JP2002208114A - Thin film magnetic head and manufacturing method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the magnetic field in the direction perpendicular to the surface of a recording medium, generated from a magnetic pole part and to shorten the magnetic path length to enhance high frequency characteristics in a thin film magnetic head. SOLUTION: A thin film magnetic head is provided with a first and a second magnetic layers 8 and 14 each including a magnetic pole part and magnetically connected with each other at a position apart from a medium facing surface ABS, a gap layer 9 provided between the magnetic layers 8 and 14 and a thin film coil 10, a part of which is provided between the magnetic layers 8 and 14. The second magnetic layer 14 has a magnetic pole part layer 14A and a yoke part layer 14B. The saturated magnetic flux density of the magnetic pole part layer 14A is higher than the saturated magnetic flux density of the yoke part layer 14B. The yoke part layer 14B comprises a first layer 14B1 coming in contact with the surfaces on the gap layer 9 side of the first magnetic layer 8 and the magnetic pole part layer 14A and a second layer 14B2 coming into contact with the first layer 14B1 and both side surfaces of the rear end surface and the width direction of the magnetic pole part layer 14A.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin-film magnetic head used in a magnetic recording / reproducing device such as a magnetic disk device and a magnetic tape device, and a method of manufacturing the same.

[0002]

2. Description of the Related Art In a recording system of a magnetic recording / reproducing apparatus, a direction of signal magnetization is determined by an in-plane direction (longitudinal direction) of a recording medium.
And a perpendicular magnetic recording system in which the direction of signal magnetization is perpendicular to the surface of the recording medium. Perpendicular magnetic recording is more efficient than longitudinal magnetic recording.
It is said that the recording medium is less susceptible to thermal fluctuations and can achieve a high linear recording density.

A thin film magnetic head for a longitudinal magnetic recording system is
In general, a medium facing surface (air bearing surface) facing a recording medium is magnetically coupled to each other, and first and second magnetic fields including magnetic pole portions facing each other via a gap on the medium facing surface side. The structure includes a layer and a thin-film coil provided at least partially between the first and second magnetic layers in a state insulated from the first and second magnetic layers.

On the other hand, a thin film magnetic head for a perpendicular magnetic recording system has a ring head having the same structure as a thin film magnetic head for a longitudinal magnetic recording system, and a magnetic field in the direction perpendicular to the recording medium by one main pole. There is a single pole head to apply. When a single-pole head is used, a two-layer medium in which a soft magnetic layer and a magnetic recording layer are laminated on a substrate is generally used as a recording medium.

[0005] In a thin-film magnetic head, it is desired to reduce the track width in order to increase the track density.
Then, in order to reduce the track width without reducing the strength of the magnetic field applied to the recording medium, the magnetic layer including the magnetic pole portion is formed by the magnetic pole portion and the yoke portion magnetically connected to the magnetic pole portion. Various types of thin-film magnetic heads have been proposed in which the saturation magnetic flux density at the magnetic pole portion is larger than the saturation magnetic flux density at the yoke portion.

As described above, the magnetic layer including the magnetic pole portion is
Examples of a thin film magnetic head having a structure in which a magnetic pole portion and a yoke portion are divided are disclosed in JP-A-2000-57522 and JP-A-200-57522.
No. 0-67413, JP-A-11-102506 and the like.

In each of the thin-film magnetic heads disclosed in the above-mentioned publications, any of the first magnetic layer and the second magnetic layer is located on the front side in the traveling direction of the recording medium (air outflow in the slider including the thin-film magnetic head). The second magnetic layer disposed on the (end side) is divided into a magnetic pole portion and a yoke portion.

In each of the thin-film magnetic heads disclosed in the above publications, the yoke portion includes a coil from a magnetic connection portion between the first magnetic layer and the second magnetic layer to a magnetic pole portion. It is arranged to bypass.

In the thin-film magnetic head disclosed in JP-A-2000-57522, the second magnetic layer has a main magnetic film and an auxiliary magnetic film. In this head, a portion of the main magnetic film on the medium facing surface side forms a magnetic pole portion, and another portion of the main magnetic film and an auxiliary magnetic film form a yoke portion.

In the thin-film magnetic head disclosed in Japanese Patent Application Laid-Open No. 2000-67413, the second magnetic layer has a pole portion layer including a pole portion and a yoke portion layer including a yoke portion. The magnetic pole partial layer has a rear end surface (a surface opposite to the medium facing surface), a side surface (a surface perpendicular to the medium facing surface and the surface of the gap portion), and an upper surface (a surface opposite to the gap portion).
Is magnetically connected to the yoke partial layer.

In the thin-film magnetic head disclosed in Japanese Patent Application Laid-Open No. H11-102506, the second magnetic layer has a pole portion layer including a pole portion and a yoke portion layer including a yoke portion. The pole portion layer is magnetically connected to the yoke portion layer on the side and top surfaces.

On the other hand, a thin film magnetic head for a perpendicular magnetic recording system is described in FIG. 2 in “Nikkei Electronics, September 25, 2000 (No. 779), p. 206”.
FIG. 1 shows an example of the structure of a single pole head. In this head, the magnetic layer including the main pole is a single layer.

[0013]

In order to realize a magnetic recording / reproducing apparatus having a large surface recording density, for example, 60 gigabits / (inch) ² or more, it is promising to employ a perpendicular magnetic recording system. Have been watched. However, a thin-film magnetic head suitable for the perpendicular magnetic recording method and having a performance for realizing a magnetic recording / reproducing apparatus having a large surface recording density such as 60 gigabits / (inch) ² or more has been realized. Absent. This is because the conventional thin film magnetic head has problems as described below.

First, all of the thin-film magnetic heads disclosed in the above publications are structural heads for longitudinal magnetic recording, and are not suitable for perpendicular magnetic recording. More specifically, in the thin-film magnetic head disclosed in each publication,
In each case, the thickness of the gap portion is small and the throat height is short, and the yoke portion is arranged so as to bypass the coil, so that the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium is There is a problem that it is small. Further, in the thin-film magnetic heads disclosed in each of the above publications, any of the thin-film magnetic heads has a gap portion between the magnetic pole portions due to the influence of etching for patterning the magnetic pole portions of the second magnetic layer and a process after formation of the magnetic pole portions. Is easy to bend the opposite edge. Therefore, the thin-film magnetic heads disclosed in the above publications have a problem that the bit pattern shape on the recording medium is distorted, and it is difficult to increase the linear recording density. Further, in each of the thin-film magnetic heads disclosed in the above-mentioned publications, the yoke portion has a structure arranged so as to bypass the coil, so that the magnetic path length becomes longer, thereby deteriorating high frequency characteristics. There is a point.

In the thin-film magnetic head disclosed in JP-A-11-102506, the pole portion layer is magnetically connected to the yoke portion layer only on the side and top surfaces. Therefore, in this head, the area of the magnetic connection portion between the magnetic pole portion layer and the yoke portion layer is small, and
There is a problem that the magnetic flux is saturated at the connection portion and the magnetic field generated from the magnetic pole portion on the medium facing surface is reduced.

On the other hand, in the thin-film magnetic head shown in FIG. 2 in “Nikkei Electronics September 25, 2000 (No. 779), p. 206”, the magnetic layer including the main pole is a single layer. . In this head, the entire magnetic layer is thinner in order to reduce the thickness of the magnetic layer on the medium facing surface. Therefore, in this head, there is a problem that the magnetic flux is easily saturated in the middle of the magnetic layer, and the magnetic field generated from the main pole on the medium facing surface is reduced.
Also, in this head, when considering the necessity of flattening the main magnetic pole, the entire magnetic layer must be flattened. Therefore, in this head, the magnetic path is square and long. Such a structure is inefficient from the viewpoint of magnetic field strength and high frequency characteristics.

The present invention has been made in view of the above problems, and has as its object to increase the magnetic field generated from a magnetic pole portion in the direction perpendicular to the surface of a recording medium and to shorten the magnetic path length. An object of the present invention is to provide a thin-film magnetic head capable of improving high-frequency characteristics and a method of manufacturing the same.

[0018]

A first thin-film magnetic head according to the present invention is disposed so as to face a medium facing surface facing a recording medium and to face each other at a predetermined distance before and after in a traveling direction of the recording medium. A first magnetic layer and a second magnetic layer, the first magnetic layer and the second magnetic layer comprising a first magnetic layer and a second magnetic layer, the first magnetic layer and the second magnetic layer comprising a magnetic pole portion, and magnetically connected to each other at a position distant from the medium facing surface. And a thin-film coil provided at least partially between the first and second magnetic layers and insulated from the first and second magnetic layers. And a surface of at least a part of the thin-film coil on the second magnetic layer side is disposed at a position closer to the first magnetic layer than a position of an end of the gap layer on the medium facing surface on the second magnetic layer side. , The second magnetic layer includes a magnetic pole portion, and has a width in the medium facing surface. A magnetic pole partial layer for defining a track width; and a yoke partial layer for magnetically connecting the magnetic pole partial layer and the first magnetic layer. The saturation magnetic flux density of the magnetic pole partial layer is determined by the saturation magnetic flux density of the yoke partial layer. As described above, the yoke partial layer is magnetically connected to the magnetic pole partial layer at least on the surface of the magnetic pole partial layer on the gap layer side and both side surfaces in the width direction.

In the first thin-film magnetic head of the present invention,
The magnetic layer has a pole portion layer and a yoke portion layer, and at least a part of the thin-film coil on the side of the second magnetic layer is located at the end of the gap layer on the medium facing surface on the side of the second magnetic layer. The yoke partial layer is disposed at a position closer to the first magnetic layer than the position, and the yoke partial layer is magnetically connected to the magnetic pole partial layer at least on the gap layer side surface and both lateral sides of the magnetic pole partial layer. I have. Therefore, in the present invention, the yoke partial layer is
A short magnetic path can be formed between the magnetic connection to the first magnetic layer and the pole sublayer, and the yoke sublayer can be located closer to the thin film coil.
Further, according to the present invention, the saturation magnetic flux density of the magnetic pole partial layer is equal to or higher than the saturation magnetic flux density of the yoke partial layer, and the yoke partial layer is formed on at least the gap layer side surface and both side surfaces in the width direction of the magnetic pole partial layer. Since the magnetic layer is magnetically connected to the partial layer, saturation of magnetic flux in the middle of the second magnetic layer can be prevented. From these facts, in the present invention, the electromagnetic conversion efficiency is increased, the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium is increased, and the magnetic path length is shortened to improve high frequency characteristics. Becomes possible.

In the first thin-film magnetic head of the present invention,
The first magnetic layer is disposed on the rear side in the traveling direction of the recording medium,
The second magnetic layer may be arranged on the front side in the traveling direction of the recording medium.

In the first thin-film magnetic head of the present invention, the yoke partial layer is in contact with the first magnetic layer and the surface of the magnetic pole partial layer on the gap layer side, and is magnetically connected thereto. It may include a first layer and a second layer in contact with the first layer and both side surfaces in the width direction of the pole portion layer and magnetically connected thereto. In this case, the second layer of the yoke partial layer may be further magnetically connected to the surface of the magnetic pole partial layer opposite to the gap layer.

In the first thin-film magnetic head of the present invention, the yoke portion layer is further magnetically connected to the pole portion layer at an end surface of the pole portion layer opposite to the medium facing surface. Is also good. In this case, the yoke partial layer is in contact with the first magnetic layer and the surface of the magnetic pole partial layer on the gap layer side,
The first layer magnetically connected to the first layer and the end face of the first layer and the magnetic pole partial layer opposite to the medium facing surface and both side faces in the width direction are in contact with and magnetically connected to these. And a second layer formed. In this case, the second layer of the yoke partial layer may be further magnetically connected to the surface of the magnetic pole partial layer opposite to the gap layer.

In the first thin-film magnetic head of the present invention, the end of the yoke portion layer on the medium facing surface side may be arranged at a position distant from the medium facing surface.

In the first thin-film magnetic head according to the present invention, the width of the portion of the pole portion layer that contacts the yoke portion layer is:
It may be larger than the width of the pole portion layer in the medium facing surface.

In the first thin-film magnetic head of the present invention, the length from the medium facing surface to the end surface of the pole portion layer opposite to the medium facing surface may be 2 μm or more.

The first thin-film magnetic head of the present invention may further comprise a non-magnetic layer in contact with the surface of the pole portion layer on the side opposite to the gap layer. In this case, the non-magnetic layer may be exposed on the medium facing surface. Further, a part of the yoke partial layer may be adjacent to the surface of the magnetic pole partial layer opposite to the gap layer via the nonmagnetic layer, and may be magnetically connected to the magnetic pole partial layer via the nonmagnetic layer. Good. Further, the nonmagnetic layer may be made of a material having a lower etching rate for dry etching than a material forming the pole portion layer and a material forming a portion of the gap layer in contact with the pole portion layer.

In the first thin-film magnetic head according to the present invention, at least a part of the thin-film coil has a first magnetic property higher than that of the intermediate position between the first magnetic layer and the magnetic pole partial layer of the second magnetic layer. It may be arranged at a position close to the layer.

In the first thin-film magnetic head of the present invention, the gap layer is made of a material having fluidity at the time of formation, is filled at least between at least a part of the windings of the thin-film coil, and is exposed to the medium facing surface. It may have a first portion that is not used, and a second portion that is made of a material having better corrosion resistance, rigidity, and insulation than the first portion, and that is exposed to the medium facing surface. In this case, the first portion may be made of an organic non-conductive non-magnetic material or a spin-on-glass film. Further, the second portion may be made of an inorganic non-conductive non-magnetic material.

The first thin-film magnetic head of the present invention may further include a magneto-resistance effect element as a reproducing element. In this case, further, a part of the medium facing surface side is arranged so as to face each other across the magnetoresistive effect element.
First and second shields for shielding the magnetoresistive element
May be provided. Further, the first magnetic layer may also serve as the second shield layer.

Further, the first thin-film magnetic head of the present invention comprises:
It may be used for perpendicular magnetic recording.

According to the first method of manufacturing a thin film magnetic head of the present invention, a medium facing surface facing a recording medium and magnetic poles arranged so as to face each other at a predetermined interval before and after in the traveling direction of the recording medium. A first and second magnetic layer magnetically coupled to each other at a position distant from the medium facing surface, the first and second magnetic layers comprising a nonmagnetic material; And a thin-film coil provided at least partially between the first and second magnetic layers in a state insulated from the first and second magnetic layers. The second magnetic layer includes a magnetic pole portion, and has a magnetic pole portion layer whose width in the medium facing surface defines a track width, and a yoke partial layer for magnetically connecting the magnetic pole portion layer and the first magnetic layer. The saturation magnetic flux density of the pole sublayer is A method for manufacturing a thin-film magnetic head having a density equal to or higher than a density, comprising: forming a first magnetic layer; The yoke portion layer is disposed at a position closer to the first magnetic layer than the position of the end portion on the second magnetic layer side, and the yoke portion layer is provided on at least the gap layer side surface and both side surfaces in the width direction of the pole portion layer. Forming a gap layer, a thin-film coil, and a second magnetic layer on the first magnetic layer so as to be magnetically connected to the partial layer.

In the first method of manufacturing a thin-film magnetic head according to the present invention, the second magnetic layer has a pole portion layer and a yoke portion layer, and a surface of at least a part of the thin-film coil on the side of the second magnetic layer. Is disposed at a position closer to the first magnetic layer than to a position of an end of the gap layer on the medium facing surface on the second magnetic layer side, and the yoke partial layer has at least a surface of the magnetic pole partial layer on the gap layer side and On both side surfaces in the width direction, it is magnetically connected to the pole part layer. Therefore, in the present invention, the yoke partial layer can form a short magnetic path between the magnetic coupling portion to the first magnetic layer and the magnetic pole partial layer, and can place the yoke partial layer near the thin-film coil. It becomes possible to arrange. Further, according to the present invention, the saturation magnetic flux density of the magnetic pole partial layer is equal to or higher than the saturation magnetic flux density of the yoke partial layer, and the yoke partial layer is formed on at least the gap layer side surface and both side surfaces in the width direction of the magnetic pole partial layer. Since the magnetic layer is magnetically connected to the partial layer, saturation of magnetic flux in the middle of the second magnetic layer can be prevented. from these things,
According to the present invention, the electromagnetic conversion efficiency can be increased, the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium can be increased, and the magnetic path length can be shortened to improve high frequency characteristics.

