed on the upper electrode, the matching layer being formed in the same pattern as the divided patterns of the upper electrode; And a multifocal lens formed on the matching layer and having at least two curvatures to form a multi-focal point.

In an embodiment of the present invention, the division patterns of the upper electrode may be divided in an elevation direction of the ultrasonic transducer.

In the embodiment of the present invention, the division patterns of the upper electrode may have a symmetrical structure about the azimuth direction of the ultrasonic transducer.

In an embodiment of the present invention, a width kerf may be formed between the divided patterns of the upper electrode.

In an embodiment of the present invention, the adhesive layer may be filled with the adhesive layer (kerf) between the divided patterns of the upper electrode.

In an embodiment of the present invention, the ultrasonic transducer may further include a ground sheet formed on the upper electrode.

In an embodiment of the present invention, the matching layer may include two or more layers.

In an embodiment of the present invention, the ultrasonic transducer may further include a lower electrode formed on a lower portion of the piezoelectric body.

In an embodiment of the present invention, the upper electrode and the lower electrode may include at least one of gold (Au), platinum (Pt), titanium (Ti), and silver (Ag).

In the embodiment of the present invention, the ultrasonic transducer may further include a flexible printed circuit board (FPCB) formed at a lower portion of the lower electrode to apply electrical energy to the lower electrode.

In the embodiment of the present invention, the ultrasonic transducer has a rectangular parallelepiped shape as a whole, the lower electrode has a rectangular plate shape, and the upper electrode may have a slit rectangular planar shape.

In an embodiment of the present invention, the ultrasonic transducer may have a cylindrical shape as a whole, the lower electrode may have a circular plate shape, and the upper electrode may have a plurality of concentric planes.

According to another aspect of the present invention, there is provided an ultrasonic apparatus including: the ultrasonic transducer; And a controller for controlling driving of the ultrasonic transducer by controlling electric energy applied to the divided patterns of the upper electrode.

In an embodiment of the present invention, the ultrasonic device may further include a main unit for coupling the ultrasonic transducer and the control unit.

In an embodiment of the present invention, the controller may apply electric energy to the divided patterns of the upper electrode at the same time.

In an embodiment of the present invention, the control unit may selectively apply electric energy to a part of the divided patterns of the upper electrode.

In the embodiment of the present invention, the control section can independently control each division pattern of the division patterns of the upper electrode.

In an embodiment of the present invention, the ultrasonic device may be used as at least one of an ultrasonic wave treatment device, an ultrasonic diagnostic device, an ultrasonic wave detection device, and an ultrasonic wave processing device.

According to another aspect of the present invention, there is provided a method of manufacturing an ultrasonic transducer, including: forming a flexible printed circuit board (FPCB) on a substrate formed on a rear block; Stacking a piezoelectric body on which the lower electrode and the upper electrode are deposited on the flexible circuit board; Removing the upper electrode in an elevation direction and separating the upper electrode; Forming a ground sheet on the upper electrode; Forming a matching layer on the ground sheet; Separating the matching layer in the same pattern as the upper electrode; And forming a multifocal lens having at least two curvatures to form a multifocal on the matching layer.

In an embodiment of the present invention, the step of removing and separating the upper electrode in an elevation direction and the step of separating the matching layer in the same pattern as the upper electrode include grinding the upper electrode and the matching layer to remove can do.

According to such an ultrasonic transducer, it is possible to provide a high-performance ultrasonic transducer by improving the beam shape in the width direction. Accordingly, the present invention can be applied to an ultrasonic diagnostic apparatus for diagnosing human diseases, an ultrasonic detector using ultrasonic waves, an acupuncture therapy using ultrasonic waves, and an ultrasonic processing apparatus for other mechanical microprocessing.

In addition, since the ultrasonic transducer according to the present invention includes the focusing lens array manufactured on the basis of the MEMS, it is possible to mass produce the semiconductor lens using the semiconductor manufacturing process, and to easily manufacture the focusing lens array having the desired fine and precise shape And production of products by mass production can be reduced.

