JPS58138333U - gallium diffuser - Google Patents
gallium diffuserInfo
- Publication number
- JPS58138333U JPS58138333U JP3599882U JP3599882U JPS58138333U JP S58138333 U JPS58138333 U JP S58138333U JP 3599882 U JP3599882 U JP 3599882U JP 3599882 U JP3599882 U JP 3599882U JP S58138333 U JPS58138333 U JP S58138333U
- Authority
- JP
- Japan
- Prior art keywords
- shielding plate
- heat shielding
- quartz tube
- gallium
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は開管法による従来のガリウム拡散装置・の縦断
面図、第２図は本考案の一実施例を示す拡散装置の縦断
面図である。
１・・・・・・石英管、２・・・・・・キャリヤーガス
入口、２′・・・・・・キャリヤーガス出口、３・・・
・・・三酸化ガリウム、４，４′・・・・・・熱しゃへ
い板、５．５’、５“。
５″・・・・・・ガリウム酸化物、６・・・・・・シリ
ボン円板、７・・・・・・保持具、８，８′・・・・・
・気密キャップ、９゜１０・・・・・・発熱体。FIG. 1 is a vertical cross-sectional view of a conventional gallium diffusion device using the open tube method, and FIG. 2 is a vertical cross-sectional view of a diffusion device showing an embodiment of the present invention. 1...Quartz tube, 2...Carrier gas inlet, 2'...Carrier gas outlet, 3...
...Gallium trioxide, 4,4'...Heat shield plate, 5.5', 5". 5"...Gallium oxide, 6...Siribon circle Plate, 7... Holder, 8, 8'...
・Airtight cap, 9°10... Heating element.
Claims (1)
封入された被拡散物を加熱するために、該石英管の一定
部分を外側より囲繞する円筒状の発熱体の端面よりも内
側で、かつ前記石英管の内部に封入された拡散源の不純
物を選ぶキャリヤーガスの流れ方向からみて、出口側の
内部温度が９５０°Ｃ以上の温度を有する位置に、縦方
向断面がＨ形をした円板状の熱しゃへい板を設置し、更
に該熱じゃへい板と同形の他の熱しゃへい板を、前記発
熱体の端面よりも外側で、かつ前記キャリヤーガス出口
側の内部温度が５００〜６５０°Ｃの温度を有する位置
に設置したことを特徴とするガリウム拡散装置。In a gallium diffusion device using an open tube method, in order to heat a substance to be diffused sealed inside a quartz tube, the quartz tube is heated inside the end surface of a cylindrical heating element that surrounds a certain part of the quartz tube from the outside, and A disk-shaped tube with an H-shaped vertical cross section is placed at a position where the internal temperature on the exit side is 950°C or higher when viewed from the flow direction of the carrier gas that selects impurities from the diffusion source sealed inside the quartz tube. A heat shielding plate of the same shape as the heat shielding plate is installed, and another heat shielding plate of the same shape as the heat shielding plate is installed outside the end face of the heating element and at an internal temperature of 500 to 650°C on the carrier gas outlet side. A gallium diffusion device characterized in that it is installed at a location where the temperature is high.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3599882U JPS58138333U (en) | 1982-03-15 | 1982-03-15 | gallium diffuser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3599882U JPS58138333U (en) | 1982-03-15 | 1982-03-15 | gallium diffuser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58138333U true JPS58138333U (en) | 1983-09-17 |
| JPS6221000Y2 JPS6221000Y2 (en) | 1987-05-28 |
Family
ID=30047453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3599882U Granted JPS58138333U (en) | 1982-03-15 | 1982-03-15 | gallium diffuser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58138333U (en) |
-
1982
- 1982-03-15 JP JP3599882U patent/JPS58138333U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6221000Y2 (en) | 1987-05-28 |
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