JPS61190708A - Production of thin film magnetic head - Google Patents

Abstract

PURPOSE:To obtain a thin film magnetic head having high resolution by forming two thin film head elements at the end part of a slider block having two projected rails at the bottom part with a position shift and different gap depths of pole parts secured between both head elements. CONSTITUTION:A slider block contains a block main body having an oblong section and projected rails 4A and 4B set in parallel with each other and opposite to both side parts of the bottom part of the block main body. These rails 4A and 4B are set at the inner and outer circumferential parts of a magnetic disk respectively. Then thin film magnetic head elements 2A and 2B are formed at an end part with pole parts PA and PB set opposite to each other. Here the gap depths L1 and L2 of both elements 2A and 2B are defined as L2-L1=1mum. Both elements 2A and 2B contain the 1st magnetic layers 22, insulated layers 23, foil-shaped coils 24 and the 2nd magnetic layers 25 formed inside an end substrate 5 containing bases 21 and 26 of Al2O3.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a thin film magnetic head, sometimes floating above a magnetic disk, for reading and writing information. This invention relates to a method of manufacturing a 6ft air head.

Technical background of the invention and its problems 1 This type of thin-film magnetic head has an iWI! It has a magnetic head element, and with the rail surface facing the magnetic disk surface, relative air pressure acting between both surfaces is used to levitate the magnetic head 111 while reading and writing information on the magnetic disk surface. ing.

A conventional method for manufacturing such a thin film magnetic head will be explained with reference to FIG.

This thin film magnetic head is Aj! 2o3 base 21
′ on the first magnetic layer 22 . Insulation 1i123. The foil-like coil 24 and the second magnetic layer 25 are formed by thin film forming means such as vapor deposition or by etching.
The base body 27 is further covered with a protective film 26 of A12o3 to form a magnetic head element 30, and the base body 27 is roughly processed into a slider shape so that the magnetic head element 30 is disposed at the end thereof. And the first. Second magnetic layer 22.2
5 and the insulating film 23 is polished in the length direction and the depth direction of the gap, so that the gap length of the pole portion P becomes a predetermined dimension.

FIG. 7 shows the relationship between the gap length and the relative output characteristics P1 and resolution characteristics P2 of the thin film magnetic head element 30.

As is clear from the figure, the gap length of the thin film magnetic head element 30 is 1μ, which corresponds to the intersection of the two characteristics.
It can be seen that the best relative output and resolution can be obtained when the distance is approximately m±0.5 μm.

However, in the conventional manufacturing method, the gap length is affected by alignment tolerances of the photomask, pattern tolerances of the insulating layer 23, processing tolerances of the slider block 27, polishing errors of the pole portion P, etc. in the manufacturing process of the thin film magnetic head element 30. In particular, it is extremely difficult to control microscopic dimensions of about ±0.5 μm.As a result, it is difficult to manufacture thin-film magnetic heads with good relative output and resolution, resulting in extremely low yields. there were.

[Object of the Invention] The present invention has been made in view of the above circumstances, and is a fi III 6t which has a high yield and excellent relative output and resolution.
The object of the present invention is to provide a method for manufacturing an i-air head.

[Summary of the Invention 1] The outline of the present invention for achieving the above object is to shift the position of each end of a slider block having two protruding rails at the bottom with respect to the protruding rails, and to increase the gap length of the pole portion. It consists of a step of forming thin film magnetic head elements with different thicknesses, and a step of polishing the pole portion of each one-film magnetic head element. It is characterized in that it is used as a magnetoelectric conversion element.

[Embodiments of the invention] Examples of the present invention will be described in detail below.

First, there is a 7IJ film magnetic head element 2A at the end of the slider block 1 having different gap lengths at the pole portions.

The process of forming 2B will be explained with reference to FIG.

The slider block 1 includes a block body 3 having a rectangular cross section and both bottom portions 11t of this block body 3! It is constructed by having protruding rails 4A and 4B formed in a parallel arrangement facing each other in one part, one protruding rail 4A is on the inner circumferential side of the magnetic disk, and the protruding rail 4B used is on the outer circumferential side. They are arranged respectively.

At one end of this slider block 1, thin film magnetic head elements 2A and 2B are formed in a shape such that pole parts P^ and Pa, which will be described later, are respectively exposed.