In the first method of manufacturing a thin film magnetic head according to the present invention, the yoke partial layer is further magnetically connected to the pole partial layer at an end face of the pole partial layer opposite to the medium facing surface. Is also good.

In the first method of manufacturing a thin-film magnetic head according to the present invention, the yoke partial layer is in contact with the first magnetic layer and the surface of the pole partial layer on the gap layer side, and is magnetically opposed thereto. A gap layer, a thin-film coil, and a second layer, the first layer being connected to the first layer and the second layer being in contact with and magnetically connected to both side surfaces of the first layer and the pole portion layer in the width direction.
Forming a thin film coil and a part of a gap layer that insulates the thin film coil from the surroundings on the first magnetic layer; Forming a first layer of the yoke partial layer on a portion of the gap layer; and forming another portion of the gap layer on the first magnetic layer, a portion of the gap layer, and the first layer The process of
Polishing another portion of the gap layer until the first layer is exposed to planarize the upper surfaces of the first layer and the other portion of the gap layer; and planarizing the first layer and the gap layer. Forming a layer to be etched made of a material constituting the pole portion layer on another part of the layer, and selectively etching the layer to be etched by dry etching to form a portion of the pole portion layer in contact with the first layer. The method may include a step of determining the outer shape and exposing the first layer, and a step of forming a second layer of the yoke partial layer on the first layer.

In this case, the second layer of the yoke partial layer further contacts the end face of the magnetic pole partial layer opposite to the medium facing surface,
On the other hand, it may be magnetically connected. Further, the step of forming the gap layer, the thin-film coil, and the second magnetic layer may further include, after the step of forming the layer to be etched, a step of flattening the upper surface of the layer to be etched by polishing. Good.

The gap layer, the thin film coil and the second
The step of forming a magnetic layer further includes, after the step of forming a layer to be etched, a step of forming a non-magnetic layer on the layer to be etched, and a step of forming a magnetic pole partial layer on the non-magnetic layer. The step of etching the layer to be etched may include the step of forming a corresponding mask, and the non-magnetic layer and the layer to be etched may be etched using the mask. In the step of forming a mask, a resist frame having a gap corresponding to the shape of the pole portion layer may be formed on the nonmagnetic layer, and the mask may be formed in the gap of the resist frame.

Further, the second layer of the yoke partial layer may be formed by an electroplating method. In this case, the step of forming the second layer of the yoke partial layer includes a step of forming a resist cover that covers a part of the magnetic pole partial layer on the medium facing surface side;
First of resist cover, magnetic pole partial layer and yoke partial layer
The method may include a step of forming an electrode layer for electroplating on the layer, and a step of forming a second layer of the yoke partial layer by electroplating using the electrode layer.

A second thin-film magnetic head according to the present invention includes a medium facing surface facing a recording medium, and magnetic pole portions arranged so as to face each other at predetermined intervals before and after in the direction of travel of the recording medium. And a first and second magnetic layer magnetically connected to each other at a position distant from the medium facing surface, and a nonmagnetic material, provided between the first and second magnetic layers. A thin-film magnetic head comprising: a gap layer having a thickness; and a thin-film coil provided at least partially between the first and second magnetic layers while being insulated from the first and second magnetic layers. The surface of at least a part of the thin-film coil on the side of the second magnetic layer is arranged at a position closer to the first magnetic layer than the end of the gap layer on the medium facing surface on the side of the second magnetic layer. The second magnetic layer includes a magnetic pole portion and is provided on the medium facing surface. A pole portion layer whose width defines a track width; and a yoke portion layer magnetically connecting the pole portion and the first magnetic layer. The saturation magnetic flux density of the pole portion layer is The yoke partial layer is magnetically connected to the magnetic pole partial layer at least on a surface of the magnetic pole partial layer on the gap layer side, and a connection portion between the yoke partial layer and the magnetic pole partial layer is The first magnetic layer and the yoke partial layer are arranged at a position closer to the medium facing surface than the connection portion.

According to the second thin film magnetic head of the present invention,
The magnetic layer has a pole portion layer and a yoke portion layer, and at least a part of the thin-film coil on the side of the second magnetic layer is located at the end of the gap layer on the medium facing surface on the side of the second magnetic layer. The yoke partial layer is disposed at a position closer to the first magnetic layer than the position, and the yoke partial layer is magnetically connected to the magnetic pole partial layer at least on a surface of the magnetic pole partial layer on the gap layer side. The connection portion with the partial layer is arranged at a position closer to the medium facing surface than the connection portion between the first magnetic layer and the yoke partial layer. Therefore, in the present invention, the yoke partial layer can form a short magnetic path between the magnetic coupling portion to the first magnetic layer and the magnetic pole partial layer, and can place the yoke partial layer near the thin-film coil. It becomes possible to arrange. Further, according to the present invention, the saturation magnetic flux density of the pole portion layer is equal to or higher than the saturation magnetic flux density of the yoke portion layer, and the yoke portion layer has at least a surface on the gap layer side of the pole portion layer with respect to the pole portion layer. The connection of the magnetic layers can prevent saturation of magnetic flux in the middle of the second magnetic layer. From these facts, in the present invention, the electromagnetic conversion efficiency is increased, the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium is increased, and the magnetic path length is shortened to improve high frequency characteristics. Becomes possible.

In the second thin film magnetic head of the present invention,
A portion of the yoke partial layer opposite to the first magnetic layer that is not in contact with the magnetic pole partial layer may be disposed closer to the first magnetic layer than a surface of the magnetic pole partial layer closer to the gap layer. .

In the second thin-film magnetic head according to the present invention, at least a part of the surface of the yoke partial layer opposite to the first magnetic layer gradually becomes closer to the first magnetic layer as the distance from the magnetic pole partial layer increases. May be approaching.

Further, in the second thin-film magnetic head of the present invention, the first magnetic layer is disposed on the rear side in the traveling direction of the recording medium, and the second magnetic layer is disposed on the front side in the traveling direction of the recording medium. You may.

In the second thin-film magnetic head of the present invention, the end of the yoke portion layer on the medium facing surface side may be arranged at a position away from the medium facing surface.

In the second thin-film magnetic head according to the present invention, the width of the portion of the pole portion layer in contact with the yoke portion layer is:
It may be larger than the width of the pole portion layer in the medium facing surface.

In the second thin-film magnetic head of the present invention, the length from the medium facing surface to the end surface of the pole portion layer opposite to the medium facing surface may be 2 μm or more.

The second thin-film magnetic head of the present invention may further include a non-magnetic layer in contact with the surface of the pole portion layer on the side opposite to the gap layer. In this case, the non-magnetic layer may be exposed on the medium facing surface. Further, the nonmagnetic layer may be made of a material having a lower etching rate for dry etching than a material forming the pole portion layer and a material forming a portion of the gap layer in contact with the pole portion layer.

Further, in the second thin-film magnetic head of the present invention, at least a part of the thin-film coil has a first magnetic property higher than the intermediate position between the first magnetic layer and the magnetic pole partial layer of the second magnetic layer. It may be arranged at a position close to the layer.

In the second thin-film magnetic head of the present invention, the gap layer is formed of a material having fluidity at the time of formation, is filled at least between at least a part of the windings of the thin-film coil, and is exposed to the medium facing surface. It may have a first portion that is not used, and a second portion that is made of a material having better corrosion resistance, rigidity, and insulation than the first portion, and that is exposed to the medium facing surface. In this case, the first portion may be made of an organic non-conductive non-magnetic material or a spin-on-glass film. Further, the second portion may be made of an inorganic non-conductive non-magnetic material.

The second thin-film magnetic head of the present invention may further comprise a magneto-resistance effect element as a reproducing element. In this case, further, a part of the medium facing surface side is arranged so as to face each other across the magnetoresistive effect element.
First and second shields for shielding the magnetoresistive element
May be provided. Further, the first magnetic layer may also serve as the second shield layer.

Further, the second thin film magnetic head of the present invention comprises:
It may be used for perpendicular magnetic recording.

According to a second method of manufacturing a thin film magnetic head of the present invention, a magnetic medium facing surface facing a recording medium and magnetic poles arranged so as to face each other at a predetermined interval before and after in the traveling direction of the recording medium. A first and second magnetic layer magnetically coupled to each other at a position distant from the medium facing surface, the first and second magnetic layers comprising a nonmagnetic material; And a thin-film coil provided at least partially between the first and second magnetic layers in a state insulated from the first and second magnetic layers. The second magnetic layer includes a magnetic pole portion, and has a magnetic pole portion layer whose width in the medium facing surface defines a track width, and a yoke partial layer for magnetically connecting the magnetic pole portion layer and the first magnetic layer. The saturation magnetic flux density of the pole sublayer is A method for manufacturing a thin-film magnetic head having a density equal to or higher than a density, comprising: forming a first magnetic layer; The yoke portion layer is disposed at a position closer to the first magnetic layer than the position of the end portion on the side of the second magnetic layer, and the yoke portion layer is magnetically at least at the surface of the pole portion layer on the gap layer side. Connected to
A gap is formed on the first magnetic layer so that the connection between the yoke partial layer and the pole partial layer is located closer to the medium facing surface than the connection between the first magnetic layer and the yoke partial layer. Forming a layer, a thin-film coil, and a second magnetic layer.

According to the second method of manufacturing a thin film magnetic head of the present invention, the second magnetic layer has a magnetic pole portion layer and a yoke portion layer, and at least a part of the thin film coil on the side of the second magnetic layer. Is disposed at a position closer to the first magnetic layer than to a position of an end of the gap layer on the medium facing surface on the side of the second magnetic layer, and the yoke partial layer is disposed at least on the surface of the pole part layer closer to the gap layer. The yoke partial layer is magnetically connected to the magnetic pole portion layer, and a connection portion between the yoke partial layer and the magnetic pole portion layer is arranged at a position closer to the medium facing surface than a connection portion between the first magnetic layer and the yoke partial layer. . Therefore, in the present invention, the yoke partial layer can form a short magnetic path between the magnetic coupling portion to the first magnetic layer and the magnetic pole partial layer, and can place the yoke partial layer near the thin-film coil. It becomes possible to arrange. Further, according to the present invention, the saturation magnetic flux density of the pole portion layer is equal to or higher than the saturation magnetic flux density of the yoke portion layer, and the yoke portion layer has at least a surface on the gap layer side of the pole portion layer with respect to the pole portion layer. Since the connection is established, the saturation of the magnetic flux in the middle of the second magnetic layer can be prevented. From these facts, in the present invention, the electromagnetic conversion efficiency is increased, the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium is increased, and the magnetic path length is shortened to improve high frequency characteristics. Becomes possible.

In the manufacturing method of the second thin-film magnetic head of the present invention, the step of forming the gap layer, the thin-film coil and the second magnetic layer includes the steps of: forming a thin-film coil on the first magnetic layer; Forming a part of a gap layer that insulates the first magnetic layer and a part of the gap layer from each other; forming a yoke partial layer on the first magnetic layer and a part of the gap layer; Forming another portion of the gap layer over a portion of the layer and the yoke partial layer; polishing another portion of the gap layer until the yoke partial layer is exposed, Flattening the upper surface of another part of the layer and forming an etched layer made of a material constituting the pole part layer on the flattened yoke part layer and the other part of the gap layer And dry etching the layer to be etched Selectively determining the outer shape of the pole portion layer in contact with the yoke portion layer and exposing the yoke portion layer to form a surface of the yoke portion layer opposite to the gap layer. May be.

In this case, the step of forming the gap layer, the thin-film coil, and the second magnetic layer further includes a step of flattening the upper surface of the layer to be etched by polishing after the step of forming the layer to be etched. May be included.

Further, the gap layer, the thin film coil and the second
The step of forming a magnetic layer further includes, after the step of forming a layer to be etched, a step of forming a non-magnetic layer on the layer to be etched, and a step of forming a magnetic pole partial layer on the non-magnetic layer. The step of etching the layer to be etched may include the step of forming a corresponding mask, and the non-magnetic layer and the layer to be etched may be etched using the mask. In the step of forming a mask, a resist frame having a gap corresponding to the shape of the pole portion layer may be formed on the nonmagnetic layer, and the mask may be formed in the gap of the resist frame.

[0056]

Embodiments of the present invention will be described below in detail with reference to the drawings. [First Embodiment] First, a thin film magnetic head according to a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a sectional view showing the configuration of the thin-film magnetic head according to the present embodiment. FIG. 1 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. The arrow indicated by the symbol T in FIG. 1 indicates the traveling direction of the recording medium. FIG. 2 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. FIG. 3 is an enlarged perspective view showing the vicinity of the magnetic pole portion in FIG. FIG. 4 is a front view showing a part of the medium facing surface of the thin-film magnetic head shown in FIG.
FIG. 5 is an enlarged front view showing the magnetic pole partial layer and the nonmagnetic layer in FIG.

As shown in FIG. 1, the thin-film magnetic head according to the present embodiment has an AlTiC (Al ₂ O ₃ .TiC)
A substrate 1 made of a ceramic material such as a ceramic material, an insulating layer 2 formed of an insulating material such as alumina (Al ₂ O ₃ ) formed on the substrate 1, and a magnetic material formed on the insulating layer 2 And a lower shield layer 3 formed on the lower shield layer 3 with an insulating layer 4 interposed therebetween.
An R (magnetoresistive) element 5 and an upper shield layer 6 made of a magnetic material and formed on the MR element 5 via an insulating layer 4 are provided. Each of the lower shield layer 3 and the upper shield layer 6 has a thickness of, for example, 1 to 2 μm.

One end of the MR element 5 is arranged on the ABS (air bearing surface) ABS facing the medium. As the MR element 5, an element using a magnetosensitive film exhibiting a magnetoresistance effect, such as an AMR (anisotropic magnetoresistance effect) element, a GMR (giant magnetoresistance effect) element, or a TMR (tunnel magnetoresistance effect) element is used. be able to.

The thin-film magnetic head further includes a non-magnetic layer 7 formed on the upper shield layer 6, a first magnetic layer 8 made of a magnetic material formed on the non-magnetic layer 7, An insulating layer 9A formed on the first magnetic layer 8 at a position where the thin-film coil 10 is to be formed, a thin-film coil 10 formed on the insulating layer 9A, and at least between the windings of the thin-film coil 10. And an insulating layer 9B which is filled and is not exposed to the medium facing surface ABS. A contact hole 9a is formed in the insulating layer 9A at a position away from the medium facing surface ABS. In the present embodiment, the insulating layer 9B is formed so as to cover the entire thin film coil 10.

The thickness of the first magnetic layer 8 is, for example, 1 to 2 μm.
It is. The magnetic material constituting the first magnetic layer 8 may be, for example, an iron-nickel alloy, that is, permalloy, or a high saturation magnetic flux density material as described later.

The insulating layer 9A is made of a non-conductive and non-magnetic material such as alumina, and has a thickness of, for example, 0.1 to 1 μm.
m.

The thin-film coil 10 is made of a conductive material such as copper, and its winding has a thickness of, for example, 0.3 to 2 μm. The number of turns of the thin-film coil 10 is arbitrary, and the pitch of the windings is also arbitrary. Here, as an example, the thin film coil 10
Is 1.3 μm, the width of the winding is 0.8 μm, the pitch of the winding is 1.3 μm, and the number of windings is 8. The thin-film coil 10 is wound around the contact hole 9a.

