JPS57104831A - Temperature sensor - Google Patents
Temperature sensorInfo
- Publication number
- JPS57104831A JPS57104831A JP18238080A JP18238080A JPS57104831A JP S57104831 A JPS57104831 A JP S57104831A JP 18238080 A JP18238080 A JP 18238080A JP 18238080 A JP18238080 A JP 18238080A JP S57104831 A JPS57104831 A JP S57104831A
- Authority
- JP
- Japan
- Prior art keywords
- piezo
- electric film
- inverter
- alloy
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000956 alloy Substances 0.000 abstract 3
- 229910045601 alloy Inorganic materials 0.000 abstract 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000005083 Zinc sulfide Substances 0.000 abstract 1
- 239000007792 gaseous phase Substances 0.000 abstract 1
- 238000007733 ion plating Methods 0.000 abstract 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000005121 nitriding Methods 0.000 abstract 1
- 239000011787 zinc oxide Substances 0.000 abstract 1
- 229910052984 zinc sulfide Inorganic materials 0.000 abstract 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To enable manufacturing of a small-sized temperature sensor which has a rectilinear temperature dependency of a resonace frequency, a low time constant, and a less consumption power, by a method wherein a piezo-electric film and an electrode are mounted on an optional vibrating surface of a vibrator body made of an inverter alloy. CONSTITUTION:A piezo-electric film is formed on an optional vibrating surface of a vibratro body made of an inverter alloy, an electrode is further formed thereon. The body is formed in a laminar manner, a tuning fork, or a tuning bar, and zinc oxide, zinc sulfide, nitriding aliminum or other types are formed as the piezo-electric film by a vacuum evaporating, a spattering, an ion plating, or a gaseous phase evaporating method. For example, a tuning fork-shaped vibrator body 1, made of an inverter alloy, is held between the nip formed by support rods 5 and 6, and the one support rod is electrically connected to said body to form a lead terminal. A piezo-electric film 2 is further formed on the vibrating surface of said body, and an electrode 3, mounted thereon, is connected to the lead terminal 7 via a lead wire 8 to form a temperature sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18238080A JPS57104831A (en) | 1980-12-22 | 1980-12-22 | Temperature sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18238080A JPS57104831A (en) | 1980-12-22 | 1980-12-22 | Temperature sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57104831A true JPS57104831A (en) | 1982-06-30 |
| JPS6112214B2 JPS6112214B2 (en) | 1986-04-07 |
Family
ID=16117293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18238080A Granted JPS57104831A (en) | 1980-12-22 | 1980-12-22 | Temperature sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57104831A (en) |
-
1980
- 1980-12-22 JP JP18238080A patent/JPS57104831A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6112214B2 (en) | 1986-04-07 |
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