KR100686331B1 - 평판 디스플레이 장치용 박막 트랜지스터의 제조 방법 - Google Patents
평판 디스플레이 장치용 박막 트랜지스터의 제조 방법 Download PDFInfo
- Publication number
- KR100686331B1 KR100686331B1 KR1020010018005A KR20010018005A KR100686331B1 KR 100686331 B1 KR100686331 B1 KR 100686331B1 KR 1020010018005 A KR1020010018005 A KR 1020010018005A KR 20010018005 A KR20010018005 A KR 20010018005A KR 100686331 B1 KR100686331 B1 KR 100686331B1
- Authority
- KR
- South Korea
- Prior art keywords
- gate
- thin film
- film transistor
- display device
- flat panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (3)
- 평판 디스플레이 장치용 박막 트랜지스터를 제조하는 방법에 있어서,일정 면적을 갖는 기판에 반도체층을 형성하는 단계와;상기 반도체층의 상면에 제 1 절연막을 형성하는 단계와;상기 제 1 절연막의 상면에 알루미늄 계열의 제 1 게이트를 형성한 후 상기 제 1 게이트의 상면에 몰리브덴 계열의 제 2 게이트를 형성하여 게이트를 형성하는 단계와;상기 게이트의 상면에 제 2 절연막을 형성하는 단계와;상기 반도체층이 노출되도록 상기 제 2 절연막에 콘택홀을 형성한 후, 상기 콘택홀이 채워지도록 상기 제 2 절연막의 상면에 패터닝된 소오스/드레인 전극을 형성하는 단계를 포함하는 평판 디스플레이 장치용 박막 트랜지스터의 제조 방법.
- 제 1 항에 있어서, 상기 제 1 게이트 및 제 2 게이트의 에지는 일정 곡률을 갖도록 등방성 식각되는 평판 디스플레이 장치용 박막 트랜지스터의 제조 방법.
- 제 1 항에 있어서, 상기 제 1 게이트는 알루미늄, 알루미늄 합금 중 어느 하나이고, 상기 제 2 게이트는 몰리브덴, 몰리브덴 합금 중 어느 하나인 평판 디스플레이 장치용 박막 트랜지스터의 제조 방법.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020010018005A KR100686331B1 (ko) | 2001-04-04 | 2001-04-04 | 평판 디스플레이 장치용 박막 트랜지스터의 제조 방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020010018005A KR100686331B1 (ko) | 2001-04-04 | 2001-04-04 | 평판 디스플레이 장치용 박막 트랜지스터의 제조 방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20020078116A KR20020078116A (ko) | 2002-10-18 |
| KR100686331B1 true KR100686331B1 (ko) | 2007-02-22 |
Family
ID=27699925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020010018005A Expired - Lifetime KR100686331B1 (ko) | 2001-04-04 | 2001-04-04 | 평판 디스플레이 장치용 박막 트랜지스터의 제조 방법 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR100686331B1 (ko) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101043992B1 (ko) | 2004-08-12 | 2011-06-24 | 엘지디스플레이 주식회사 | 액정표시소자 및 그 제조방법 |
| KR101037322B1 (ko) | 2004-08-13 | 2011-05-27 | 엘지디스플레이 주식회사 | 액정표시소자 및 그 제조방법 |
| KR101048903B1 (ko) | 2004-08-26 | 2011-07-12 | 엘지디스플레이 주식회사 | 액정표시소자 및 그 제조방법 |
| KR101048998B1 (ko) | 2004-08-26 | 2011-07-12 | 엘지디스플레이 주식회사 | 액정표시소자 및 그 제조방법 |
| KR101050899B1 (ko) | 2004-09-09 | 2011-07-20 | 엘지디스플레이 주식회사 | 액정표시소자 및 그 제조방법 |
| KR101073403B1 (ko) | 2004-09-09 | 2011-10-17 | 엘지디스플레이 주식회사 | 액정표시소자 및 그 제조방법 |
| KR101078360B1 (ko) | 2004-11-12 | 2011-10-31 | 엘지디스플레이 주식회사 | 폴리형 액정 표시 패널 및 그 제조 방법 |
| KR101192746B1 (ko) | 2004-11-12 | 2012-10-18 | 엘지디스플레이 주식회사 | 폴리형 박막 트랜지스터 기판의 제조방법 |
| KR101066489B1 (ko) | 2004-11-12 | 2011-09-21 | 엘지디스플레이 주식회사 | 폴리형 박막 트랜지스터 기판 및 그 제조 방법 |
| KR101153297B1 (ko) | 2004-12-22 | 2012-06-07 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
| KR101086487B1 (ko) | 2004-12-24 | 2011-11-25 | 엘지디스플레이 주식회사 | 폴리 박막 트랜지스터 기판 및 그 제조 방법 |
| KR101107251B1 (ko) | 2004-12-31 | 2012-01-19 | 엘지디스플레이 주식회사 | 폴리 박막 트랜지스터 기판 및 그 제조 방법 |
| KR101107252B1 (ko) | 2004-12-31 | 2012-01-19 | 엘지디스플레이 주식회사 | 일렉트로-루미네센스 표시 패널의 박막 트랜지스터 기판및 그 제조 방법 |
| KR101125252B1 (ko) | 2004-12-31 | 2012-03-21 | 엘지디스플레이 주식회사 | 폴리 액정 표시 패널 및 그 제조 방법 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999039241A1 (fr) * | 1998-01-30 | 1999-08-05 | Hitachi, Ltd. | Dispositif d'affichage a cristaux liquides |
| KR19990067999A (ko) * | 1998-01-19 | 1999-08-25 | 가나이 쓰도무 | 액정표시장치 |
-
2001
- 2001-04-04 KR KR1020010018005A patent/KR100686331B1/ko not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990067999A (ko) * | 1998-01-19 | 1999-08-25 | 가나이 쓰도무 | 액정표시장치 |
| WO1999039241A1 (fr) * | 1998-01-30 | 1999-08-05 | Hitachi, Ltd. | Dispositif d'affichage a cristaux liquides |
Non-Patent Citations (1)
| Title |
|---|
| 1019990067999 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20020078116A (ko) | 2002-10-18 |
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