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JPS6453461A - Semiconductor device and manufacture thereof - Google Patents

Semiconductor device and manufacture thereof

Info

Publication number
JPS6453461A
JPS6453461A JP32569887A JP32569887A JPS6453461A JP S6453461 A JPS6453461 A JP S6453461A JP 32569887 A JP32569887 A JP 32569887A JP 32569887 A JP32569887 A JP 32569887A JP S6453461 A JPS6453461 A JP S6453461A
Authority
JP
Japan
Prior art keywords
type
impurity layer
mos
type impurity
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32569887A
Other languages
English (en)
Other versions
JP2537649B2 (ja
Inventor
Masahiro Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP62325698A priority Critical patent/JP2537649B2/ja
Publication of JPS6453461A publication Critical patent/JPS6453461A/ja
Application granted granted Critical
Publication of JP2537649B2 publication Critical patent/JP2537649B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP62325698A 1987-05-19 1987-12-23 半導体装置及び半導体装置の製造方法 Expired - Lifetime JP2537649B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62325698A JP2537649B2 (ja) 1987-05-19 1987-12-23 半導体装置及び半導体装置の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62-121702 1987-05-19
JP12170287 1987-05-19
JP62325698A JP2537649B2 (ja) 1987-05-19 1987-12-23 半導体装置及び半導体装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP7232710A Division JP2591518B2 (ja) 1995-09-11 1995-09-11 半導体装置

Publications (2)

Publication Number Publication Date
JPS6453461A true JPS6453461A (en) 1989-03-01
JP2537649B2 JP2537649B2 (ja) 1996-09-25

Family

ID=26458996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62325698A Expired - Lifetime JP2537649B2 (ja) 1987-05-19 1987-12-23 半導体装置及び半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP2537649B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0330370A (ja) * 1989-06-27 1991-02-08 Sony Corp Ｍｉｓ型半導体装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621275A (ja) * 1985-06-26 1987-01-07 Matsushita Electronics Corp 半導体装置の製造方法
JPS6223168A (ja) * 1985-07-24 1987-01-31 Hitachi Ltd 半導体装置
JPS6266678A (ja) * 1985-09-19 1987-03-26 Toshiba Corp 半導体装置の製造方法
JPS63263767A (ja) * 1987-04-22 1988-10-31 Hitachi Ltd 半導体装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621275A (ja) * 1985-06-26 1987-01-07 Matsushita Electronics Corp 半導体装置の製造方法
JPS6223168A (ja) * 1985-07-24 1987-01-31 Hitachi Ltd 半導体装置
JPS6266678A (ja) * 1985-09-19 1987-03-26 Toshiba Corp 半導体装置の製造方法
JPS63263767A (ja) * 1987-04-22 1988-10-31 Hitachi Ltd 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0330370A (ja) * 1989-06-27 1991-02-08 Sony Corp Ｍｉｓ型半導体装置

Also Published As

Publication number Publication date
JP2537649B2 (ja) 1996-09-25

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