[go: up one dir, main page]

JPS57176005A - Manufacture of optical waveguide circuit - Google Patents

Manufacture of optical waveguide circuit

Info

Publication number
JPS57176005A
JPS57176005A JP6155981A JP6155981A JPS57176005A JP S57176005 A JPS57176005 A JP S57176005A JP 6155981 A JP6155981 A JP 6155981A JP 6155981 A JP6155981 A JP 6155981A JP S57176005 A JPS57176005 A JP S57176005A
Authority
JP
Japan
Prior art keywords
layer
groove
optical waveguide
glass
waveguide circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6155981A
Other languages
Japanese (ja)
Inventor
Tetsuya Yamazaki
Eiji Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP6155981A priority Critical patent/JPS57176005A/en
Publication of JPS57176005A publication Critical patent/JPS57176005A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To obtain an optical waveguide circuit which has high productivity and less loss by forming a porous layer by the CVD method in each inversely trapezoid groove of silicon single crystal, and then heating and fusing it until it changes into transparent glass. CONSTITUTION:In the surface of a silicon single crystal substrate 1, grooves which are sectioned in an inversely trapezoid shape by anisotropic etching, and the internal surface of each groove is covered with the 1st clad glass layer 5. On this layer, a porous layer is formed by the CVD method and then heated and fused to change into transparent glass, thus filling the internal space of the groove of the substrate with the core glass 6. Lastly, unnecessary parts of the core glass layer 6 other than the grooves are etched away to obtain a smooth surface, on which the 2nd clad glass layer 7 is formed.
JP6155981A 1981-04-23 1981-04-23 Manufacture of optical waveguide circuit Pending JPS57176005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6155981A JPS57176005A (en) 1981-04-23 1981-04-23 Manufacture of optical waveguide circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6155981A JPS57176005A (en) 1981-04-23 1981-04-23 Manufacture of optical waveguide circuit

Publications (1)

Publication Number Publication Date
JPS57176005A true JPS57176005A (en) 1982-10-29

Family

ID=13174582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6155981A Pending JPS57176005A (en) 1981-04-23 1981-04-23 Manufacture of optical waveguide circuit

Country Status (1)

Country Link
JP (1) JPS57176005A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039605A (en) * 1983-08-12 1985-03-01 Nippon Telegr & Teleph Corp <Ntt> Production of optical waveguiding film
JPH01502367A (en) * 1987-07-10 1989-08-17 ケルンフオルシユングスツエントルム　カールスルーエ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング Switch matrix with nonlinear, e.g., bistable optical elements and its manufacturing method
US5163118A (en) * 1986-11-10 1992-11-10 The United States Of America As Represented By The Secretary Of The Air Force Lattice mismatched hetrostructure optical waveguide
JPH0685371A (en) * 1991-12-11 1994-03-25 American Teleph & Telegr Co <Att> Optical device
JPH0720336A (en) * 1993-06-18 1995-01-24 Nec Corp Structure of optical waveguide and its production

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039605A (en) * 1983-08-12 1985-03-01 Nippon Telegr & Teleph Corp <Ntt> Production of optical waveguiding film
US5163118A (en) * 1986-11-10 1992-11-10 The United States Of America As Represented By The Secretary Of The Air Force Lattice mismatched hetrostructure optical waveguide
US5354709A (en) * 1986-11-10 1994-10-11 The United States Of America As Represented By The Secretary Of The Air Force Method of making a lattice mismatched heterostructure optical waveguide
JPH01502367A (en) * 1987-07-10 1989-08-17 ケルンフオルシユングスツエントルム　カールスルーエ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング Switch matrix with nonlinear, e.g., bistable optical elements and its manufacturing method
JP2637213B2 (en) * 1987-07-10 1997-08-06 ケルンフオルシユングスツエントルム カールスルーエ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Switch matrix having non-linear, e.g., bistable optical element and method of making same
JPH0685371A (en) * 1991-12-11 1994-03-25 American Teleph & Telegr Co <Att> Optical device
JPH0720336A (en) * 1993-06-18 1995-01-24 Nec Corp Structure of optical waveguide and its production

Similar Documents

Publication Publication Date Title
US4375312A (en) Graded index waveguide structure and process for forming same
US4384038A (en) Method of producing integrated optical waveguide circuits and circuits obtained by this method
ES8103390A1 (en) High bandwidth optical waveguides and method of fabrication
ES482852A1 (en) High bandwidth optical waveguide having B2O3 free core and method of fabrication
JPS5969438A (en) Manufacture of base material for optical fiber
JPS57176005A (en) Manufacture of optical waveguide circuit
JPS5776509A (en) Optical fiber-lens coupler and its manufacture
JPS57604A (en) Formation of three-dimensionally disposed glass waveguide
JP3196797B2 (en) Manufacturing method of laminated quartz optical waveguide
JPS5642204A (en) Production of photocircuit
JPS57176006A (en) Manufacture of optical waveguide circuit
JPH01288802A (en) Light guide and its production
JP2000019337A (en) Optical waveguide and its production
JPS60155552A (en) Production of plate microlens
JPS56146107A (en) Production of glass waveguide with optical fiber
JPH06331844A (en) Quartz optical waveguide and its production
JPH06174952A (en) Substrate type optical waveguide and its production
JPS61210304A (en) Production of optical plane waveguide
JPS59137346A (en) Manufacture of glass waveguide
JPH0727090B2 (en) Method of manufacturing optical waveguide
JPS5642202A (en) Photocoupling circuit with filter
JPS6066210A (en) Production of optical waveguide
JP3837506B2 (en) Optical waveguide and method for forming the same
JPS63191107A (en) Production of light guide
JPS56114909A (en) Multicore optical fiber connecting method