1 is a cross-sectional view of an ultrasonic transducer according to an embodiment of the present invention.
2 is a plan view of the upper electrode of FIG.
3 is a plan view of an upper electrode of an ultrasonic transducer according to another embodiment of the present invention.
4 and 5 are waveform diagrams showing characteristics of the ultrasonic transducer according to the present invention.
6 is a flowchart illustrating a method of manufacturing an ultrasonic transducer according to an embodiment of the present invention.

The following detailed description of the invention refers to the accompanying drawings, which illustrate, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are different, but need not be mutually exclusive. For example, certain features, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the invention in connection with an embodiment. It is also to be understood that the position or arrangement of the individual components within each disclosed embodiment may be varied without departing from the spirit and scope of the invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is to be limited only by the appended claims, along with the full scope of equivalents to which such claims are entitled, if properly explained. In the drawings, like reference numerals refer to the same or similar functions throughout the several views.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

1 is a cross-sectional view of an ultrasonic transducer according to an embodiment of the present invention. 2 is a plan view of the upper electrode of FIG. 3 is a plan view of an upper electrode of an ultrasonic transducer according to another embodiment of the present invention.

The ultrasonic transducer 1 according to the present invention improves the beam shape in the elevation direction. 1, an ultrasonic transducer 1 according to the present invention includes a piezoelectric body 40, at least two separated upper electrodes 50, matching layers 70 and 80, and a multi-focusing lens , 90).

The ultrasonic transducer 1 includes at least one of a back block 10, a substrate (not shown), a flexible circuit board (FPCB) 20, a lower electrode 30, and a ground sheet 60 As shown in FIG. Further, it is possible to delete some of the configurations or further include additional configurations as necessary.

The ultrasonic transducer 1 may be in the form of a chip manufactured using MEMS (Micro-Electro-Mechanical System) technology.

Here, a transducer is a device that converts some form of energy received from one or more sources into another form, for example, a speaker converts an electrical voice signal to an audible air pressure wave, and the pick- . Therefore, the ultrasonic transducer corresponds to an ultrasonic transducer that converts electric energy into ultrasonic wave.

The ultrasonic apparatus including the ultrasonic transducer 1 includes a control unit for controlling the driving of the ultrasonic transducer 1, and the main unit can combine the ultrasonic transducer 1 and the control unit. The main body unit may also function as a cover for protecting the ultrasonic transducer 1 from noise or physical contact from the outside.

When electric energy is applied to the ultrasonic transducer 1, ultrasonic waves are generated, and the ultrasonic waves are projected on a human body to perform lipid analysis or other purposes for treatment, diagnosis or detection.

The main body unit is provided with a microprocessor constituting the control unit and a power supply circuit for supplying power to the ultrasonic transducer 1. The microprocessor is provided with an input unit for inputting ultrasonic irradiation conditions and a display unit And a power unit for supplying power to each electrical component can be electrically connected to each other.

The input unit inputs an ultrasonic irradiation condition such as an ultrasonic frequency of a desired band and an ultrasonic irradiation time as an operation unit. The display unit may display the operation time of the ultrasonic wave, the output intensity of the current ultrasonic wave, the frequency of the ultrasonic wave currently being examined, and the like. Also, the power unit may be constituted by a battery for wireless operation, or may supply external power by wire through an electric cable.

The ultrasonic transducer 1 is controlled by the control unit, more specifically, the microprocessor. For example, when a frequency of a desired band is set through the input unit, And controls the driving of the ultrasonic transducer 1 so as to generate the ultrasonic wave.

In other words, the control unit controls the ultrasonic transducer 1 so that the ultrasonic transducer 1 can generate ultrasonic waves in the corresponding frequency bands in any one band selected from a plurality of frequency bands capable of being oscillated by the ultrasonic transducer 1, And controls the ducer 1.

In addition, the main body unit is provided with a high-frequency oscillator for supplying a high-frequency current to the ultrasonic transducer 1, and the high-frequency oscillator can be controlled by the control unit.

The ultrasonic transducer 1 according to the present invention includes the piezoelectric body 40 and two electrodes for applying a current to the piezoelectric body 40. One of the two electrodes is connected to the lower electrode 30 And the other electrode is formed by the upper electrode 50.