That is, on one end base material 5 of the slider block 1, as shown in FIGS. 2, 3(a) and 3(b), a thin film 11 is located on the protrusion 5A side and has a gap length L1. The magnetic head element 2A is located on the side of the protrusion 5B, and a thin film magnetic head element 2B having a gap length L2 is formed, respectively. At this time, L2-Lt=1 μm. In other words, the pole portion P^ and the pole portion Pa have different gap lengths. In addition, the thin film magnetic head element 2
Both A and 2B are the same as those shown in Fig. 6 described above.
Inside the end substrate 5 having a 12o3 substrate 21.26, a first magnetic layer 22. It is constructed by forming an insulating layer 23, a foil coil 24, and a second magnetic layer 25.

In this way, having different gap lengths Lz, L2,
and both shoulders 1II whose positions in the depth direction are shifted from each other
li! ! After forming the magnetic head elements 2A, 2B at the ends of the slider block 1, both shoulder membrane magnetic head elements 2A, 2 are formed.
Each pole portion P^, Pa of B is polished by a polishing means such as diamond polishing.

By polishing the pole portion P^, the gap length of the thin film magnetic head element 2A changes from the initial gap length L1 to the gap length LA shown in FIG. If it is determined that it is within the range of 5 μm, polishing is stopped at that point.

In this case, by using the thin film magnetic head element 2A as the l1f1 electric conversion element, it is possible to provide a thin film magnetic head with excellent relative ratio)j and resolution.

On the other hand, the polishing depth for the pole parts P^ and Pa is shown in Fig. 5 (
As shown in a) and (b), the gap length of the pole part PA is larger than the case shown in FIG. 4(a), and the gap length of the pole part PA changes from 11 gap length L^ to the gap length L^' shown in FIG. 5(a). In this case, the gap length L^' of this pole part P^ is 1μ
The value is even smaller than m-0.5μm=0.5μm, and the gap length Ls of the pole portion P8 shown in FIG. 5(b)
' is 1 μm±0.5 μm in this case, so the thin film magnetic head element 2B is used as the magnetoelectric transducer.

In this way, either one of the thin film magnetic head elements 2A is polished to a gap length of 1 μm±0.5 μm.
Alternatively, 2B can be used as a la magnetoelectric transducer, and as a result, it is possible to improve the yield when manufacturing a 711MMm head.

The present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the invention.

For example, in the above embodiment, a thin film magnetic head having two thin film magnetic head elements at the end of the slider block has been described, but a thin film magnetic head having three or more thin film magnetic head elements can also be manufactured in the same manner. be able to.

[Effect of the invention] According to the present invention detailed above, at least two books 11
The position of the Nm gas head element is shifted in advance and formed.
Relative output is used to set the gap length of one of the thin film magnetic head elements to the optimum value in terms of relative output resolution in the polishing process.