The insulating layer 9B is made of a non-conductive and non-magnetic material having fluidity when formed. Specifically, the insulating layer 9B may be formed of, for example, an organic non-conductive non-magnetic material such as a photoresist (photosensitive resin) or a spin-on-glass (SOG) film made of coated glass. It may be formed.

The thin-film magnetic head further includes an insulating layer 9C formed on the insulating layer 9A from a part of the insulating layer 9B on the medium facing surface ABS side to the medium facing surface ABS, and exposed to the medium facing surface ABS. I have. The insulating layer 9C is made of a non-conductive and non-magnetic material having better corrosion resistance, rigidity and insulating properties than the insulating layer 9B. As such a material, an inorganic non-conductive non-magnetic material such as alumina or silicon oxide (SiO ₂ ) can be used. The total thickness of the insulating layer 9A and the insulating layer 9C in the medium facing surface ABS is, for example, 3 to 6 μm.

The insulating layers 9A, 9B, 9C constitute a gap layer 9 provided between the first magnetic layer 8 and a second magnetic layer 14 described later. The insulating layer 9B corresponds to the first part of the gap layer in the present invention, and the insulating layers 9A and 9C correspond to the second part of the gap layer in the present invention.

The surface of the thin-film coil 10 on the second magnetic layer 14 side is the end of the gap layer 9 on the medium facing surface ABS on the second magnetic layer 14 side (the end of the insulating layer 9C on the magnetic layer 14 side).
Is located closer to the first magnetic layer 8 than the position.

The thin-film magnetic head further includes a second magnetic layer 14 made of a magnetic material formed on the gap layer 9,
Made of a non-conductive and non-magnetic material such as alumina,
The protective layer 17 is formed so as to cover the magnetic layer 14 of FIG.

The second magnetic layer 14 includes a pole portion layer 14A including a pole portion and a yoke portion layer 14B serving as a yoke portion.
And The yoke partial layer 14B contacts the first magnetic layer 8 and the surface of the magnetic pole partial layer 14A on the gap layer 9 side,
The first layer 14B ₁ that is magnetically connected to these,
Bearing surface A of the first layer 14B ₁ and the magnetic pole portion layer 14A
The end face opposite to the BS (hereinafter, referred to as the rear end face.) And a width in contact with the both sides of the direction, and a second layer 14B is magnetically connected ₂ to these.

The first layer 14B ₁ of the yoke partial layer 14B is
The first magnetic layer 8 and the insulating layer 9 extend from the position where the contact hole 9a is formed toward the medium facing surface ABS to a position on the end surface of the insulating layer 9C opposite to the medium facing surface ABS.
B. The first layer 14B ₁ of the thickness at the position of the contact hole 9a is larger than the total thickness of the insulating layer 9A and the insulating layer 9B, is, for example 3μm or more. End of the first layer 14B ₁ of the bearing surface ABS side, a position away from the bearing surface ABS e.g. 1.5μm or more, the medium facing surface than the rear end surface of the pole portion layer 14A A
It is located near the BS. Here, as an example, the distance between the end portion and the air bearing surface ABS of the first layer 14B ₁ of the bearing surface ABS side is 5 [mu] m. First layer 14B ₁
May be, for example, an iron-nickel alloy, that is, permalloy, or a high saturation magnetic flux density material as described later.

[0070] upper surface of the portion of the bearing surface ABS side of the first layer 14B ₁ of the yoke portion layer 14B and the insulating layer 9C is flattened. Pole portion layer 14A is formed on the planarized top surface of the first layer 14B ₁ and the insulating layer 9C. Therefore, the first layer 1 of the yoke partial layer 14B
4B ₁ is in contact with the surface of the pole portion layer 14A on the gap layer 9 side and is magnetically connected thereto.

The thin-film magnetic head further includes a pole part layer 14.
A non-magnetic layer 15 formed on A is provided. The second layer 14B ₂ of the yoke portion layer 14B is disposed on the first layer 14B ₁ and the nonmagnetic layer 15. Second layer 14B
₂ is in contact with the both side surfaces of the rear end surface and the width direction of the first layer 14B ₁ and the magnetic pole portion layer 14A, and is magnetically connected to these. The medium facing surface ABS of the second layer 14B ₂
Is partially adjacent to the upper surface of the pole portion layer 14A via the non-magnetic layer 15, and the pole portion layer 14A via the non-magnetic layer 15.
Are magnetically connected to Second of the yoke partial layer 14B
The thickness of the layer 14B ₂ is, for example, 0.5 to 2 [mu] m. Magnetic material forming the second layer 14B _2, for example iron - may be a nickel-based alloy That Permalloy, or a high saturation magnetic flux density material such as described below.

The thickness of the pole portion layer 14A is preferably 0.1 to 0.8 μm, more preferably 0.3 to 0.8 μm.
0.8 μm. Here, as an example, the thickness of the pole portion layer 14A is 0.5 μm. The medium facing surface A
The length from BS to the rear end face of the pole part layer 14A is 2 μm.
That is all. Here, as an example, this length is set to 10 μm.
m.

As shown in FIG. 3, the pole portion layer 14A
Is a first portion 14A arranged on the medium facing surface ABS side.
_1, and a second portion 14A ₂ which are located away from the medium facing surface ABS than the first portion 14A _1. The first portion 14A ₁ is a pole portion of the second magnetic layer 14. Pole portion of the first magnetic layer 8 includes a portion with the gap layer 9 of the first magnetic layer 8 opposite to the first portion 14A _1.

The first part 14A₁Is equal to the track width
It has a wide width. That is, the first portion 14A₁Medium
The width at the body facing surface ABS defines the track width.
You. Second part 14A_TwoOf the first portion 14A₁With
The first portion 14A at the boundary position ₁Equal to the width of
The greater the distance from the medium facing surface ABS, the larger
After it has become a certain size. Magnetic pole partial layer 14
A second part 14A of A_TwoIs the first of the yoke partial layers 14B.
Layer 14B₁Overlaps a part of the medium facing surface ABS side of
Second layer 14B of yoke partial layer 14B_TwoMedium facing surface AB
A part on the S side is formed via the nonmagnetic layer 15 and the pole portion layer 14A.
The second part 14A of_TwoOn top of.

[0075] The first portion 14A ₁ of the width of the bearing surface ABS, that is, the track width is preferably 0.5μ
m, more preferably 0.3 μm or less.
Second portion 1 in a portion overlapping yoke portion layer 14B
The width of 4A ₂ is greater than the width of the first bearing surface (ABS) of the portion 14A _1, is, for example 2μm or more.

[0076] end of the second layer 14B ₂ of bearing surface ABS side of the yoke portion layer 14B is a position away from the bearing surface ABS e.g. 1.5μm or more, the magnetic pole portion layer 14
It is arranged at a position closer to the medium facing surface ABS than the rear end surface of A.

In this embodiment, the yoke partial layer 1
The end opposite to the second layer of 14B ₂ bearing surface ABS and 4B, rather than the magnetic coupling portion of the first layer 14B ₁ and the first magnetic layer 8, away from the bearing surface ABS Is located in the position.

The saturation magnetic flux density of the pole part layer 14A is equal to or higher than the saturation magnetic flux density of the yoke part layer 14B. As the magnetic material forming the magnetic pole portion layer 14A, it is preferable to use a high saturation magnetic flux density material having a saturation magnetic flux density of 1.4T or more. As the high saturation magnetic flux density material, a material containing iron and nitrogen atoms, a material containing iron, zirconia and oxygen atoms,
For example, a material containing iron and nickel elements can be used. Specifically, as the high saturation magnetic flux density material, for example,
NiFe (Ni: 45% by weight, Fe: 55% by weight), F
eN and its compounds, Co-based amorphous alloys, Fe-C
o, Fe-M (including O (oxygen atom if necessary)), Fe-Co-M (O (oxygen atom if necessary)
Including. ) Can be used. Here, M is Ni, N, C, B, Si, A
It is at least one selected from l, Ti, Zr, Hf, Mo, Ta, Nb, and Cu (all chemical symbols).

As the magnetic material constituting the yoke partial layer 14B, for example, a material containing iron and nickel elements having a saturation magnetic flux density of about 1.0T can be used.
Such a material is excellent in corrosion resistance and has a high pole part layer 14.
It has higher resistance than the material constituting A. Further, the use of such a material facilitates the formation of the yoke partial layer 14B.

As the magnetic material forming the yoke partial layer 14B, a magnetic material having the same composition as the magnetic material forming the magnetic pole partial layer 14A can be used. In this case, in order to make the saturation magnetic flux density of the yoke partial layer 14B smaller than the saturation magnetic flux density of the magnetic pole partial layer 14A, as the magnetic material forming the yoke partial layer 14B, the magnetic material forming the magnetic pole partial layer 14A is used. It is preferable to use a material having a smaller composition ratio of iron atoms than a material.

The planar shape of the nonmagnetic layer 15 is the same as that of the pole portion layer 14A. The non-magnetic layer 15 is exposed on the ABS facing the medium. The thickness of the nonmagnetic layer 15 is preferably 0.5 μm or less. Here, as an example, the thickness of the nonmagnetic layer 15 is 0.3 μm. Further, the non-magnetic layer 15 can be omitted.

As a material constituting the nonmagnetic layer 15, for example, a material containing titanium or tantalum (including an alloy and an oxide), alumina, silicon oxide (SiO 2)
₂ ) or other inorganic non-conductive non-magnetic materials can be used. When the pole portion layer 14A is formed by dry etching, the material forming the non-magnetic layer 15 includes a material forming the pole portion layer 14A and an insulating layer in the gap layer 9 which is in contact with the pole portion layer 14A. It is preferable to use a material having a lower etching rate for dry etching than the material constituting 9C. As such a material, for example, a material containing titanium or tantalum (including an alloy and an oxide) can be used.

As shown in FIGS. 4 and 5, the surface of the magnetic pole portion layer 14A exposed on the medium facing surface ABS may be rectangular, or may be formed on the rear side of the recording medium in the traveling direction T (air inflow in the slider). The lower side arranged on the end side) may be a trapezoid or a triangle smaller than the upper side. The side surface of the pole portion layer 14A may be concave. The medium facing surface ABS
Side of the surface of the magnetic pole portion layer 14A exposed to the
Is preferably 80 to 88 °.

As described above, the thin-film magnetic head according to the present embodiment has the medium facing surface AB facing the recording medium.
S, a reproducing head, and a recording head. The reproducing head includes an MR element 5 as a reproducing element and a medium facing surface AB.
A lower shield layer 3 and an upper shield layer 6 for shielding the MR element 5 are provided so that a part on the S side is opposed to the MR element 5 with the MR element 5 interposed therebetween.

The recording head includes magnetic pole portions arranged so as to be opposed to each other at predetermined intervals before and after the recording medium in the traveling direction T on the medium facing surface ABS side.
First magnetic layer 8 and second magnetic layer 14 magnetically connected to each other at a position distant from medium facing surface ABS
And a gap layer 9 made of a non-magnetic material, provided between the first magnetic layer 8 and the second magnetic layer 14, and at least a part thereof is formed of the first magnetic layer 8 and the second magnetic layer 14. Between,
And a thin-film coil 10 provided insulated from the magnetic layers 8 and 14.

In the present embodiment, the portion of the second magnetic layer 1 between the magnetic layers 8 and 14 of the thin film coil 10
The surface on the fourth side (upper surface in FIG. 1) is a medium facing surface AB
The gap layer 9 is located at a position closer to the first magnetic layer 8 (a lower end in FIG. 1) than a position of the gap layer 9 closer to the second magnetic layer 14 (an upper end in FIG. 1). .

The second magnetic layer 14 includes a magnetic pole portion, and the magnetic pole portion layer 14A whose width at the medium facing surface ABS defines the track width, and a yoke portion, and the magnetic pole portion layer 14A and the first magnetic layer 8 and a yoke portion layer 14B for magnetically connecting to the yoke portion layer 8B. The saturation magnetic flux density of the pole part layer 14A is equal to or higher than the saturation magnetic flux density of the yoke part layer 14B. The yoke part layer 14B is magnetically connected to the pole part layer 14A at least on the surface of the pole part layer 14A on the gap layer 9 side, the rear end face, and both side faces in the width direction.

The thin-film magnetic head according to the present embodiment is suitable for use in a perpendicular magnetic recording system. When using this thin film magnetic head in the vertical magnetic recording method, the first portion 14A ₁ in the pole portion layer 14A of the second magnetic layer 14 becomes the main magnetic pole, the pole portion of the first magnetic layer 8 is an auxiliary magnetic pole . When the thin-film magnetic head according to the present embodiment is used for the perpendicular magnetic recording system, it is possible to use either a two-layer medium or a single-layer medium as a recording medium.

In the thin-film magnetic head according to the present embodiment,
The second magnetic layer 14 is composed of the pole portion layer 14A and the yoke portion layer 1
4B, and at least a second part of the thin film coil 10
Is closer to the second magnetic layer 14 than the end of the gap layer 9 in the medium facing surface ABS.
Of the yoke partial layer 14B
Are magnetically connected to the pole part layer 14A at least on the surface of the pole part layer 14A on the gap layer 9 side, the rear end face, and both side faces in the width direction. Therefore, in the present embodiment, the yoke partial layer 14B is the first magnetic layer 8
A short magnetic path can be formed between the magnetic coupling portion and the pole portion layer 14A, and the yoke portion layer 1
4B can be arranged near the thin-film coil 10.

In this embodiment, the magnetic pole partial layer 14
The saturation magnetic flux density of A is equal to or higher than the saturation magnetic flux density of the yoke partial layer 14B. Further, the yoke portion layer 14B is magnetically connected to the pole portion layer 14A at least on the gap layer side surface, the rear end face, and both side surfaces in the width direction of the pole portion layer 14A. That is, the yoke partial layer 14B
The area of the magnetic connection between the magnetic pole portion layer 14A and the magnetic pole portion layer 14A is large. Therefore, according to the present embodiment, the second magnetic layer 14
Of the magnetic flux in the middle of the process can be prevented.

From these facts, according to the present embodiment, the electromagnetic conversion efficiency is increased, and the magnetic field in the direction perpendicular to the surface of the recording medium, which is generated from the magnetic pole portion of the second magnetic layer 14, is increased. In addition, it is possible to improve the high frequency characteristics by shortening the magnetic path length. When a high saturation magnetic flux density material is used for the pole portion layer 14A, the magnetic field in the direction perpendicular to the surface of the recording medium can be increased, and recording on a recording medium having a large coercive force can be performed.

In the thin-film magnetic head according to the present embodiment, the magnetic field in the direction perpendicular to the surface of the recording medium is larger than the magnetic field in the longitudinal direction, and the magnetic energy generated by the head is efficiently transmitted to the recording medium. be able to. Therefore, according to the thin-film magnetic head, the recording medium is hardly affected by the thermal fluctuation, and the linear recording density can be increased.

As shown in FIG. 1, in the thin-film magnetic head according to the present embodiment, the first magnetic layer 8 is located on the rear side in the traveling direction T of the recording medium (on the air inflow end side of the slider including the thin-film magnetic head). ), And the second magnetic layer 14 is preferably disposed on the front side (the air outflow end side of the slider including the thin film magnetic head) in the traveling direction T of the recording medium. With such an arrangement, the magnetization reversal transition width in the recording medium when the perpendicular magnetic recording method is used is smaller than in the case of the opposite arrangement, and a higher density magnetization is achieved in the recording medium. A pattern can be formed, and as a result, the linear recording density can be increased.

Further, as shown in FIG. 1, in the thin-film magnetic head according to the present embodiment, the yoke portion layer 14B is formed between the first magnetic layer 8 and the surface of the pole portion layer 14A on the gap layer 9 side. First layer 1 in contact with and magnetically connected to these
And 4B _1, in contact with the both side surfaces of the rear end surface and the width direction of the first layer 14B ₁ and the magnetic pole portion layer 14A, and a second layer 14B ₂ that is magnetically connected to these. This facilitates formation of the yoke partial layer 14B.

