KR100818226B1 - 감광성 조성물 및 블랙 매트릭스 - Google Patents
감광성 조성물 및 블랙 매트릭스 Download PDFInfo
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- KR100818226B1 KR100818226B1 KR1020060054816A KR20060054816A KR100818226B1 KR 100818226 B1 KR100818226 B1 KR 100818226B1 KR 1020060054816 A KR1020060054816 A KR 1020060054816A KR 20060054816 A KR20060054816 A KR 20060054816A KR 100818226 B1 KR100818226 B1 KR 100818226B1
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- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 2
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- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Substances CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 1
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- XLYMOEINVGRTEX-UHFFFAOYSA-N fumaric acid monoethyl ester Natural products CCOC(=O)C=CC(O)=O XLYMOEINVGRTEX-UHFFFAOYSA-N 0.000 description 1
- 239000006232 furnace black Substances 0.000 description 1
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- VANNPISTIUFMLH-UHFFFAOYSA-N glutaric anhydride Chemical compound O=C1CCCC(=O)O1 VANNPISTIUFMLH-UHFFFAOYSA-N 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
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- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
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- 229940119545 isobornyl methacrylate Drugs 0.000 description 1
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- 239000006233 lamp black Substances 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
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- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
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- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 1
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- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- CXHHBNMLPJOKQD-UHFFFAOYSA-M methyl carbonate Chemical compound COC([O-])=O CXHHBNMLPJOKQD-UHFFFAOYSA-M 0.000 description 1
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- CQDGTJPVBWZJAZ-UHFFFAOYSA-N monoethyl carbonate Chemical compound CCOC(O)=O CQDGTJPVBWZJAZ-UHFFFAOYSA-N 0.000 description 1
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- 239000003791 organic solvent mixture Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- GRDVGGZNFFBWTM-UHFFFAOYSA-N phenyl 2-methylprop-2-eneperoxoate Chemical compound CC(=C)C(=O)OOC1=CC=CC=C1 GRDVGGZNFFBWTM-UHFFFAOYSA-N 0.000 description 1
- WZESLRDFSNLECD-UHFFFAOYSA-N phenyl prop-2-eneperoxoate Chemical compound C=CC(=O)OOC1=CC=CC=C1 WZESLRDFSNLECD-UHFFFAOYSA-N 0.000 description 1
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- 229920002223 polystyrene Polymers 0.000 description 1
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- LYBIZMNPXTXVMV-UHFFFAOYSA-N propan-2-yl prop-2-enoate Chemical compound CC(C)OC(=O)C=C LYBIZMNPXTXVMV-UHFFFAOYSA-N 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- FOWDZVNRQHPXDO-UHFFFAOYSA-N propyl hydrogen carbonate Chemical compound CCCOC(O)=O FOWDZVNRQHPXDO-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
