JPS6055534A - Production of optical recording medium - Google Patents

Abstract

PURPOSE:To simplify the production of an optical recording medium and at the same time to secure the accurate transcription by irradiating the light to a photoresist layer on a substrate via a mask matter containing an information pattern to transcribe this pattern and developing it. CONSTITUTION:A thin film layer 200 and a photoresist 300 are formed on a substrate 100. The light is irradiated to the resist 300 via a mask body 400 containing an information pattern to transcribe this pattern to the resist 300. Then the pattern is developed, and the layer 200 is etched. Furthermore the remaining resist is removed, and a reflecting film 500 is coated on the substrate 100 to form a protecting layer 600.

Description

[Detailed description of the invention] (b) Industrial application field The present invention relates to a method for manufacturing an optical recording medium.

(b) Conventional technology Conventionally, optical recording media (e.g. video discs).

The method shown in FIG. 1 is known as a method for manufacturing compact discs, etc.).

That is, a photoresist (2) is applied on a well-polished glass plate [11] (see Figure 1). This photoresist (2
) is irradiated with laser light (electron beam, ultraviolet light, etc.) modulated by the audio signal to print the audio signal and further develop it (FIG. 1C).

Next, silver (A P
) f31 of 4<
The Ni) layer (4) is stacked to a thickness of about several μm (FIG. 1(e)).

This nickel film layer is etched off and used as a mold (stambar) (see FIG. 1). Using this mold, Acryμ
・The disk was made of pine, made of resin such as polycarbonate, using resin molding techniques such as compression molding and injection molding.

The prayer method has the advantage that discs can be mass-produced at low cost17.

However, some conventional methods have the following disadvantages.

That is, (1) there are many steps to manufacturing a disc (especially steps to creating a stand bar) and it is very complicated.

(II) Since this is a method of transferring the information signal pattern of the mold (stambar) by resin molding, it is necessary to keep the molding conditions such as the temperature of the resin very close. This is because if certain molding conditions are not met, the information signal pattern of the mold (stambar) cannot be accurately transferred (for example,
(The depth or shape of the bit cannot be transferred sufficiently), resulting in a defective disc. Also, if the mold (stambar) is contaminated with dust or the like, defective discs may occur, so it is necessary to carefully inspect the mold (stambar) for dust adhesion.

(IIIj) When a defective disk occurs, it is uneconomical because there is no other use for discarding the defective disk.

(c) Purpose of the Invention An object of the present invention is to provide a method for manufacturing an optical recording medium that solves the above-mentioned problems.

B) Summary of the Invention In order to achieve the above object, a process of forming a thin film layer on a substrate forming the main body of an optical recording medium, a process of forming a photoresist layer on this thin film layer, and a process of recording on this photoresist layer are provided. A process of transferring the information pattern onto the photoresist layer by irradiating light through a mask body on which the information pattern to be printed is formed, and a process of developing the photoresist layer to which the information pattern has been transferred. An optical recording medium is manufactured by a rubbing process, a process of removing the thin film layer in the portion where the photoresist layer was removed by this development process, and a process of forming at least a protective layer.

(e) Example First, manufacturing of a mask body will be explained with reference to Fig. wJ2.

For example, on a quartz or glass substrate (101), chromium (Cr
) - is multiplied by 800A (Figure 2 A). Tokoru chrome (
Cr) thin film layer - coating photoresist on top (Figure 12). The audio signal is printed by irradiating V-za light modulated with an audio signal onto the photoresist (1), and then the photoresist (1) is further developed (see FIG. 2). Next, when treated in an aqueous solution containing, for example, ceric ammonium nitrate as the main component, the portions of the chrome film that are not covered by the resist will dissolve, and when the resist is then removed, the result will be as shown in Figure 2. A mask body is formed.

Next, the present invention using such a mask body will be explained with reference to FIG.

On the substrate (100) which forms the main body of the optical recording medium, a thin film layer (200) made of a material different from that of the substrate (100) is formed by vapor deposition and sputtering (4IK). Apply photoresist (300) (Figure 3 opening). The information pattern recorded on the mask body (400) is transferred onto the photoresist (300) by irradiating light (laser light, ultraviolet light, etc.) onto the photoresist (300) through the mask body (400). c) Then, a development process is performed (Fig. 3-2).

After that, the thin film layer (200) is subjected to a conventional etching process. For example, when the thin film layer (200) is formed of aluminum (AJ), the resist is etched when the thin film layer (200) is treated in a solution containing phosphoric acid as a main component. The thin film layer (200) not covered by (30°) is etched), and the remaining resist is further removed (as shown in the third figure). After that, after applying a reflective film (SOO), a protective layer (600) is formed to complete the optical recording medium. If a metal with poor reflectance is used, there is no need to form a special reflective film (500).

Further, the thin film layer in the present invention may be made of any material as long as it can be etched.

(f) Effects of the Invention According to the present invention, an optical recording medium can be manufactured by a simple method. In addition, since the transfer is optical transfer rather than transfer using a resin, the substrate can be reused by simply removing the # film layer even when there are no restrictions on formation-E, which is economical.

For example, if the thin film layer has a thickness corresponding to the bit depth, the pit depth can be easily controlled.

4. Figure 4 shows the conventional manufacturing method, Figure 2 shows the manufacturing method of the mask body, and Figure 3 shows the manufacturing method of 1.

(100)...Substrate, (200)...Thin film layer, (3
00)...Photoresist, (400)...Mask body, (a OO) -...Ho@Nii.

Figure 1 3

Claims (1)

[Claims] (1) A process of forming a thin film layer on the substrate 1 which forms the main body of the optical recording medium, a process of forming a photoresist layer on this thin film layer, and an information pattern to be recorded on this photoresist layer-F is formed. a process of transferring the information pattern onto the photoresist layer by irradiating light through a mask body; and a process of transferring the information pattern onto the photoresist layer;
A process of performing development treatment 1 on the photoresist layer, a process of removing the thin film layer in the area where the photoresist layer was removed in this development process J1, a process of removing the remaining photoresist layer, and at least a process of preserving the photoresist layer. A method for manufacturing an optical recording medium, comprising a process of forming a layer. 2. The method of manufacturing an optical recording medium according to claim 1, wherein the T21/film layer is formed to a thickness corresponding to the pit depth of the information pattern to be recorded.