The second layer 14B of the yoke partial layer 14B
₂ is further magnetically connected to the surface of the pole portion layer 14A on the side opposite to the gap layer 9. Thus, from the surface opposite to the gap layer 9 of the pole portion layer 14A, second layer 14B ₂ from the magnetic pole portion layer 14A of the yoke portion layer 14B
Magnetic flux can be guided to the device, and as a result, the electromagnetic conversion efficiency can be improved.

Further, as shown in FIG. 1, in the thin-film magnetic head according to the present embodiment, the first
Each end of the layer 14B ₁ and the second layer 14B ₂ of bearing surface ABS side is located at a distance from the medium facing surface ABS. Thereby, the first layer 14 of the yoke partial layer 14B is formed.
By the magnetic field generated from each end of the B ₁ and the second layer 14B ₂ of bearing surface ABS side it can be prevented that the writing of information on a recording medium arises.

Further, as shown in FIG. 2, in the thin film magnetic head according to the present embodiment, the width of the portion of the pole portion layer 14A in contact with the yoke portion layer 14B is equal to the width of the pole portion layer 14A in the medium facing surface ABS. It is larger than the width.
As a result, the area of the pole portion layer 14A in contact with the yoke portion layer 14B can be increased, and the saturation of magnetic flux at this portion can be prevented. As a result, the magnetic flux can be efficiently guided from the yoke partial layer 14B to the magnetic pole partial layer 14A, and the medium facing surface A of the magnetic pole partial layer 14A
The magnetic field applied to the recording medium can be increased by reducing the exposed area in the BS.

Further, in the thin-film magnetic head according to the present embodiment, by setting the length from the medium facing surface ABS to the rear end face of the pole portion layer 14A to be 2 μm or more, the thickness and width of the pole portion layer 14A can be increased. Without increasing the area of the pole portion layer 14A in contact with the yoke portion layer 14B, it is possible to prevent the magnetic flux from being saturated in this portion. As a result, the magnetic flux can be efficiently guided from the yoke partial layer 14B to the magnetic pole partial layer 14A.

Further, as shown in FIG. 1, the thin-film magnetic head according to the present embodiment includes a non-magnetic layer 15 which is in contact with the surface of the pole portion layer 14A on the side opposite to the gap layer 9. Thus, when the pole portion layer 14A is formed by dry etching or when the yoke portion layer 14B is formed by electroplating, the surface of the pole portion layer 14A opposite to the gap layer 9 is damaged. Can be prevented and its surface can be flattened. In particular, in the present embodiment, since the nonmagnetic layer 15 is exposed at the medium facing surface ABS, the magnetic pole partial layer 14 is exposed at the medium facing surface ABS.
The end opposite to the gap layer 9 of A can be kept flat. Thus, the magnetic field generated from the pole portion layer 14A in the medium facing surface ABS can be made uniform in the direction intersecting the track. As a result, the linear recording density can be improved while suppressing the distortion of the bit pattern shape in the recording medium.

In this embodiment, the yoke partial layer 1
4B, a part of the medium facing surface ABS side, that is, the second layer 14
Some bearing surface ABS side of the B _2, adjacent to the surface opposite to the gap layer 9 of the pole portion layer 14A through the non-magnetic layer 15, the magnetic pole portion layer 14A through the non-magnetic layer 15 Magnetically connected. As a result, the magnetic flux can be guided from a part of the yoke partial layer 14B to the medium facing surface ABS side of the magnetic pole partial layer 14A via the nonmagnetic layer 15.

Further, the non-magnetic layer 15 is replaced with the pole portion layer 14A.
And the material forming the gap layer 9 and the material forming the portion of the gap layer 9 which is in contact with the magnetic pole portion layer 14A, the material having a lower etching rate for dry etching is used to form the magnetic pole portion layer 14A by dry etching. At this time, it is possible to prevent the surface of the pole portion layer 14A on the side opposite to the gap layer 9 from being damaged.

Further, as shown in FIG. 1, in the thin-film magnetic head according to this embodiment, the first
The portion disposed between the first magnetic layer 8 and the second magnetic layer 14 is disposed between the first magnetic layer 8 and the second magnetic layer 14.
It is arranged at a position closer to the first magnetic layer 8 than at a position intermediate with 4A. Thus, the first magnetic layer 8 having a larger volume than the second magnetic layer 14 allows the thin-film coil 10
Can efficiently absorb the magnetic field generated from the
Can be improved in the magnetic field absorptivity of the first magnetic layer 8 and the second magnetic layer 14 as compared with the case where the second magnetic layer 14 is close to the second magnetic layer 14.

As shown in FIG. 1, in the thin-film magnetic head according to the present embodiment, the gap layer 9 is made of a material having fluidity at the time of formation, and at least the thin-film coil 1 is formed.
0, and a first portion (insulating layer 9B) which is not exposed to the medium facing surface ABS and is made of a material having better corrosion resistance, rigidity, and insulating properties than the first portion. Second portion exposed to ABS (insulating layers 9A and 9C)
And The first portion (insulating layer 9B) is formed of the second portion (insulating layers 9A and 9C) and the first portion of the yoke portion layer 14B.
It is completely covered by the layer 14B _1. Filling the non-magnetic material with no gap between the windings of the thin film coil 10
Although it is difficult by the sputtering method, it is easy when a non-magnetic material having fluidity such as an organic material is used. However, organic materials have poor reliability in terms of resistance to dry etching, corrosion resistance, heat resistance, rigidity, and the like. In the present embodiment, as described above, the first portion (insulating layer 9B) filled between the windings of the thin-film coil 10 with the material having fluidity at the time of formation is formed. Since the second portion (insulating layers 9A and 9C) exposed on the medium facing surface ABS is formed by covering a part of the first portion with a material having excellent corrosion resistance, rigidity, and insulating properties, the thin film coil is formed. The non-magnetic material can be filled without gaps between the windings 10 and the reliability of the gap layer 9 can be improved.

Further, the thin-film magnetic head according to the present embodiment has an MR element 5 as a reproducing element. Thereby, the reproduction performance can be improved as compared with the case where the reproduction is performed using the induction type electromagnetic transducer. Also, MR
Since the element 5 is shielded by the shield layers 3 and 6, the resolution at the time of reproduction can be improved.

Next, a modification of the thin-film magnetic head according to the present embodiment will be described with reference to FIG. FIG. 6 is a cross-sectional view showing a configuration of a thin film magnetic head according to a modification. FIG. 6 shows a cross section perpendicular to the medium facing surface and the surface of the substrate.

The thin-film magnetic head of this modification is such that the upper shield layer 6 and the non-magnetic layer 7 in the thin-film magnetic head shown in FIG. 1 are omitted, and the first magnetic layer 8 also serves as the upper shield layer 6. It is. According to this configuration, the structure of the thin-film magnetic head is simplified, and the manufacturing is also simplified. Other configurations of the thin film magnetic head of this modification are the same as those of the thin film magnetic head shown in FIG.

Next, a method for manufacturing the thin-film magnetic head according to the present embodiment will be described with reference to FIGS. Here, a method of manufacturing the thin film magnetic head shown in FIG. 1 will be described as an example.
The manufacturing of the thin-film magnetic head shown in FIG. 1 is the same as that described below, except that the step of forming the upper shield layer 6 and the nonmagnetic layer 7 is omitted.

In the method of manufacturing a thin-film magnetic head according to the present embodiment, first, an insulating layer 2 is formed on a substrate 1. Next, the lower shield layer 3 is formed on the insulating layer 2. 7 to 22, the substrate 1 and the insulating layer 2 are omitted.

Next, as shown in FIG. 7, an insulating film to be a part of the insulating layer 4 is formed on the lower shield layer 3, and the MR element 5 and the MR element 5 and leads (not shown) to be connected. Next, the MR element 5
Then, the leads are covered with a new insulating film that becomes another part of the insulating layer 4, and the MR element 5 and the leads are embedded in the insulating layer 4.

Next, the upper shield layer 6 is formed on the insulating layer 4, and the nonmagnetic layer 7 is formed thereon. Next, a first magnetic layer 8 is formed on the non-magnetic layer 7 in a predetermined shape. Next, although not shown, the non-magnetic layer 7 and the first magnetic layer 8 are covered with a non-magnetic material such as alumina to form the first magnetic layer 8.
Is polished until the first magnetic layer 8 is exposed.
Is flattened.

Next, as shown in FIG. 8, a non-conductive and non-magnetic material such as alumina is sputtered on the first magnetic layer 8 to form an insulating layer 9A. Next, a contact hole 9a is formed in the insulating layer 9A at a position where the first magnetic layer 8 and a later-described second magnetic layer 14 are to be connected by using a known photolithography technique and a dry etching technique. .

Next, as shown in FIG. 9, the thin-film coil 10 is formed on the insulating layer 9A by using a well-known photolithography technique and a film forming technique (for example, an electroplating method).

Next, as shown in FIG. 10, at least the thin film coil 1 is formed using a well-known photolithography technique.
The insulating layer 9B filled between the 0 windings is formed. Here, the insulating layer 9B is formed so as to completely cover the thin-film coil 10. However, after the insulating layer 9B filled between the windings of the thin-film coil 10 is formed, the insulating layer 9B is separated from the thin-film coil 10B. An insulating layer covering the insulating layer 10 and the insulating layer 9B may be formed.

Next, as shown in FIG. 11, a known photolithography technique and a deposition technique (for example, an electroplating technique) are used to move a predetermined position from the position where the contact hole 9a is formed toward the medium facing surface ABS. position to the, to form the first layer 14B ₁ of the yoke portion layer 14B on the first magnetic layer 8 and the insulating layer 9B. At this point, the first layer 14B ₁
Has a thickness of 3 μm or more, a depth (length in a direction perpendicular to the medium facing surface ABS) of 2 to 10 μm, and a width of 5 to 20 μm, for example.

[0115] Next, as shown in FIG. 12, by sputtering, the insulating layer 9A, an insulating layer 9C so as to cover the first layer 14B ₁ of the insulating layer 9B and the yoke portion layer 14B. At this point, the thickness of the insulating layer 9C is
The thickness should be at least ₁ .

Next, as shown in FIG. 13, the first layer 14B of the yoke partial layer 14B is
₁ by polishing the surface of the insulating layer 9C to expose the planarized upper surface of the insulating layer 9C and the first layer 14B _1. At this point, the distance from the upper surface of the first magnetic layer 8 to the upper surface of the insulating layer 9C is, for example, 3 to 6 μm.

Next, as shown in FIG. 14, the insulating layer 9C
And on the first layer 14B _1, the etching layer made of a material forming the pole portion layer 14A of the second magnetic layer 14 1
4Ae is formed. The thickness of the layer to be etched 14Ae is
Preferably it is 0.1-0.8 μm, more preferably 0.3-0.8 μm. The method of forming the layer 14Ae to be etched may be an electroplating method or a sputtering method. When the surface roughness of the layer 14Ae to be etched is large (for example, when the arithmetic average roughness Ra is 12 Å or more), the surface of the layer 14Ae to be etched is preferably planarized by chemical mechanical polishing or the like. .

Next, a nonmagnetic layer 15e is formed on the layer to be etched 14Ae. The thickness of the nonmagnetic layer 15e is preferably set to 0.5 μm or less.

Next, although not shown, an electrode layer for electroplating is formed on the nonmagnetic layer 15e by sputtering. The thickness of this electrode layer is 0.1 μm or less, and the material is, for example, an iron-nickel alloy.

Next, as shown in FIG. 15, a resist frame 31 having a cavity corresponding to the shape of the pole portion layer 14A is formed on the electrode layer by photolithography using a photoresist. I do. Next, using this resist frame 31, a plating film serving as a mask 32 corresponding to the shape of the pole portion layer 14A is formed on the electrode layer by an electroplating method (frame plating method). The thickness of the plating film is 1 to 4 μm, and the material is, for example, an iron-nickel alloy. Next, the resist frame 31 is removed.

Next, as shown in FIG.
And the non-magnetic layer 15e and the layer to be etched 14Ae by a dry etching technique such as ion milling.
Is etched to form the non-magnetic layer 15 and the pole portion layer 14.
Form A. At this time, it is preferable that at least a portion of the mask 32 corresponding to the medium facing surface ABS is completely removed. Absent.

By the above-described etching, FIGS.
As shown in the figure, the shape of the surface of the magnetic pole portion layer 14A exposed on the medium facing surface ABS is rectangular, or the lower side disposed on the rear side (air inflow end side of the slider) in the traveling direction T of the recording medium is smaller than the upper side. Are also small trapezoids or triangles. The side surface of the pole portion layer 14A may be concave. In addition, the width of the pole portion layer 14A in the medium facing surface ABS may be defined by the above-described etching so as to match the track width standard.

At the same time that the nonmagnetic layer 15 and the pole portion layer 14A are formed by the above-described etching,
The first layer 14B ₁ of the yoke portion layer 14B is exposed.

Note that, instead of forming the mask 32 of the plating film as described above, a photoresist is formed on the nonmagnetic layer 15e by using a photolithography technique.
A resist pattern corresponding to the shape of the magnetic pole partial layer 14A may be formed. Then, using this resist pattern as a mask, the nonmagnetic layer 15e and the layer to be etched 14A are formed.
e, by etching the nonmagnetic layer 15 and the pole portion layer 1
4A and the first layer 14 of the yoke partial layer 14B.
B ₁ is exposed, and thereafter, the resist pattern may be removed.

Next, as shown in FIG. 17, the medium facing surface A of the pole portion layer 14A and the non-magnetic layer 15 is formed by photolithography using a photoresist.
A resist cover 33 covering a part on the BS side is formed. The thickness of the resist cover 33 is preferably equal to or less than the thickness of a yoke partial layer forming frame described later.

Next, as shown in FIG. 18, the resist cover 33, the pole portion layer 14A (and the non-magnetic layer 15),
And on the first layer 14B of the yoke portion layer 14B _1, by sputtering, to form the electrode layer 34 for the electroplating process. The thickness of the electrode layer 34 is 0.1 μm or less,
The material may be, for example, an iron-nickel alloy, and a film of Ti (titanium) may be formed as an underlayer.

Next, as shown in FIG.
On the yoke partial layer 14B by photoresist.
Forming a resist frame 35 having a gap portion corresponding to the second layer 14B ₂ shapes.

[0128] Next, as shown in FIG. 20, using the resist frame 35, by electroplating (frame plating) to form a second layer 14B ₂ of the yoke portion layer 14B on the electrode layer 34 . Next, resist frame 3
5 is removed. Note that the second layer 14B ₂ can be formed using a lift-off method, but the second layer 14B ₂
It is most preferable to use an electroplating method in order to make the shape follow the shape of the base.

Next, as shown in FIG.
Of, removing portions other than the portion below the second layer 14B ₂ of the yoke portion layer 14B by dry etching.

Next, as shown in FIG. 22, the resist cover 33 is removed. Next, a protective layer 17 is formed so as to cover the second magnetic layer 14. Next, wirings, terminals, and the like are formed on the protective layer 17, the substrate is cut in units of sliders, the ABS of the medium facing surface is polished, and a flying rail is manufactured to complete the thin-film magnetic head.

As described above, in the method of manufacturing the thin-film magnetic head according to the present embodiment, the step of forming the first magnetic layer 8 and the step of forming the second magnetic layer 1 of at least a part of the thin-film coil 10 are performed.
4 is closer to the second magnetic layer 14 side of the gap layer 9 in the medium facing surface ABS than the first magnetic layer 8 is.
And the yoke portion layer 14B is magnetically connected to the pole portion layer 14A at least on the surface of the pole portion layer 14A on the gap layer 9 side, the rear end face, and both side surfaces in the width direction. As described above, the gap layer 9, the thin-film coil 10 and the second magnetic layer 14 are formed on the first magnetic layer 8.
Forming a step. According to the method of manufacturing the thin-film magnetic head, the same operation and effect as those of the thin-film magnetic head according to the present embodiment can be obtained.

In the method of manufacturing a thin-film magnetic head according to the present embodiment, the gap layer 9 is formed on the first magnetic layer 8.
The step of forming the thin-film coil 10 and the second magnetic layer 14 includes forming the thin-film coil 10 on the first magnetic layer 8 and a part of the gap layer 9 for insulating the thin-film coil 10 from the surroundings. Forming the insulating layer 9B; and forming the first yoke partial layer 14B on the first magnetic layer 8 and the insulating layer 9B.
Forming a layer 14B _1, the first magnetic layer 8, on the insulating layer 9B and the first layer 14B _1, forming an insulating layer 9C is another part of the gap layer 9, first Layer 14B
_The insulating layer 9C is polished until the first layer 14 is exposed.
B ₁ and planarizing the upper surface of the insulating layer 9C, on the first layer 14B ₁ and the insulating layer 9C, which is flattened, etched layer made of a material forming the pole portion layer 14A 1
Forming a 4Ae, and selectively etching the layer to be etched 14Ae by dry etching to form a first
Exposing a first layer 14B ₁ and determines the outer shape of the pole portion layer 14A in contact with the layer 14B _1, first layer 14
On the B _1, and a step of forming a second layer 14B ₂ of the yoke portion layer 14B.

As described above, according to the present embodiment, the first yoke portion layer 14B is formed before the pole portion layer 14A is formed.
To form a layer 14B _1, since forming the second layer 14B ₂ of the yoke portion layer 14B after forming the pole portion layer 14A,
At least the yoke portion layer 14B magnetically connected to the pole portion layer 14A on at least the surface on the gap layer 9 side, the rear end face, and both side surfaces in the width direction of the pole portion layer 14A can be easily formed. .

According to the present embodiment, prior to the step of forming layer 14Ae to be etched, first layer 14B _{1 of} insulating layer 9C and yoke partial layer 14B serving as a base of layer 14Ae to be etched is polished. Is flattened. This makes it possible to flatten the end of the pole portion layer 14A on the gap layer 9 side in the medium facing surface ABS. When the layer to be etched 14Ae is formed by a sputtering method, the layer to be etched 14Ae has good uniformity in film thickness at the time of film formation. The side edge can also be flattened. From these facts, the magnetic field generated from the magnetic pole partial layer 14A in the medium facing surface ABS can be made uniform in the direction intersecting the track. As a result, the distortion of the bit pattern shape in the recording medium can be suppressed, and The recording density can be improved.

In the present embodiment, when the upper surface of the layer to be etched 14Ae is flattened by polishing after the step of forming the layer to be etched 14Ae, the pole portion layer 14Ae is formed in the medium facing surface ABS. Can be completely flattened at the end opposite to the gap layer 9.
As a result, the pole portion layer 14 is formed on the medium facing surface ABS.
The magnetic field generated by A can be made uniform in the direction intersecting the track, and as a result, distortion of the bit pattern shape on the recording medium can be suppressed, and the linear recording density can be improved.

Further, in the present embodiment, the step of forming the pole portion layer 14A includes, after the step of forming the layer to be etched 14Ae, a step of forming a nonmagnetic layer 15e on the layer to be etched 14Ae; On the non-magnetic layer 15e,
Forming a mask 32 corresponding to the shape of the magnetic pole portion layer 14A. The step of etching the layer to be etched 14Ae uses the mask 32 to form the nonmagnetic layer 15e.
The layer to be etched 14Ae may be etched. In this case, the outer shape of the pole portion layer 14A can be determined while the upper surface of the layer to be etched 14Ae is protected by the nonmagnetic layer 15e, and the flatness of the end portion of the pole portion layer 14A on the side opposite to the gap layer 9 is improved. Can be maintained.

In the step of forming the mask 32, a resist frame 31 having a gap corresponding to the shape of the pole portion layer 14A is formed on the nonmagnetic layer 15e, and the mask is formed in the gap of the resist frame 31. 32 may be formed. In this case, it is possible to form the mask 32 which is more resistant to dry etching than when the mask 32 is formed of a resist. This makes it possible to determine the outer shape of the pole portion layer 14A by dry etching using the mask 32 even when the material forming the pole portion layer 14A has excellent resistance to dry etching.

[0138] Further, in this embodiment, the second layer 14B ₂ of the yoke portion layer 14B may be formed by electroplating. In this case, the second layer 14B ₂ can be easily formed, the second layer 14B _2, it is possible to form a good follow-up the shape to the shape of the underlying.

The second layer 14B of the yoke partial layer 14B
_The step of forming ₂ is performed in the medium facing surface A of the pole portion layer 14A.
A step of forming a resist cover 33 covering a part of the BS side, and a first layer 14 of the resist cover 33, the pole portion layer 14A (and the nonmagnetic layer 15), and the yoke portion layer 14B.
On the B _1, forming an electrode layer 34 for the electroplating method, using an electrode layer 34 may include a step of forming a second layer 14B ₂ by electroplating. In this case, it is possible to prevent the electrode layer from adhering and remaining on a part of the side surface of the pole portion layer 14A on the medium facing surface ABS side, and to increase the track width due to the adhesion and remaining of the electrode layer. Can be prevented. Further, when the electrode layer is removed by dry etching, the etched material adheres to a part of the side surface of the pole portion layer 14A on the side of the medium facing surface ABS, and remains to reduce the reliability of the thin film magnetic head. It can also be prevented from happening.

[Second Embodiment] Next, a thin film magnetic head according to a second embodiment of the present invention will be described with reference to FIGS. FIG. 23 is a sectional view showing the configuration of the thin-film magnetic head according to the present embodiment. FIG. 23 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. In FIG. 23, the arrow indicated by the symbol T indicates the direction of travel of the recording medium. FIG. 24 shows FIG.
FIG. 3 is a perspective view showing a main part of the thin-film magnetic head shown in FIG.

[0141] In this embodiment, as compared with the first embodiment, the first layer 14B ₁ of the thickness of the yoke portion layer 14B is small. The first layer 14B ₁ of the thickness at the position of the contact hole 9a is equal to or less than the total thickness of the insulating layer 9A and the insulating layer 9B. However, the first layer 14B ₁ of the thickness at the position of the contact hole 9a is preferably 1μm or more.

In this embodiment, the yoke partial layer 1
The first layer 14B ₁ of 4B from magnetic coupling of the first magnetic layer 8, 2 [mu] m in a direction away from the bearing surface ABS
It extends. In the present embodiment, the yoke partial layer 14
Preferably also extend on both sides of the first layer 14B ₁ further widthwise direction of B.

In the present embodiment, the yoke partial layer 1
The end opposite to the second layer of 14B ₂ bearing surface ABS and 4B, rather than the magnetic coupling portion of the first layer 14B ₁ and the first magnetic layer 8, located close to the air bearing surface ABS Are located in However, an end portion opposite to the air bearing surface ABS of the second layer 14B ₂ are bearing surface AB of the pole portion layer 14A
It is arranged at a position more distant from the medium facing surface ABS than the position of the end opposite to S, and is preferably arranged at a position more than 10 μm from the medium facing surface ABS.

Next, a method of manufacturing the thin-film magnetic head according to the present embodiment will be described with reference to FIGS.

In the method of manufacturing a thin-film magnetic head according to the present embodiment, as shown in FIG. 10, up to the step of forming the thin-film coil 10 and the insulating layer 9B on the insulating layer 9A,
This is the same as in the first embodiment.

In this embodiment, next, as shown in FIG. 25, the first magnetic layer 8 and the insulating layer 9B are formed by using a well-known photolithography technique and a film forming technique (for example, electroplating). On the first layer 14B of the yoke partial layer 14B
To form a _1. At this point, the shape of the first layer 14B ₁ has a thickness of, for example, 1 to 4 [mu] m, depth 2 to 10 [mu] m, a width of 5 to 20 [mu] m.

[0147] Next, as shown in FIG. 26, by sputtering, the insulating layer 9A, an insulating layer 9C so as to cover the first layer 14B ₁ of the insulating layer 9B and the yoke portion layer 14B. At this point, the thickness of the insulating layer 9C is
The thickness should be at least ₁ .

Next, as shown in FIG. 27, the first layer 14B of the yoke partial layer 14B is
₁ is exposed, the thickness of the insulating layer 9C is polished surface of the insulating layer 9C to equal a predetermined recording gap length, flattening the upper surface of the insulating layer 9C and the first layer 14B _1. At this point, the distance from the upper surface of the first magnetic layer 8 to the upper surface of the insulating layer 9C is, for example, 3 to 6 μm.

Next, as shown in FIG. 28, the insulating layer 9C
And on the first layer 14B _1, the etching layer made of a material forming the pole portion layer 14A of the second magnetic layer 14 1
4Ae is formed. The thickness of the layer to be etched 14Ae is
Preferably it is 0.1-0.8 μm, more preferably 0.3-0.8 μm. The method of forming the layer 14Ae to be etched may be an electroplating method or a sputtering method. When the surface roughness of the layer 14Ae to be etched is large (for example, when the arithmetic average roughness Ra is 12 Å or more), the surface of the layer 14Ae to be etched is preferably planarized by chemical mechanical polishing or the like. .

Next, a nonmagnetic layer 15e is formed on the layer to be etched 14Ae. The thickness of the nonmagnetic layer 15e is preferably set to 0.5 μm or less.

Next, although not shown, an electrode layer for electroplating is formed on the nonmagnetic layer 15e by sputtering. The thickness of this electrode layer is 0.1 μm or less, and the material is, for example, an iron-nickel alloy.

Next, as shown in FIG. 29, a resist frame 31 having a void corresponding to the shape of the magnetic pole portion layer 14A is formed on the electrode layer by photolithography using a photoresist. I do. Next, using this resist frame 31, a plating film serving as a mask 32 corresponding to the shape of the pole portion layer 14A is formed on the electrode layer by an electroplating method (frame plating method). The thickness of the plating film is 1 to 4 μm, and the material is, for example, an iron-nickel alloy. Next, the resist frame 31 is removed.

Next, as shown in FIG.
And the non-magnetic layer 15e and the layer to be etched 14Ae by a dry etching technique such as ion milling.
Is etched to form the non-magnetic layer 15 and the pole portion layer 14.
Form A. At this time, it is preferable that at least a portion of the mask 32 corresponding to the medium facing surface ABS is completely removed. Absent. In addition, the non-magnetic layer 15 and the pole portion layer 1
4A at the same time is being formed, the first layer 14B ₁ of the yoke portion layer 14B is exposed.

Note that instead of forming the mask 32 of the plating film as described above, a photoresist is formed on the non-magnetic layer 15e by using a photolithography technique.
A resist pattern corresponding to the shape of the magnetic pole partial layer 14A may be formed. Then, using this resist pattern as a mask, the nonmagnetic layer 15e and the layer to be etched 14A are formed.
e, by etching the nonmagnetic layer 15 and the pole portion layer 1
4A and the first layer 14 of the yoke partial layer 14B.
B ₁ is exposed, and thereafter, the resist pattern may be removed.

Next, as shown in FIG. 31, the medium facing surface A of the pole portion layer 14A and the non-magnetic layer 15 is formed by photolithography using a photoresist.
A resist cover 33 covering a part on the BS side is formed. The thickness of the resist cover 33 is preferably equal to or less than the thickness of a yoke partial layer forming frame described later.

Next, as shown in FIG. 32, the resist cover 33, the pole portion layer 14A (and the non-magnetic layer 15),
And on the first layer 14B of the yoke portion layer 14B _1, by sputtering, to form the electrode layer 34 for the electroplating process. The thickness of the electrode layer 34 is 0.1 μm or less,
The material may be, for example, an iron-nickel alloy, and a film of Ti (titanium) may be formed as an underlayer.

Next, as shown in FIG.
On the yoke partial layer 14B by photoresist.
Forming a resist frame 35 having a gap portion corresponding to the second layer 14B ₂ shapes.

[0158] Next, as shown in FIG. 34, using the resist frame 35, by electroplating (frame plating) to form a second layer 14B ₂ of the yoke portion layer 14B on the electrode layer 34 . Next, resist frame 3
5 is removed.

Next, as shown in FIG.
Of, removing portions other than the portion below the second layer 14B ₂ of the yoke portion layer 14B by dry etching.

Next, as shown in FIG. 36, the resist cover 33 is removed. Next, a protective layer 17 is formed so as to cover the second magnetic layer 14. Next, wirings, terminals, and the like are formed on the protective layer 17, the substrate is cut in units of sliders, the ABS of the medium facing surface is polished, and a flying rail is manufactured to complete the thin-film magnetic head.

In this embodiment, as in the thin film magnetic head shown in FIG. 6, the upper shield layer 6 and the non-magnetic layer 7 are omitted, and the first magnetic layer 8 is replaced with the upper shield layer 6.
May also be used. Other configurations, operations, and effects of the present embodiment are the same as those of the first embodiment.

[Third Embodiment] Next, a thin-film magnetic head according to a third embodiment of the present invention will be described with reference to FIGS. FIG. 37 is a sectional view showing the configuration of the thin-film magnetic head according to the present embodiment. FIG. 37 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. In FIG. 37, an arrow indicated by a symbol T indicates a traveling direction of the recording medium. FIG. 38 shows FIG.
FIG. 3 is a perspective view showing a main part of the thin-film magnetic head shown in FIG.

[0163] In this embodiment, the first layer upper surface of the 14B ₁ of the yoke portion layer 14B is planarized with the upper surface of the gap layer 9, which form the same plane. In this embodiment, the flattened on the first layer 14B ₁ and the gap layer 9, is formed pole portion layer 14A, which is non-magnetic layer 15 is formed further thereon. In this embodiment, a portion opposite to the bearing surface (ABS) of the pole portion layer 14A and the non-magnetic layer 15, than the magnetic coupling of the first magnetic layer 8 and the first layer 14B _1, ABS facing medium
Extending away from the

The second layer 14B of the yoke partial layer 14B
The _second bearing surface ABS part of the opposite side extends to a position near the end opposite to the bearing surface (ABS) of the pole portion layer 14A and the nonmagnetic layer 15. In this embodiment, the second layer 14B _2, to the pole portion layer 14A, not in contact at its rear end, is in contact only at both sides in the width direction. Note that the second layer 14B ₂ via the non-magnetic layer 15 is magnetically connected to the top surface of the pole portion layer 14A. Therefore, in the present embodiment, the yoke portion layer 14B is directly in contact with and magnetically connected to the pole portion layer 14A on the surface of the pole portion layer 14A on the gap layer 9 side and both side surfaces in the width direction. And non-magnetic layer 1
5 and is magnetically connected to the upper surface of the pole portion layer 14A.

The method of manufacturing the thin-film magnetic head according to the present embodiment is the same as in the first embodiment.

In this embodiment, as in the thin-film magnetic head shown in FIG. 6, the upper shield layer 6 and the non-magnetic layer 7 are omitted, and the first magnetic layer 8 is replaced with the upper shield layer 6.
May also be used. Other configurations, operations, and effects of the present embodiment are the same as those of the first embodiment.

[Fourth Embodiment] Next, a thin-film magnetic head according to a fourth embodiment of the present invention will be described with reference to FIGS. FIG. 39 is a sectional view showing the configuration of the thin-film magnetic head according to the present embodiment. FIG. 39 shows a cross section perpendicular to the medium facing surface and the surface of the substrate. In FIG. 39, the arrow indicated by the symbol T indicates the traveling direction of the recording medium. FIG. 40 shows FIG.
FIG. 3 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. FIG. 41 is a perspective view showing a main part of a modification of the thin-film magnetic head shown in FIG. In FIGS. 40 and 41, the gap layer 9 and the thin-film coil 10 are omitted.

The thin-film magnetic head according to the present embodiment is similar to the thin-film magnetic head according to the second embodiment except that the second layer 1
It has a configuration omitting the 4B _2. That is, the yoke portion layer 14B in this embodiment is formed into a shape similar to that of the first layer 14B ₁ of the yoke portion layer 14B of the second embodiment. Therefore, in the present embodiment, the yoke portion layer 14B is magnetically connected to the pole portion layer 14A on the surface of the pole portion layer 14A on the gap layer 9 side, and the yoke portion layer 14B and the pole portion layer 14A At least a portion of the connection portion between the first magnetic layer 8 and the yoke portion layer 14B is located closer to the medium facing surface ABS than the connection portion between the first magnetic layer 8 and the yoke portion layer 14B.

[0169] The method of manufacturing a thin film magnetic head according to the present embodiment, in the second embodiment, the omits the step of forming the second layer 14B _2.

In the present embodiment, the pole portion layer 14A of the yoke portion layer 14B on the side opposite to the first magnetic layer 8 is formed.
The portion not in contact with is located closer to the first magnetic layer 8 than the surface of the pole portion layer 14A on the gap layer 9 side. Also,
At least a part of the surface of the yoke partial layer 14B opposite to the first magnetic layer 8 gradually approaches the first magnetic layer 8 as the distance from the magnetic pole partial layer 14A increases. The shape of the surface of the yoke partial layer 14B opposite to the first magnetic layer 8 is determined by etching when forming the pole partial layer 14A.

FIG. 40 shows that the yoke partial layer 14B is
Shows a case in which the same shape as the first layer 14B ₁ of the yoke portion layer 14B of the second embodiment. On the other hand, FIG. 41 shows that the thickness of the insulating layer 9B is larger than that of the second embodiment, and the medium facing surface A of the yoke partial layer 14B.
40 shows a case where the thickness at a part on the BS side is made thinner than the case of FIG.

In the present embodiment, the yoke partial layer 14B is formed as described above,
B without increasing the volume of B excessively.
4B makes it possible to magnetically connect the pole portion layer 14A and the first magnetic layer 8 over a short distance.

In the present embodiment, the yoke partial layer 1
Since 4B is composed of one layer, the structure and manufacturing of the thin-film magnetic head are simplified as compared with the other embodiments.

In this embodiment, as in the thin-film magnetic head shown in FIG. 6, the upper shield layer 6 and the non-magnetic layer 7 are omitted, and the first magnetic layer 8 is replaced with the upper shield layer 6.
May also be used. Other configurations, operations, and effects of the present embodiment are the same as those of the second embodiment.

The present invention is not limited to the above embodiments, and various changes can be made. For example, in FIG.
Medium facing surface AB of _second layer 14B2 of yoke partial layer 14B
End of the S side is disposed near the medium facing surface than the end portion of the first layer 14B ₁ of the bearing surface ABS side ABS, but the positional relationship of the both end portions may be reversed to this, Both ends may be arranged at the same distance from the medium facing surface ABS.

After the step of forming the layer to be etched, a nonmagnetic layer is formed on the layer to be etched, and a mask corresponding to the shape of the pole portion layer is formed on the nonmagnetic layer. The method of using this mask to etch the nonmagnetic layer and the layer to be etched to determine the outer shape of the pole portion layer is not limited to the thin-film magnetic head of the present invention, and the end of the pole portion layer on the side opposite to the gap layer. As long as it is preferable to maintain the flatness of the portion, the present invention is also effective for thin-film magnetic heads of other shapes.

[0177]

As described above, claims 1 and 2
In the thin-film magnetic head according to any one of the first to third aspects, the second magnetic layer has a pole portion layer and a yoke portion layer, and at least a part of the thin-film coil on the second magnetic layer side is a medium facing surface. The yoke partial layer is disposed at a position closer to the first magnetic layer than a position of an end portion of the gap layer closer to the second magnetic layer, and the yoke partial layer has at least a surface of the magnetic pole partial layer on the gap layer side and both lateral surfaces in the width direction Is magnetically connected to the pole portion layer. Therefore, in the present invention, the yoke partial layer can form a short magnetic path between the magnetic coupling portion to the first magnetic layer and the magnetic pole partial layer, and can place the yoke partial layer near the thin-film coil. It becomes possible to arrange. Also,
According to the present invention, the saturation magnetic flux density of the pole portion layer is equal to or higher than the saturation magnetic flux density of the yoke portion layer, and the yoke portion layer is formed on at least the gap layer side surface and both side surfaces in the width direction of the pole portion layer. , Magnetic saturation can be prevented in the middle of the second magnetic layer. From the above, according to the present invention, the electromagnetic conversion efficiency is increased, the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium is increased, and the magnetic path length is shortened to improve the high frequency characteristics. The effect that it becomes possible to do it is produced.

Further, according to the thin film magnetic head of the present invention, the first magnetic layer is disposed on the rear side in the traveling direction of the recording medium, and the second magnetic layer is disposed on the front side in the traveling direction of the recording medium. Therefore, it is possible to form a higher-density magnetization pattern in the recording medium, and as a result, it is possible to increase the linear recording density.

According to the thin-film magnetic head of the third or fourth aspect, the yoke partial layer is in contact with the first magnetic layer and the surface of the magnetic pole partial layer on the gap layer side, and is magnetically opposed thereto. Since the first layer connected to the first layer and the second layer in contact with the first layer and both side surfaces in the width direction of the pole portion layer and magnetically connected thereto are included, the yoke portion layer There is an effect that the formation is facilitated.

According to the thin film magnetic head of the fourth aspect, the second layer of the yoke portion layer is further magnetically connected to the surface of the pole portion layer opposite to the gap layer. The magnetic flux can be guided from the second layer of the yoke partial layer to the magnetic pole partial layer also from the surface of the magnetic pole partial layer opposite to the gap layer, and the effect of improving the electromagnetic conversion efficiency is achieved.

According to the thin-film magnetic head of any one of claims 5 to 7, the yoke partial layer is further provided on the end surface of the magnetic pole partial layer opposite to the medium facing surface with respect to the magnetic pole partial layer. Because of the magnetic connection, there is an effect that the saturation of the magnetic flux in the middle of the second magnetic layer can be further prevented.

According to the thin-film magnetic head of the sixth or seventh aspect, the yoke partial layer is in contact with the first magnetic layer and the surface of the magnetic pole partial layer on the gap layer side, and is magnetically opposed thereto. A first layer connected to the first layer, an end face of the first layer and the pole portion layer opposite to the medium facing surface, and both side faces in the width direction;
Since the second layer is magnetically connected to the second layer, the yoke partial layer can be easily formed.

According to the thin-film magnetic head of the seventh aspect, the second layer of the yoke partial layer is further magnetically connected to the surface of the magnetic pole partial layer opposite to the gap layer. The magnetic flux can be guided from the second layer of the yoke partial layer to the magnetic pole partial layer also from the surface of the magnetic pole partial layer opposite to the gap layer, and the effect of improving the electromagnetic conversion efficiency is achieved.

According to the thin-film magnetic head of the present invention, since the end of the yoke portion layer on the medium facing surface side is located at a position away from the medium facing surface, the yoke portion layer has a medium facing surface. There is an effect that it is possible to prevent writing of information on the recording medium due to a magnetic field generated from the end on the surface side.

According to the thin-film magnetic head of the ninth aspect, the width of the portion of the pole portion layer in contact with the yoke portion layer is larger than the width of the pole portion layer on the medium facing surface. The magnetic flux can be efficiently guided from the yoke part layer to the magnetic pole part layer by preventing the saturation of the magnetic flux at the part in contact with the layer, and by reducing the exposed area of the magnetic pole part layer in the medium facing surface, the recording medium This has the effect of increasing the magnetic field applied to the.

According to the thin-film magnetic head of the tenth aspect, since the length from the medium facing surface to the end surface of the pole portion layer opposite to the medium facing surface is set to 2 μm or more, the thickness of the pole portion layer is reduced. Without increasing the width of the magnetic pole portion layer, saturation of the magnetic flux at the portion of the magnetic pole portion layer in contact with the yoke portion layer can be prevented, and the magnetic flux can be efficiently guided from the yoke portion layer to the magnetic pole portion layer.

According to the thin-film magnetic head of the present invention, since the non-magnetic layer is provided in contact with the surface of the pole portion layer opposite to the gap layer, the pole portion layer can be dried. When forming by etching or when forming the yoke partial layer by electroplating, it is possible to prevent the surface of the magnetic pole partial layer opposite to the gap layer from being damaged and to make the surface flat. This has the effect.

According to the thin film magnetic head of the twelfth aspect, since the nonmagnetic layer is exposed on the medium facing surface, the end of the magnetic pole partial layer on the side opposite to the gap layer on the medium facing surface. The magnetic field generated from the magnetic pole partial layer in the medium facing surface can be made uniform in the direction intersecting the tracks, and as a result, the distortion of the bit pattern shape on the recording medium can be suppressed, and the linear recording density can be reduced. There is an effect that it can be improved.

In the thin film magnetic head according to the thirteenth aspect, a part of the yoke partial layer is adjacent to the surface of the magnetic pole partial layer opposite to the gap layer via the nonmagnetic layer. Is magnetically connected to the pole portion layer via the magnetic layer, so that the magnetic flux can be guided from the yoke portion layer to the pole portion layer via the non-magnetic layer even from the surface of the pole portion layer opposite to the gap layer. This has the effect.

According to the thin-film magnetic head of the present invention, the nonmagnetic layer is more resistant to dry etching than the material forming the pole portion layer and the material forming the portion of the gap layer in contact with the pole portion layer. Since it is made of a material having a low etching rate, it is possible to prevent the surface of the pole part layer opposite to the gap layer from being damaged when the pole part layer is formed by dry etching.

According to the thin-film magnetic head of the present invention, at least a part of the thin-film coil is more than the first magnetic layer and the second magnetic layer at a position between the first and second magnetic poles.
The first magnetic layer has an effect that the magnetic field generated from the thin-film coil can be efficiently absorbed by the first magnetic layer.

According to the thin film magnetic head of the present invention, the gap layer is made of a material having fluidity at the time of formation, and is filled at least between at least a part of the windings of the thin film coil. A first portion not exposed to the medium facing surface, and a second portion made of a material having better corrosion resistance, rigidity, and insulation than the first portion, and exposed to the medium facing surface. And the gap layer can be filled with a non-magnetic material without any gap, and the reliability of the gap layer can be improved.

Further, according to the thin-film magnetic head according to any one of the nineteenth to twenty-first aspects, since the thin-film magnetic head is provided with the magnetoresistive effect element as the reproducing element, it is possible to perform the reproduction in comparison with the case of performing the reproduction using the inductive electromagnetic transducer. Thus, there is an effect that the reproduction performance can be improved.

According to the thin-film magnetic head of the present invention, since the thin-film magnetic head is used for the perpendicular magnetic recording system, it is hardly affected by the thermal fluctuation of the recording medium, and the linear recording density is reduced. The effect that it can raise is produced.

In the method for manufacturing a thin-film magnetic head according to any one of claims 23 to 31, the second magnetic layer has a pole portion layer and a yoke portion layer, and the second magnetic layer has at least a portion of the second portion. The surface on the side of the magnetic layer is disposed at a position closer to the first magnetic layer than a position of an end of the gap layer on the medium facing surface on the side of the second magnetic layer, and the yoke partial layer has at least a gap of the pole part layer. On the layer side surface and both side surfaces in the width direction, it is magnetically connected to the pole part layer. Therefore, in the present invention, the yoke partial layer can form a short magnetic path between the magnetic coupling portion to the first magnetic layer and the magnetic pole partial layer, and can place the yoke partial layer near the thin-film coil. It becomes possible to arrange. In the present invention,
The saturation magnetic flux density of the pole portion layer is equal to or higher than the saturation magnetic flux density of the yoke portion layer, and the yoke portion layer has a magnetic flux with respect to the pole portion layer at least on the gap layer side surface and both side surfaces in the width direction. Connected to
The saturation of the magnetic flux in the middle of the second magnetic layer can be prevented. From the above, according to the present invention, the electromagnetic conversion efficiency is increased, the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium is increased, and the magnetic path length is shortened to improve the high frequency characteristics. The effect that it becomes possible to do it is produced.

According to the method of manufacturing a thin-film magnetic head of the present invention, the yoke partial layer further has a magnetic property with respect to the magnetic pole partial layer at an end face of the magnetic pole partial layer opposite to the medium facing surface. Since the connection is made, there is an effect that the saturation of the magnetic flux in the middle of the second magnetic layer can be further prevented.

According to the method of manufacturing a thin-film magnetic head according to any one of claims 25 to 31, the first layer of the yoke partial layer is formed before the magnetic pole partial layer is formed, and the magnetic pole partial layer is formed. Then, the yoke partial layer magnetically connected to the pole partial layer at least on the gap layer side surface and the widthwise side surfaces of the pole partial layer can be easily formed. This has the effect that it can be formed. Further, in the present invention, an etching target layer made of a material constituting the pole portion layer is formed on the flattened first layer and the gap layer, and the etching target layer is selectively etched by dry etching. The outer shape of the pole part layer is determined. Therefore, according to the present invention, it is possible to flatten the end of the pole portion layer on the gap layer side in the medium facing surface. In addition, when the layer to be etched is formed by the sputtering method, the end of the pole portion layer on the side opposite to the gap layer can be flattened in the medium facing surface. From these facts, according to the present invention, it is possible to make the magnetic field generated by the magnetic pole partial layer in the medium facing surface uniform in the direction intersecting the tracks, and as a result, the distortion of the bit pattern shape in the recording medium is reduced. This has the effect that the linear recording density can be improved while suppressing the linear recording density.

According to the thin film magnetic head manufacturing method of the twenty-sixth aspect, the second layer of the yoke partial layer further contacts the end face of the magnetic pole partial layer opposite to the medium facing surface. Therefore, the magnetic flux can be further prevented from being saturated in the middle of the second magnetic layer.

According to the method of manufacturing a thin-film magnetic head of the twenty-seventh aspect, the upper surface of the layer to be etched is flattened by polishing after the step of forming the layer to be etched. In the surface, the end of the pole part layer opposite to the gap layer can be completely flattened, so that the magnetic field generated by the pole part layer in the medium facing surface is uniform in the direction crossing the track. As a result, it is possible to suppress the distortion of the bit pattern shape on the recording medium and to improve the linear recording density.

According to a method of manufacturing a thin-film magnetic head according to claim 28 or 29, after the step of forming the layer to be etched, a non-magnetic layer is formed on the layer to be etched. A mask corresponding to the shape of the pole portion layer is formed on the non-magnetic layer and the layer to be etched using the mask to determine the outer shape of the pole portion layer. The outer shape of the pole portion layer can be determined in a state where the upper surface of the pole portion is protected by the nonmagnetic layer, and the flatness of the end portion of the pole portion layer opposite to the gap layer can be maintained.

According to the method of manufacturing a thin-film magnetic head of claim 29, the step of forming the mask includes forming a resist frame having a void corresponding to the shape of the pole portion layer on the non-magnetic layer. However, since a mask is formed in the gap of the resist frame, it is possible to form a mask having excellent resistance to dry etching, and as a result, the material constituting the magnetic pole partial layer is resistant to dry etching. In this case, the outer shape of the pole portion layer can be determined by dry etching using a mask.

According to the method of manufacturing a thin film magnetic head of the present invention, since the second layer of the yoke partial layer is formed by electroplating, the second layer can be formed easily. The second layer has an effect that it can be formed in a shape that closely follows the shape of the base.

