JPS61214135A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS61214135A JPS61214135A JP5536385A JP5536385A JPS61214135A JP S61214135 A JPS61214135 A JP S61214135A JP 5536385 A JP5536385 A JP 5536385A JP 5536385 A JP5536385 A JP 5536385A JP S61214135 A JPS61214135 A JP S61214135A
- Authority
- JP
- Japan
- Prior art keywords
- roll
- substrate
- ferromagnetic material
- take
- guide roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 239000003302 ferromagnetic material Substances 0.000 claims abstract description 22
- 238000004804 winding Methods 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 230000005294 ferromagnetic effect Effects 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 230000037303 wrinkles Effects 0.000 description 16
- 229920006267 polyester film Polymers 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 5
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔技術分野〕
この発明は強磁性金属薄膜層を記録層とする磁気記録媒
体の製造方法に関し、その目的とするところは強磁性金
属薄膜層形成時に発生するしわを抑制して、しわのない
前記の磁気記録媒体を製造する方法を提供することにあ
る。[Detailed Description of the Invention] [Technical Field] The present invention relates to a method of manufacturing a magnetic recording medium having a ferromagnetic metal thin film layer as a recording layer, and its purpose is to suppress wrinkles that occur during the formation of the ferromagnetic metal thin film layer. An object of the present invention is to provide a method for manufacturing the above-mentioned wrinkle-free magnetic recording medium.
強磁性金属薄膜層を記録層とする磁気記録媒体は、通常
、ポリエステルフィルムなどの基板を真空槽内に配設し
た種々のガイドロールを介して円筒状キャンの周側面に
沿って案内走行させ、この基板上に強磁性材を真空蒸着
するなどしてつくられている。A magnetic recording medium having a ferromagnetic metal thin film layer as a recording layer is usually produced by guiding a substrate such as a polyester film along the circumferential side of a cylindrical can via various guide rolls disposed in a vacuum chamber. It is made by vacuum-depositing a ferromagnetic material onto this substrate.
ところが、この製造方法では、強磁性材蒸発源からの輻
射熱により基板が伸びたり、あるいは極めて平滑な基板
と各ロール間の摩擦や強磁性材を溶融するのに使用する
電子銃の二次電子などによる帯電等で基板の走行に支障
が生じたりして、走行中の基板にしわが発生し易(、特
に強磁性材蒸着後基板が巻き取りロールに巻き取られる
際は、巻き取りロールの拳き径が変化し基板の接触角が
変化するためしわが発生し易い。このため、各ロール間
の機械的精度を向上させたり、または基板およびガイド
ロールの表面粗度を適度にし、さらには基板の裏面に潤
滑剤を塗布するなどして、基板にかかる張力のアンバラ
ンスの解消や、基板と各ロール間の摩擦力およびこれに
よって発生する帯電などを低減し、しわの発生を抑制す
ることが試みられているが、未だ充分にしわの発生を抑
制することができず、特にこれらの方法では巻き取りロ
ールの巻き径の変化によって生じるしわを効果的に抑制
することができない。However, with this manufacturing method, the substrate may stretch due to radiant heat from the ferromagnetic material evaporation source, friction between the extremely smooth substrate and each roll, or secondary electrons from the electron gun used to melt the ferromagnetic material. This may hinder the running of the board due to electrostatic charges, etc., which may cause wrinkles on the running board. Wrinkles are likely to occur because the diameter changes and the contact angle of the substrate changes.For this reason, it is necessary to improve the mechanical precision between each roll, or to moderate the surface roughness of the substrate and guide roll, and to improve the surface roughness of the substrate. Attempts are being made to suppress the occurrence of wrinkles by applying lubricant to the back surface, etc., to eliminate the unbalanced tension on the substrate, reduce the frictional force between the substrate and each roll, and the static electricity generated by this. However, it is still not possible to sufficiently suppress the occurrence of wrinkles, and in particular, these methods cannot effectively suppress wrinkles caused by changes in the winding diameter of the take-up roll.