Thin pIA with good resolution! ! It is possible to provide a manufacturing method that can provide air heads with a high yield.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a slider block and an end base material in an embodiment of the present invention, FIG. 2 is a plan view of the end base material,
3(a) is an enlarged schematic sectional view taken along the line I-I in FIG. 2, FIG. 3(b) is an enlarged schematic sectional view taken along the line II-n in FIG. (a) is an enlarged schematic cross-sectional view showing the polished state of the pole part, and FIG. 4(b) is the fourth
An enlarged schematic sectional view showing the state of the other pole part corresponding to the pole part shown in FIG. 5(a), FIG.
5(b) is an enlarged schematic sectional view showing the pole part shown in FIG. 4(b) in a further polished state. FIG. 6 is an enlarged schematic sectional view showing the pole part shown in FIG. FIG. 7 is an enlarged sectional view of a main part showing the manufacturing process of the thin film magnetic head, and is a graph showing the relationship between the gap length, relative output, and resolution of the thin film magnetic head element. 1...Slider block, 2A, 2B-...Thin 1116fl air head element, 4A,
4B...Protruding rail, P^, Pa...Pole part, Ll, L2...Gap length, L^, La...Gap length, L^', La'...Gap length. Agent Patent Attorney Tadashi Misawa 1-1r' Procedural Amendment August 12, 1985 Patent Application No. 32279 of 1985 2 Title of Invention Method of Manufacturing Thin Film Magnetic Head 3 Related: Patent applicant 5, Date of amendment order Initiator 6, Subject of amendment Description 7, Contents of amendment As attached (In the specification, "gap length" is amended to read "gap depth" ) Description 1, Title of the Invention Method for manufacturing a thin film magnetic head 2, Claims A slider block having at least two protruding rails at the bottom thereof has a pole at each end thereof, the positions of which are shifted relative to the protruding rails. The process consists of a process of forming thin film magnetic head elements with different gear depths in the parts, and a process of polishing the pole parts of each thin film magnetic head element. A method of manufacturing a thin film magnetic head, characterized in that a magnetic head element is used as a magnetoelectric conversion element. 3. Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to a method for manufacturing a thin film magnetic head, and sometimes a thin film magnetic head that levitates on a magnetic disk to read and write information. [Technical background of the invention and its problems 1 This type of thin-film magnetic head has a thin-film magnetic head element at the end of a slider block that has two or three rails on the bottom surface. With the thin-film magnetic head facing the magnetic disk surface, relative air pressure acting between both surfaces is used to fly the thin-film magnetic head while reading information on the magnetic disk surface. A conventional method for manufacturing such a thin film magnetic head will be explained with reference to FIG. This thin film magnetic head has a first
magnetic layer 22. Insulating layer 23. Foil coil 24 and second
A second magnetic layer 25 is formed by a thin film forming method such as vapor deposition or an etching process, and the second magnetic layer 25 is roughly A, e2.
03 to form a magnetic head element 30, and the base body 27 is roughly processed into a slider shape so that the magnetic head element 30 is disposed at the end thereof. And the first. Second magnetic layer 22, 25 and insulating layer 23
The pole part P formed by
By polishing in the depth direction), the gap depth L of the pole portion P is set to a predetermined dimension. The relationship between the gap depth L and the relative output characteristics P1 and resolution characteristics P2 of the thin film magnetic head element 30 is shown in FIG. As is clear from the figure, the gap depth L of the thin film magnetic head element 30 corresponds to the point where the above two characteristics intersect.
It can be seen that the best relative output and resolution can be obtained when the distance is about .mu.m+0.5 .mu.m. However, in the conventional manufacturing method, the gap depth is affected by alignment tolerances of photomasks, pattern tolerances of the insulating layer 23, processing tolerances of the slider block 27, and polishing errors of the pole portion P in the manufacturing process of the thin-film magnetic head element 30. Variations occur in the length L, and it is extremely difficult to control the minute dimensions, especially around ±0.5 μm.As a result,
There was a problem in that it was difficult to manufacture a thin film magnetic head with good relative output and resolution, and the yield was extremely low. [Object of the Invention] The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a method for manufacturing a thin film magnetic head with a high yield and excellent relative output and resolution. [Summary of the Invention] The outline of the present invention for achieving the above object is to shift the position of each end of a slider block having two protruding rails at the bottom with respect to the protruding rails, and to adjust the gap depth of the pole portion. The method consists of a step of forming thin film magnetic head elements with different gap depths, and a step of polishing the pole portion of each thin film magnetic head element. It is characterized in that it is used as a magnetoelectric conversion element. [Embodiments of the Invention] Examples of the present invention will be described in detail below. First, there is a thin film magnetic head element 2A at the