According to the method of manufacturing a thin-film magnetic head of the present invention, the step of forming the second layer of the yoke partial layer includes forming a resist cover covering a part of the magnetic pole partial layer on the medium facing surface side. Forming an electrode layer for electroplating on the first layer of the resist cover, the pole portion layer and the yoke portion layer, and using the electrode layer
Forming the second layer of the yoke partial layer by the electroplating method, so that the electrode layer and the deposits during etching remain on a part of the side surface of the magnetic pole partial layer on the medium facing surface side. Thus, it is possible to prevent an increase in the track width due to the remaining electrode layer and a decrease in the reliability of the thin-film magnetic head due to the remaining adhering substance during etching.

In the thin-film magnetic head according to any one of claims 32 to 49, the second magnetic layer has a pole portion layer and a yoke portion layer, and the second magnetic layer has at least a portion of the second magnetic layer. The surface on the layer side is disposed at a position closer to the first magnetic layer than a position of an end of the gap layer on the medium facing surface on the side of the second magnetic layer, and the yoke partial layer is at least a gap layer of the magnetic pole partial layer. The yoke partial layer and the magnetic pole partial layer are magnetically connected to the magnetic pole partial layer on the side surface, and the connection between the yoke partial layer and the magnetic pole partial layer is closer to the medium facing surface than the connection between the first magnetic layer and the yoke partial layer. It is located at the position. Therefore,
In the present invention, the yoke partial layer can form a short magnetic path between the magnetic connection to the first magnetic layer and the pole partial layer, and arranges the yoke partial layer near the thin-film coil. It becomes possible. Further, according to the present invention, the saturation magnetic flux density of the pole portion layer is equal to or higher than the saturation magnetic flux density of the yoke portion layer, and the yoke portion layer has at least a surface on the gap layer side of the pole portion layer with respect to the pole portion layer. The connection of the magnetic layers can prevent saturation of magnetic flux in the middle of the second magnetic layer. From the above, according to the present invention, the electromagnetic conversion efficiency is increased, the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium is increased, and the magnetic path length is shortened to improve the high frequency characteristics. The effect that it becomes possible to do it is produced.

According to the thin film magnetic head of the present invention, the portion of the yoke portion layer opposite to the first magnetic layer that is not in contact with the pole portion layer is the gap layer of the pole portion layer. The magnetic pole portion layer and the first magnetic layer are magnetically connected to each other at a short distance without excessively increasing the volume of the yoke portion layer because the yoke portion layer is disposed closer to the first magnetic layer than the side surface. This has the effect that it becomes possible.

According to the thin-film magnetic head of the thirty-fourth aspect, at least a part of the surface of the yoke partial layer opposite to the first magnetic layer gradually becomes closer to the first magnetic layer as the distance from the magnetic pole partial layer increases. Since it is close to the layer, the magnetic pole part layer and the first magnetic layer can be magnetically connected at a short distance without excessively increasing the volume of the yoke part layer.

According to the thin-film magnetic head of the thirty-fifth aspect, the first magnetic layer is disposed on the rear side in the traveling direction of the recording medium, and the second magnetic layer is disposed on the front side in the traveling direction of the recording medium. Therefore, it is possible to form a higher-density magnetization pattern in the recording medium, and as a result, it is possible to increase the linear recording density.

According to the thin-film magnetic head of the present invention, since the end of the yoke portion layer on the medium facing surface side is located at a position away from the medium facing surface, the yoke portion layer has a medium facing surface. There is an effect that it is possible to prevent writing of information on the recording medium due to a magnetic field generated from the end on the surface side.

According to the thin-film magnetic head of the present invention, the width of the portion of the pole portion layer in contact with the yoke portion layer is larger than the width of the pole portion layer on the medium facing surface.
The magnetic flux can be efficiently guided from the yoke partial layer to the magnetic pole partial layer by preventing the saturation of the magnetic flux at the portion of the magnetic pole partial layer in contact with the yoke partial layer, and the exposed area of the magnetic pole partial layer on the medium facing surface is reduced. By doing so, there is an effect that the magnetic field applied to the recording medium can be increased.

According to the thin-film magnetic head of the present invention, since the length from the medium facing surface to the end surface of the pole portion layer opposite to the medium facing surface is set to 2 μm or more, the thickness of the pole portion layer is reduced. Without increasing the width of the magnetic pole portion layer, saturation of the magnetic flux at the portion of the magnetic pole portion layer in contact with the yoke portion layer can be prevented, and the magnetic flux can be efficiently guided from the yoke portion layer to the magnetic pole portion layer.

According to the thin-film magnetic head of any one of claims 39 to 41, since the non-magnetic layer is provided in contact with the surface of the pole portion layer opposite to the gap layer, the pole portion layer can be dried. When forming by etching or when forming the yoke partial layer by electroplating, it is possible to prevent the surface of the magnetic pole partial layer opposite to the gap layer from being damaged and to make the surface flat. This has the effect.

According to the thin-film magnetic head of the present invention, since the nonmagnetic layer is exposed on the medium facing surface, the end of the magnetic pole partial layer on the side opposite to the gap layer on the medium facing surface. The magnetic field generated by the magnetic pole partial layer in the medium facing surface can be made uniform in the direction intersecting the tracks, and as a result, the bit distortion in the recording medium can be suppressed and the linear recording density can be improved. It has the effect of being able to do so.

According to the thin-film magnetic head of claim 41, the non-magnetic layer is more resistant to dry etching than the material forming the pole portion layer and the material forming the portion of the gap layer in contact with the pole portion layer. Since it is made of a material having a low etching rate, it is possible to prevent the surface of the pole part layer opposite to the gap layer from being damaged when the pole part layer is formed by dry etching.

According to the thin-film magnetic head of the present invention, at least a part of the thin-film coil is more than the first magnetic layer and the second magnetic layer at a position between the first and second magnetic layers.
The first magnetic layer has an effect that the magnetic field generated from the thin-film coil can be efficiently absorbed by the first magnetic layer.

According to the thin film magnetic head of any one of claims 43 to 45, the gap layer is made of a material having fluidity at the time of formation, and is filled at least between at least a part of the windings of the thin film coil. A first portion not exposed to the medium facing surface, and a second portion made of a material having better corrosion resistance, rigidity, and insulation than the first portion, and exposed to the medium facing surface. And the gap layer can be filled with a non-magnetic material without any gap, and the reliability of the gap layer can be improved.

Further, according to the thin-film magnetic head according to any one of claims 46 to 48, since the thin-film magnetic head is provided with the magnetoresistive effect element as the reproducing element, it is possible to perform the reproducing operation using the inductive electromagnetic transducer. Thus, there is an effect that the reproduction performance can be improved.

Further, according to the thin-film magnetic head according to claim 49, since this thin-film magnetic head is used for the perpendicular magnetic recording system, it is hardly affected by the thermal fluctuation of the recording medium, and the linear recording density is reduced. The effect that it can raise is produced.

In the method of manufacturing a thin-film magnetic head according to any one of claims 50 to 54, the second magnetic layer has a pole portion layer and a yoke portion layer, and the second magnetic layer has at least a portion of the second portion. The surface on the side of the magnetic layer is disposed at a position closer to the first magnetic layer than a position of an end of the gap layer on the medium facing surface on the side of the second magnetic layer, and the yoke partial layer has at least a gap of the pole part layer. The magnetic layer is magnetically connected to the pole part layer on the layer-side surface, and the connection part between the yoke part layer and the pole part layer is closer to the medium facing surface than the connection part between the first magnetic layer and the yoke part layer. Placed in the position. Therefore, in the present invention, the yoke partial layer can form a short magnetic path between the magnetic coupling portion to the first magnetic layer and the magnetic pole partial layer, and can place the yoke partial layer near the thin-film coil. It becomes possible to arrange. Further, according to the present invention, the saturation magnetic flux density of the pole portion layer is equal to or higher than the saturation magnetic flux density of the yoke portion layer, and the yoke portion layer has at least a surface on the gap layer side of the pole portion layer with respect to the pole portion layer. Since the connection is established, the saturation of the magnetic flux in the middle of the second magnetic layer can be prevented. From these, according to the present invention, the electromagnetic conversion efficiency is increased, the magnetic field generated from the magnetic pole portion in the direction perpendicular to the surface of the recording medium is increased, and the magnetic path length is shortened to improve the high frequency characteristics. The effect that it becomes possible to do it is produced.

According to the method of manufacturing a thin-film magnetic head of any one of claims 51 to 54, the yoke partial layer is formed before the magnetic pole partial layer is formed. In this case, it is possible to easily form a yoke partial layer magnetically connected to the magnetic pole partial layer on the surface. Further, in the present invention, a layer to be etched made of a material constituting the pole part layer is formed on the flattened yoke partial layer and the gap layer, and the layer to be etched is selectively etched by dry etching. The outer shape of the pole part layer is determined. Therefore, according to the present invention, it is possible to flatten the end of the pole portion layer on the gap layer side in the medium facing surface. In addition, when the layer to be etched is formed by the sputtering method,
The end of the pole portion layer opposite to the gap layer can also be flattened. From these facts, according to the present invention, the magnetic field generated from the pole portion layer in the medium facing surface can be made uniform in the direction intersecting the track,
As a result, there is an effect that the distortion of the bit in the recording medium can be suppressed and the linear recording density can be improved.

According to the method of manufacturing a thin-film magnetic head of the present invention, the upper surface of the layer to be etched is flattened by polishing after the step of forming the layer to be etched. In the surface, the end of the pole part layer opposite to the gap layer can be completely flattened, so that the magnetic field generated by the pole part layer in the medium facing surface is uniform in the direction crossing the track. As a result, there is an effect that the distortion of the bit in the recording medium can be suppressed and the linear recording density can be improved.

According to the method of manufacturing a thin film magnetic head of the present invention, a nonmagnetic layer is formed on the layer to be etched after the step of forming the layer to be etched. A mask corresponding to the shape of the pole portion layer is formed on the non-magnetic layer and the layer to be etched using the mask to determine the outer shape of the pole portion layer. The outer shape of the pole portion layer can be determined in a state where the upper surface of the pole portion is protected by the nonmagnetic layer, and the flatness of the end portion of the pole portion layer opposite to the gap layer can be maintained.

According to the method of manufacturing a thin-film magnetic head of the present invention, the step of forming a mask includes forming a resist frame having a void corresponding to the shape of the pole portion layer on the non-magnetic layer. However, since a mask is formed in the gap of the resist frame, it is possible to form a mask having excellent resistance to dry etching, and as a result, the material constituting the magnetic pole partial layer is resistant to dry etching. In this case, the outer shape of the pole portion layer can be determined by dry etching using a mask.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of a thin-film magnetic head according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a main part of the thin-film magnetic head shown in FIG.

FIG. 3 is an enlarged perspective view showing the vicinity of a magnetic pole portion in FIG. 2;

FIG. 4 is a front view showing a part of a medium facing surface of the thin-film magnetic head shown in FIG. 1;

FIG. 5 is an enlarged front view showing a magnetic pole partial layer and a non-magnetic layer in FIG. 4;

FIG. 6 is a cross-sectional view illustrating a configuration of a thin-film magnetic head according to a modification of the first embodiment of the present invention.

FIG. 7 is a sectional view showing one step in a method of manufacturing the thin-film magnetic head according to the first embodiment of the present invention.

FIG. 8 is a sectional view showing a step following the step shown in FIG. 7;

FIG. 9 is a sectional view showing a step following FIG. 8;

FIG. 10 is a sectional view showing a step following FIG. 9;

FIG. 11 is a sectional view showing a step following FIG. 10;

FIG. 12 is a sectional view showing a step following FIG. 11;

FIG. 13 is a sectional view showing a step following FIG. 12;

FIG. 14 is a sectional view showing a step following FIG. 13;

FIG. 15 is a sectional view showing a step following FIG. 14;

FIG. 16 is a sectional view showing a step following FIG. 15;

FIG. 17 is a sectional view showing a step following FIG. 16;

FIG. 18 is a sectional view showing a step following FIG. 17;

FIG. 19 is a sectional view showing a step following FIG. 18;

FIG. 20 is a sectional view showing a step following FIG. 19;

FIG. 21 is a sectional view showing a step following FIG. 20;

FIG. 22 is a sectional view showing a step following FIG. 21;

FIG. 23 is a sectional view showing a configuration of a thin-film magnetic head according to a second embodiment of the present invention.

FIG. 24 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. 23;

FIG. 25 is a cross-sectional view showing one step in a method of manufacturing the thin-film magnetic head according to the second embodiment of the present invention.

FIG. 26 is a sectional view showing a step following FIG. 25;

FIG. 27 is a sectional view showing a step following FIG. 26;

FIG. 28 is a sectional view showing a step following FIG. 27;

FIG. 29 is a sectional view showing a step following FIG. 28;

FIG. 30 is a sectional view showing a step following FIG. 29;

FIG. 31 is a sectional view showing a step following FIG. 30;

FIG. 32 is a sectional view showing a step following FIG. 31;

FIG. 33 is a sectional view showing a step following FIG. 32;

FIG. 34 is a sectional view showing a step following FIG. 33;

FIG. 35 is a sectional view showing a step following FIG. 34;

FIG. 36 is a sectional view showing a step following FIG. 35;

FIG. 37 is a sectional view showing a configuration of a thin-film magnetic head according to a third embodiment of the present invention.

FIG. 38 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. 37;

FIG. 39 is a sectional view showing a configuration of a thin-film magnetic head according to a fourth embodiment of the present invention.

40 is a perspective view showing a main part of the thin-film magnetic head shown in FIG. 39.

FIG. 41 is a perspective view showing a main part of a modification of the thin-film magnetic head shown in FIG. 39;

[Explanation of symbols]

3 lower shield layer, 4 insulating layer, 5 MR element, 6
Upper shield layer, 7: non-magnetic layer, 8: first magnetic layer, 9
... Gap layer, 9A, 9B, 9C insulating layer, 10 thin film coil, 14 second magnetic layer, 14A magnetic pole partial layer, 1
4B ... yoke portion layer, 14B ₁ ... first layer, 14B ₂ ... second
Layer, 15: Non-magnetic layer.