この発明はかかる欠点を改善するため、特に巻き取りロ
ールとその直前のガイドロールとの関係について種々検
討を行った結果、巻き取りロールにその直前のガイドロ
ールを接触させ、このガイドロールで強磁性材蒸着後の
基板を巻き取りロールに挟接しながら巻き取るようにす
ると、巻き取りロールの巻き径が変化してもガイドロー
ルに接する基板の接触角が変化せず、しかも直前のガイ
ドロールにより基板が適度に巻き取りロールに押圧され
るため、しわの発生が効果的に抑制されて、巻き取りロ
ールに取り込まれるしわを完全に防止することができる
ことを見いだした結果なされたもので、真空槽内で、基
板移動支持装置により連続的に移動する基板に、強磁性
材蒸発源から強磁性材の蒸気流を差し向けて強磁性金属
薄膜層を形成する磁気記録媒体の製造方法において、強
磁性材蒸着後の基板を巻き取る巻き取りロールに対して
その直前のガイドロールを接触させ、このガイドロール
で強磁性材蒸着後の基板を巻き取りロールに挟接しなが
ら巻き取るようにしたことを特徴とするものである。In order to improve this drawback, this invention has made various studies in particular regarding the relationship between the take-up roll and the guide roll immediately before it, and as a result, the take-up roll is brought into contact with the guide roll immediately before it, and this guide roll If the substrate after material deposition is wound up while being sandwiched between the take-up rolls, the contact angle of the substrate in contact with the guide rolls will not change even if the winding diameter of the take-up rolls changes, and the substrate This was achieved by discovering that since the material is appropriately pressed against the take-up roll, the generation of wrinkles can be effectively suppressed, and wrinkles introduced into the take-up roll can be completely prevented. In a method for manufacturing a magnetic recording medium in which a ferromagnetic metal thin film layer is formed by directing a vapor flow of ferromagnetic material from a ferromagnetic material evaporation source onto a substrate that is continuously moved by a substrate moving support device, A guide roll immediately in front of the take-up roll that winds up the substrate after vapor deposition is brought into contact with the take-up roll, and the substrate after evaporation of the ferromagnetic material is wound up by this guide roll while being sandwiched between the take-up roll and the take-up roll. It is something to do.
以下、図面を参照しながらこの発明について説明する。The present invention will be described below with reference to the drawings.
第1図は真空蒸着装置の断面図を示したものであり、1
は真空槽でこの真空槽1の内部は排気系2によって真空
に保持される。3は真空槽1の中央部に配設された円筒
状キャンであり、ポリエステルフィルム等の基板4は原
反ロール5より、ガイドロール6、テンションロール7
およびガイドロール8を介してこの円筒状キャン3の周
側面に沿って移動し、ガイドロール9、テンションロー
ル10およびガイドロール11を介して巻き取りロール
12に巻き取られる。この間円筒状キャン3の周側面に
沿って移動する基板4に対向して真空槽1の下部に配設
された強磁性材蒸発源13で強磁性材14が加熱蒸発さ
れ、この蒸気流が基板4に差し向けられて蒸着が行われ
る。Figure 1 shows a cross-sectional view of the vacuum evaporation apparatus,
is a vacuum chamber, and the inside of this vacuum chamber 1 is maintained in a vacuum by an exhaust system 2. 3 is a cylindrical can disposed in the center of the vacuum chamber 1, and a substrate 4 such as a polyester film is moved from a raw roll 5 to a guide roll 6 and a tension roll 7.
It moves along the circumferential surface of the cylindrical can 3 via a guide roll 8 and is wound up onto a take-up roll 12 via a guide roll 9, a tension roll 10, and a guide roll 11. During this time, the ferromagnetic material 14 is heated and evaporated by the ferromagnetic material evaporation source 13 disposed at the bottom of the vacuum chamber 1, facing the substrate 4 moving along the circumferential side of the cylindrical can 3, and this vapor flow is transferred to the substrate 4. 4 for vapor deposition.
ここで巻き取りロール12の直前のガイドロール11は
、巻き取りロール12と接触するように配設され、強磁
性材蒸着後の基体4はこのガイドロール11により巻き
取りロール12に挟接されながら巻き取りロール12に
巻き取られる。また巻き取りロール12は左右に移動可
能に取りつけられ、強磁性材蒸着後の基体4が巻き取ら
れるに従って変化する巻き取りロール12の巻き径に対
応するように左右に移動調整される。従って、強磁性材
蒸着後の基体4が巻き取りロール12に巻き取られる際
、巻き取りロール12の巻き径が変化しても基板4は、
ガイドロール11により常に適度な接触圧力で挟接され
ながら巻き取りロール12に巻き取られ、ガイドロール
に接する基板4の接触角θは変化しないため、基板4の
巻き取りロール12に巻き取られる際のしわの発生が効
果的に抑制され、巻き取りロール12に取り込まれるし
わを完全に防止することができる。Here, the guide roll 11 just before the take-up roll 12 is arranged so as to be in contact with the take-up roll 12, and the substrate 4 after the ferromagnetic material has been deposited is sandwiched between the take-up roll 12 by the guide roll 11. It is wound up on a winding roll 12. Further, the winding roll 12 is mounted so as to be movable left and right, and is adjusted so as to correspond to the winding diameter of the winding roll 12, which changes as the substrate 4 on which the ferromagnetic material has been deposited is wound up. Therefore, when the substrate 4 after ferromagnetic material deposition is wound around the take-up roll 12, even if the winding diameter of the take-up roll 12 changes, the substrate 4
The substrate 4 is always sandwiched between the guide rolls 11 and taken up by the take-up roll 12, and the contact angle θ of the substrate 4 in contact with the guide roll does not change, so when the substrate 4 is taken up by the take-up roll 12 The generation of wrinkles can be effectively suppressed, and wrinkles introduced into the take-up roll 12 can be completely prevented.