Therefore, when the lower electrode 30 and the upper electrode 50 are electrically opened to apply a high frequency current, for example, a high frequency alternating current, to the piezoelectric body 40 through the electrode portions, the piezoelectric body 40 Ultrasonic waves are generated by mechanical vibration that repeats compression and expansion.

The piezoelectric body 40 may be made of quartz, rosewater, barium titanate (BaTiO 3), artificial ceramic (PZT), or the like. In one embodiment, the piezoelectric body 40 may be a quartz crystal plate, but it is not limited thereto, and other known materials may be used.

The upper electrode 50 and the lower electrode 30 may include at least one of gold (Au), platinum (Pt), titanium (Ti), and silver (Ag) The upper electrode 50 and the lower electrode 30 may be deposited to a thickness of about 0.1 탆 or less, for example.

The ground sheet 60 and the flexible circuit board 20 are attached to the upper electrode 50 and the lower electrode 30, respectively. Electric energy is applied to the piezoelectric body 40 during ultrasonic wave transmission, And serves to sense the electrical energy generated by the sound pressure at the time of reception.

The matching layers 70 and 80 are formed in the same pattern as the division patterns of the upper electrode 50. The matching layers 70 and 80 may be formed of two or more layers. In this embodiment, the matching layers 70 and 80 are formed as a double layer composed of the first matching layer 70 and the second matching layer 80.

The multifocal lens 90 is formed on the matching layers 70 and 80 and has at least two curvatures to form a multi-focal point. A method of adjusting the beam shape of an ultrasonic transducer generally uses a single focal lens (similar to sunlight focusing with a magnifying glass). In the case of a single focal point, since a sound wave is focused at a specific depth, there is a problem that the beam width of the focused portion is narrowed and the beam width of the other portion is widened.

In order to compensate for this, the present invention uses the multifocal lens 90, but since the sound waves are converged at various depths, the effect of uniforming the beam width in the depth direction is exhibited. However, a problem that the sidelobe level becomes high may occur.

Accordingly, the upper electrode 50 is formed as a split electrode, and the effective length at which the sound waves are generated is adjusted to reduce the level of the side lobe. Accordingly, since it is difficult to make the side lobe level and the beam width uniform in the prior art, the present invention improves the beam shape by applying the split electrode 50 and the multifocal lens 90 simultaneously.

In order to uniformly improve the shape of the beam in the elevation direction, the ultrasonic transducer 1 according to the present invention has a shaded electrode structure in which the upper electrode 50 is divided into a plurality of parts. That is, the upper electrode 50 has a plurality of divided patterns in which the tooth width kerf 55 is formed.

The division pattern of the upper electrode 50 is obtained by dividing the length of the upper electrode 50 in the upper layer portion of the piezoelectric body 40 to adjust the size of the portion where the sound waves are generated. By dividing the upper electrode 50, it is possible to increase or decrease the area of the entire area of the upper electrode 50 where the current is applied.

The divided patterns may be divided into an elevation direction of the ultrasonic transducer and may have a symmetrical structure about the azimuth direction of the ultrasonic transducer 1. A current may be selectively applied to a part or a plurality of portions of the divided patterns of the upper electrode 50, and the control can be independently performed.

The lower electrode 30 is disposed on the other side of the piezoelectric body 40 so as to be separated from the other side of the piezoelectric body 40. [ For example, a vibration plate.

The upper electrode 50 is connected to one side electrode line of a wire for supplying a high frequency current and the lower electrode 30 is connected to a flexible circuit board 20 of the ultrasonic transducer 1, A high-frequency current can be applied through the second terminal.

When the high frequency current is supplied to the upper electrode 50 and the lower electrode 30, the upper electrode 50 and the lower electrode 30 serve as a condenser, And serves as a dielectric of the capacitor to determine the capacitance (C value) of the capacitor, and the C value determines the frequency of the ultrasonic wave.

If the distance between the upper electrode 50 and the lower electrode 30 is assumed to be constant, the frequency of the ultrasonic wave is affected by the width of the electrode plate. Therefore, The frequency modulation of the ultrasonic waves may be enabled by using the change.

