JPS6034687B2 - 圧力電子変換素子 - Google Patents
圧力電子変換素子Info
- Publication number
- JPS6034687B2 JPS6034687B2 JP51150679A JP15067976A JPS6034687B2 JP S6034687 B2 JPS6034687 B2 JP S6034687B2 JP 51150679 A JP51150679 A JP 51150679A JP 15067976 A JP15067976 A JP 15067976A JP S6034687 B2 JPS6034687 B2 JP S6034687B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- conductive
- conductive layer
- pair
- members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 title description 10
- 239000011521 glass Substances 0.000 claims description 21
- 239000004020 conductor Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 description 6
- 239000012811 non-conductive material Substances 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000005297 pyrex Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- -1 Pyrex Chemical compound 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
- G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66618876A | 1976-03-12 | 1976-03-12 | |
| US666188 | 1996-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52123283A JPS52123283A (en) | 1977-10-17 |
| JPS6034687B2 true JPS6034687B2 (ja) | 1985-08-10 |
Family
ID=24673185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51150679A Expired JPS6034687B2 (ja) | 1976-03-12 | 1976-12-14 | 圧力電子変換素子 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS6034687B2 (de) |
| DE (1) | DE2709945C2 (de) |
| FR (1) | FR2344006A1 (de) |
| GB (1) | GB1563894A (de) |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
| US4238661A (en) * | 1978-10-02 | 1980-12-09 | The Bendix Corporation | Pressure-sensing capacitor and method of trimming same |
| US4238662A (en) * | 1978-10-02 | 1980-12-09 | The Bendix Corporation | Pressure-sensing capacitor and method of trimming same |
| JPS5565128A (en) * | 1978-11-09 | 1980-05-16 | Vaisala Oy | Pressure gauge |
| FR2442439A1 (fr) * | 1978-11-24 | 1980-06-20 | Vaisala Oy | Manometre aneroide |
| DE2903994A1 (de) * | 1979-02-02 | 1980-08-07 | Sprenger Albin Kg | Luftdruckgeber |
| CA1159524A (en) * | 1979-04-16 | 1983-12-27 | Mark A. Brooks | Method of fabricating a pressure sensor |
| US4288835A (en) * | 1979-04-16 | 1981-09-08 | The Bendix Corporation | Pressure sensor |
| DE3108300C2 (de) * | 1980-03-06 | 1986-05-28 | Robert Bosch Gmbh, 7000 Stuttgart | Druckmeßdose und Verfahren zu deren Herstellung |
| US4382247A (en) * | 1980-03-06 | 1983-05-03 | Robert Bosch Gmbh | Pressure sensor |
| US4287553A (en) * | 1980-06-06 | 1981-09-01 | The Bendix Corporation | Capacitive pressure transducer |
| US4558600A (en) * | 1982-03-18 | 1985-12-17 | Setra Systems, Inc. | Force transducer |
| US4649759A (en) * | 1981-05-19 | 1987-03-17 | Setra Systems, Inc. | Force transducer |
| US4899600A (en) * | 1981-05-19 | 1990-02-13 | Setra Systems, Inc. | Compact force transducer with mechanical motion amplification |
| US4389895A (en) * | 1981-07-27 | 1983-06-28 | Rosemount Inc. | Capacitance pressure sensor |
| US4425799A (en) * | 1982-06-03 | 1984-01-17 | Kavlico Corporation | Liquid capacitance pressure transducer technique |
| DE3238430A1 (de) * | 1982-10-16 | 1984-04-19 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Differenzdrucksensor |
| JPS59171826A (ja) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | 静電容量型圧力センサ−の温度補償装置 |
| JPS60133335A (ja) * | 1983-12-22 | 1985-07-16 | Yokogawa Hokushin Electric Corp | 圧力センサ |
| IT1187900B (it) * | 1986-02-10 | 1987-12-23 | Marelli Autronica | Dispositivo sensore di pressione |
| JPH0750789B2 (ja) * | 1986-07-18 | 1995-05-31 | 日産自動車株式会社 | 半導体圧力変換装置の製造方法 |
| JPH0652212B2 (ja) * | 1986-12-12 | 1994-07-06 | 富士電機株式会社 | 静電容量式圧力センサにおけるギヤツプ形成方法 |
| JPH061228B2 (ja) * | 1987-08-13 | 1994-01-05 | 富士電機株式会社 | 静電容量式圧力検出器 |
| DE3733766A1 (de) * | 1987-10-06 | 1989-04-27 | Murata Elektronik Gmbh | Verfahren zum herstellen eines drucksensors |
| DE3811047A1 (de) * | 1988-03-31 | 1989-10-12 | Draegerwerk Ag | Fuehler zur kapazitiven messung des druckes in gasen |
| FR2632069B1 (fr) * | 1988-05-30 | 1990-12-14 | Garcia Manuel | Capteur de detection par vitesse de variation d'impedance ou par variation d'impedance |
| DE3901492A1 (de) * | 1988-07-22 | 1990-01-25 | Endress Hauser Gmbh Co | Drucksensor und verfahren zu seiner herstellung |
| DE8815425U1 (de) * | 1988-12-12 | 1990-04-12 | Fibronix Sensoren GmbH, 2300 Kiel | Überlastfester kapazitiver Drucksensor |
| DE3909185A1 (de) * | 1989-03-21 | 1990-09-27 | Endress Hauser Gmbh Co | Kapazitiver drucksensor und verfahren zu seiner herstellung |