このように、ガイドロール11を巻き取りロール12に
接触させ、基板4を挟接しながら巻き取る際のガイドロ
ール11と巻き取りロール12との接触圧力は、はとん
どな(でもしわの発生を抑制することができるが、0.
1kg/cn1以上の圧力で挟接するのがより好ましく
、これより強い接触圧力にするとしわの発生が完全に防
止される。しかし、接触圧力が大きくなりすぎると強磁
性材蒸着後の基板に塑性変形が生じるため、基板に塑性
変形が生じない範囲内の接触圧力であることが好ましい
。In this way, the contact pressure between the guide roll 11 and the take-up roll 12 when the guide roll 11 is brought into contact with the take-up roll 12 and the substrate 4 is taken up while being sandwiched therebetween is very small (but does not cause wrinkles). can be suppressed, but 0.
It is more preferable to clamp them at a pressure of 1 kg/cn1 or more, and a stronger contact pressure will completely prevent wrinkles from forming. However, if the contact pressure becomes too large, plastic deformation will occur in the substrate after the ferromagnetic material has been deposited, so the contact pressure is preferably within a range that does not cause plastic deformation in the substrate.
強磁性金属薄膜層を形成する基板としては、ポリエステ
ル、ポリイミド、ポリアミド等一般に使用されている高
分子成形物からなるプラスチックフィルムおよび銅など
の非磁性金属板が使用され、強磁性金属薄膜層の形成は
、コバルト、ニッケル、鉄などの金属単体の他、これら
の合金あるいは酸化物、およびCo−P、Co−Ni
−Pなど一般に使用される強磁性材を真空蒸着すること
によって形成される。As the substrate for forming the ferromagnetic metal thin film layer, a plastic film made of commonly used polymer moldings such as polyester, polyimide, polyamide, etc. and a nonmagnetic metal plate such as copper are used to form the ferromagnetic metal thin film layer. includes elemental metals such as cobalt, nickel, and iron, as well as their alloys or oxides, Co-P, Co-Ni
- It is formed by vacuum deposition of a commonly used ferromagnetic material such as P.
次に、この発明の実施例について説明する。 Next, embodiments of the invention will be described.
実施例1
第1図に示すように、ガイドロール11を巻き取りロー
ル12に接触させて配設した真空蒸着装置を使用し、厚
さが12μのヤング率が下記第1表に示すように異なる
ポリエステルフィルム4を原反ロール5よりガイドロー
ル6、テンションロール7、ガイドロール8を介して円
筒状キャン3の周側面に沿って移動させ、ガイドロール
9、テンションロール10、ガイドロール11を介して
、張力0.5kg/co+で接触圧力を下記第1表に示
すように種々に代えて、巻き取りロール12に巻き取る
ようにセットするとともに強磁性材蒸発源13にコバル
ト14をセントした。次いで、排気系2で真空槽l内を
5X10−5トールにまで真空排気し、コバルト14を
加熱蒸発させてポリエステルフィルム4上に、厚さが1
ooo人のコバルトからなる強磁性金属薄膜層を形成し
た。しかる後、これを所定の巾に裁断して磁気テープを
つくった。Example 1 As shown in FIG. 1, a vacuum evaporation apparatus was used in which a guide roll 11 was placed in contact with a take-up roll 12, and the Young's modulus of a film having a thickness of 12μ was different as shown in Table 1 below. The polyester film 4 is moved along the circumferential side of the cylindrical can 3 from the raw roll 5 through the guide roll 6, tension roll 7, and guide roll 8, and then through the guide roll 9, tension roll 10, and guide roll 11. , the tension was 0.5 kg/co+ and the contact pressure was varied as shown in Table 1 below, and cobalt 14 was placed in the ferromagnetic material evaporation source 13 while being set to be wound on the winding roll 12. Next, the inside of the vacuum chamber 1 is evacuated to 5X10-5 Torr using the exhaust system 2, and the cobalt 14 is heated and evaporated to form a layer of 1.1 mm thick on the polyester film 4.
