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JPS57147604A - Production for flush type optical waveguide - Google Patents

Production for flush type optical waveguide

Info

Publication number
JPS57147604A
JPS57147604A JP3337481A JP3337481A JPS57147604A JP S57147604 A JPS57147604 A JP S57147604A JP 3337481 A JP3337481 A JP 3337481A JP 3337481 A JP3337481 A JP 3337481A JP S57147604 A JPS57147604 A JP S57147604A
Authority
JP
Japan
Prior art keywords
optical waveguide
refractive index
type optical
flush type
high refractive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3337481A
Other languages
Japanese (ja)
Inventor
Hiroshi Honmo
Kanze Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3337481A priority Critical patent/JPS57147604A/en
Publication of JPS57147604A publication Critical patent/JPS57147604A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1469—Means for changing or stabilising the shape or form of the shaped article or deposit

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To produce plane plate-shaped flush type optical waveguides in large quantities, by making a tube-shaped member flat and solid after laminating a glass layer having a high refractive index on the inside wall of this tube-shaped member. CONSTITUTION:A glass film 2 of a high refractive index is accumlated on the inside wall of a quartz glass tube 1 by the CVD method or the like. In this case, a refractive index distribution can be given to the glass film of a high refractive index. The pressure in this glass tube 1 is made negative, and the glass tube 1 is heated by a source such as an oxyhydrogen flame and is made flat and solid, thus obtaining a flush type optical waveguide base material 3. This flush type optical waveguide base material 3 is cut to required dimensions and is subjected to optical polishing, and grooves which are deep enough to reach the bottom part of the glass film 2 of a high refractive index are formed in both sides of a part which becomes an optical waveguide by the photoetching method or the like, thereby obtaining a linear flush type optical waveguide 4.
JP3337481A 1981-03-09 1981-03-09 Production for flush type optical waveguide Pending JPS57147604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3337481A JPS57147604A (en) 1981-03-09 1981-03-09 Production for flush type optical waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3337481A JPS57147604A (en) 1981-03-09 1981-03-09 Production for flush type optical waveguide

Publications (1)

Publication Number Publication Date
JPS57147604A true JPS57147604A (en) 1982-09-11

Family

ID=12384806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3337481A Pending JPS57147604A (en) 1981-03-09 1981-03-09 Production for flush type optical waveguide

Country Status (1)

Country Link
JP (1) JPS57147604A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000055100A1 (en) * 1999-03-12 2000-09-21 Corning Incorporated Projection lithography photomask substrate and method of making
WO2008035067A1 (en) * 2006-09-22 2008-03-27 University Of Southampton Method of fabricating a planar substrate having optical waveguides

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000055100A1 (en) * 1999-03-12 2000-09-21 Corning Incorporated Projection lithography photomask substrate and method of making
WO2008035067A1 (en) * 2006-09-22 2008-03-27 University Of Southampton Method of fabricating a planar substrate having optical waveguides
US8218933B2 (en) 2006-09-22 2012-07-10 University Of Southampton Method of fabricating a planar substrate having optical waveguides

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