JPS6032125Y2 - Single crystal manufacturing equipment - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a single crystal manufacturing apparatus, and more particularly to a concentrated heating single crystal manufacturing apparatus for manufacturing high quality single crystals such as orthoferrite, which is attracting attention as an electronics material.

FIG. 1 is an explanatory diagram of the principle of a conventional single-crystal manufacturing apparatus. In the figure, 1 is a halogen lamp, 2 is an ellipsoidal spheroidal mirror whose inner wall surface is gold-plated, and 3 is a sample. A polycrystalline material rod, 4 is a seed crystal, 5 is a melting zone, and 6 is a quartz tube.

In the figure, a halogen lamp 1 installed at one focal point of a spheroidal mirror 2 acts as a heat source, and its radiant heat is focused by the spheroidal mirror 2 and directed to the other focal point of the spheroidal mirror 2. A corresponding predetermined location of the quartz tube 6 is intensively heated.

On the other hand, inside the quartz tube 6, a polycrystalline material rod 3 suspended from above and a seed crystal 4 supported at the bottom are placed, and the atmosphere inside the quartz tube 6 is variable, so that normally the necessary gas flows. has been done.

When power is supplied to the halogen lamp 1, a molten zone 5 is formed between the polycrystalline rod 3 and the seed crystal 4.

In this state, when the polycrystalline material rod 3 and the seed crystal 4 are rotated in opposite directions and slowly lowered as a whole from top to bottom, a single crystal grows.

However, in the conventional example described above, there are no restrictions on the atmosphere inside the quartz tube 6, so any gas can be used, and the halogen lamp 1 as a heat source is highly stable. is extremely difficult, and
A nozogen lamp 1 is placed in the high temperature atmosphere of the spheroidal mirror 2.
Since the halogen lamp 1 is provided with a lamp, there are disadvantages such as a shortened life span of the halogen lamp 1.

The present invention has been made in view of these drawbacks, and its purpose is to provide an easy-to-manufacture centralized heating type single crystal manufacturing apparatus that eliminates all of the above drawbacks.

The feature of the present invention is that a single crystal manufacturing apparatus of a concentrated heating type that manufactures high-quality single crystals is installed inside a cylindrical quartz protective tube with a high-frequency coil surrounding it on the outside, and that the outer shell surface is coated with gold or gold. The sphere is plated with platinum and has an inner wall surface forming a total reflection surface, which is rotatable and is provided so as to pass through a quartz tube in which a sample is housed.

Hereinafter, the present invention will be explained in detail using figures.

FIG. 2 is an explanatory diagram of the principle of the embodiment of the present invention, and in the figure, 1
1 is a high frequency coil, 12 is a cylindrical quartz protection tube, 13 is a polycrystalline material rod of a sample, 14 is a seed crystal, 15 is a melting zone,
16 is a quartz tube; 17 is a sphere made of a material such as quartz and whose inner wall surface forms a total reflection surface; 18 is gold, platinum, etc.;
) is a coating plated (or vapor-deposited).

In the embodiment of the present invention having the above configuration, when a high frequency current is passed through the high frequency coil 11, a current flows through the surface of the coating 18 due to the skin effect, causing the sphere 17 to generate heat, and the heat is completely absorbed by the inner wall surface of the sphere 17. A predetermined portion of the quartz tube 16 is heated intensively while being reflected.

On the other hand, inside the quartz tube 16, a polycrystalline material rod 13 suspended from above and a seed crystal 14 supported below are placed. A melting zone 15 is formed between the seed crystal 13 and the seed crystal 14 .

In this state, the polycrystalline material rod 13 and the seed crystal 14 are rotated in opposite directions and slowly lowered as a whole from top to bottom, thereby growing a single crystal.

According to the embodiment of the present invention as described in detail above, the sphere is made to generate heat by utilizing the surface effect caused by the high frequency current flowing through the external high frequency coil, and the heat is totally reflected on the inner wall surface of the sphere. Therefore, it has the advantage that the quartz tube containing the sample can be heated efficiently with little heat loss.

Furthermore, according to the embodiment of the present invention, there is no need for a spheroidal mirror or a halogen lamp as in the conventional example, so the accompanying drawbacks of the conventional example are also eliminated, and single crystal manufacturing equipment can be improved. It also has the advantage of being simpler and easier to manufacture.

In addition, as another embodiment of the present invention, the sphere 17 shown in FIG. 2 is made of a heat-resistant material such as ceramic with low thermal conductivity, and the inner wall surface of the sphere 17 is also plated with gold or platinum. There is one that has a mirror finish and is otherwise the same as the embodiment of the present invention described above.

In this case, there are some new and additional advantages, such as the fact that the heat loss from the sphere 17 is even smaller than in the embodiment of the present invention, resulting in economical benefits.

[Brief explanation of the drawing]

Figure 1 is an explanatory diagram of the principle of a conventional example of single crystal manufacturing equipment;
The figure is an explanatory diagram of the principle of the embodiment of the present invention. 1...Halogen lamp, 2...Spheroidal mirror, 3.13...Polycrystalline material rod, 4,14
... Seed crystal, 5, 15 ... Melting zone, 6, 16 ... Quartz tube, 11 ... High frequency coil, 12 ... Quartz protection tube, 17...
... Sphere, 18... Coating.

Claims (1)

[Scope of utility model registration request] In a concentrated heating type single crystal production equipment that produces high-quality single crystals as electronics materials, there are two types of equipment: a sphere whose outer shell surface is plated with gold or platinum, and whose inner wall surface forms a total reflection surface; A quartz tube that is provided so as to pass through it, is rotatable, and has a sample placed inside it, and a cylindrical quartz protection tube that has the sphere inside it and a high-frequency coil surrounding it on the outside. Single crystal manufacturing equipment featuring: