JPS5599764A - Mos memory device - Google Patents
Mos memory deviceInfo
- Publication number
- JPS5599764A JPS5599764A JP798479A JP798479A JPS5599764A JP S5599764 A JPS5599764 A JP S5599764A JP 798479 A JP798479 A JP 798479A JP 798479 A JP798479 A JP 798479A JP S5599764 A JPS5599764 A JP S5599764A
- Authority
- JP
- Japan
- Prior art keywords
- type
- substrate
- impurity
- source
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 abstract 7
- 239000000758 substrate Substances 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To increase the degree of integration by injecting an impurity layer of conduction type opposite to that of the substrate into either the source or the drain and diffusing an impurity of conduction type same as the substrate and thereby forming a double impurity layers. CONSTITUTION:MOS memory device 301 consists of p-type silicon substrate 302, n-type impurity layer 303, which has been formed by injecting n-type impurity ions on the drain side, p-type impurity layer 304, which has been formed inside it, source 305 and gate oxide film 306, which have been formed by diffusing an n-type impurity, and metal electrodes 307, 308 and 309. By giving a negative potential to substrate 302, a deplection layer is made to extend from the n-type region diffused in source 305 and the drain side. Next, by giving a negative potential to gate electrode 308, positive holes are accumulated on the surface of Si. When the charges held on Si surface 310 are read out, electrode 307 connected to the doubly diffused drain region is used as a digit line.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP798479A JPS5599764A (en) | 1979-01-25 | 1979-01-25 | Mos memory device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP798479A JPS5599764A (en) | 1979-01-25 | 1979-01-25 | Mos memory device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5599764A true JPS5599764A (en) | 1980-07-30 |
JPS6410945B2 JPS6410945B2 (en) | 1989-02-22 |
Family
ID=11680689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP798479A Granted JPS5599764A (en) | 1979-01-25 | 1979-01-25 | Mos memory device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5599764A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5311049A (en) * | 1991-10-17 | 1994-05-10 | Rohm Co., Ltd. | Non-volatile semiconductor memory with outer drain diffusion layer |
-
1979
- 1979-01-25 JP JP798479A patent/JPS5599764A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5311049A (en) * | 1991-10-17 | 1994-05-10 | Rohm Co., Ltd. | Non-volatile semiconductor memory with outer drain diffusion layer |
Also Published As
Publication number | Publication date |
---|---|
JPS6410945B2 (en) | 1989-02-22 |
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