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JPS6467960A - Color solid-state image sensing element - Google Patents

Color solid-state image sensing element

Info

Publication number
JPS6467960A
JPS6467960A JP22387587A JP22387587A JPS6467960A JP S6467960 A JPS6467960 A JP S6467960A JP 22387587 A JP22387587 A JP 22387587A JP 22387587 A JP22387587 A JP 22387587A JP S6467960 A JPS6467960 A JP S6467960A
Authority
JP
Japan
Prior art keywords
sensing element
image sensing
state image
color solid
conductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22387587A
Other languages
Japanese (ja)
Inventor
Sakae Tamura
Katsuhisa Mita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22387587A priority Critical patent/JPS6467960A/en
Publication of JPS6467960A publication Critical patent/JPS6467960A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Color Television Image Signal Generators (AREA)

Abstract

PURPOSE:To suppress the charging potential of the surface of a color solid-state image sensing element to a low value, to prevent dusts from being attracted to the sensing element and to provide the solid-state image sensing element having no image defect by providing a transparent conductor layer between the surface of the sensing element and a color filter, and connecting the conductor layer to a ground terminal provided to the sensing element. CONSTITUTION:An aluminum optical sheet 23 is provided on a semiconductor substrate on which a P-N junction photodiode and a charge transfer unit are integrated. The sheet 23 is so provided as to be electrically connected to the ground electrode of an image sensing element. Then, a transparent conductor layer 4 made of In2O3 is provided on the shield 23, and a protective film 24 made of Si3N4 is provided thereon. Thereafter, a color filter 3 is provided on the film 24 to obtain a color solid-state image sensing element. The surface potential of the color solid-state image sensing element is -5volts or below, and dust does not substantially adhere thereto.
JP22387587A 1987-09-09 1987-09-09 Color solid-state image sensing element Pending JPS6467960A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22387587A JPS6467960A (en) 1987-09-09 1987-09-09 Color solid-state image sensing element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22387587A JPS6467960A (en) 1987-09-09 1987-09-09 Color solid-state image sensing element

Publications (1)

Publication Number Publication Date
JPS6467960A true JPS6467960A (en) 1989-03-14

Family

ID=16805078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22387587A Pending JPS6467960A (en) 1987-09-09 1987-09-09 Color solid-state image sensing element

Country Status (1)

Country Link
JP (1) JPS6467960A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000029132A (en) * 1998-07-13 2000-01-28 Nikon Corp Optical equipment
JP2001518703A (en) * 1997-09-26 2001-10-16 インテル・コーポレーション Method and apparatus for using light-blocking layer to change pixel color responsivity
JP2007311533A (en) * 2006-05-18 2007-11-29 Tdk Corp Optical semiconductor device and method of manufacturing the same
US7961244B2 (en) 1998-03-31 2011-06-14 Nikon Corporation Optical filter and optical device provided with this optical filter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001518703A (en) * 1997-09-26 2001-10-16 インテル・コーポレーション Method and apparatus for using light-blocking layer to change pixel color responsivity
US7961244B2 (en) 1998-03-31 2011-06-14 Nikon Corporation Optical filter and optical device provided with this optical filter
JP2000029132A (en) * 1998-07-13 2000-01-28 Nikon Corp Optical equipment
JP2007311533A (en) * 2006-05-18 2007-11-29 Tdk Corp Optical semiconductor device and method of manufacturing the same

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