JPS59103457U - Glass substrate for thin film semiconductor devices - Google Patents
Glass substrate for thin film semiconductor devicesInfo
- Publication number
- JPS59103457U JPS59103457U JP19833982U JP19833982U JPS59103457U JP S59103457 U JPS59103457 U JP S59103457U JP 19833982 U JP19833982 U JP 19833982U JP 19833982 U JP19833982 U JP 19833982U JP S59103457 U JPS59103457 U JP S59103457U
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- thin film
- film semiconductor
- semiconductor devices
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図から第３図は、本考案によるガラス基板を用いた
ときのＴＰＴ及びその製造工程を説明するための図であ
る。
１・・・・・・ガラス基板、２・・・・・・塗布酸化膜
、１０・・・・・・ＴＦＴ、１１．１２・・・・・・基
板表面の凹凸。FIGS. 1 to 3 are diagrams for explaining a TPT using a glass substrate according to the present invention and its manufacturing process. 1...Glass substrate, 2...Coated oxide film, 10...TFT, 11.12...Irregularities on the substrate surface.
Claims (1)
ガラス基板の表面に塗布酸化膜を塗布後ベークして形成
した絶縁膜を有することを特徴とする薄膜半導体装置用
ガラス基板。1. A glass substrate for a thin film semiconductor device on which a thin film semiconductor device is to be formed, characterized in that the glass substrate has an insulating film formed by applying a coated oxide film on the surface of the glass substrate and then baking it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19833982U JPS59103457U (en) | 1982-12-28 | 1982-12-28 | Glass substrate for thin film semiconductor devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19833982U JPS59103457U (en) | 1982-12-28 | 1982-12-28 | Glass substrate for thin film semiconductor devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59103457U true JPS59103457U (en) | 1984-07-12 |
Family
ID=30423902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19833982U Pending JPS59103457U (en) | 1982-12-28 | 1982-12-28 | Glass substrate for thin film semiconductor devices |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59103457U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11354445A (en) * | 1997-08-26 | 1999-12-24 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
| JP2005294859A (en) * | 1997-08-26 | 2005-10-20 | Semiconductor Energy Lab Co Ltd | Method for manufacturing semiconductor device |
| JP2007141945A (en) * | 2005-11-15 | 2007-06-07 | Hitachi Displays Ltd | Display device and manufacturing method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5180183A (en) * | 1975-01-08 | 1976-07-13 | Hitachi Ltd | Handotaisochino seizohoho |
| JPS5352388A (en) * | 1976-10-25 | 1978-05-12 | Seiko Epson Corp | Semiconductor device |
-
1982
- 1982-12-28 JP JP19833982U patent/JPS59103457U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5180183A (en) * | 1975-01-08 | 1976-07-13 | Hitachi Ltd | Handotaisochino seizohoho |
| JPS5352388A (en) * | 1976-10-25 | 1978-05-12 | Seiko Epson Corp | Semiconductor device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11354445A (en) * | 1997-08-26 | 1999-12-24 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
| JP2005294859A (en) * | 1997-08-26 | 2005-10-20 | Semiconductor Energy Lab Co Ltd | Method for manufacturing semiconductor device |
| JP2007141945A (en) * | 2005-11-15 | 2007-06-07 | Hitachi Displays Ltd | Display device and manufacturing method thereof |
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