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JPS5683032A - Exposing device of electronic beam - Google Patents

Exposing device of electronic beam

Info

Publication number
JPS5683032A
JPS5683032A JP16102579A JP16102579A JPS5683032A JP S5683032 A JPS5683032 A JP S5683032A JP 16102579 A JP16102579 A JP 16102579A JP 16102579 A JP16102579 A JP 16102579A JP S5683032 A JPS5683032 A JP S5683032A
Authority
JP
Japan
Prior art keywords
dac
scanning
starting point
data
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16102579A
Other languages
Japanese (ja)
Inventor
Seigo Igaki
Yoshiaki Goto
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16102579A priority Critical patent/JPS5683032A/en
Publication of JPS5683032A publication Critical patent/JPS5683032A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To reduce the waiting time when setting the scanning point as well as to perform the high-speed drawing for the subject device by a method wherein two digital-to-analog converters for positioning of the starting point of scanning of an electronic beam are provided and these converters are used alternately by switching for the positioning of the next pattern region. CONSTITUTION:The data X1 for starting point of scanning on the pattern to be drawn at first is sent out from a central processing device 13 to a digital-to-analog converter (DAC)11-A through an interface 14. The scanning starting point data X1 is sent to a positioning unit DAC 11-A through a buffer resistor 15-A and the DAC 11-A outputs an analog signal. The DAC is selected by a DAC selecting circuit 16 and it is connected to a deflection system through an adder 17. When the scanning by scanner DAC 12 starts, the data X3 for scanning is sent to DAC 11-B. Accordingly, when a scanning is finished, the DAC is switched and the next scanning can be started immediately.
JP16102579A 1979-12-12 1979-12-12 Exposing device of electronic beam Pending JPS5683032A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16102579A JPS5683032A (en) 1979-12-12 1979-12-12 Exposing device of electronic beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16102579A JPS5683032A (en) 1979-12-12 1979-12-12 Exposing device of electronic beam

Publications (1)

Publication Number Publication Date
JPS5683032A true JPS5683032A (en) 1981-07-07

Family

ID=15727150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16102579A Pending JPS5683032A (en) 1979-12-12 1979-12-12 Exposing device of electronic beam

Country Status (1)

Country Link
JP (1) JPS5683032A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942093A (en) * 1988-09-09 1990-07-17 Bridgestone/Firestone, Inc. Adhesive system for bonding uncured rubber to cured polyurethane

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51118968A (en) * 1975-04-11 1976-10-19 Toshiba Corp Electron beam exposure device
JPS54105970A (en) * 1978-02-08 1979-08-20 Nippon Telegr & Teleph Corp <Ntt> Electron beam drawing device and its use
JPS54154974A (en) * 1978-05-29 1979-12-06 Fujitsu Ltd Electron beam exposure device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51118968A (en) * 1975-04-11 1976-10-19 Toshiba Corp Electron beam exposure device
JPS54105970A (en) * 1978-02-08 1979-08-20 Nippon Telegr & Teleph Corp <Ntt> Electron beam drawing device and its use
JPS54154974A (en) * 1978-05-29 1979-12-06 Fujitsu Ltd Electron beam exposure device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942093A (en) * 1988-09-09 1990-07-17 Bridgestone/Firestone, Inc. Adhesive system for bonding uncured rubber to cured polyurethane

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