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JPS5642204A - Production of photocircuit - Google Patents

Production of photocircuit

Info

Publication number
JPS5642204A
JPS5642204A JP11826779A JP11826779A JPS5642204A JP S5642204 A JPS5642204 A JP S5642204A JP 11826779 A JP11826779 A JP 11826779A JP 11826779 A JP11826779 A JP 11826779A JP S5642204 A JPS5642204 A JP S5642204A
Authority
JP
Japan
Prior art keywords
film
substrate
sio2
grooves
clad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11826779A
Other languages
Japanese (ja)
Inventor
Yasuhiro Sugiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11826779A priority Critical patent/JPS5642204A/en
Publication of JPS5642204A publication Critical patent/JPS5642204A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To simultaneously form plural optical guides by burying the optical guides of the size identical to that of the cores of low-loss optical fibers in the grooves of a substrate. CONSTITUTION:A film 2 of SiO2 or the like is formed on the surface of a substrate 1 such as silicon and the film 2 is selectively removed by photoetching according to predetermined patterns to expose the Si substrate surface. Next, with the SiO2 film 2 as a mask, etching is performed to form predetermined pattern grooves. After this, the part where the SiO2 film has remained are once completely removed and a thin SiO2 film 3 is newly deposited over the entire part of the substrate including the bottom of the grooves by a CVD method or the like to form part of clad, thence a glass layer 4 of a refractive index higher than that of the film 3 is deposited thickly thereon through CVD. The other parts are removed by etching or the like by leaving the glass 4 in the grooves of the substrate to make cores, and finally an SiO2 layer 2' is deposited on the flat surface to form a clad.
JP11826779A 1979-09-14 1979-09-14 Production of photocircuit Pending JPS5642204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11826779A JPS5642204A (en) 1979-09-14 1979-09-14 Production of photocircuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11826779A JPS5642204A (en) 1979-09-14 1979-09-14 Production of photocircuit

Publications (1)

Publication Number Publication Date
JPS5642204A true JPS5642204A (en) 1981-04-20

Family

ID=14732397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11826779A Pending JPS5642204A (en) 1979-09-14 1979-09-14 Production of photocircuit

Country Status (1)

Country Link
JP (1) JPS5642204A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57202506A (en) * 1981-06-06 1982-12-11 Nippon Sheet Glass Co Ltd Optical circuit and its production
JPS5834415A (en) * 1981-08-24 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> Coupling method between optical waveguide and optical fiber
WO1989009420A1 (en) * 1988-03-22 1989-10-05 Fujitsu Limited Method of connecting optical waveguide with optical fiber
JPH0213207U (en) * 1989-06-22 1990-01-26
JPH0271203A (en) * 1988-03-03 1990-03-09 American Teleph & Telegr Co <Att> Device having optical guide body supported by substrate
EP1067410A2 (en) * 1999-07-07 2001-01-10 Shin-Etsu Chemical Co., Ltd. Method for preparing optical waveguide substrate
JP2007086122A (en) * 2005-09-20 2007-04-05 Toray Ind Inc Optical distribution member and its manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5280042A (en) * 1975-12-22 1977-07-05 Ibm Optical coupler
JPS5370839A (en) * 1976-12-07 1978-06-23 Fujitsu Ltd Production of optical wave guide circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5280042A (en) * 1975-12-22 1977-07-05 Ibm Optical coupler
JPS5370839A (en) * 1976-12-07 1978-06-23 Fujitsu Ltd Production of optical wave guide circuit

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57202506A (en) * 1981-06-06 1982-12-11 Nippon Sheet Glass Co Ltd Optical circuit and its production
JPS5834415A (en) * 1981-08-24 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> Coupling method between optical waveguide and optical fiber
JPH0140324B2 (en) * 1981-08-24 1989-08-28 Nippon Telegraph & Telephone
JPH0271203A (en) * 1988-03-03 1990-03-09 American Teleph & Telegr Co <Att> Device having optical guide body supported by substrate
WO1989009420A1 (en) * 1988-03-22 1989-10-05 Fujitsu Limited Method of connecting optical waveguide with optical fiber
JPH0213207U (en) * 1989-06-22 1990-01-26
EP1067410A2 (en) * 1999-07-07 2001-01-10 Shin-Etsu Chemical Co., Ltd. Method for preparing optical waveguide substrate
EP1067410A3 (en) * 1999-07-07 2001-01-17 Shin-Etsu Chemical Co., Ltd. Method for preparing optical waveguide substrate
US6615614B1 (en) 1999-07-07 2003-09-09 Shin-Etsu Chemical Co., Ltd. Method for preparing optical waveguide substrate
JP2007086122A (en) * 2005-09-20 2007-04-05 Toray Ind Inc Optical distribution member and its manufacturing method

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