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- 150000003254 radicals Chemical class 0.000 description 1
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- 229940014800 succinic anhydride Drugs 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
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- 229910052718 tin Inorganic materials 0.000 description 1
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- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Polymerisation Methods In General (AREA)
Abstract
Description
노광량 (mJ/cm2) | 패턴의 직진성 | 패턴 박리 | 잔류 | ||||||
45 | 50 | 60 | 70 | 45 | 50 | 60 | 70 | ||
실시예 1 | 양호 | 양호 | 양호 | 양호 | 없음 | 없음 | 없음 | 없음 | 없음 |
실시예 2 | 양호 | 양호 | 양호 | 양호 | 없음 | 없음 | 없음 | 없음 | 없음 |
실시예 3 | 양호 | 양호 | 양호 | 양호 | 없음 | 없음 | 없음 | 없음 | 없음 |
실시예 4 | 양호 | 양호 | 양호 | 양호 | 없음 | 없음 | 없음 | 없음 | 없음 |
실시예 5 | 양호 | 양호 | 양호 | 양호 | 없음 | 없음 | 없음 | 없음 | 없음 |
비교예 1 | 불량 | 불량 | 양호 | 양호 | 있음 | 있음 | 없음 | 없음 | 없음 |
비교예 2 | 불량 | 불량 | 양호 | 양호 | 있음 | 있음 | 없음 | 없음 | 없음 |
비교예 3 | 불량 | 불량 | 양호 | 양호 | 있음 | 있음 | 없음 | 없음 | 없음 |
비교예 4 | 불량 | 불량 | 양호 | 양호 | 있음 | 있음 | 없음 | 없음 | 없음 |
Claims (7)
- 광중합성 화합물과, 광중합 개시제와, 차광재료를 함유하고,상기 광중합 개시제로서,(a) 화학식 1로 나타내어지는 화합물;화학식 1(상기 식에서, X는 화학식 2 또는 화학식 3으로 나타내어지는 기이고, R1은 페닐기, 탄소수 1~20의 알킬기, -CN, -NO2 및 탄소수 1~4의 할로알킬기로 이루어지는 군에서 선택되는 적어도 어느 1종의 기이며, R2는 탄소수 2~12의 아실기 또는 탄소수 4~6의 알케노일기이다)화학식 2(상기 식에서, R3~R7은 각각 독립하여, 수소원자, 할로겐원자, 탄소수 1~12의 알킬기, 페닐기 또는 C6H5S-로 이루어지는 군에서 선택되는 적어도 어느 1종의 기이다)화학식 3(상기 식에서, R8, R9는 각각 독립하여 수소원자, 할로겐원자, 탄소수 1~12의 알킬기 또는 페닐기로 이루어지는 군에서 선택되는 적어도 어느 1종의 기이다)및, (b) 메르캅토벤즈이미다졸을 함유하는 것을 특징으로 하는 감광성 조성물.
- 삭제
- 제 1 항에 있어서,상기 차광재료로서 카본블랙 또는 티탄 블랙 중 적어도 어느 하나를 함유하는 것을 특징으로 하는 감광성 조성물.
- 제 1 항에 있어서,상기 감광성 조성물의 막두께 1㎛당 OD값이 3.5 이상인 것을 특징으로 하는 감광성 조성물.
- 제 1 항에 기재된 감광성 조성물로 형성된 블랙 매트릭스.
- 삭제
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JP2005181616 | 2005-06-22 | ||
JPJP-P-2005-00181616 | 2005-06-22 | ||
JP2005205187A JP4627227B2 (ja) | 2005-06-22 | 2005-07-14 | 感光性組成物およびブラックマトリクス |
JPJP-P-2005-00205187 | 2005-07-14 |
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KR20060134809A KR20060134809A (ko) | 2006-12-28 |
KR100818226B1 true KR100818226B1 (ko) | 2008-04-01 |
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JP (1) | JP4627227B2 (ko) |
KR (1) | KR100818226B1 (ko) |
CN (1) | CN1928713B (ko) |
TW (1) | TWI304154B (ko) |
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WO2008059935A1 (fr) * | 2006-11-15 | 2008-05-22 | Taiyo Ink Mfg. Co., Ltd. | Composition de résine photodurcissable/thermodurcissable, produit durci et planche de câblage imprimé |
WO2008059670A1 (fr) * | 2006-11-15 | 2008-05-22 | Taiyo Ink Mfg. Co., Ltd. | Composition de résine photodurcissable/thermodurcissable, object durci et plaque de câblage imprimée |
JP5003200B2 (ja) * | 2007-02-26 | 2012-08-15 | Jsr株式会社 | 着色層形成用感放射線性組成物、カラーフィルタおよびカラー液晶表示素子 |
CN102621810B (zh) * | 2007-05-11 | 2014-05-28 | 日立化成株式会社 | 光敏性树脂组合物、光敏性元件、抗蚀剂图案的形成方法及印刷电路板的制造方法 |