end of the slider block 1 having different gap depths in the pole portion. The process of forming 2B will be explained with reference to FIG. The slider block 1 includes a block main body 3 having a rectangular cross section, and protruding rails 4A and 4B that are arranged in parallel and facing each other on both sides of the bottom of the block main body 3. The protruding rail 4A is disposed on the inner circumferential side of the magnetic disk, and the other protruding rail 4B is disposed on the outer circumferential side. At one end of this slider block 1, thin film magnetic head elements 2A and 2B are formed in such a shape that pole portions PA and PB, which will be described later, are exposed, respectively. That is, on one end base material 5 of the slider block 1, as shown in FIGS. 2, 3(a) and 3(b), there is a thin film located on the protrusion 5A side and having a gap depth Ll. The magnetic head element 2A is located on the side of the protrusion 5B, and a thin film magnetic head element 2B having a gap depth L2 is formed, respectively. At this time, it is assumed that L2-11=1 μm. That is, the pole portion PA and the pole portion Pa have different gap depths. The thin film magnetic head elements 2A and 2B each have a first magnetic layer 22.26 inside an end base material 5 having an Al2O3 base body 21. Insulating layer 23. foil coil 2
4 and a second magnetic body H25. In this way, having different gap depths Ll, L2,
After forming both shoulder film magnetic head elements 2A and 2B whose positions in the depth direction are shifted from each other at the end of the slider block 1, the respective pole parts PA and Pa of both shoulder film magnetic head elements 2A and 2B are formed. Polish by a polishing means such as diamond polishing. By polishing the pole portion PA, the gap depth of the thin film magnetic head element 2A changes from the initial gap depth Ll to the gap depth LA shown in FIG. 4(a), and this gap depth LA is 1 μm. If it is determined that it is within the range of ±0.5 μm, polishing is stopped at that point. In this case, by using the thin film magnetic head element 2A as a magnetoelectric transducer, it is possible to provide a thin film magnetic head with excellent relative output and resolution. On the other hand, the polishing depth for pole parts PA and PB is shown in Figure 5 (
a>, as shown in (b), the gap depth of the pole part PA is larger than the case shown in FIG. In this case, the gap depth LA' of the pole part PA becomes a value roughly smaller than 1 μm - 0.5 μm = 0.5 μm, and the gap depth of the pole part Pa shown in FIG. 5(b) Since LB' is 1 μm±0.5 μm in this case, the thin film magnetic head element 2B is used as the magnetoelectric transducer. In this way, the gap depth is 1 μm+Q. It can be used as either one of the thin film magnetic head elements 2A or 2B@magnetoelectric transducer which is polished to a range of 5 μm, and as a result, it is possible to improve the yield during manufacturing of the thin film magnetic head. The present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the invention. For example, in the embodiment described above, there are two
Although a thin film magnetic head having three thin film magnetic head elements has been described, a thin film magnetic head having three or more thin film magnetic head elements can also be manufactured in the same manner. [Effects of the Invention] According to the present invention described in detail above, at least two thin film magnetic head elements are formed with their positions shifted in advance, and the gap depth of one of the thin film magnetic head elements is adjusted relative to each other in the polishing process. Relative output because it is intended to achieve the optimum value in terms of output 2 resolution. A manufacturing method that can provide a thin film magnetic head with good resolution and a high yield can be provided. 4. Brief description of the drawings FIG. 1 is a perspective view showing a slider block and an end base material in an embodiment of the present invention, FIG. 2 is a plan view of the end base material,
Figure 3 (a) is an enlarged schematic sectional view taken along the IT line in Figure 2, Figure 3 (b) is an enlarged schematic sectional view taken along the line II-II in Figure 2, and Figure 4 (a) is an enlarged schematic sectional view taken along the line II-II in Figure 2. FIG. 4(b) is an enlarged schematic cross-sectional view showing the polished state of the pole part shown in FIG. 4(a), and FIG. Figure 5(a) is similar to Figure 4(a).
5(b) is an enlarged schematic sectional view showing the pole part shown in FIG. 4(b) in a further polished state. FIG. 6 is an enlarged schematic sectional view showing the pole part shown in FIG. FIG. 7 is an enlarged sectional view of a main part showing the manufacturing process of the thin film magnetic head, and FIG. 7 is a graph showing the relationship between the gap depth, relative output, and resolution of the thin film magnetic head element. 1...Slider block, 2A, 2B...Thin film magnetic head element, 4A, 4B...
・Protruding rail, PA, Pa...Pole part, LL, L2...Gap depth, LA, LB...Gap depth, LA', LB'...Gi V knob depth.

Claims (1)

[Claims] A step of forming thin film magnetic head elements by shifting the positions of the ends of the slider block having at least two protruding rails on the bottom thereof with respect to the protruding rails and making the gap lengths of the pole parts different; 1. A method for manufacturing a thin film magnetic head, comprising the step of polishing a pole portion of a thin film magnetic head, and using any of the thin film magnetic head elements polished to have an optimum gap length as a magnetoelectric transducer.