KR100411476B1 - Method for manufacturing capacitance type vacuum sensor and vacuum detecting device by using the same - Google Patents

Abstract

The present invention relates to a method for manufacturing a vacuum sensor capable of optimally detecting a vacuum state from low vacuum to medium vacuum, and a vacuum detection apparatus using the vacuum sensor. The present invention relates to a metal container having a low coefficient of expansion due to heat. Metal case), a high purity insulator (glass) is deposited, the first and second electrodes are deposited, lead wires are drawn from each electrode, and a getter capable of maintaining a vacuum is provided in the metal container. The vacuum sensor is manufactured by a method of making a vacuum through a vacuum suction tube after installing the membrane in an oblique direction, and when the vacuum is sucked, the membrane is deformed in one direction by a pulling phenomenon proportional to the suction amount. By converting the change in the capacitance of the electrode and the second electrode into a frequency and converting the frequency into a vacuum degree, it is possible to accurately detect the vacuum state.

Description

Method for manufacturing capacitance type vacuum sensor and vacuum detecting device by using the same}

The present invention relates to a capacitive vacuum sensor, and more particularly, to a manufacturing method of a vacuum sensor capable of optimally detecting a vacuum state from a low vacuum to a medium vacuum, and a vacuum detecting apparatus using the vacuum sensor.

In general, there are many methods for preventing the corrosion / oxidation / deterioration of the product, of which it is most ideal to maintain the storage and production process in a vacuum vessel.

In facilities such as closed containers / pipelines that require a vacuum, various methods are used to maintain the vacuum, and a sensor capable of recognizing a vacuum requires complicated and advanced technology.

Accordingly, an object of the present invention is to provide a method for manufacturing a vacuum sensor capable of optimally detecting a vacuum state from low vacuum to medium vacuum, and a vacuum detecting apparatus using the vacuum sensor.

"Method of manufacturing a capacitive vacuum sensor" according to the present invention for achieving the above object,

A first step of primary lathe machining of the outer metal case to form an insulator (glass);

A second step of assembling the glass, the electrode lead and the ceramic in the metal housing and molding the glass by the glass molding curve;

Heat treating the molded insulator case to process the surface oxidized metal and to process the molded glass into a plane;

A fourth step of processing the insulated surface edge after processing the insulated surface portion;

A fifth step of degreasing and washing the insulating part in which the processing step is completed, and then drying the insulating part in a thermostat for a predetermined time;

A sixth step of forming an electrode by depositing aluminum at a predetermined position of the insulator;

A seventh step of precision lathe machining of the metal plate;

An eighth step of precision welding the vacuum suction tube, the getter housing, and the electrode lead case to the lathe metal plate;

A ninth step of assembling and forming the electrode lead and the glass into a metal case;

And inserting a getter and spot welding the diaphragm in which the fine holes are processed to the metal housing.

In addition, the "vacuum detection apparatus using a capacitive vacuum sensor" according to the present invention,

A vacuum sensor for generating a capacitance signal corresponding to the suction amount;

A power supply for supplying driving power to a required portion of the vacuum detection device;

A temperature controller configured to receive the necessary power from the power supply and control heater heating according to the detected temperature;

A heater and a temperature sensor that generate heat under the control of the temperature controller to maintain the temperature at a constant temperature, detect a temperature of the vacuum sensor, and transmit the detected temperature to the temperature controller;

A capacitance / frequency converting unit converting the capacitance signal output from the vacuum sensor into a frequency signal;

Control data for reading the frequency converted by the capacitance / frequency converter through a digital port, converting the read frequency signal into a vacuum to determine a vacuum state, and storing, transmitting and displaying the determined vacuum state data. A control unit for outputting a;

A digital / analog converter converting the vacuum detection data output from the controller into an analog signal and transmitting the converted signal to a display side;

A memory for storing vacuum detection data output from the controller;

And a communication processor configured to transmit the vacuum detection data output from the controller to an external device.

1 is a structural diagram of a capacitive vacuum sensor according to the present invention;

2 is a manufacturing process flowchart showing a method of manufacturing a capacitive vacuum sensor according to the present invention;

3 is a block diagram showing the configuration of a vacuum detection apparatus using a capacitive vacuum sensor according to the present invention.

<Explanation of symbols for the main parts of the drawings>

100 ..... Vacuum sensor

101 ..... Metal containers (metal case)

102 ..... Insulators (Glass)

103, 104 ..... First and second electrodes

105 ..... Getter

106 ..... Membrane

107 ..... Vacuum suction line

300 ..... Thermostat

400 ..... Capacitive / Frequency Converter

600 ..... Controls

800 ..... memory

900 ..... Communication Processing Unit

Hereinafter, described in detail with reference to the accompanying drawings, preferred embodiments of the present invention according to the technical spirit as described above.

2 is a process flowchart showing a method of manufacturing a capacitive vacuum sensor according to the present invention.