JP4985768B2 (ja) * | 2007-05-11 | 2012-07-25 | 日立化成工業株式会社 | 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法 |
CN101681097A (zh) | 2007-05-29 | 2010-03-24 | 旭硝子株式会社 | 感光性组合物、间隔壁、黑色矩阵 |
JP5274132B2 (ja) * | 2007-07-17 | 2013-08-28 | 富士フイルム株式会社 | 硬化性組成物、カラーフィルタ用硬化性組成物、パターン形成方法、カラーフィルタ、及びその製造方法 |
JP2009237294A (ja) * | 2008-03-27 | 2009-10-15 | The Inctec Inc | ブラックマトリクス形成用感光性樹脂組成物 |
JP5173528B2 (ja) * | 2008-03-28 | 2013-04-03 | 富士フイルム株式会社 | 感光性樹脂組成物、遮光性カラーフィルター及びその製造方法、並びに、固体撮像素子 |
JP5192876B2 (ja) * | 2008-03-28 | 2013-05-08 | 富士フイルム株式会社 | 感光性樹脂組成物、遮光性カラーフィルター及びその製造方法、並びに、固体撮像素子 |
JP5189395B2 (ja) * | 2008-03-31 | 2013-04-24 | 富士フイルム株式会社 | 感光性樹脂組成物、遮光性カラーフィルター及びその製造方法、並びに、固体撮像素子 |
JP5528677B2 (ja) * | 2008-03-31 | 2014-06-25 | 富士フイルム株式会社 | 重合性組成物、固体撮像素子用遮光性カラーフィルタ、固体撮像素子および固体撮像素子用遮光性カラーフィルタの製造方法 |
JP5268415B2 (ja) * | 2008-04-28 | 2013-08-21 | 富士フイルム株式会社 | 重合性組成物及びそれを用いた固体撮像素子用遮光性カラーフィルタ並びに固体撮像素子 |
JP5546801B2 (ja) * | 2008-06-10 | 2014-07-09 | 富士フイルム株式会社 | 紫外光レーザー露光用感光性樹脂組成物、パターン形成方法、その方法を用いて製造したカラーフィルタ、カラーフィルタの製造方法および液晶表示装置 |
JP5340198B2 (ja) * | 2009-02-26 | 2013-11-13 | 富士フイルム株式会社 | 分散組成物 |
JP5657267B2 (ja) * | 2009-04-16 | 2015-01-21 | 富士フイルム株式会社 | カラーフィルタ用重合性組成物、カラーフィルタ、及び固体撮像素子 |
JP5934463B2 (ja) * | 2009-07-07 | 2016-06-15 | 富士フイルム株式会社 | 遮光膜用着色組成物、遮光膜及び遮光パターンの形成方法、並びに固体撮像素子及びその製造方法 |
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KR20010082580A (ko) * | 1999-12-15 | 2001-08-30 | 에프. 아. 프라저, 에른스트 알테르 (에. 알테르), 한스 페터 비틀린 (하. 페. 비틀린), 피. 랍 보프, 브이. 스펜글러, 페. 아에글러 | 옥심 에스테르 광개시제 |
KR20040007700A (ko) * | 2001-06-11 | 2004-01-24 | 시바 스페셜티 케미칼스 홀딩 인크. | 결합된 구조를 가지는 옥심 에스테르 광개시제 |
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JP2004240241A (ja) * | 2003-02-07 | 2004-08-26 | Jsr Corp | 感光性樹脂組成物、表示パネル用スペーサーおよび表示パネル |
JP4442292B2 (ja) * | 2003-06-10 | 2010-03-31 | 三菱化学株式会社 | 光重合性組成物、カラーフィルター及び液晶表示装置 |
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2005
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- 2006-05-19 TW TW095117923A patent/TWI304154B/zh active
- 2006-06-12 CN CN2006100913265A patent/CN1928713B/zh active Active
- 2006-06-19 KR KR1020060054816A patent/KR100818226B1/ko active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201859A (ja) | 1986-02-28 | 1987-09-05 | Asahi Chem Ind Co Ltd | 新規なオキシムエステル化合物及びその合成法 |
JPS62286961A (ja) | 1986-06-05 | 1987-12-12 | Asahi Chem Ind Co Ltd | 新規なオキシムエステル化合物及びその製造方法 |
KR20010082580A (ko) * | 1999-12-15 | 2001-08-30 | 에프. 아. 프라저, 에른스트 알테르 (에. 알테르), 한스 페터 비틀린 (하. 페. 비틀린), 피. 랍 보프, 브이. 스펜글러, 페. 아에글러 | 옥심 에스테르 광개시제 |
KR20040007700A (ko) * | 2001-06-11 | 2004-01-24 | 시바 스페셜티 케미칼스 홀딩 인크. | 결합된 구조를 가지는 옥심 에스테르 광개시제 |
Also Published As
Publication number | Publication date |
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TWI304154B (en) | 2008-12-11 |
JP4627227B2 (ja) | 2011-02-09 |
CN1928713A (zh) | 2007-03-14 |
TW200700903A (en) | 2007-01-01 |
JP2007033467A (ja) | 2007-02-08 |
CN1928713B (zh) | 2010-12-29 |
KR20060134809A (ko) | 2006-12-28 |
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