JPS5826660U - Ultra high speed sample gas analyzer - Google Patents
Ultra high speed sample gas analyzerInfo
- Publication number
- JPS5826660U JPS5826660U JP11385181U JP11385181U JPS5826660U JP S5826660 U JPS5826660 U JP S5826660U JP 11385181 U JP11385181 U JP 11385181U JP 11385181 U JP11385181 U JP 11385181U JP S5826660 U JPS5826660 U JP S5826660U
- Authority
- JP
- Japan
- Prior art keywords
- sample gas
- gas analyzer
- high speed
- ultra high
- speed sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は、本考案の一実施例を示す超高速試料ガス分析
装置の配管系統図。第2図は、第1図に示した酸化触媒
下流の温度と試料ガスの酸化率の関係を示した試料ガス
酸化特性図。第3図、第4図は、本考案の他の実施例を
示す超高速試料ガス分析装置の部分配管系統図。
1・・・真空室、4・・・四重極質量分析部、7・・・
真空室、10・・・試料ガス導入管、10a・・・接続
口、13・・・酸化触媒、14・・・加熱炉。
第2図・
第4図FIG. 1 is a piping system diagram of an ultrahigh-speed sample gas analyzer showing one embodiment of the present invention. FIG. 2 is a sample gas oxidation characteristic diagram showing the relationship between the temperature downstream of the oxidation catalyst shown in FIG. 1 and the oxidation rate of the sample gas. 3 and 4 are partial piping system diagrams of an ultrahigh-speed sample gas analyzer showing another embodiment of the present invention. 1... Vacuum chamber, 4... Quadrupole mass spectrometry section, 7...
Vacuum chamber, 10... Sample gas introduction tube, 10a... Connection port, 13... Oxidation catalyst, 14... Heating furnace. Figure 2/Figure 4
Claims (1)
源を流量制御素子を介して連通させ、前記試料ガス導入
管内に酸化触媒を前記流量制御素子からの空気流入部よ
り下流側に位置させて装着し、前記酸化触媒を加熱装置
により加熱可能に設けたことを特徴とする超高速試料ガ
ス分析装置。An air source is communicated through a flow rate control element in the middle of the sample gas introduction tube that communicates with the quadrupole mass spectrometer, and an oxidation catalyst is located in the sample gas introduction tube downstream of the air inlet from the flow rate control element. 1. An ultrahigh-speed sample gas analyzer, characterized in that the oxidation catalyst is mounted so that the oxidation catalyst can be heated by a heating device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11385181U JPS5826660U (en) | 1981-07-31 | 1981-07-31 | Ultra high speed sample gas analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11385181U JPS5826660U (en) | 1981-07-31 | 1981-07-31 | Ultra high speed sample gas analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5826660U true JPS5826660U (en) | 1983-02-21 |
Family
ID=29908141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11385181U Pending JPS5826660U (en) | 1981-07-31 | 1981-07-31 | Ultra high speed sample gas analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5826660U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62190689U (en) * | 1986-05-28 | 1987-12-04 |
-
1981
- 1981-07-31 JP JP11385181U patent/JPS5826660U/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62190689U (en) * | 1986-05-28 | 1987-12-04 | ||
JPH0434956Y2 (en) * | 1986-05-28 | 1992-08-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5826660U (en) | Ultra high speed sample gas analyzer | |
JPS58134767U (en) | Device for measuring particulates in exhaust gas | |
JPS5937728U (en) | CVD equipment | |
JPS581149U (en) | Flue smoke mercury detection device | |
JPS6031663U (en) | sampling device | |
Philippu | Separation of Galactose, Glucose, and Lactose in Urine by Paper Chromatography | |
JPS60114959U (en) | Gas chromatograph mass spectrometer | |
JPS60149132U (en) | Semiconductor heat treatment furnace | |
JPS58126U (en) | Radiant tube burner | |
JPS5971172U (en) | Device for measuring elements in metals | |
JPS5954924U (en) | drying equipment | |
JPS5926238U (en) | CVD equipment | |
JPH0193544U (en) | ||
JPS60114958U (en) | Gas chromatograph mass spectrometer | |
JPS58180459U (en) | Sample high temperature device | |
JPS58167450U (en) | High frequency plasma analyzer | |
JPS59135467U (en) | Liquid chromatograph mass spectrometer | |
JPS5846948U (en) | combustion device | |
JPS58138333U (en) | gallium diffuser | |
JPS6059964U (en) | Gas chromatograph | |
JPS6050457U (en) | Mass spectrometer sample introduction device | |
JPS5827756U (en) | gas analyzer | |
Martin et al. | Solenoid-Operated Glass-Mercury Valve for Small Pressure Differentials | |
JPS58162265U (en) | Engine exhaust recirculation device | |
JPS60158128U (en) | Photometer with anti-condensation device |