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JPS5437690A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5437690A
JPS5437690A JP10462577A JP10462577A JPS5437690A JP S5437690 A JPS5437690 A JP S5437690A JP 10462577 A JP10462577 A JP 10462577A JP 10462577 A JP10462577 A JP 10462577A JP S5437690 A JPS5437690 A JP S5437690A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
heat treatment
resistance value
polycrystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10462577A
Other languages
Japanese (ja)
Inventor
Yasutaka Ikushima
Takehiko Kubota
Tsutomu Tashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10462577A priority Critical patent/JPS5437690A/en
Publication of JPS5437690A publication Critical patent/JPS5437690A/en
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To establish the resistor uniform in the resistance value and high in the resistance value with good reproducibility, by performing heat treatment again under H2 atmosphere, after coating polycrystal Si layer selectively via the insulation film on the semiconductor substrate and activating with heat treatment at more than 700°C with ion implantation.
COPYRIGHT: (C)1979,JPO&Japio
JP10462577A 1977-08-30 1977-08-30 Manufacture for semiconductor device Pending JPS5437690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10462577A JPS5437690A (en) 1977-08-30 1977-08-30 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10462577A JPS5437690A (en) 1977-08-30 1977-08-30 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5437690A true JPS5437690A (en) 1979-03-20

Family

ID=14385613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10462577A Pending JPS5437690A (en) 1977-08-30 1977-08-30 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5437690A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220452A (en) * 1985-03-27 1986-09-30 Nec Corp Manufacturing method of semiconductor device
JPS62183090U (en) * 1986-05-13 1987-11-20
US5037766A (en) * 1988-12-06 1991-08-06 Industrial Technology Research Institute Method of fabricating a thin film polysilicon thin film transistor or resistor
JPH04211168A (en) * 1991-01-28 1992-08-03 Seiko Epson Corp Manufacturing method of semiconductor device
US6974022B2 (en) 2001-05-11 2005-12-13 Nitta Corporation Beaded conveyor belt

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220452A (en) * 1985-03-27 1986-09-30 Nec Corp Manufacturing method of semiconductor device
JPH0556661B2 (en) * 1985-03-27 1993-08-20 Nippon Electric Co
JPS62183090U (en) * 1986-05-13 1987-11-20
US5037766A (en) * 1988-12-06 1991-08-06 Industrial Technology Research Institute Method of fabricating a thin film polysilicon thin film transistor or resistor
JPH04211168A (en) * 1991-01-28 1992-08-03 Seiko Epson Corp Manufacturing method of semiconductor device
US6974022B2 (en) 2001-05-11 2005-12-13 Nitta Corporation Beaded conveyor belt
US7051869B2 (en) 2001-05-11 2006-05-30 Nitta Corporation Beaded conveyor belt

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