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (Reference) H01L 43/08 H01L 43/08 Z (72) Inventor Tetsuya Roppongi 1-13-1 Nihonbashi, Chuo-ku, Tokyo TDK Corporation Company F term (reference) 5D033 AA05 BA07 BA12 BA22 BA34 BA41 BB03 BB43 CA00 CA01 DA04 DA07 DA31 5D034 AA05 BA02 BA18 BB01 DA07

Claims (54)

[Claims] 1. A medium facing surface facing a recording medium, and magnetic pole portions arranged so as to face each other at predetermined intervals before and after in the direction of travel of the recording medium, and apart from the medium facing surface. A first and a second magnetic layer magnetically coupled to each other at a position; a gap layer made of a non-magnetic material and provided between the first and the second magnetic layers; A portion between the first and second magnetic layers,
A thin-film coil provided in a state insulated from the first and second magnetic layers, wherein at least a part of the thin-film coil on the side of the second magnetic layer is A position closer to the first magnetic layer than a position of an end of the gap layer closer to the second magnetic layer in the medium facing surface; the second magnetic layer includes a magnetic pole portion; And a yoke portion layer for magnetically connecting the pole portion and the first magnetic layer. The saturation magnetic flux density of the pole portion layer is determined by the yoke. The yoke partial layer is not less than the saturation magnetic flux density of the partial layer, and the yoke partial layer is magnetically connected to the magnetic pole partial layer at least on the surface of the magnetic pole partial layer on the gap layer side and both side surfaces in the width direction. A thin-film magnetic head characterized by the above-mentioned. 2. The recording medium according to claim 1, wherein the first magnetic layer is disposed on the rear side in the traveling direction of the recording medium, and the second magnetic layer is disposed on the front side in the traveling direction of the recording medium. The thin-film magnetic head as described in the above. 3. The first yoke part layer is in contact with the first magnetic layer and a surface of the pole part layer on the gap layer side, and is magnetically connected to the first layer and the first layer. 3. The thin-film magnetic head according to claim 1, further comprising a second layer in contact with the layer and both side surfaces in the width direction of the pole portion layer and magnetically connected thereto. 4. The thin film according to claim 3, wherein the second layer of the yoke partial layer is further magnetically connected to a surface of the magnetic pole partial layer opposite to the gap layer. Magnetic head. 5. The magnetic recording medium according to claim 1, wherein the yoke partial layer is further magnetically connected to the magnetic pole partial layer at an end face of the magnetic pole partial layer opposite to the medium facing surface. Or the thin-film magnetic head according to 2. 6. The first yoke part layer is in contact with the first magnetic layer and a surface of the pole part layer on the gap layer side, and is magnetically connected to the first layer and the first layer. 6. A magnetic head according to claim 5, further comprising a second layer in contact with the layer and an end face of the pole portion layer opposite to the medium facing surface and both side faces in the width direction, and magnetically connected thereto. The thin-film magnetic head as described in the above. 7. The thin film according to claim 6, wherein the second layer of the yoke partial layer is further magnetically connected to a surface of the pole partial layer opposite to the gap layer. Magnetic head. 8. The thin-film magnetic head according to claim 1, wherein an end of the yoke portion layer on the medium facing surface side is arranged at a position away from the medium facing surface. . 9. The magnetic recording medium according to claim 1, wherein a width of a portion of the pole portion layer in contact with the yoke portion layer is larger than a width of the pole portion layer in a medium facing surface. Thin film magnetic head. 10. The thin film magnetic device according to claim 1, wherein a length from a medium facing surface to an end surface of the magnetic pole partial layer opposite to the medium facing surface is 2 μm or more. head. 11. The thin-film magnetic head according to claim 1, further comprising a non-magnetic layer in contact with a surface of the pole portion layer opposite to the gap layer. 12. The thin-film magnetic head according to claim 11, wherein said non-magnetic layer is exposed at a medium facing surface. 13. A part of the yoke part layer is adjacent to a surface of the pole part layer opposite to the gap layer via the non-magnetic layer, and is connected to the pole part layer via the non-magnetic layer. 13. The thin-film magnetic head according to claim 11, wherein the thin-film magnetic head is magnetically connected. 14. The non-magnetic layer is made of a material having a lower etching rate for dry etching than a material forming the pole portion layer and a material forming a portion of the gap layer in contact with the pole portion layer. 14. The thin-film magnetic head according to claim 11, wherein: 15. At least a part of the thin-film coil includes:
15. The semiconductor device according to claim 1, wherein the first magnetic layer is arranged at a position closer to the first magnetic layer than at an intermediate position between the magnetic pole portion layers of the first magnetic layer and the second magnetic layer. The thin-film magnetic head as described in the above. 16. The gap layer is formed of a material having fluidity at the time of formation, is filled at least between at least a part of windings of the thin film coil, and is not exposed to a medium facing surface; The thin-film magnetic head according to any one of claims 1 to 15, wherein the thin-film magnetic head is made of a material having better corrosion resistance, rigidity, and insulation than the first part, and has a second part exposed to the medium facing surface. . 17. The thin-film magnetic head according to claim 16, wherein the first portion is made of an organic non-conductive non-magnetic material or a spin-on-glass film. 18. The thin-film magnetic head according to claim 16, wherein the second portion is made of an inorganic non-conductive non-magnetic material. 19. The thin-film magnetic head according to claim 1, further comprising a magneto-resistance effect element as a reproducing element. 20. Further, a part of the medium facing surface side is disposed so as to face the magneto-resistance effect element.
20. The apparatus according to claim 19, further comprising first and second shield layers for shielding the magnetoresistive element.
The thin-film magnetic head according to the above. 21. The thin-film magnetic head according to claim 20, wherein said first magnetic layer also serves as said second shield layer. 22. The thin-film magnetic head according to claim 1, wherein the thin-film magnetic head is used for a perpendicular magnetic recording system. 23. A medium facing surface facing a recording medium, and magnetic pole portions arranged to face each other at a predetermined interval before and after in the traveling direction of the recording medium, and apart from the medium facing surface. A first and second magnetic layer magnetically coupled to each other at a location; and a non-magnetic material;
A gap layer provided between the first magnetic layer and the second magnetic layer, at least a portion between the first and second magnetic layers, and a gap layer between the first and second magnetic layers; And a thin-film coil provided in an insulated state with respect to the second coil.
The magnetic layer includes a magnetic pole portion, a magnetic pole portion layer whose width in the medium facing surface defines a track width, and a yoke partial layer for magnetically connecting the magnetic pole portion and the first magnetic layer. A method of manufacturing a thin-film magnetic head wherein the saturation magnetic flux density of the magnetic pole partial layer is equal to or higher than the saturation magnetic flux density of the yoke partial layer, wherein at least one of the step of forming the first magnetic layer; The surface of the portion on the side of the second magnetic layer is disposed at a position closer to the first magnetic layer than the position of the end of the gap layer on the medium facing surface on the side of the second magnetic layer, and the yoke partial layer Is at least on the gap layer side surface of the magnetic pole partial layer and both side surfaces in the width direction,
Forming the gap layer, the thin-film coil, and the second magnetic layer on the first magnetic layer so as to be magnetically connected to the pole portion layer. A method for manufacturing a thin film magnetic head. 24. The magnetic recording medium according to claim 23, wherein the yoke portion layer is further magnetically connected to the pole portion layer at an end surface of the pole portion layer opposite to the medium facing surface. Of manufacturing a thin film magnetic head. 25. The yoke partial layer, wherein the first magnetic layer is in contact with a surface of the magnetic pole partial layer on the gap layer side, and a first layer magnetically connected to the first magnetic layer and the first magnetic layer. Forming the gap layer, the thin-film coil, and the second magnetic layer, the second layer being in contact with and magnetically connected to both sides of the pole portion layer in the width direction of the pole portion layer. Forming the thin-film coil and a part of the gap layer that insulates the thin-film coil from the surroundings on the first magnetic layer; Above some,
Forming a first layer of the yoke partial layer; forming another part of the gap layer on the first magnetic layer, a part of the gap layer and the first layer; Polishing another portion of the gap layer until the first layer is exposed to flatten the upper surfaces of the first layer and the other portion of the gap layer; Forming a layer to be etched made of a material constituting the pole portion layer on one layer and another part of the gap layer; and selectively etching the layer to be etched by dry etching, Determining a profile of the pole portion layer in contact with a first layer and exposing the first layer; and forming a second layer of the yoke portion layer on the first layer. The thin film magnetic head according to claim 23, characterized in that: The method of production. 26. The second layer of the yoke partial layer further comprises:
In contact with the end face of the pole portion layer opposite to the medium facing surface,
26. The method of manufacturing a thin-film magnetic head according to claim 25, wherein the method is magnetically connected thereto. 27. The step of forming the gap layer, the thin-film coil and the second magnetic layer further comprises, after the step of forming the layer to be etched, flattening the upper surface of the layer to be etched by polishing. 27. The method of manufacturing a thin film magnetic head according to claim 25, comprising a step. 28. The step of forming the gap layer, the thin-film coil, and the second magnetic layer further includes forming a non-magnetic layer on the layer to be etched after the step of forming the layer to be etched. And a step of forming a mask corresponding to the shape of the pole portion layer on the non-magnetic layer. The step of etching the layer to be etched uses the mask to form the non-magnetic layer and the 28. The layer to be etched is etched.
The method for manufacturing a thin-film magnetic head according to any one of the above. 29. The step of forming the mask includes forming a resist frame having a void corresponding to the shape of the pole portion layer on the nonmagnetic layer, and forming the mask in the void of the resist frame. The method for manufacturing a thin-film magnetic head according to claim 28, wherein: 30. The method according to claim 25, wherein the second layer of the yoke partial layer is formed by an electroplating method. 31. The step of forming the second layer of the yoke partial layer includes forming a resist cover covering a part of the magnetic pole partial layer on the medium facing surface side, and forming the resist cover, the magnetic pole partial layer, Forming an electrode layer for electroplating on the first layer of the yoke partial layer; and forming a second layer of the yoke partial layer by electroplating using the electrode layer. The method for manufacturing a thin-film magnetic head according to claim 30, wherein the method includes: 32. A medium facing surface facing a recording medium, and magnetic pole portions arranged so as to face each other at a predetermined interval before and after in the traveling direction of the recording medium, and apart from the medium facing surface. A first and a second magnetic layer magnetically coupled to each other at a position; a gap layer made of a non-magnetic material and provided between the first and the second magnetic layers; A portion between the first and second magnetic layers,
A thin-film coil provided in a state insulated from the first and second magnetic layers, wherein at least a part of the thin-film coil on the side of the second magnetic layer is A position closer to the first magnetic layer than a position of an end of the gap layer closer to the second magnetic layer in the medium facing surface; the second magnetic layer includes a magnetic pole portion; A magnetic pole portion layer whose width defines a track width; and a yoke portion layer for magnetically connecting the magnetic pole portion and the first magnetic layer. The yoke partial layer is not less than the saturation magnetic flux density of the partial layer, and the yoke partial layer is magnetically connected to the magnetic pole partial layer at least on a surface of the magnetic pole partial layer on the gap layer side. The connection portion with the layer is the first Thin-film magnetic head is characterized in that it is arranged at a position of the medium facing surface than the connection portion between the magnetic layer and the yoke portion layer. 33. A portion of the yoke partial layer opposite to the first magnetic layer that is not in contact with the magnetic pole partial layer is a first magnetic layer higher than a surface of the magnetic pole partial layer on the gap layer side. 33. The thin-film magnetic head according to claim 32, wherein the thin-film magnetic head is disposed on the side. 34. At least a part of the surface of the yoke partial layer opposite to the first magnetic layer gradually approaches the first magnetic layer as the distance from the magnetic pole partial layer increases. 34. The thin-film magnetic head according to claim 32. 35. The recording medium according to claim 32, wherein the first magnetic layer is disposed on the rear side in the traveling direction of the recording medium, and the second magnetic layer is disposed on the front side in the traveling direction of the recording medium.
35. The thin-film magnetic head according to any one of items 34 to 34. 36. The thin-film magnetic head according to claim 32, wherein an end of the yoke portion layer on the medium facing surface side is arranged at a position away from the medium facing surface. . 37. The width of a portion of the pole portion layer in contact with the yoke portion layer is larger than the width of the pole portion layer on the medium facing surface.
7. The thin-film magnetic head according to any one of 6. 38. The thin film magnetic device according to claim 32, wherein a length from the medium facing surface to an end surface of the pole portion layer opposite to the medium facing surface is 2 μm or more. head. 39. The thin-film magnetic head according to claim 32, further comprising a non-magnetic layer in contact with a surface of the pole portion layer opposite to the gap layer. 40. The thin-film magnetic head according to claim 39, wherein said non-magnetic layer is exposed on a medium facing surface. 41. The non-magnetic layer is made of a material forming the pole part layer and a material having a lower etching rate for dry etching than a material forming a part of the gap layer in contact with the pole part layer. The thin-film magnetic head according to claim 39 or claim 40. 42. At least a part of the thin-film coil includes:
42. The device according to claim 32, wherein the first magnetic layer is located closer to the first magnetic layer than to an intermediate position between the magnetic pole portion layers of the first magnetic layer and the second magnetic layer. The thin-film magnetic head as described in the above. 43. The gap layer is formed of a material having fluidity at the time of formation, is filled at least between at least a part of the windings of the thin film coil, and is not exposed to the medium facing surface; 43. The thin-film magnetic head according to claim 32, wherein the thin-film magnetic head is made of a material having better corrosion resistance, rigidity, and insulation than the first part, and has a second part exposed to the medium facing surface. . 44. The thin-film magnetic head according to claim 43, wherein the first portion is made of an organic non-conductive non-magnetic material or a spin-on-glass film. 45. The thin-film magnetic head according to claim 43, wherein the second portion is made of an inorganic non-conductive non-magnetic material. 46. The thin-film magnetic head according to claim 32, further comprising a magneto-resistance effect element as a reproducing element. 47. A device according to claim 47, wherein a portion of the medium facing surface is opposed to the magnetoresistive effect element.
47. A device according to claim 46, further comprising first and second shield layers for shielding the magnetoresistive element.
The thin-film magnetic head according to the above. 48. The thin-film magnetic head according to claim 47, wherein said first magnetic layer also serves as said second shield layer. 49. The thin film magnetic head according to claim 32, wherein the thin film magnetic head is used for a perpendicular magnetic recording system. 50. A medium facing surface facing a recording medium, and magnetic pole portions arranged to face each other with a predetermined interval before and after in the traveling direction of the recording medium, and apart from the medium facing surface. A first and second magnetic layer magnetically coupled to each other at a location; and a non-magnetic material;
A gap layer provided between the first magnetic layer and the second magnetic layer, at least a portion between the first and second magnetic layers, and a gap layer between the first and second magnetic layers; And a thin-film coil provided in an insulated state with respect to the second coil.
The magnetic layer includes a magnetic pole portion, a magnetic pole portion layer whose width in the medium facing surface defines a track width, and a yoke partial layer for magnetically connecting the magnetic pole portion and the first magnetic layer. A method of manufacturing a thin-film magnetic head in which a saturation magnetic flux density of the magnetic pole partial layer is equal to or higher than a saturation magnetic flux density of the yoke partial layer, wherein at least one of the step of forming the first magnetic layer; The surface of the portion on the side of the second magnetic layer is disposed at a position closer to the first magnetic layer than the position of the end of the gap layer on the medium facing surface on the side of the second magnetic layer, and the yoke partial layer Is magnetically connected to the pole portion layer at least on a surface of the pole portion layer on the gap layer side, and a connection portion between the yoke portion layer and the pole portion layer is formed by the first magnetic layer and the yoke portion. Media facing surface rather than layer connection As will be disposed in position, said gap layer on the first magnetic layer, the method of manufacturing a thin film magnetic head is characterized in that a step of forming a thin film coil and the second magnetic layer. 51. The step of forming the gap layer, the thin-film coil, and the second magnetic layer, comprising: forming the thin-film coil on the first magnetic layer; Forming a part of a layer; and a part of the first magnetic layer and a part of the gap layer.
Forming the yoke part layer; forming another part of the gap layer on the first magnetic layer, a part of the gap layer and the yoke part layer; Polishing the other part of the gap layer until the upper surface of the yoke portion layer and the other portion of the gap layer is flattened until the surface of the yoke portion layer and the gap portion are exposed. Forming, on another part of the gap layer, a layer to be etched made of a material constituting the pole part layer; and selectively etching the layer to be etched by dry etching to form the yoke part layer. 52. A step of determining the outer shape of the pole portion layer that is in contact and exposing the yoke portion layer to form a surface of the yoke portion layer opposite to the gap layer. Manufacturing method of the mounted thin film magnetic head. 52. The step of forming the gap layer, the thin-film coil, and the second magnetic layer further comprises, after the step of forming the layer to be etched, flattening the upper surface of the layer to be etched by polishing. The method for manufacturing a thin-film magnetic head according to claim 51, comprising a step. 53. The step of forming the gap layer, the thin-film coil and the second magnetic layer further comprises forming a non-magnetic layer on the etched layer after the step of forming the etched layer. And a step of forming a mask corresponding to the shape of the pole portion layer on the non-magnetic layer. The step of etching the layer to be etched uses the mask to form the non-magnetic layer and the 53. The layer to be etched is etched.
The manufacturing method of the thin film magnetic head according to the above. 54. The step of forming the mask includes forming a resist frame having a gap corresponding to the shape of the pole portion layer on the nonmagnetic layer, and forming the mask in the gap of the resist frame. The method for manufacturing a thin-film magnetic head according to claim 53, wherein: