JPS60256905A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To solve problems such as the wear and plastic flow of a thin film magnetic head owing to traveling of a magnetic medium and to produce a thin film magnetic head having a long life by using a magnetic metallic material having high hardness on the traveling surface of the recording medium consisting of the thin magnetic metallic film. CONSTITUTION:The thin film magnetic head is constituted by using an amorphous alloy or Fe-Al-Si alloy to the lower thin magnetic metallic film 2 and an Fe-Al-Si alloy for the central rear thin magnetic metallic film 5. The thin film magnetic head made into such constitution permits the formation of the Fe-Al-Si alloy and amorphous alloy, etc. having high hardness into 1-2mum thin film and the working of the film by lift off and ion etching. The Fe-Ni alloy which is easily electrodepositable is laminated on the part of the recording medium except the traveling surface in order to prevent the magnetic flux saturation of the thin magnetic metallic film which is formed as thinly as 1-2mum. The stable thin film magnetic recording and reproduction are thus made possible with the decreased frictional deterioration in traveling of the medium.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a thin film magnetic head for recording and reproducing magnetization signals in a magnetic recording medium.

Conventional Structure and Problems Conventionally, the core of a magnetic head has been manufactured by machining a material such as ferrite or sendust, and the core has been wound with wire. For this reason, there are limits to high precision and mass production, and in recent years there has been a growing interest in thin-film magnetic heads, and mass production of some of them has begun.

A thin film magnetic head is a highly accurate magnetic head that makes full use of semiconductor manufacturing methods such as thin film formation technology and photolithography.

The structure of the thin film magnetic head will be explained below.

A thin film magnetic head consists of a magnetic thin film serving as a magnetic core, a conductive thin film serving as one winding, and an insulating material between the conductive thin film and the magnetic thin film.

Then, an insulating thin film serving as a gap material is deposited using a method such as vapor deposition or electrodeposition, and processed into a predetermined shape using photolithography. Thin-film magnetic heads are much smaller in area and volume than conventional magnetic heads, and magnetic thin films are often made of materials with high effective magnetic permeability, such as metallic magnetic materials such as Fe-Ni alloys. It will be done. The conductive thin film is made of a material with low resistivity such as Ag, Cu, or AA in consideration of heat generation due to miniaturization, and the insulating material is photoresist, Sio2. Eight tons
2o3 etc. are used. These thin film magnetic heads are
A wear-resistant material such as At20 is used in consideration of wear during media running.
3. This configuration is protected by a board such as Sio2 and a cover.

Thin-film magnetic heads are processed using thin-film formation technology and photo-etching technology, which allows the magnetic head to be made smaller.

High precision is easy to achieve, and since the magnetic core is formed of a thin film, there is little deterioration of magnetic permeability at high frequencies, ■ The head magnetic field that contributes to recording is steep, allowing high-resolution recording, and ■ Multi When used as a trunk, the area facing adjacent tracks is very small, so crosstalk between each head hardly becomes a problem.

Although the thin film magnetic head has the above-mentioned advantages, the metal magnetic thin film, which is the running surface of the recording medium, is made of highly hard Fe-At.
-Si alloys and amorphous alloys are difficult to form thin films with, and photoetching is difficult, so Fe-Ni alloys have been the mainstream. This causes problems such as wear and plastic flow of the metal magnetic thin film due to the running of the recording medium, which shortens the life of the thin film magnetic head.

Purpose of the Invention The present invention solves problems such as wear and plastic flow of the thin film magnetic head due to the running of the recording medium by using a highly hard metal magnetic material on the recording medium running surface of the metal magnetic thin film, and provides a long-life thin film magnetic head. The purpose is to obtain.

Structure of the Invention The present invention forms a lower metal magnetic thin film on a nonmagnetic substrate,
A winding is formed using a conductive thin film on this lower metal magnetic thin film through a first insulating thin film that serves as a head gap, and a second insulating thin film is further formed on the conductive thin film, and a lower metal magnetic thin film is formed on the rear part of the conductive thin film. In a thin film magnetic head in which a hollow metal magnetic thin film and an upper metal magnetic thin film are formed so as to be magnetically connected, the lower metal magnetic thin film is made of an amorphous alloy, Fe-AA-
This is a thin film magnetic head in which the hollow metal magnetic thin film of St gold alloy is made of Fe-Ni alloy, and the upper metal magnetic thin film is made of Fe-A4-8t alloy. For thin film magnetism with this structure, it is possible to process high-hardness Fe-At-8t alloys and amorphous alloys into thin films of 1 to 2 μm using lift-off and ion beam etching. In order to prevent magnetic flux saturation in the metal magnetic thin film, an F@-Ni alloy that can be easily electrodeposited is laminated on areas other than the recording medium running surface, making it possible to perform stable thin film magnetic recording and reproduction with less wear and deterioration due to media running. It is something.

Description of examples An embodiment of the present invention will be described based on FIGS. 1 and 2.

1A, 3102 or At20 as shown in Figure 2
F on the non-magnetic substrate 1 such as 3 by a method such as snow ζ
e-A)1. -3 I alloy, an amorphous ferromagnetic material is deposited to a thickness of 3 to 5 μm, and a lower metal magnetic thin film 2 is formed by a method such as lift-off. Furthermore, Sio2. which becomes the throat gap. A first insulating thin film 3 of At2O3 or the like is deposited to a thickness of about 0.5 μm using a method such as vapor deposition or sputtering, and a conductive material such as Cu, Ag, At or the like, which will become a winding wire, is deposited on it to a thickness of 2 to 3 μm by electrodeposition or vapor deposition. A predetermined first conductive thin film 4 is formed. A second insulating thin film 7 for electrically insulating the first conductive thin film 4, hollow metal magnetic thin film 5, and second conductive thin film 6.
is formed of photoresist or the like, and a first conductive thin film 4 is formed thereon.
Cu, Ag.

It is processed into a predetermined shape using a metal material such as At. A Fe--Ni alloy is electrodeposited to form a metal magnetic thin film 6 having a thickness of 3 to 6 μm so as to be magnetically coupled to the lower metal magnetic thin film 2 at the rear and not to come out onto the recording medium running surface 8.

A high-hardness metallic magnetic material such as an amorphous Fe-At-8t alloy is deposited thereon to a thickness of about 1 to 2 .mu.m by sputtering or the like to form an upper metallic magnetic thin film 9.

In order to protect the thin film part from external forces, an insulating material such as SiO2""203 is deposited with a thickness of 20 to 30 μm by sputtering to form a protective thin film 1.
A cover member 13 is bonded with an adhesive 12 such as glass or resin to protect the thin film magnetic head from wear due to the running of the recording medium 11.

As another embodiment, the second insulating thin film layer is formed of a heat-resistant thin film such as photosensitive polyimide to have a thin film structure that can withstand temperatures of around 450°C, and the lower metal magnetic thin film 2. After forming the hollow metal magnetic thin film 5 and the upper metal magnetic thin film 9 by a method such as vapor deposition or electrodeposition, they are heated to 300°C to 450°C in a magnetic field perpendicular to the flow of magnetic flux of the thin film magnetic head. , lower metal magnetic thin film 2. The effective magnetic permeability of the hollow metal magnetic thin film 5 and the upper metal magnetic thin film 9 in the frequency band used can be approximately doubled.

In the thin film magnetic head having the structure of this embodiment as described above, the surface 8 on the nonmagnetic substrate 1 that is substantially perpendicular to the lower metal magnetic thin film 2 is the surface that comes into contact with the recording medium 11, and the arrow 14 is the direction of movement of the medium. be. As a result, the magnetic flux induced when a current flows through the first conductive thin film 4 and the first conductive thin film 6 passes through the recording medium 11 from the upper metal magnetic thin film 9 to the lower metal magnetic thin film 2. The hollow metal magnetic thin film 5 is guided and returns to the upper metal magnetic thin film 9. According to the present embodiment as described above, the non-magnetic substrate 1 exposed to the medium running surface 8. Lower metal magnetic thin film 2, first insulating thin film 3. Upper metal magnetic thin film 9. Protective thin film 1o2. Since the cover member 13 is made of a wear-resistant material, the wear of the thin-film magnetic nodule is reduced and the service life can be extended.

Effects of the Invention The thin film magnetic head of the present invention is made of an Fe-Al-Si alloy which has been difficult to form into thin films but has excellent wear resistance.

Fe-
A thin-film magnetic head with excellent wear resistance can be easily manufactured by combining Ni alloys, and its practical effects are great.

[Brief explanation of the drawing]

FIG. 1 is a partially sectional perspective view of a thin film magnetic head according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along line AA' in FIG. 1...Nonmagnetic substrate, 2,5.9...Metal magnetic thin film, 3,7...Insulating thin film, 4,6...
・Conductive thin film.

Claims (1)

[Scope of Claims] (1) A lower metallic magnetic thin film is formed on a non-magnetic substrate, and a winding is formed using a conductive thin film on the lower metallic magnetic thin film via a first insulating thin film that serves as a head gap. A middle rear metal magnetic thin film and an upper metal magnetic thin film are formed on the conductive thin film via a second insulating thin film and magnetically coupled to the lower metal magnetic thin film at the rear, and the lower metal magnetic thin film A thin film magnetic head characterized in that the thin film and the upper metallic magnetic thin film are formed of a highly hard magnetic material, and the middle and rear metallic magnetic thin films are composed of a metallic magnetic thin film that is easy to manufacture. Q) The thin film magnetic head according to claim 1, wherein the lower metal magnetic thin film is an amorphous alloy, the upper metal magnetic thin film is an Fe-AL-8i alloy, and the middle and rear metal magnetic thin films are an Fe-Ni alloy. (3) Claim characterized in that the second insulating thin film is made of a heat-resistant thin film; (4) Claim characterized in that the heat-resistant thin film is made of photosensitive polyimide; The thin film magnetic head according to item 3. (5) The second insulating thin film is made of a heat-resistant thin film, and after forming the lower metal magnetic thin film, the middle rear metal magnetic thin film, and the upper metal magnetic thin film, it is placed in a magnetic field perpendicular to the magnetic flux flow of the head at 3001: to 450. 2. The thin film magnetic head according to claim 1, wherein the thin film magnetic head is heated to a temperature of .degree.