KR100188090B1 - 액정 표시 장치용 박막 트랜지스터 기판의 및 그 제조방법 - Google Patents
액정 표시 장치용 박막 트랜지스터 기판의 및 그 제조방법 Download PDFInfo
- Publication number
- KR100188090B1 KR100188090B1 KR1019950035200A KR19950035200A KR100188090B1 KR 100188090 B1 KR100188090 B1 KR 100188090B1 KR 1019950035200 A KR1019950035200 A KR 1019950035200A KR 19950035200 A KR19950035200 A KR 19950035200A KR 100188090 B1 KR100188090 B1 KR 100188090B1
- Authority
- KR
- South Korea
- Prior art keywords
- gate electrode
- insulating film
- gate
- polycrystalline silicon
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
- H10D30/0312—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
- H10D30/0314—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral top-gate TFTs comprising only a single gate
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
- H10D30/6731—Top-gate only TFTs
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- High Energy & Nuclear Physics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Mathematical Physics (AREA)
- Thin Film Transistor (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950035200A KR100188090B1 (ko) | 1995-10-12 | 1995-10-12 | 액정 표시 장치용 박막 트랜지스터 기판의 및 그 제조방법 |
TW085110952A TWI246620B (en) | 1995-10-12 | 1996-09-07 | A thin film transistor for liquid crystal display and a method for manufacturing the same |
JP27048196A JP3774278B2 (ja) | 1995-10-12 | 1996-10-14 | 液晶表示装置用薄膜トランジスタ基板の製造方法 |
JP2005172379A JP4312741B2 (ja) | 1995-10-12 | 2005-06-13 | 液晶表示装置用薄膜トランジスタ基板およびその製造方法 |
JP2008232509A JP2009048199A (ja) | 1995-10-12 | 2008-09-10 | 液晶表示装置用薄膜トランジスタ基板およびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950035200A KR100188090B1 (ko) | 1995-10-12 | 1995-10-12 | 액정 표시 장치용 박막 트랜지스터 기판의 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970024303A KR970024303A (ko) | 1997-05-30 |
KR100188090B1 true KR100188090B1 (ko) | 1999-07-01 |
Family
ID=19430017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950035200A Expired - Lifetime KR100188090B1 (ko) | 1995-10-12 | 1995-10-12 | 액정 표시 장치용 박막 트랜지스터 기판의 및 그 제조방법 |
Country Status (3)
Country | Link |
---|---|
JP (3) | JP3774278B2 (ja) |
KR (1) | KR100188090B1 (ja) |
TW (1) | TWI246620B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3318285B2 (ja) | 1999-05-10 | 2002-08-26 | 松下電器産業株式会社 | 薄膜トランジスタの製造方法 |
KR101781175B1 (ko) * | 2015-08-31 | 2017-09-22 | 가천대학교 산학협력단 | 초박막 저결정성 실리콘 채널을 갖는 무접합 전계효과 트랜지스터 및 그 제조방법 |
WO2019244665A1 (ja) * | 2018-06-22 | 2019-12-26 | 住友重機械工業株式会社 | 半導体装置のレーザーアニール方法、半導体装置、レーザーアニール方法、レーザーアニール装置の制御装置およびレーザーアニール装置 |
CN109920731B (zh) * | 2019-03-20 | 2021-03-19 | 上海华虹宏力半导体制造有限公司 | 多晶硅薄膜晶体管及其制作方法 |
CN115497816B (zh) * | 2022-10-19 | 2023-10-17 | 弘大芯源(深圳)半导体有限公司 | 一种半导体场效应集成电路及制备方法 |
-
1995
- 1995-10-12 KR KR1019950035200A patent/KR100188090B1/ko not_active Expired - Lifetime
-
1996
- 1996-09-07 TW TW085110952A patent/TWI246620B/zh not_active IP Right Cessation
- 1996-10-14 JP JP27048196A patent/JP3774278B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-13 JP JP2005172379A patent/JP4312741B2/ja not_active Expired - Fee Related
-
2008
- 2008-09-10 JP JP2008232509A patent/JP2009048199A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2009048199A (ja) | 2009-03-05 |
TWI246620B (en) | 2006-01-01 |
JP4312741B2 (ja) | 2009-08-12 |
JPH09133928A (ja) | 1997-05-20 |
JP3774278B2 (ja) | 2006-05-10 |
KR970024303A (ko) | 1997-05-30 |
JP2005326867A (ja) | 2005-11-24 |
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