JPS62204420A - Manufacturing method of thin film magnetic head - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Summary] The present invention relates to the tip structure of a pair of magnetic poles in a floating thin film magnetic head, in which the first magnetic pole on the air inflow end side is formed and then completely covered with an a-free insulating layer. By etching or polishing the surface to make it flat, it is possible to easily form a second magnetic pole on the air outflow end side, where the tip of the magnetic pole is wider than the first magnetic pole. It is.

[Industrial application field]

The present invention relates to a floating thin film magnetic head, particularly a thin film magnetic head having a structure in which the tip of a second magnetic pole located on the air outflow end side of a slider is wider than the tip of a first magnetic pole located on the air inflow end side. The present invention relates to a manufacturing method.

In recent years, with the increase in the density of magnetic recording, thin-film magnetic heads that are compact and capable of forming highly accurate shapes are viewed as promising. but,
In particular, in order to improve trunk density, a thin film magnetic head is required that has less noise contamination from adjacent tracks, so-called side crosstalk, and less decreases in reproduction signal output when off-track.

As a new thin film magnetic head that meets these requirements,
The present inventors proposed a thin film magnetic field in which the tip of the first magnetic pole located on the air outflow end side of the slider was made wider than the tip of the second magnetic pole located on the air inflow end. I suggested the head.

Note that the tip of the magnetic pole referred to herein means a portion of the magnetic pole extending toward the head air bearing surface from the edge of the interlayer insulating layer existing between the magnetic poles.

[Conventional technology]

FIG. 2 is a sectional view of a main part of a conventional thin film magnetic head, FIG. 3 is a schematic diagram of a slider equipped with the same, and FIG. 4 is a diagram showing the shape of the magnetic pole tip of the head as viewed from the recording medium side. In these figures, the thin film head has Ni as first and second magnetic poles 12 and 13 on a substrate 11 made of ceramics.
A magnetic material such as Fe is formed by sandwiching a gap layer 14 made of Si 02 , A 1203, etc., a coil conductor layer 15 and an interlayer insulating layer from both sides, and then a protective layer 1 made of the same oxide material is formed over them. A thick pattern 16 is provided.

However, at the end of the lever, the width of the tip of the first magnetic pole 12 is wider than that of the second magnetic pole 13.

Note that the slider is formed by processing the substrate 11. Further, in the figure, 17 indicates a recording medium, and 18 indicates an air bearing surface opposite to the surface of the medium.

[Problem that the invention seeks to solve]

However, in conventional manufacturing technology, the second magnetic pole is directly formed on the first magnetic pole with a gap layer interposed therebetween, so the tip of the second magnetic pole is made smaller than that of the first magnetic pole. Unable to widen the area, the aforementioned patent application was filed in 1986-23.
It is difficult to manufacture the thin film magnetic head proposed in No. 3856.

In view of the above-mentioned conventional situation, the present invention provides a thin film magnetic head in which the tip of the second magnetic pole located on the air outflow end is wider than the tip of the first magnetic pole located on the air inflow end. The object of the present invention is to provide a method that can form a magnetic pole tip structure with high precision and good reproducibility.

[Means for solving problems]

The method for forming a magnetic pole tip of a thin film magnetic head according to the present invention includes the step of forming a first magnetic pole on a substrate, and forming an inorganic insulating layer having a thickness of at least 1 centimeter of the magnetic pole on the substrate including the first magnetic pole. process,
a step of etching or polishing the surface of the inorganic insulating layer to expose the tip of the first magnetic pole and making them flush; a step of forming a gap layer on the flush surface;
The present invention is characterized in that it comprises a step of forming a tip portion of a second magnetic pole wider than a tip portion of the first magnetic pole on the gap layer.

[Effect]

The tip of the first magnetic pole is completely covered with an inorganic insulating layer having a thickness equal to or greater than that of the first magnetic pole, and the surface of the inorganic insulating layer is processed by etching or polishing until the tip of the first magnetic pole is exposed. An i-free insulating layer flush with the tip of the magnetic pole is formed around the tip of the magnetic pole. In other words, an insulating spacer having the same height as the tip of the first magnetic pole is formed around the tip of the first magnetic pole, and a second magnetic pole whose tip is wider than the first magnetic pole is placed on top of this with a gap layer interposed therebetween. can be easily formed.

