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JPS5748820A - Surface acoustic wave element - Google Patents

Surface acoustic wave element

Info

Publication number
JPS5748820A
JPS5748820A JP12382780A JP12382780A JPS5748820A JP S5748820 A JPS5748820 A JP S5748820A JP 12382780 A JP12382780 A JP 12382780A JP 12382780 A JP12382780 A JP 12382780A JP S5748820 A JPS5748820 A JP S5748820A
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric
film
electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12382780A
Other languages
English (en)
Inventor
Tasuku Masuo
Kenji Ando
Atsushi Yamagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP12382780A priority Critical patent/JPS5748820A/ja
Publication of JPS5748820A publication Critical patent/JPS5748820A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP12382780A 1980-09-05 1980-09-05 Surface acoustic wave element Pending JPS5748820A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12382780A JPS5748820A (en) 1980-09-05 1980-09-05 Surface acoustic wave element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12382780A JPS5748820A (en) 1980-09-05 1980-09-05 Surface acoustic wave element

Publications (1)

Publication Number Publication Date
JPS5748820A true JPS5748820A (en) 1982-03-20

Family

ID=14870341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12382780A Pending JPS5748820A (en) 1980-09-05 1980-09-05 Surface acoustic wave element

Country Status (1)

Country Link
JP (1) JPS5748820A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348511A (ja) * 1989-04-14 1991-03-01 Murata Mfg Co Ltd 弾性表面波装置
US5061870A (en) * 1989-07-06 1991-10-29 Murata Mfg. Co., Ltd. Surface acoustic wave device
KR20020007212A (ko) * 2000-07-19 2002-01-26 무라타 야스타카 박막, 박막 제조 방법 및 전자 소자
JP2005136115A (ja) * 2003-10-30 2005-05-26 Tdk Corp 電子デバイス及びその製造方法
US7642693B2 (en) 2003-05-15 2010-01-05 National Institute Of Advanced Industrial Science And Technology Wurtzite thin film, laminate containing wurtzite crystalline layer and their manufacturing methods

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348511A (ja) * 1989-04-14 1991-03-01 Murata Mfg Co Ltd 弾性表面波装置
JP2545983B2 (ja) * 1989-04-14 1996-10-23 株式会社村田製作所 弾性表面波装置
US5061870A (en) * 1989-07-06 1991-10-29 Murata Mfg. Co., Ltd. Surface acoustic wave device
KR20020007212A (ko) * 2000-07-19 2002-01-26 무라타 야스타카 박막, 박막 제조 방법 및 전자 소자
US7642693B2 (en) 2003-05-15 2010-01-05 National Institute Of Advanced Industrial Science And Technology Wurtzite thin film, laminate containing wurtzite crystalline layer and their manufacturing methods
JP2005136115A (ja) * 2003-10-30 2005-05-26 Tdk Corp 電子デバイス及びその製造方法

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