JPS57104833A - Temperature sensor - Google Patents
Temperature sensorInfo
- Publication number
- JPS57104833A JPS57104833A JP18238380A JP18238380A JPS57104833A JP S57104833 A JPS57104833 A JP S57104833A JP 18238380 A JP18238380 A JP 18238380A JP 18238380 A JP18238380 A JP 18238380A JP S57104833 A JPS57104833 A JP S57104833A
- Authority
- JP
- Japan
- Prior art keywords
- temperature sensor
- duralumin
- vibrator body
- electrode
- vibrating surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 4
- 229910000737 Duralumin Inorganic materials 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 3
- 239000011787 zinc oxide Substances 0.000 abstract 2
- 239000005083 Zinc sulfide Substances 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000007792 gaseous phase Substances 0.000 abstract 1
- 238000007733 ion plating Methods 0.000 abstract 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910052984 zinc sulfide Inorganic materials 0.000 abstract 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To permit the manufacture of small-sized and high-precise temperature sensor which has low time constant and a less consumption power, by a method wherein a method wherein a piezo-electric film and an electrode are provided on an optional vibrating surface of a vibrator body made of a duralumin. CONSTITUTION:A piezo-electric film is formed on an optional vibrating surface of a vibrator body made of duralumin, and an electrode is further provided thereon to form a temperature sensor. The vibrator body is formed in a laminar manner, a tuning fork, or a tuning bar, and zinc oxide, zinc sulfide, and other various types are formed as the piezoelectric film by a vacuum evaporating, a spattering, an ion plating, or a gaseous phase evaporateing methode. For example, a tuning fork type vibrator body 1 made of duralumin is held between the nip formed by support rods 5 and 6 of a stem 4, and the one support rod and said body are electrically connected together to form a lead terminal. A zinc oxide film 2 is further formed on the vibrating surface of the body by a high-frequency spattering method, and an electrode placed thereon is connected to a lead terminal 7 with a lead wire 8 to form a temperature sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18238380A JPS57104833A (en) | 1980-12-22 | 1980-12-22 | Temperature sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18238380A JPS57104833A (en) | 1980-12-22 | 1980-12-22 | Temperature sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57104833A true JPS57104833A (en) | 1982-06-30 |
| JPS6112216B2 JPS6112216B2 (en) | 1986-04-07 |
Family
ID=16117345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18238380A Granted JPS57104833A (en) | 1980-12-22 | 1980-12-22 | Temperature sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57104833A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7320164B2 (en) | 2002-01-10 | 2008-01-22 | Murata Manufacturing Co., Ltd. | Method of manufacturing an electronic component |
-
1980
- 1980-12-22 JP JP18238380A patent/JPS57104833A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7320164B2 (en) | 2002-01-10 | 2008-01-22 | Murata Manufacturing Co., Ltd. | Method of manufacturing an electronic component |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6112216B2 (en) | 1986-04-07 |
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