〔Example〕

Hereinafter, one embodiment of the present invention will be described in detail with reference to an enlarged sectional view of a magnetic pole tip. In the sectional view of FIG. 1, the same parts as in FIGS. 2 to 4 are designated by the same reference numerals.

In the step shown in FIG. 1(a), a magnetic material such as NiFe is deposited to a thickness of 2 to 3 μm on a substrate 11 made of ceramic or the like by sputtering, vapor deposition, or plating, and then
The first magnetic pole 12 is formed by patterning using techniques such as chemical etching and ion etching. Note that the width of the illustrated magnetic pole tip is 10 μm.

In the step shown in FIG. 1(b), S + 02, A is deposited on the substrate 11 including the first magnetic pole 12 by sputtering.
An i-free insulating layer 31 of 12O3 or the like is deposited to a thickness of 3 to 5 μm.

In the step shown in FIG. 1(c), the surface of the inorganic insulating layer 31 is polished until the lower first magnetic pole 12 is exposed, so that they are flush with each other. Note that for this polishing, for example, an aluminum plate coated with diamond particles and having a high surface precision is used.

In the process shown in FIG. 1+d), S
Gear knob layer 14 consisting of i 02, A 1203, etc.
A film of 0.5 μm thick is formed. Thereafter, although not shown, the top of the tip of the first magnetic pole is removed in the same manner as in the prior art (an interlayer insulating layer, a coil conductor layer, and an interlayer insulating layer are sequentially laminated on this gap layer).

In the step shown in FIG. 1(e), first the gap layer 14
NiF' is placed on top of the first magnetic pole 12 in the same way as the first magnetic pole 12.
E is formed by adhering n2 to a thickness of 2 to 3 μm. Next, this NiF
The second magnetic pole 13 is formed by patterning the e-film by a technique such as chemical etching or ion etching, and the width of the tip of the magnetic pole is set to be 1 to 2 μm wider than the width of the tip of the first magnetic pole 12.

Thereafter, although not shown, a protective layer made of S j 02, A 1203, etc. is deposited, and the substrate 11 is processed into a slider shape or bonded to a slider assembly to complete a floating thin film magnetic head.

〔effect〕

As is clear from the above description, according to the present invention, the width of the tip of the second magnetic pole located on the air outflow end is wider than the width of the tip of the first magnetic pole located on the air inflow end. A thin film magnetic head can be easily manufactured with high precision. Therefore, it is possible to provide a flying type thin film magnetic head with less side crosstalk and less reduction in reproduction output due to off-track.

[Brief explanation of drawings]

FIG. 1 is an enlarged cross-sectional view of essential parts showing the process order of an embodiment of a method for manufacturing a thin film magnetic head according to the present invention, and FIG. 2 is a conventional thin film magnetic head manufacturing method. i! FIG. 3 is a schematic diagram of a slider on which the magnetic head is mounted, and FIG. 4 is a diagram showing the shape of the magnetic pole tip when the head is viewed from the recording medium side. , In Fig. 1, 11 is the substrate, I2 is the first magnetic pole, and 13 is the second magnetic pole.
magnetic pole, 14 is gear layer, 31 is no a '4f!
The A-rim layer is shown respectively. Figure 1 of the shape of the brass fitting part of the company T-cooled fIJ/1.

Claims (1)

[Claims] The tip portions of the first and second magnetic poles, which are installed on a slider assembly having an air bearing surface, with a gap layer interposed therebetween,
In a thin film magnetic head in which the second magnetic pole located on the air outflow end side is formed wider than the first magnetic pole located on the air inflow end side, the tips of the first and second magnetic poles are as follows. A method of manufacturing a thin film magnetic head, characterized in that it is formed by the steps of: (a) forming a first magnetic pole (12) with a predetermined thickness on the substrate (11); (b) forming a first magnetic pole (12) with a predetermined thickness on the substrate including the first magnetic pole (12); An inorganic insulating layer (31
), and (c) etching or polishing the surface of the inorganic insulating layer (31) to expose the tip of the first magnetic pole (12) so that they are flush with each other; (d) forming a gap layer (14) on this flush surface; (e) forming a gap layer (14) on the gap layer (14) with a width smaller than the tip of the first magnetic pole (12); Step of forming the tip of the wide second magnetic pole (13) with a predetermined thickness.