Therefore, the frequency can be modulated by dividing the upper electrode 50 into a plurality of divided electrodes and selectively adjusting the area of the upper electrode 50 to which the current is applied. In addition, application of a current to each of the divided electrodes can be controlled, and a selective current can be applied to the divided electrodes. In other words, application of a current to one of the divided electrodes of the upper electrode 50 and application of a current to a plurality of divided electrodes can be selectively performed.

2 is a plan view of the upper electrode 50. The upper electrode 50 includes a plurality of divided electrodes 50a, 50b, 50c, 50d, and 50e. A tooth width kerf 55 is generated between the split electrodes 50a, 50b, 50c, 50d, and 50e in the azimuth direction of the ultrasonic transducer 1 so that the split electrodes 50a and 50b , 50c, 50d, and 50e. The split electrodes 50a, 50b, 50c, 50d, and 50e have a slit pattern shape in the azimuth direction of the ultrasonic transducer 1.

The tooth width 55 between the split electrodes 50a, 50b, 50c, 50d and 50e may be constant and the split electrodes 50a, 50b, 50c, 50d and 50e may be fixed to the ultrasonic transducer 1, And may have a symmetrical structure with respect to one line in the azimuth direction.

3, the ultrasonic transducer according to another embodiment of the present invention has a cylindrical shape, and the upper electrode 50 has a circular plate-like appearance, and the divided electrodes 50f, 50g, 50h, and 50i, at least one of which is in the shape of a silver ring.

The split electrodes 50f, 50g, 50h, and 50i are divided by the dividing electrode so as to be concentric with each other in a plan view. However, the shape and the division manner of the upper electrode 50 are not limited thereto. In the present embodiment, the upper electrode 50 is divided by four concentric divisions having different diameters.

In this case, a branch electrode line branched from the main electrode line constituting the one side electrode line is connected to each of the divided electrodes, and the frequency of the ultrasonic wave may be varied depending on whether current is applied through each of the branched electrode lines. Although not shown, a switch for opening / closing each branch electrode line may be provided, and the switch is controlled by the control unit.

Therefore, a current may be applied to only a part of the split electrodes 50f, 50g, 50h and 50i, a current may be applied to the split electrodes at the same time, and the split electrodes 50f, 50g, 50h and 50i A current may be applied only to a part of the divided electrodes 50f, 50g, 50h and 50i rather than a current applied to all of the divided electrodes 50f, 50g, 50h and 50i. The area where the current is applied becomes smaller.

The frequency of the ultrasonic waves generated when a current is applied to only one of the divided electrodes 50f, 50g, 50h, and 50i or a plurality of divided electrodes 50f is higher than that applied to the divided electrodes 50f, 50g, 50h, and 50i. Of course, various combinations of portions to which a current is selectively applied to at least one of the split electrodes 50f, 50g, 50h, and 50i are possible, and thus the frequency of the ultrasonic waves can be variously modulated.

By forming the divided electrodes 50f, 50g, 50h, and 50i in a concentric manner, the ultrasonic waves can be irradiated to a constant region without being deflected at the same center even when the frequency is modulated. The ultrasonic transducer 1 according to the present invention having the above-described configuration can be applied to ultrasonic apparatuses in various areas other than the ultrasonic apparatus.

The present invention improves the beam shape in the width direction to provide a high-performance ultrasonic transducer, and frequency modulation is also easy. Accordingly, various applications such as an ultrasonic diagnosis machine for diagnosing a human disease, an ultrasonic detector using ultrasonic waves, acupuncture therapy using ultrasonic waves, and an ultrasonic processing device for other mechanical micro-machining can be applied.

In addition, since the ultrasonic transducer according to the present invention includes the focusing lens array manufactured on the basis of the MEMS, it is possible to mass produce the semiconductor lens using the semiconductor manufacturing process, and to easily manufacture the focusing lens array having the desired fine and precise shape And production of products by mass production can be reduced.

Hereinafter, characteristics of the ultrasonic transducer according to the present invention will be described in comparison with the prior art.

4A is a graph showing a beam pattern of a normalized value of the magnitude of the sound pressure according to the angle at a point 1 m away from the ultrasonic transducer 1.

This is to confirm the sidelobe level, which means that the smaller the size of the sidelobe based on the main lobe, the better the performance. The sound waves must be focused on the object to be measured because the sound waves measured in the undesired direction distort the measurement signal when the size of the side lobe is high.

