JPS6481293A - Manufacture of fine circuit - Google Patents
Manufacture of fine circuitInfo
- Publication number
- JPS6481293A JPS6481293A JP62238417A JP23841787A JPS6481293A JP S6481293 A JPS6481293 A JP S6481293A JP 62238417 A JP62238417 A JP 62238417A JP 23841787 A JP23841787 A JP 23841787A JP S6481293 A JPS6481293 A JP S6481293A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- irradiated
- ceramic
- superconductor
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000919 ceramic Substances 0.000 abstract 4
- 238000010894 electron beam technology Methods 0.000 abstract 3
- 239000002887 superconductor Substances 0.000 abstract 3
- 238000009434 installation Methods 0.000 abstract 2
- 238000010884 ion-beam technique Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 235000011837 pasties Nutrition 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To manufacture a fine circuit by using a simple means whose cost of installation is low by a method wherein a ceramic thin film capable of becoming a superconductor is formed on a substrate and this thin film is irradiated with an electron beam or a laser. CONSTITUTION:A ceramic thin layer 2 is formed on a substrate 1 composed of an insulator such as a ceramic or the like in such a way that a pasty ceramic capable of becoming a superconductor is coated, sputtered or the like. Then, a part to be used as a circuit in the thin layer 2 is irradiated with an ion beam according to a need; a very small quantity of composition in the part to be used as the circuit is adjusted. Then, the part to be used as the circuit is irradiated with an electron beam 3 or a laser; the part to be used as the circuit is baked; a fine circuit 4 composed of the superconductor is formed. Accordingly, when a position to be irradiated with the electron beam 3 or the ion beam and a heating temperature are controlled by using a computer, the arbitrary circuit can be formed; the structure thus formed is simple and a cost of installation is low.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62238417A JPS6481293A (en) | 1987-09-22 | 1987-09-22 | Manufacture of fine circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62238417A JPS6481293A (en) | 1987-09-22 | 1987-09-22 | Manufacture of fine circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6481293A true JPS6481293A (en) | 1989-03-27 |
Family
ID=17029897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62238417A Pending JPS6481293A (en) | 1987-09-22 | 1987-09-22 | Manufacture of fine circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6481293A (en) |
-
1987
- 1987-09-22 JP JP62238417A patent/JPS6481293A/en active Pending
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