As shown therein, a first step (S101) of primary lathe processing of an outer metal case for forming an insulator (glass); A second step (S102) of assembling a glass, an electrode lead, and a ceramic into a metal housing and molding the glass by a glass molding curve; A third step (S103) of processing the surface oxidized metal by heat-treating the molded insulator case and processing the molded glass into a plane; A fourth step (S104 to S105) of processing the insulator curved surface edge after processing the insulated curved surface portion; A fifth step (S106) of degreasing and washing the insulating part in which the processing step is completed, and then drying it in a thermostat for a predetermined time; A sixth step (S107) of forming aluminum by depositing aluminum at a predetermined position of the insulator; A seventh step (S108) of precision lathe machining of the metal plate; An eighth step (S109) of precisely welding the vacuum suction pipe, the getter housing, and the electrode lead case to the lathe processed metal plate; A ninth step (S110) of assembling the electrode lead and the glass into a metal case; The getter is inserted, and a tenth step (S111 to S112) is performed to spot weld the diaphragm in which the fine holes are processed to the metal housing.

In the method of manufacturing the capacitive vacuum sensor thus obtained, first, in step S101, the metal housing for making the insulator of the vacuum sensor is processed, that is, the outer metal container 101 is lathed to form the insulator (glass). do.

Next, in step S102, a glass (glass), an electrode lead, and a ceramic are assembled to the metal housing and molded by a glass molding curve.

Next, in step S103, the metal container in which the insulator is molded is heat-treated to process the surface oxidized metal, and the molded glass is processed into a plane.

In addition, in step S104 and step S105 to process the optimum curved surface to operate the sensing membrane, and when the sensing membrane is welded to the insulation and the cross section that the sensing membrane can maintain the best flatness Perform the making process.

Thereafter, in step S106, after cleaning the contaminated surface during the processing of the insulating process is completed, clean the contaminated surface, and dried for 24 hours in a thermostat (80 ℃) to complete the best insulation by the process of checking the leakage of internal contaminants.

That is, the above-described processes of steps S101 to S106 show a process of manufacturing an insulator. The insulator is made by welding glass to a metal case with a low coefficient of thermal expansion. At this time, the adhesion between the metal and the glass should be ensured and no leakage should be generated. In addition, it is easy to weld with a ceramic conduit or the like at the lead / suction port of the electrode and has no crack.

On the other hand, the metal container is completely dried after removing the foreign matter on the surface by the cleaning process. Next, a corrosion layer is formed on the surface of the metal to facilitate the welding of the glass. Then, an appropriate amount of glass and electrode leads are inserted and then inserted into a sealed electric furnace. Next, shape processing is performed by the curved surface grinding method.

Next, in step S107, a process of making an electrode capable of measuring the C value of the capacitance method is performed. In other words, aluminum is vacuum deposited on the insulator (glass) to deposit two electrodes.

In other words, two aluminum electrodes are deposited on the surface of the insulator by a vacuum evaporator, and the deposited aluminum is heat-treated at 400 ° C. Check the connection between the electrode and the wire so that the contact resistance is less than 0.5Ω.

In this way, the insulation is manufactured, and a high vacuum chamber (Chamber) is then manufactured to make and maintain the optimum space inside the sensor in a high vacuum state.

That is, in step S108, the vacuum suction tube, the getter housing, and the electrode conductor are fixed, and the metal plate is precisely lathed to make an optimal space.

Next, the vacuum suction pipe, the getter housing, and the electrode lead case are precision welded to the metal plate precision machined in step S109.

Subsequently, in step S110, an electrode unit capable of connecting the electrode of the insulation unit to the outside is manufactured. Also in this case, it is the process of assembling an electrode lead and glass in a metal container similarly to the said insulated part, and carrying out glass molding.

Next, in step S111, a getter which is the main material for determining the high vacuum holding is inserted.

Finally, the metal housing is machined to install the vacuum connection and the sensing membrane so as to detect the degree of vacuum in step S112. Here, the diaphragm with fine holes must be spot welded to the metal housing precisely so that the sensing membrane works best.

That is, a membrane is installed and a getter is put in a getter hole on the back and sealed. Next, connect the vacuum pump to the vacuum inlet and seal the vacuum in airtight. Then start the getter.

This completes the vacuum sensor mechanism.

2 is a structural diagram of a capacitive vacuum sensor manufactured as described above.

As shown therein, the high purity insulator (glass) 102 is filled in a metal container (metal case) 101 having a low coefficient of expansion due to heat, and the first and second electrodes 103 and 104 are deposited. Conductors are drawn out from the respective electrodes 103 and 104.

Next, the getter 105 is installed in the metal container 101 to maintain the vacuum, and the membrane 106 is installed diagonally with the surface of the electrode to make a vacuum through the vacuum suction tube 107.

In this state, when suctioned in the vacuum 108, the membrane 106 is deformed in one direction due to a pulling phenomenon proportional to the suction amount, and at this time, the capacitance of the first electrode 103 and the second electrode 104 decreases. do.

By converting the thus obtained capacitance signal into a frequency and converting the frequency into a vacuum degree, it is possible to accurately detect a vacuum state.

FIG. 3 is a block diagram showing an apparatus for detecting an actual vacuum state using a vacuum sensor manufactured by the above method.

