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JPS57132967A - Abrasive sheet-like stuff - Google Patents

Abrasive sheet-like stuff

Info

Publication number
JPS57132967A
JPS57132967A JP56015626A JP1562681A JPS57132967A JP S57132967 A JPS57132967 A JP S57132967A JP 56015626 A JP56015626 A JP 56015626A JP 1562681 A JP1562681 A JP 1562681A JP S57132967 A JPS57132967 A JP S57132967A
Authority
JP
Japan
Prior art keywords
stuff
abrasive sheet
sheet
pits
spikes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56015626A
Other languages
Japanese (ja)
Inventor
Yasuyoshi Horiguchi
Shunichi Shinohara
Shigeki Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP56015626A priority Critical patent/JPS57132967A/en
Publication of JPS57132967A publication Critical patent/JPS57132967A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To obtain an abrasive sheet-like stuff excellent in abrading performance with no variation by lot, by applying an emboss process to form pits and spikes on the surface of a substance made of a fiber-like material and adhesives. CONSTITUTION:An extremely fine fiber of a synthetic fiber made of polyamide, polyester, or polyacrylonitrile, with a single yarn size of 1-3d, or 1d or less, is formed into worsted multilayer webs by a carding machine, then they are entwined three-dimensionally by needle punching, etc. into a sheet-like material, which is impregnated or coated with adhesives to form a substance of an abrasive sheet. Next, an emboss process is applied to its surface to form pits and spikes so that the ratio of pits per unit area is 40-70 percent, then an abrasive sheet stuff is obtained. This sheet stuff is fitted to a rotary disk 4, and is used to abrade a silicone wafer 5 using grindgrains as a medium.
JP56015626A 1981-02-06 1981-02-06 Abrasive sheet-like stuff Pending JPS57132967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56015626A JPS57132967A (en) 1981-02-06 1981-02-06 Abrasive sheet-like stuff

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56015626A JPS57132967A (en) 1981-02-06 1981-02-06 Abrasive sheet-like stuff

Publications (1)

Publication Number Publication Date
JPS57132967A true JPS57132967A (en) 1982-08-17

Family

ID=11893916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56015626A Pending JPS57132967A (en) 1981-02-06 1981-02-06 Abrasive sheet-like stuff

Country Status (1)

Country Link
JP (1) JPS57132967A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63205383A (en) * 1987-02-20 1988-08-24 F S K Kk Tacky sheet for sticking stick wafer
JPS63205382A (en) * 1987-02-20 1988-08-24 F S K Kk Tacky sheet for sticking wafer
JP2017064882A (en) * 2015-10-02 2017-04-06 富士紡ホールディングス株式会社 Polishing brush
JP2017131976A (en) * 2016-01-25 2017-08-03 富士紡ホールディングス株式会社 Polishing pad, manufacturing method thereof, and manufacturing method of polished product
JP2017131977A (en) * 2016-01-25 2017-08-03 富士紡ホールディングス株式会社 Wrapping sheet for difficult-to-cut materials, method for producing the same, and method for producing lapping products
CN110948376A (en) * 2019-10-24 2020-04-03 清华大学 A driving device for chemical mechanical polishing carrier head
JP2023150173A (en) * 2022-03-31 2023-10-16 株式会社ノリタケカンパニーリミテド polishing pad

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63205383A (en) * 1987-02-20 1988-08-24 F S K Kk Tacky sheet for sticking stick wafer
JPS63205382A (en) * 1987-02-20 1988-08-24 F S K Kk Tacky sheet for sticking wafer
JP2017064882A (en) * 2015-10-02 2017-04-06 富士紡ホールディングス株式会社 Polishing brush
JP2017131976A (en) * 2016-01-25 2017-08-03 富士紡ホールディングス株式会社 Polishing pad, manufacturing method thereof, and manufacturing method of polished product
JP2017131977A (en) * 2016-01-25 2017-08-03 富士紡ホールディングス株式会社 Wrapping sheet for difficult-to-cut materials, method for producing the same, and method for producing lapping products
CN110948376A (en) * 2019-10-24 2020-04-03 清华大学 A driving device for chemical mechanical polishing carrier head
CN110948376B (en) * 2019-10-24 2020-10-20 清华大学 Driving device for chemical mechanical polishing bearing head
JP2023150173A (en) * 2022-03-31 2023-10-16 株式会社ノリタケカンパニーリミテド polishing pad

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