JPS57174448A - Production of photoconductive member - Google Patents
Production of photoconductive memberInfo
- Publication number
- JPS57174448A JPS57174448A JP56060153A JP6015381A JPS57174448A JP S57174448 A JPS57174448 A JP S57174448A JP 56060153 A JP56060153 A JP 56060153A JP 6015381 A JP6015381 A JP 6015381A JP S57174448 A JPS57174448 A JP S57174448A
- Authority
- JP
- Japan
- Prior art keywords
- compds
- raw material
- formula
- carbon atoms
- constituting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE:To form an extremely good photoconductive layer easily by mixing >=2 kinds of silicon compds. expressed by the specific formula at specific ratios and mixing these with materials consisting of carbon atoms as constituting atoms thereby constituting a raw material for formation of photoconductive layers. CONSTITUTION:A raw material for formation of photoconductive layers is constituted of at least 2 kinds of the compds. expressed by the formula SinH2n+2 (n is a positive integer), and a material consisting of carbon atoms as constituting atoms. The ratios of the compds. of the formula are such that with respect to the compd. of the lowest order of (n), for example Si2H6, the compds. of (n) of higher order than this, for example, Si3H8, Si4H10 are contained at >=1vol%, more preferably >=5vol%. There are, for example, methane, ethylene, acetylene, etc. as the raw material for introduction of carbon atoms, and these are mixed at about <=15vol% based on the vol. of the compds. of the formula. Such raw material is introduced in a gaseous state into a deposition chamber, the pressure wherein is held decreased, whereby electric discharge is caused, and a good photoconductive layer is formed over a wide area on a substrate.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56060153A JPS57174448A (en) | 1981-04-21 | 1981-04-21 | Production of photoconductive member |
| US06/354,898 US4468443A (en) | 1981-03-12 | 1982-03-04 | Process for producing photoconductive member from gaseous silicon compounds |
| DE19823209055 DE3209055A1 (en) | 1981-03-12 | 1982-03-12 | METHOD FOR PRODUCING A PHOTO-CONDUCTIVE ELEMENT |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56060153A JPS57174448A (en) | 1981-04-21 | 1981-04-21 | Production of photoconductive member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57174448A true JPS57174448A (en) | 1982-10-27 |
| JPS6145705B2 JPS6145705B2 (en) | 1986-10-09 |
Family
ID=13133915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56060153A Granted JPS57174448A (en) | 1981-03-12 | 1981-04-21 | Production of photoconductive member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57174448A (en) |
-
1981
- 1981-04-21 JP JP56060153A patent/JPS57174448A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6145705B2 (en) | 1986-10-09 |
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