JPS5974729U - Sample measuring device - Google Patents
Sample measuring deviceInfo
- Publication number
- JPS5974729U JPS5974729U JP17078582U JP17078582U JPS5974729U JP S5974729 U JPS5974729 U JP S5974729U JP 17078582 U JP17078582 U JP 17078582U JP 17078582 U JP17078582 U JP 17078582U JP S5974729 U JPS5974729 U JP S5974729U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample stage
- measuring device
- gas
- sample measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施態様を説明するための試料測定
装置の要部拡大断面図である。
１・・・試料台、２・・・Ｘ−Ｙスキャナー、３・・・
試料、４・・」ロータリポンプ、５・・・熱交換部、６
・・・ガス加熱器、７・・・低温液体温、８，９．１１
・・・パイプ、１０・・・ガスコンデンサ、１２・・・
シールドキャップ、１３．１５．１６・・・開閉弁、１
７・・・モータ、１８・・・プローブ。FIG. 1 is an enlarged sectional view of a main part of a sample measuring device for explaining one embodiment of the present invention. 1... Sample stage, 2... X-Y scanner, 3...
Sample, 4..."Rotary pump, 5...Heat exchange section, 6
...Gas heater, 7...Low temperature liquid temperature, 8,9.11
...Pipe, 10...Gas condenser, 12...
Shield cap, 13.15.16...Opening/closing valve, 1
7...Motor, 18...Probe.
Claims (1)
段と、上記熱交換部に加熱乃至冷却された気体を導入し
、必要に応じて上記気体を試料台表面に吹き出す気体系
と、上記試料台表面上の試料の特性を測定する手段と、
上記試料台及び上記測定手段とを囲うシールドキャップ
とから成ることを特徴とする試料測定装置。a sample stage having a heat exchange section; a means for heating or cooling gas; a gas system for introducing the heated or cooled gas into the heat exchange section and blowing out the gas onto the surface of the sample stage as necessary; means for measuring properties of the sample on the sample stage surface;
A sample measuring device comprising: a shield cap surrounding the sample stage and the measuring means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17078582U JPS5974729U (en) | 1982-11-10 | 1982-11-10 | Sample measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17078582U JPS5974729U (en) | 1982-11-10 | 1982-11-10 | Sample measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5974729U true JPS5974729U (en) | 1984-05-21 |
| JPS6246265Y2 JPS6246265Y2 (en) | 1987-12-12 |
Family
ID=30372737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17078582U Granted JPS5974729U (en) | 1982-11-10 | 1982-11-10 | Sample measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5974729U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62293629A (en) * | 1986-06-12 | 1987-12-21 | Nec Corp | Accelerated life test of semiconductor device |
| JPH07209373A (en) * | 1993-11-30 | 1995-08-11 | Nec Corp | Cooling tester |
| WO2002046781A1 (en) * | 2000-12-07 | 2002-06-13 | Advantest Corporation | Socket for electronic component test, and electronic component test apparatus using the socket |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5452640B2 (en) * | 2012-02-07 | 2014-03-26 | シャープ株式会社 | Semiconductor test equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5350982A (en) * | 1976-10-20 | 1978-05-09 | Mitsubishi Electric Corp | Low-high temperature testing station |
| JPS5473578A (en) * | 1977-11-24 | 1979-06-12 | Toshiba Corp | Pattern exposure method of semiconductor substrate and pattern exposure apparatus |
| JPS5788344A (en) * | 1980-11-21 | 1982-06-02 | Fujitsu Ltd | Cryostat |
-
1982
- 1982-11-10 JP JP17078582U patent/JPS5974729U/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5350982A (en) * | 1976-10-20 | 1978-05-09 | Mitsubishi Electric Corp | Low-high temperature testing station |
| JPS5473578A (en) * | 1977-11-24 | 1979-06-12 | Toshiba Corp | Pattern exposure method of semiconductor substrate and pattern exposure apparatus |
| JPS5788344A (en) * | 1980-11-21 | 1982-06-02 | Fujitsu Ltd | Cryostat |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62293629A (en) * | 1986-06-12 | 1987-12-21 | Nec Corp | Accelerated life test of semiconductor device |
| JPH07209373A (en) * | 1993-11-30 | 1995-08-11 | Nec Corp | Cooling tester |
| WO2002046781A1 (en) * | 2000-12-07 | 2002-06-13 | Advantest Corporation | Socket for electronic component test, and electronic component test apparatus using the socket |
| US6932635B2 (en) | 2000-12-07 | 2005-08-23 | Advantest Corporation | Electronic component testing socket and electronic component testing apparatus using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6246265Y2 (en) | 1987-12-12 |
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