4 (b) is a graph showing the sound pressure propagated in the ultrasonic transducer 1 as a relative sound pressure value (level) in the depth direction at a reference sound pressure of 1 μPa. It can be said that the higher the sound pressure generated in the section where the beam is focused, the better the performance. The higher the sound pressure generated, the more sound waves can be sent to the subject.

4 (c) shows the sound pressure generated from the ultrasonic transducer 1 in the depth direction and the elevation direction. In this case, the relative sound pressure value is converted into the relative sound pressure value based on the highest sound pressure at each depth, And is a graph represented by a contour. This graph is for checking the beam width.

Table 1 below shows the numerical values according to the respective experimental results in Fig.

Condition Flat lens & whole electrode Multi-Focusing lens
& shaded electrode Sidelobe level -13.0 dB -20.2 dB Focal range 189 mm 93.2 mm Min. 아바개 4.94 mm 2.04 mm

According to FIG. 4 and Table 1, the structure proposed in the present invention (Multi-Focusing lens & shaded electrode) is smaller than that of the prior art (flat lens & whole electrod) and has a small side lobe and narrow beam width from near field It can be seen that the sound pressure has a high beam profile.

FIG. 5 is a view showing a state where a flat lens & whole electrode and a structure proposed by the present invention (multi-focusing lens & shaded electrode) are manufactured for the performance verification of the ultrasonic transducer 1 according to the present invention, It is a graph.

As can be seen from the measured beam shape, it can be confirmed that the structure proposed in the present invention has a narrow and uniform beam width as compared with the prior art. Therefore, it can be seen that the ultrasonic transducer according to the present invention has the effect of uniformly improving the beam shape.

6 is a flowchart illustrating a method of manufacturing an ultrasonic transducer according to an embodiment of the present invention.

The manufacturing method of the ultrasonic transducer according to the present embodiment can produce an ultrasonic transducer having substantially the same structure as that of the ultrasonic transducer 1 of Fig. Therefore, the same components as those of the ultrasonic transducer 1 of Fig. 1 are denoted by the same reference numerals, and repeated description is omitted.

Referring to FIG. 6, in the method of manufacturing an ultrasonic transducer according to the present embodiment, a flexible circuit board (FPCB) is formed on a substrate formed on a rear block (step S10).

The rear block may be an oxide semiconductor that can be formed on the rear block using MEMS technology. For example, it may be formed of silicon dioxide (SiO ₂ ), and may further include a separate substrate.

The flexible circuit board (FPCB) may be a wiring board, and may include wiring and connection terminals used for power supply from the outside, signal output to the outside, and the like.

A piezoelectric body on which the lower electrode and the upper electrode are deposited is laminated on the flexible circuit board (step S20). The upper electrode and the lower electrode form two electrodes for applying an electric signal, that is, a pulsed high-frequency current, to the piezoelectric body. An example of the piezoelectric body is a quartz plate.

The upper electrode and the lower electrode may include at least one of gold (Au), platinum (Pt), titanium (Ti), and silver (Ag) .

Thereafter, the upper electrode is removed in an elevation direction and separated (step S30).

The present invention uniformly improves the shape of the beam in the elevation direction of the ultrasonic transducer by dividing the length of the upper electrode of the upper layer of the piezoelectric body so as to adjust the size of the portion of the upper electrode where the sound waves are generated.

The upper electrode can be divided by forming a kerf using a precision grinder. Alternatively, the surface of the piezoelectric body may be coated with copper (Cu) and then divided into a plurality of divided electrodes through a photolithography process using a photoresist (PR) used in a semiconductor manufacturing process , And the production method thereof is not limited thereto.

Next, a ground sheet is formed on the upper electrode (step S40), and a matching layer is formed on the ground sheet (step S50). The ground sheet and the matching layer may be laminated using an adhesive, so that the width formed between the divided patterns of the upper electrode may be filled with an adhesive.

When the matching layer is formed, the matching layer is separated in the same pattern as the upper electrode (step S60). Also, the grinding process can be performed using a precision grinder. In this case, the ground sheet is not cut.

