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JPS6420504A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS6420504A
JPS6420504A JP17761687A JP17761687A JPS6420504A JP S6420504 A JPS6420504 A JP S6420504A JP 17761687 A JP17761687 A JP 17761687A JP 17761687 A JP17761687 A JP 17761687A JP S6420504 A JPS6420504 A JP S6420504A
Authority
JP
Japan
Prior art keywords
colored
photoresist
films
colors
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17761687A
Other languages
Japanese (ja)
Inventor
Masahiro Yoneyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP17761687A priority Critical patent/JPS6420504A/en
Publication of JPS6420504A publication Critical patent/JPS6420504A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To provide a specified transmittance and to stabilize device characteristics by forming colored films of desired colors on a surface and patterning the films by photolithography and etching. CONSTITUTION:An intermediate layer 2, the colored film 2 and a photoresist 4 are formed successively on an underlying pattern 1. The colored film 3 consists of the photoresist colored with a dye. After the polyimide film 3 is etched through the photoresist 4, the photoresist 4 is removed. The polyimide films colored to respective colors are similarly patterned when 3 colors are required.
JP17761687A 1987-07-15 1987-07-15 Production of semiconductor device Pending JPS6420504A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17761687A JPS6420504A (en) 1987-07-15 1987-07-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17761687A JPS6420504A (en) 1987-07-15 1987-07-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6420504A true JPS6420504A (en) 1989-01-24

Family

ID=16034120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17761687A Pending JPS6420504A (en) 1987-07-15 1987-07-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6420504A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02244102A (en) * 1989-03-17 1990-09-28 Fujitsu Ltd Color filter manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02244102A (en) * 1989-03-17 1990-09-28 Fujitsu Ltd Color filter manufacturing method

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