| DE3910646A1 (de) * | 1989-04-01 | 1990-10-04 | Endress Hauser Gmbh Co | Kapazitiver drucksensor und verfahren zu seiner herstellung |
| DE3912217A1 (de) * | 1989-04-13 | 1990-10-18 | Endress Hauser Gmbh Co | Drucksensor |
| DE3932443C1 (de) * | 1989-09-28 | 1990-12-20 | Endress U. Hauser Gmbh U. Co, 7864 Maulburg, De | |
| DE3933512A1 (de) * | 1989-10-06 | 1991-04-18 | Endress Hauser Gmbh Co | Differenzdruckmessgeraet |
| DE3942020C2 (de) * | 1989-12-20 | 1993-11-04 | Vega Grieshaber Gmbh & Co | Druckaufnehmer fuer hydrostatische fuellstandsmessung mit einem kapazitiven druckwandler |
| DE4000326C2 (de) * | 1990-01-08 | 1995-12-14 | Mannesmann Ag | Drucksensor |
| DE4031791A1 (de) * | 1990-10-08 | 1992-04-09 | Leybold Ag | Sensor fuer ein kapazitaetsmanometer |
| DE9013959U1 (de) * | 1990-10-08 | 1990-12-13 | Leybold AG, 6450 Hanau | Sensor für ein Kapazitäts-Manometer |
| SE9601336L (sv) * | 1996-04-10 | 1997-10-11 | Samba Sensors Ab | Anordning för mätning av tryck |
| US5954900A (en) * | 1996-10-04 | 1999-09-21 | Envec Mess- Und Regeltechnik Gmbh + Co. | Process for joining alumina ceramic bodies |
| DE59607726D1 (de) * | 1996-10-04 | 2001-10-25 | Endress Hauser Gmbh Co | Verfahren zum Verbinden von Aluminiumoxid-Keramik-Körpern |
| DE69807319T2 (de) * | 1998-06-05 | 2003-03-13 | Honeywell International Inc., Morristown | Verfahren zur gleichzeitigen Herstellung mehrerer kapazitiver Druckmesswandler aus Glas |
| WO2008042903A2 (en) * | 2006-10-03 | 2008-04-10 | Kla-Tencor Technologies Corporation | Systems for sensing pressure/shear force |
| DE102011051441B4 (de) | 2011-06-29 | 2018-10-25 | CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH | Druckwandlungsbasierter Sensor zur Bestimmung einer Messgröße in einem Medium |
| DE102014013270A1 (de) | 2014-09-12 | 2016-03-17 | Vaccubrand Gmbh + Co Kg | Gasdruckmessvorrichtung |
| DE202014007298U1 (de) | 2014-09-12 | 2015-12-16 | Vacuubrand Gmbh + Co Kg | Gasdruckmessvorichtung |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3153156A (en) * | 1962-05-17 | 1964-10-13 | Frank W Watlington | Pressure-proof ceramic transducer |
| US3634727A (en) * | 1968-12-03 | 1972-01-11 | Bendix Corp | Capacitance-type pressure transducer |
| DE2021479A1 (de) * | 1970-05-02 | 1971-11-11 | Kleinwaechter Hans | Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten |
| US3715638A (en) * | 1971-05-10 | 1973-02-06 | Bendix Corp | Temperature compensator for capacitive pressure transducers |
| US3858097A (en) * | 1973-12-26 | 1974-12-31 | Bendix Corp | Pressure-sensing capacitor |
-
1976
- 1976-10-01 GB GB4090876A patent/GB1563894A/en not_active Expired
- 1976-12-14 JP JP51150679A patent/JPS6034687B2/ja not_active Expired
- 1976-12-27 FR FR7639183A patent/FR2344006A1/fr active Granted
-
1977
- 1977-03-08 DE DE19772709945 patent/DE2709945C2/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2344006B1 (de) | 1983-07-01 |
| JPS52123283A (en) | 1977-10-17 |
| GB1563894A (en) | 1980-04-02 |
| FR2344006A1 (fr) | 1977-10-07 |
| DE2709945C2 (de) | 1986-07-17 |
| DE2709945A1 (de) | 1977-09-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6034687B2 (ja) | 圧力電子変換素子 | |
| US4177496A (en) | Capacitive pressure transducer | |
| US4388668A (en) | Capacitive pressure transducer | |
| US4426673A (en) | Capacitive pressure transducer and method of making same | |
| US4207604A (en) | Capacitive pressure transducer with cut out conductive plate | |
| US4196632A (en) | Dual capacitance type bonded pressure transducer | |
| US4151578A (en) | Capacitive pressure transducer | |
| JP3757984B2 (ja) | 安定化圧力センサ | |
| US4951174A (en) | Capacitive pressure sensor with third encircling plate | |
| US4287553A (en) | Capacitive pressure transducer | |
| US4769738A (en) | Electrostatic capacitive pressure sensor | |
| US4389895A (en) | Capacitance pressure sensor | |
| JPS6140529A (ja) | 圧力・容量トランスデユ−サおよびその製造方法 | |
| CA1239806A (en) | Capacitive sensing cell made of brittle material | |
| US4262532A (en) | Pressure and temperature sensor | |
| EP0025336B1 (de) | Aufbau eines variablen kapazitiven Druckwandlers | |
| US5020377A (en) | Low pressure transducer using metal foil diaphragm | |
| JPH0565015B2 (de) | ||
| US4433580A (en) | Pressure transducer | |
| JPH06331651A (ja) | 微細機構を有する加速度計およびその製造方法 | |
| EP0245472A4 (de) | Differenzdruckmesswandler mit zwei membranen. | |
| US5448444A (en) | Capacitive pressure sensor having a reduced area dielectric spacer | |
| JPH0961273A (ja) | 静電容量式圧力センサ | |
| JP2004226294A (ja) | 静圧動圧検知センサ | |
| JPS5845533A (ja) | 圧力検出器 |