Filling the aperture formed between the patterns of the matching layer with a filler to fill the aperture.

Thereafter, a multifocal lens is formed on the matching layer (step S70). The multifocal lens has at least two curvatures to form a multi-focal point.

The ultrasonic transducer according to the present invention improves the beam shape by applying the split electrode and the multifocal lens simultaneously.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. You will understand.

The present invention improves the beam shape in the width direction of the ultrasonic transducer, thereby suppressing the deviation of the beam shape and suppressing the mismatching of the variable capacitor with respect to acoustic characteristics such as frequency characteristics and phase. Accordingly, various applications such as an ultrasonic diagnosis machine for diagnosing a human disease, an ultrasonic detector using ultrasonic waves, acupuncture therapy using ultrasonic waves, and an ultrasonic processing device for other mechanical micro-machining can be applied.

1: ultrasonic transducer 10: rear block
20: flexible circuit board 30: lower electrode
40: piezoelectric element 50: upper electrode
55: tooth width 60: ground sheet
70: first matching layer 80: second matching layer
90: Multifocal lens

Claims (20)

Rear block;
A flexible circuit board (FPCB) formed on the rear block to apply electrical energy;
An upper electrode having a ground sheet formed on an upper portion thereof and a lower electrode formed on the upper portion of the lower electrode, the lower electrode being separated in an elevation direction, A piezoelectric body laminated on the flexible circuit board in a state that the upper electrode and the lower electrode are vertically deposited;
A matching layer formed on the ground sheet and separated into the same separation patterns as the upper electrode; And
And a multifocal lens formed on the matching layer and having at least two curvatures to form a multi-focal point.
delete The method according to claim 1,
Wherein the division patterns of the upper electrode have a symmetrical structure about an azimuth direction of the ultrasonic transducer.
The method according to claim 1,
(Kerf) is formed between the divided patterns of the upper electrode.
The method according to claim 1,
And an adhesive is filled in the tooth width (kerf) between the divided patterns of the upper electrode.
delete The method according to claim 1,
Wherein the matching layer comprises at least two layers.
delete The method according to claim 1,
Wherein the upper electrode and the lower electrode comprise at least one of gold (Au), platinum (Pt), titanium (Ti), and silver (Ag).
delete The method according to claim 1,
Wherein the ultrasonic transducer has a rectangular parallelepiped shape as a whole, the lower electrode has a rectangular plate shape, and the upper electrode has a slit rectangular planar shape.
The method according to claim 1,
Wherein the ultrasonic transducer has a cylindrical shape as a whole, the lower electrode has a circular plate shape, and the upper electrode has a plurality of concentric circular plane shapes.
An ultrasonic transducer as set forth in any one of claims 1 to 12, wherein said ultrasonic transducer according to any one of claims 1 to 7, 9, 11, And
And a controller for controlling the driving of the ultrasonic transducer by controlling electric energy applied to the divided patterns of the upper electrode.
14. The method of claim 13,
Further comprising a main body unit for coupling the ultrasonic transducer and the control unit.
14. The apparatus of claim 13,
And applies electric energy to the divided patterns of the upper electrode at the same time.
14. The apparatus of claim 13,
And selectively applies electrical energy to a part of the divided patterns of the upper electrode.
14. The apparatus of claim 13,
And controls each divided pattern of the divided patterns of the upper electrode independently.
14. The method of claim 13,
An ultrasound therapy device, an ultrasound diagnostic device, an ultrasound detection device, and an ultrasound processing device.
Forming a flexible printed circuit board (FPCB) on the substrate formed on the rear block;
Stacking a piezoelectric body on which the lower electrode and the upper electrode are deposited on the flexible circuit board;
Removing the upper electrode in an elevation direction and separating the upper electrode;
Forming a ground sheet on the upper electrode;
Forming a matching layer on the ground sheet;
Separating the matching layer in the same pattern as the upper electrode; And
And forming a multifocal lens having at least two curvatures to form multiple foci on the matching layer.
20. The method of claim 19, wherein the step of removing and separating the upper electrode in an elevation direction and separating the matching layer in the same pattern as the upper electrode comprises:
Wherein the upper electrode and the matching layer are ground and removed.

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