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JPS642213A - Manufacture of high temperature superconductive thin film - Google Patents

Manufacture of high temperature superconductive thin film

Info

Publication number
JPS642213A
JPS642213A JP62155465A JP15546587A JPS642213A JP S642213 A JPS642213 A JP S642213A JP 62155465 A JP62155465 A JP 62155465A JP 15546587 A JP15546587 A JP 15546587A JP S642213 A JPS642213 A JP S642213A
Authority
JP
Japan
Prior art keywords
atmosphere
thin film
temperatures
stabilized
based compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62155465A
Other languages
Japanese (ja)
Other versions
JPH012213A (en
Inventor
Matahiro Komuro
Yuzo Kozono
Yoshiaki Yazawa
Masanobu Hanazono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62155465A priority Critical patent/JPS642213A/en
Publication of JPH012213A publication Critical patent/JPH012213A/en
Publication of JPS642213A publication Critical patent/JPS642213A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE: To make it possible to obtain an oxide thin film having a high superconductive critical temperature by maintaining Ba-Y-Cu-O-based compound sputtered in Ar atmosphere with a low substrate temperature in O2 atmosphere at temperatures of 700°C or lower and gradually cooling.
CONSTITUTION: A Ba-Y-Cu-O-based compound which has undergone sputtering in Ar atmosphere with substrate temperatures of 500°C or lower is heated and maintained at temperatures of 700°C or lower in O2 atmosphere and gradually cooled at cooling speeds of 200°C/h or less. Namely in Ar atmosphere at substrate temperatures of 500°C or lower, a sintered body of Ba-Y-Cu-O-based compound and a compound thin film containing a semi-stabilized phase sputtered as a target are produced. The produced thin film is then heated in O2 atmosphere to grow the semi-stabilized phase into a stabilized solid phase. Since the structure and superconductivity of the stabilized phase change if partial pressure of O2 and the cooling speed change at the time of the solid phase growth, a superconductive thin film of a property Tc>77°K is obtained by performing heat treatment at a certain partial pressure of O2 and the cooling speed.
COPYRIGHT: (C)1989,JPO&Japio
JP62155465A 1987-06-24 1987-06-24 Manufacture of high temperature superconductive thin film Pending JPS642213A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62155465A JPS642213A (en) 1987-06-24 1987-06-24 Manufacture of high temperature superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62155465A JPS642213A (en) 1987-06-24 1987-06-24 Manufacture of high temperature superconductive thin film

Publications (2)

Publication Number Publication Date
JPH012213A JPH012213A (en) 1989-01-06
JPS642213A true JPS642213A (en) 1989-01-06

Family

ID=15606645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62155465A Pending JPS642213A (en) 1987-06-24 1987-06-24 Manufacture of high temperature superconductive thin film

Country Status (1)

Country Link
JP (1) JPS642213A (en)

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