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JPS57190353A - Manufacture of solid-state image pick-up device - Google Patents

Manufacture of solid-state image pick-up device

Info

Publication number
JPS57190353A
JPS57190353A JP56076192A JP7619281A JPS57190353A JP S57190353 A JPS57190353 A JP S57190353A JP 56076192 A JP56076192 A JP 56076192A JP 7619281 A JP7619281 A JP 7619281A JP S57190353 A JPS57190353 A JP S57190353A
Authority
JP
Japan
Prior art keywords
layer
gates
equalized
electrodes
electric charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56076192A
Other languages
Japanese (ja)
Other versions
JPH0522395B2 (en
Inventor
Akira Shimohashi
Yoshihiro Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56076192A priority Critical patent/JPS57190353A/en
Publication of JPS57190353A publication Critical patent/JPS57190353A/en
Publication of JPH0522395B2 publication Critical patent/JPH0522395B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/15—Charge-coupled device [CCD] image sensors
    • H10F39/158—Charge-coupled device [CCD] image sensors having arrangements for blooming suppression

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

PURPOSE:To improve remarkably quality of the reproduced picture of a solid-state image sensing device by a method wherein blanking gates are formed with the first layer polycrystalline Si layer, storage electrodes are formed with the second layer polycrystalline Si layer, and quantity of electric charge to be discharged respectively from the adjoining storage electrodes are equalized. CONSTITUTION:After the blanking gates 7 are formed with the first layer polycrystalline Si layer on an SiO2 film 10 on an Si substrate 9, oxidation is performed to form SiO2 films 30 on the surfaces thereof, and the storage electrodes 3 are formed with the second layer polycrystalline Si layer on the SiO2 film 10. At this case, the end parts 3a of the electrodes 3 are piled up on the end parts 7a of the blanking gates 7, and a drain 8 for discharge of electric charge being the reverse conductive type with the substrate 9 is formed by self alignment. By this constitution, lateral directional size of the gates 7 on both the sides can be equalized with high precision, and even when the positions of the electrodes 3 are slipped a little in both the directions, lengthes Wr, Wl of channels 20r, 20l being directly under the gates 7 are equalized. Accordingly depthes of wells formed by the channels are equal, and because quantity Qdr of electric charge to be discharged to the drain 8 is equalized to quantity Qdl, the picture of favorable quantity can be obtained.
JP56076192A 1981-05-19 1981-05-19 Manufacture of solid-state image pick-up device Granted JPS57190353A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56076192A JPS57190353A (en) 1981-05-19 1981-05-19 Manufacture of solid-state image pick-up device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56076192A JPS57190353A (en) 1981-05-19 1981-05-19 Manufacture of solid-state image pick-up device

Publications (2)

Publication Number Publication Date
JPS57190353A true JPS57190353A (en) 1982-11-22
JPH0522395B2 JPH0522395B2 (en) 1993-03-29

Family

ID=13598266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56076192A Granted JPS57190353A (en) 1981-05-19 1981-05-19 Manufacture of solid-state image pick-up device

Country Status (1)

Country Link
JP (1) JPS57190353A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578683A1 (en) * 1985-03-08 1986-09-12 Thomson Csf METHOD FOR MANUFACTURING ANTI-GLOWING DIODE ASSOCIATED WITH A SURFACE CHANNEL, AND ANTI-GLOWING SYSTEM OBTAINED THEREBY
JPH04322760A (en) * 1991-04-22 1992-11-12 Koito Mfg Co Ltd Jig for coating

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5558581A (en) * 1978-10-26 1980-05-01 Fujitsu Ltd Infrared rays detector
JPS5646571A (en) * 1979-09-26 1981-04-27 Sony Corp Manufacture of solid image pickup element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5558581A (en) * 1978-10-26 1980-05-01 Fujitsu Ltd Infrared rays detector
JPS5646571A (en) * 1979-09-26 1981-04-27 Sony Corp Manufacture of solid image pickup element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578683A1 (en) * 1985-03-08 1986-09-12 Thomson Csf METHOD FOR MANUFACTURING ANTI-GLOWING DIODE ASSOCIATED WITH A SURFACE CHANNEL, AND ANTI-GLOWING SYSTEM OBTAINED THEREBY
US4710234A (en) * 1985-03-08 1987-12-01 Thomson--CSF Process for manufacturing an anti-blooming diode associated with a surface canal
JPH04322760A (en) * 1991-04-22 1992-11-12 Koito Mfg Co Ltd Jig for coating

Also Published As

Publication number Publication date
JPH0522395B2 (en) 1993-03-29

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