JPS6461662A - Manufacture of semiconductor biosensor - Google Patents

Abstract

PURPOSE:To form plural immobilized enzyme films on one wafer efficiently and accurately while precluding the deactivation of enzyme by making only the sensing position surface of a semiconductor detecting element substrate selectively hydrophilic and carrying out the applied immobilization of its enzyme solution. CONSTITUTION:Patterns 2a, 2b, and 2c are formed of negative resists at sensing positions (a), (b), and (c) of a substrate 1 and the exposed part is made hydrophobic with a hydrophobic property providing agent. Here, the resist is separated and the substrate is immersed in the positive resist liquid, which sticks at only the sensing position. Then only 3a is irradiated (F) with ultraviolet rays through a photoresist, the positive resist is dissolved by development, and the substrate is washed, so that drops 4a of water are left. The powder enzyme 5 is scattered there, dissolved in water, and immobilized with a crosslinking agent to form an immobilized enzyme film 5a as shown by (J). Similarly, different enzyme films are formed at the position (b) and (c), thus immobilizing plural enzymes efficiently on one wafer.