As shown here, the vacuum sensor 100 for generating a capacitance signal corresponding to the suction amount; A power supply unit 200 for supplying driving power to a required portion of the vacuum detection device; A temperature control unit 300 receiving power required from the power supply unit 200 and controlling heater heating according to the detected temperature; The heater and the temperature sensor 400 to generate heat under the control of the temperature control unit 300 to maintain the temperature at a constant temperature, detect the temperature of the vacuum sensor 100 and deliver it to the temperature control unit 300 and ; A capacitance / frequency converter 500 for converting the capacitance signal output from the vacuum sensor 100 into a frequency signal; Read the frequency converted by the capacitance / frequency converter 500 through the digital port, convert the read frequency signal into a vacuum to determine the vacuum state, and store, transmit and display the determined vacuum state data A control unit 600 for outputting control data for the control unit; A digital / analog converter 700 converting the vacuum detection data output from the controller 600 into an analog signal and transmitting the converted analog signal to a display side; A memory 800 for storing vacuum detection data output from the controller 600; Communication unit 900 for transmitting the vacuum detection data output from the control unit 600 to an external device.

The vacuum detection device using the vacuum sensor according to the present invention configured as described above,

First, DC power supply (24 VDC) input from the power supply unit 200 is processed to supply driving power required for each stage of the device.

Next, when power is supplied, the temperature controller 300 controls the heater 400 according to the temperature detected by the heater and the temperature sensor 400 so that a constant temperature is always maintained.

The process of detecting the vacuum state is as follows.

When the suction is performed by the vacuum sensor 100, the membrane is deformed in a specific direction by a pulling phenomenon proportional to the suction amount, and at this time, the capacitance change signal of the first and second electrodes is changed to the capacitance / frequency conversion unit 500. Is delivered).

The capacitive / frequency converting unit 500 converts the delivered capacitance signal into a corresponding frequency signal and transmits the converted capacitance signal to the control unit 600. The control unit 600 transmits the transmitted frequency signal to the analog / digital signal. The signal is converted into a digital signal through a port (not shown). Thereafter, the converted signal is converted into a vacuum degree to determine a vacuum state.

In addition, the determined vacuum detection data is stored in the memory 800 and transmitted to the communication processor 900 when it is transmitted to the external device. In addition, the vacuum detection data is transmitted to the digital / analog converter 700 to display the detected vacuum state.

The communication processor 900 transmits the transmitted vacuum detection data to an external device through an RS-485 / RS-422 communication method.

In addition, the digital / analog converter 700 converts the input vacuum detection data into an analog signal corresponding thereto, and transmits the same to the display device at the rear end so that the detected vacuum state is displayed.

According to the "capacitive-type vacuum sensor manufacturing method and vacuum detection apparatus using the same" according to the present invention as described above, since the optimum vacuum sensor can be manufactured, it is possible to accurately detect the vacuum state from low vacuum to medium vacuum There is an advantage.

In addition, there is an advantage to provide a capacitive vacuum sensor with a simple structure of the sensor and easy to manufacture.

Claims (3)

A first step of primary lathe machining of the outer metal case to form an insulator (glass); A second step of assembling the glass, the electrode lead and the ceramic in the metal housing and molding the glass by the glass molding curve; Heat treating the molded insulator case to process the surface oxidized metal and to process the molded glass into a plane; A fourth step of processing the insulated surface edge after processing the insulated surface portion; A fifth step of degreasing and washing the insulating part in which the processing step is completed, and then drying the insulating part in a thermostat for a predetermined time; A sixth step of forming an electrode by depositing aluminum at a predetermined position of the insulator; A seventh step of precision lathe machining of the metal plate; An eighth step of precision welding the vacuum suction tube, the getter housing, and the electrode lead case to the lathe metal plate; A ninth step of assembling and forming the electrode lead and the glass into a metal case; And a tenth step of spot welding the diaphragm in which the fine hole is processed to the metal housing by inserting a getter. The method of claim 1, wherein the fifth step, A method of manufacturing a capacitive vacuum sensor, characterized in that the internal contaminants are discharged by drying in a constant temperature bath at 80 ℃ 24 hours. A vacuum sensor for generating a capacitance signal corresponding to the suction amount; A power supply for supplying driving power to a required portion of the vacuum detection device; A temperature controller configured to receive the necessary power from the power supply and control heater heating according to the detected temperature; A heater and a temperature sensor that generate heat under the control of the temperature controller to maintain the temperature at a constant temperature, detect a temperature of the vacuum sensor, and transmit the detected temperature to the temperature controller; A capacitance / frequency converting unit converting the capacitance signal output from the vacuum sensor into a frequency signal; Control data for reading the frequency converted by the capacitance / frequency converter through a digital port, converting the read frequency signal into a vacuum to determine a vacuum state, and storing, transmitting and displaying the determined vacuum state data. A control unit for outputting a; A digital / analog converter converting the vacuum detection data output from the controller into an analog signal and transmitting the converted signal to a display side; A memory for storing the vacuum detection data output from the controller and storing various parameters; And a communication processor configured to transmit the vacuum detection data output from the controller to an external device.