A ferromagnetic metal thin film layer made of cobalt was formed. Afterwards, this was cut to a predetermined width to make magnetic tape.
比較例1
第2図に示すように、ガイドロール11を巻き取りロー
ル12に接触させないように配設した以外は第1図に示
したのと同じ真空蒸着装置を使用し、強磁性金属薄膜層
形成後のポリエステルフィルム4をガイドロール11で
巻き取りロールエ2に挟接しないで巻き取るようにした
以外は実施例1と同様にして磁気テープをつくった。Comparative Example 1 As shown in FIG. 2, the same vacuum evaporation equipment as shown in FIG. A magnetic tape was produced in the same manner as in Example 1, except that the formed polyester film 4 was wound around the guide roll 11 and wound without being sandwiched between the rolls 2.
実施例1および比較例1において、巻き取りロールに巻
き取られる際のしわの有無および基板の塑性変形を観察
した。In Example 1 and Comparative Example 1, the presence or absence of wrinkles and plastic deformation of the substrate when it was wound up on a take-up roll were observed.
下記第1表はその結果である。Table 1 below shows the results.
第1表
〔発明の効果〕
上表から明らかなように、比較例1ではしわの発生が見
られたが、実施例1ではしわの発生が認められず、また
接触圧力をヤング率の1/2以上にしないかぎり基板の
塑性変形もなく、このことからこの発明の製造方法によ
れば、しわの発生が効果的に抑制され、しわのない磁気
記録媒体が得られるのがわかる。Table 1 [Effects of the Invention] As is clear from the above table, wrinkles were observed in Comparative Example 1, but no wrinkles were observed in Example 1. There is no plastic deformation of the substrate unless it is 2 or more, which shows that according to the manufacturing method of the present invention, the generation of wrinkles can be effectively suppressed and a wrinkle-free magnetic recording medium can be obtained.
第1図は、この発明の製造方法を実施するために使用す
る真空蒸着装置の1例を示す概略断面図、第2図は従来
の真空蒸着装置の概略断面図である。
■・・・真空槽、3・・・円筒状キャン、4・・・基板
、5・・・原反ロール、6.8.9.11・・・ガイド
ロール、12・・・巻き取りロール、13・・・強磁性
材蒸発源、14・・・強磁性材
特許出願人 日立マクセル株式会社
第1図
第2図FIG. 1 is a schematic sectional view showing an example of a vacuum evaporation apparatus used to carry out the manufacturing method of the present invention, and FIG. 2 is a schematic sectional view of a conventional vacuum evaporation apparatus. ■... Vacuum chamber, 3... Cylindrical can, 4... Substrate, 5... Raw roll, 6.8.9.11... Guide roll, 12... Winding roll, 13...Ferromagnetic material evaporation source, 14...Ferromagnetic material patent applicant Hitachi Maxell Ltd. Figure 1 Figure 2
Claims (1)
する基板に、強磁性材蒸発源から強磁性材の蒸気流を差
し向けて強磁性金属薄膜層を形成する磁気記録媒体の製
造方法において、強磁性材蒸着後の基板を巻き取る巻き
取りロールにその直前のガイドロールを接触させ、この
ガイドロールで強磁性材蒸着後の基板を巻き取りロール
に挟接しながら巻き取るようにしたことを特徴とする磁
気記録媒体の製造方法1. A method for producing a magnetic recording medium in which a ferromagnetic material vapor flow is directed from a ferromagnetic material evaporation source onto a substrate that is continuously moved by a substrate moving support device in a vacuum chamber to form a ferromagnetic metal thin film layer. In this method, a guide roll just in front of the take-up roll for winding up the substrate on which the ferromagnetic material has been vapor-deposited is brought into contact with the guide roll, and the board on which the ferromagnetic material has been vapor-deposited is wound up while being sandwiched between the take-up roll and the guide roll. A method for manufacturing a magnetic recording medium characterized by
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5536385A JPS61214135A (en) | 1985-03-19 | 1985-03-19 | Production of magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5536385A JPS61214135A (en) | 1985-03-19 | 1985-03-19 | Production of magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61214135A true JPS61214135A (en) | 1986-09-24 |
Family
ID=12996403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5536385A Pending JPS61214135A (en) | 1985-03-19 | 1985-03-19 | Production of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61214135A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05109066A (en) * | 1991-10-14 | 1993-04-30 | Fuji Photo Film Co Ltd | Manufacturing device of magnetic recording medium |
-
1985
- 1985-03-19 JP JP5536385A patent/JPS61214135A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05109066A (en) * | 1991-10-14 | 1993-04-30 | Fuji Photo Film Co Ltd | Manufacturing device of magnetic recording medium |
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